TW200636709A - Preparation method of disc master - Google Patents

Preparation method of disc master

Info

Publication number
TW200636709A
TW200636709A TW094111724A TW94111724A TW200636709A TW 200636709 A TW200636709 A TW 200636709A TW 094111724 A TW094111724 A TW 094111724A TW 94111724 A TW94111724 A TW 94111724A TW 200636709 A TW200636709 A TW 200636709A
Authority
TW
Taiwan
Prior art keywords
preparation
disc master
photoresist layer
substrate
lbr
Prior art date
Application number
TW094111724A
Other languages
Chinese (zh)
Other versions
TWI262497B (en
Inventor
Liber Hsieh
Eric Lin
Hom Chuang
Original Assignee
Prodisc Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Prodisc Technology Inc filed Critical Prodisc Technology Inc
Priority to TW94111724A priority Critical patent/TWI262497B/en
Application granted granted Critical
Publication of TWI262497B publication Critical patent/TWI262497B/en
Publication of TW200636709A publication Critical patent/TW200636709A/en

Links

Abstract

A preparation method of a disc master includes providing a heat source on the central of a substrate, coating a photoresist layer above the substrate, and then laser beam recording (LBR) and developing the photoresist layer, and followed by depositing a metal layer on the photoresist layer.
TW94111724A 2005-04-13 2005-04-13 Preparation method of disc master TWI262497B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94111724A TWI262497B (en) 2005-04-13 2005-04-13 Preparation method of disc master

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94111724A TWI262497B (en) 2005-04-13 2005-04-13 Preparation method of disc master

Publications (2)

Publication Number Publication Date
TWI262497B TWI262497B (en) 2006-09-21
TW200636709A true TW200636709A (en) 2006-10-16

Family

ID=37987749

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94111724A TWI262497B (en) 2005-04-13 2005-04-13 Preparation method of disc master

Country Status (1)

Country Link
TW (1) TWI262497B (en)

Also Published As

Publication number Publication date
TWI262497B (en) 2006-09-21

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