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Application filed by Prodisc Technology IncfiledCriticalProdisc Technology Inc
Priority to TW094105281ApriorityCriticalpatent/TW200631008A/en
Publication of TW200631008ApublicationCriticalpatent/TW200631008A/en
A preparation method of a disc master includes depositing a hard mask layer on a substrate, coating a photoresist layer above the hard mask layer, wherein the etching rate of the photoresist layer is larger than the hard mask layer, laser beam recording the photoresist layer and the hard mask layer and developing them, etching the substrate and removing the photoresist layer, and removing the hard mask layer.
TW094105281A2005-02-222005-02-22Preparation method of disc master
TW200631008A
(en)
Fabrication method of stamper for optical information recording medium, master disk of stamper for optical information recording medium, and optical information recording medium