TW200632900A - Preparation method of disc master - Google Patents

Preparation method of disc master

Info

Publication number
TW200632900A
TW200632900A TW094106728A TW94106728A TW200632900A TW 200632900 A TW200632900 A TW 200632900A TW 094106728 A TW094106728 A TW 094106728A TW 94106728 A TW94106728 A TW 94106728A TW 200632900 A TW200632900 A TW 200632900A
Authority
TW
Taiwan
Prior art keywords
photoresist layer
preparation
disc master
substrate
ion etching
Prior art date
Application number
TW094106728A
Other languages
Chinese (zh)
Other versions
TWI271732B (en
Inventor
Chung-Ching Hsieh
Cheng-Yuan Tsai
Yan-Ju Lin
Original Assignee
Prodisc Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Prodisc Technology Inc filed Critical Prodisc Technology Inc
Priority to TW94106728A priority Critical patent/TWI271732B/en
Publication of TW200632900A publication Critical patent/TW200632900A/en
Application granted granted Critical
Publication of TWI271732B publication Critical patent/TWI271732B/en

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Abstract

A preparation method of a disc master includes coating a photoresist layer above a substrate having a embossed area and a rewritable area, laser beam recording and developing the photoresist layer, first reactive ion etching the embossed area of the substrate, second ion etching the photoresist layer, third reactive ion etching the embossed area and the rewritable area of the substrate, and removing the photoresist layer.
TW94106728A 2005-03-04 2005-03-04 Preparation method of disc master TWI271732B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94106728A TWI271732B (en) 2005-03-04 2005-03-04 Preparation method of disc master

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94106728A TWI271732B (en) 2005-03-04 2005-03-04 Preparation method of disc master

Publications (2)

Publication Number Publication Date
TW200632900A true TW200632900A (en) 2006-09-16
TWI271732B TWI271732B (en) 2007-01-21

Family

ID=38435309

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94106728A TWI271732B (en) 2005-03-04 2005-03-04 Preparation method of disc master

Country Status (1)

Country Link
TW (1) TWI271732B (en)

Also Published As

Publication number Publication date
TWI271732B (en) 2007-01-21

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees