Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Prodisc Technology IncfiledCriticalProdisc Technology Inc
Priority to TW93140686ApriorityCriticalpatent/TWI259462B/en
Publication of TW200623099ApublicationCriticalpatent/TW200623099A/en
Application grantedgrantedCritical
Publication of TWI259462BpublicationCriticalpatent/TWI259462B/en
A preparation method of a disc master includes plasma dry cleaning on a substrate before coating a photoresist layer above the substrate, and then laser beam recording (LBR) with developing the photoresist layer to form the basic groove/emboss structure, followed by depositing a metal layer on the photoresist layer.
TW93140686A2004-12-242004-12-24Preparation method of disc master
TWI259462B
(en)