TW200710607A - Systems and methods for retrieving residual liquid during immersion lens photolithography - Google Patents
Systems and methods for retrieving residual liquid during immersion lens photolithographyInfo
- Publication number
- TW200710607A TW200710607A TW095127001A TW95127001A TW200710607A TW 200710607 A TW200710607 A TW 200710607A TW 095127001 A TW095127001 A TW 095127001A TW 95127001 A TW95127001 A TW 95127001A TW 200710607 A TW200710607 A TW 200710607A
- Authority
- TW
- Taiwan
- Prior art keywords
- lens
- liquid
- liquid volume
- microfeature workpiece
- photolithography
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70816—Bearings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/189,236 US7583358B2 (en) | 2005-07-25 | 2005-07-25 | Systems and methods for retrieving residual liquid during immersion lens photolithography |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200710607A true TW200710607A (en) | 2007-03-16 |
TWI348597B TWI348597B (en) | 2011-09-11 |
Family
ID=37678716
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095127001A TWI348597B (en) | 2005-07-25 | 2006-07-24 | Systems and methods for retrieving residual liquid during immersion lens photolithography |
Country Status (5)
Country | Link |
---|---|
US (1) | US7583358B2 (zh) |
EP (1) | EP1913447B1 (zh) |
KR (1) | KR20080030680A (zh) |
TW (1) | TWI348597B (zh) |
WO (1) | WO2007015753A2 (zh) |
Families Citing this family (13)
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JP3473699B2 (ja) * | 2001-10-24 | 2003-12-08 | 三菱住友シリコン株式会社 | シリコンウェーハのエッチング方法とその装置及び不純物分析方法 |
JP4543767B2 (ja) * | 2004-06-10 | 2010-09-15 | 株式会社ニコン | 露光装置及びデバイス製造方法 |
US7929109B2 (en) * | 2005-10-20 | 2011-04-19 | Nikon Corporation | Apparatus and method for recovering liquid droplets in immersion lithography |
US9477158B2 (en) * | 2006-04-14 | 2016-10-25 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US11136667B2 (en) * | 2007-01-08 | 2021-10-05 | Eastman Kodak Company | Deposition system and method using a delivery head separated from a substrate by gas pressure |
US8283257B2 (en) * | 2007-06-21 | 2012-10-09 | Micron Technology, Inc. | Systems and methods for oscillating exposure of a semiconductor workpiece to multiple chemistries |
EP2381310B1 (en) | 2010-04-22 | 2015-05-06 | ASML Netherlands BV | Fluid handling structure and lithographic apparatus |
US10234942B2 (en) * | 2014-01-28 | 2019-03-19 | Medibotics Llc | Wearable and mobile brain computer interface (BCI) device and method |
US11267012B2 (en) * | 2014-06-25 | 2022-03-08 | Universal Display Corporation | Spatial control of vapor condensation using convection |
US11220737B2 (en) * | 2014-06-25 | 2022-01-11 | Universal Display Corporation | Systems and methods of modulating flow during vapor jet deposition of organic materials |
EP2960059B1 (en) | 2014-06-25 | 2018-10-24 | Universal Display Corporation | Systems and methods of modulating flow during vapor jet deposition of organic materials |
DE102015211616A1 (de) * | 2015-06-23 | 2016-12-29 | Josef Schiele Ohg | Beschichtungsvorrichtung mit einer Gaszufuhr |
US10566534B2 (en) | 2015-10-12 | 2020-02-18 | Universal Display Corporation | Apparatus and method to deliver organic material via organic vapor-jet printing (OVJP) |
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-
2005
- 2005-07-25 US US11/189,236 patent/US7583358B2/en active Active
-
2006
- 2006-07-14 EP EP06787298.6A patent/EP1913447B1/en active Active
- 2006-07-14 KR KR1020087004358A patent/KR20080030680A/ko not_active Application Discontinuation
- 2006-07-14 WO PCT/US2006/027370 patent/WO2007015753A2/en active Application Filing
- 2006-07-24 TW TW095127001A patent/TWI348597B/zh active
Also Published As
Publication number | Publication date |
---|---|
US7583358B2 (en) | 2009-09-01 |
WO2007015753A3 (en) | 2007-07-12 |
TWI348597B (en) | 2011-09-11 |
KR20080030680A (ko) | 2008-04-04 |
US20070019172A1 (en) | 2007-01-25 |
WO2007015753A2 (en) | 2007-02-08 |
EP1913447B1 (en) | 2019-09-04 |
EP1913447A2 (en) | 2008-04-23 |
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