TW200623099A - Preparation method of disc master - Google Patents

Preparation method of disc master

Info

Publication number
TW200623099A
TW200623099A TW093140686A TW93140686A TW200623099A TW 200623099 A TW200623099 A TW 200623099A TW 093140686 A TW093140686 A TW 093140686A TW 93140686 A TW93140686 A TW 93140686A TW 200623099 A TW200623099 A TW 200623099A
Authority
TW
Taiwan
Prior art keywords
preparation
disc master
photoresist layer
substrate
lbr
Prior art date
Application number
TW093140686A
Other languages
Chinese (zh)
Other versions
TWI259462B (en
Inventor
Cheng-Yuan Tsai
Original Assignee
Prodisc Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Prodisc Technology Inc filed Critical Prodisc Technology Inc
Priority to TW93140686A priority Critical patent/TWI259462B/en
Publication of TW200623099A publication Critical patent/TW200623099A/en
Application granted granted Critical
Publication of TWI259462B publication Critical patent/TWI259462B/en

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Abstract

A preparation method of a disc master includes plasma dry cleaning on a substrate before coating a photoresist layer above the substrate, and then laser beam recording (LBR) with developing the photoresist layer to form the basic groove/emboss structure, followed by depositing a metal layer on the photoresist layer.
TW93140686A 2004-12-24 2004-12-24 Preparation method of disc master TWI259462B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93140686A TWI259462B (en) 2004-12-24 2004-12-24 Preparation method of disc master

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93140686A TWI259462B (en) 2004-12-24 2004-12-24 Preparation method of disc master

Publications (2)

Publication Number Publication Date
TW200623099A true TW200623099A (en) 2006-07-01
TWI259462B TWI259462B (en) 2006-08-01

Family

ID=37873427

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93140686A TWI259462B (en) 2004-12-24 2004-12-24 Preparation method of disc master

Country Status (1)

Country Link
TW (1) TWI259462B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104299630B (en) * 2014-10-14 2017-01-04 江苏新广联科技股份有限公司 The compound method of metal negative surface clean solution

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104299630B (en) * 2014-10-14 2017-01-04 江苏新广联科技股份有限公司 The compound method of metal negative surface clean solution

Also Published As

Publication number Publication date
TWI259462B (en) 2006-08-01

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees