TW200631009A - Preparation method of disc stamper - Google Patents

Preparation method of disc stamper

Info

Publication number
TW200631009A
TW200631009A TW094105282A TW94105282A TW200631009A TW 200631009 A TW200631009 A TW 200631009A TW 094105282 A TW094105282 A TW 094105282A TW 94105282 A TW94105282 A TW 94105282A TW 200631009 A TW200631009 A TW 200631009A
Authority
TW
Taiwan
Prior art keywords
preparation
photoresist layer
stamper
substrate
disc stamper
Prior art date
Application number
TW094105282A
Other languages
Chinese (zh)
Other versions
TWI262496B (en
Inventor
Cheng-Yuan Tsai
Original Assignee
Prodisc Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Prodisc Technology Inc filed Critical Prodisc Technology Inc
Priority to TW94105282A priority Critical patent/TWI262496B/en
Publication of TW200631009A publication Critical patent/TW200631009A/en
Application granted granted Critical
Publication of TWI262496B publication Critical patent/TWI262496B/en

Links

Abstract

A preparation method of a disc stamper includes cleaning a substrate, coating a photoresist layer on the substrate, laser beam recording and developing the photoresist layer, sputtering a metal layer on the substrate and the photoresist layer, electroforming the metal layer to form a father stamper, separating the photoresist layer and the father stamper, and dry cleaning the father stamper.
TW94105282A 2005-02-22 2005-02-22 Preparation method of disc stamper TWI262496B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94105282A TWI262496B (en) 2005-02-22 2005-02-22 Preparation method of disc stamper

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94105282A TWI262496B (en) 2005-02-22 2005-02-22 Preparation method of disc stamper

Publications (2)

Publication Number Publication Date
TW200631009A true TW200631009A (en) 2006-09-01
TWI262496B TWI262496B (en) 2006-09-21

Family

ID=37987748

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94105282A TWI262496B (en) 2005-02-22 2005-02-22 Preparation method of disc stamper

Country Status (1)

Country Link
TW (1) TWI262496B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104299630B (en) * 2014-10-14 2017-01-04 江苏新广联科技股份有限公司 The compound method of metal negative surface clean solution

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104299630B (en) * 2014-10-14 2017-01-04 江苏新广联科技股份有限公司 The compound method of metal negative surface clean solution

Also Published As

Publication number Publication date
TWI262496B (en) 2006-09-21

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