TW200709276A - A system and method for lithography in semiconductor manufacturing - Google Patents

A system and method for lithography in semiconductor manufacturing

Info

Publication number
TW200709276A
TW200709276A TW095117711A TW95117711A TW200709276A TW 200709276 A TW200709276 A TW 200709276A TW 095117711 A TW095117711 A TW 095117711A TW 95117711 A TW95117711 A TW 95117711A TW 200709276 A TW200709276 A TW 200709276A
Authority
TW
Taiwan
Prior art keywords
lithography
semiconductor manufacturing
precision
substrate
exposure
Prior art date
Application number
TW095117711A
Other languages
English (en)
Other versions
TWI311339B (en
Inventor
Kuei-Shun Chen
Chin-Hsiang Lin
Ding-Chung Lu
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=36698816&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=TW200709276(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Taiwan Semiconductor Mfg Co Ltd filed Critical Taiwan Semiconductor Mfg Co Ltd
Publication of TW200709276A publication Critical patent/TW200709276A/zh
Application granted granted Critical
Publication of TWI311339B publication Critical patent/TWI311339B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70466—Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/203—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure comprising an imagewise exposure to electromagnetic radiation or corpuscular radiation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
TW095117711A 2005-08-31 2006-05-18 A system and method for lithography in semiconductor manufacturing TWI311339B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/216,658 US7501227B2 (en) 2005-08-31 2005-08-31 System and method for photolithography in semiconductor manufacturing

Publications (2)

Publication Number Publication Date
TW200709276A true TW200709276A (en) 2007-03-01
TWI311339B TWI311339B (en) 2009-06-21

Family

ID=36698816

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095117711A TWI311339B (en) 2005-08-31 2006-05-18 A system and method for lithography in semiconductor manufacturing

Country Status (10)

Country Link
US (2) US7501227B2 (zh)
JP (1) JP2007067376A (zh)
KR (1) KR100747625B1 (zh)
CN (2) CN103345120A (zh)
DE (2) DE102006015722B4 (zh)
FR (1) FR2891066B1 (zh)
IL (1) IL174923A (zh)
NL (1) NL2000103C2 (zh)
SG (1) SG130083A1 (zh)
TW (1) TWI311339B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI402894B (zh) * 2008-06-18 2013-07-21 Hynix Semiconductor Inc 使用混合式輔助特徵系統形成半導體裝置圖案之方法

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* Cited by examiner, † Cited by third party
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US7501227B2 (en) * 2005-08-31 2009-03-10 Taiwan Semiconductor Manufacturing Company System and method for photolithography in semiconductor manufacturing
JP4837971B2 (ja) * 2005-10-07 2011-12-14 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
US7803516B2 (en) * 2005-11-21 2010-09-28 Nikon Corporation Exposure method, device manufacturing method using the same, exposure apparatus, and substrate processing method and apparatus
KR100827506B1 (ko) * 2006-05-11 2008-05-06 주식회사 하이닉스반도체 이머젼 리소그라피 공정을 이용한 반도체 소자 제조방법
US8346872B2 (en) * 2006-06-30 2013-01-01 The Invention Science Fund I, Llc Context parameters and identifiers for communication
JP4357514B2 (ja) * 2006-09-29 2009-11-04 株式会社東芝 液浸露光方法
US8139199B2 (en) * 2007-04-02 2012-03-20 Nikon Corporation Exposure method, exposure apparatus, light converging pattern formation member, mask, and device manufacturing method
US8728722B2 (en) * 2010-09-30 2014-05-20 Truesense Imaging, Inc. Stitching methods using multiple microlithographic expose tools
US8728945B2 (en) * 2010-11-03 2014-05-20 Texas Instruments Incorporated Method for patterning sublithographic features
KR20140029050A (ko) * 2012-08-31 2014-03-10 삼성전자주식회사 패턴 형성 방법
US9097975B2 (en) 2012-09-14 2015-08-04 Macronix International Co., Ltd. Double patterning by PTD and NTD process
US8835100B2 (en) * 2012-09-14 2014-09-16 Macronix International Co., Ltd. Double patterning by PTD and NTD process
US9274413B2 (en) 2013-09-11 2016-03-01 United Microelectronics Corp. Method for forming layout pattern
CN110231725B (zh) * 2019-05-20 2022-03-08 深圳市华星光电半导体显示技术有限公司 一种微影玻璃薄化的方法及其控制系统

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JPH0582414A (ja) * 1991-09-24 1993-04-02 Nec Kyushu Ltd 縮小投影露光装置
WO1994024610A1 (en) 1993-04-13 1994-10-27 Astarix, Inc. High resolution mask programmable via selected by low resolution photomasking
JP3015224B2 (ja) * 1993-05-26 2000-03-06 キヤノン株式会社 露光方法
JP2993320B2 (ja) * 1993-05-27 1999-12-20 キヤノン株式会社 露光装置及びそれを用いた半導体素子の製造方法
JPH07211619A (ja) * 1994-01-25 1995-08-11 Hitachi Ltd 回路パターンの形成方法及びそれに用いられるレチクル
JP3492846B2 (ja) * 1996-04-26 2004-02-03 株式会社東芝 半導体装置の製造方法
JPH11133585A (ja) * 1997-10-30 1999-05-21 Nec Corp 露光用マスク及びその製造方法
US6080533A (en) * 1998-03-10 2000-06-27 Clear Logic, Inc. Method of patterning photoresist using precision and non-precision techniques
JPH11327121A (ja) 1998-05-20 1999-11-26 Toppan Printing Co Ltd ハーフトーン型位相シフトマスクの製造方法およびハーフトーン型位相シフトマスクのブランク
JP2000021749A (ja) * 1998-06-30 2000-01-21 Canon Inc 露光方法および露光装置
US6664011B2 (en) 2001-12-05 2003-12-16 Taiwan Semiconductor Manufacturing Company Hole printing by packing and unpacking using alternating phase-shifting masks
US6839126B2 (en) * 2002-01-03 2005-01-04 United Microelectronics Corp. Photolithography process with multiple exposures
US6894762B1 (en) 2002-09-17 2005-05-17 Lsi Logic Corporation Dual source lithography for direct write application
KR100523839B1 (ko) * 2002-10-07 2005-10-27 한국전자통신연구원 건식 리소그라피 방법 및 이를 이용한 게이트 패턴 형성방법
US6788477B2 (en) * 2002-10-22 2004-09-07 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus for method for immersion lithography
DE10258718A1 (de) 2002-12-09 2004-06-24 Carl Zeiss Smt Ag Projektionsobjektiv, insbesondere für die Mikrolithographie, sowie Verfahren zur Abstimmung eines Projektionsobjektives
CN100446179C (zh) * 2002-12-10 2008-12-24 株式会社尼康 曝光设备和器件制造法
JP2004294977A (ja) * 2003-03-28 2004-10-21 Nikon Corp パターン作成方法及びパターン作成システム、マスク製造方法及びマスク製造システム、マスク、露光方法及び露光装置、並びにデバイス製造方法
JP4305095B2 (ja) 2003-08-29 2009-07-29 株式会社ニコン 光学部品の洗浄機構を搭載した液浸投影露光装置及び液浸光学部品洗浄方法
JP2005136374A (ja) 2003-10-06 2005-05-26 Matsushita Electric Ind Co Ltd 半導体製造装置及びそれを用いたパターン形成方法
JP4540327B2 (ja) * 2003-11-06 2010-09-08 ルネサスエレクトロニクス株式会社 フォトマスクのパターン形成方法
JP2005191381A (ja) * 2003-12-26 2005-07-14 Canon Inc 露光方法及び装置
US20050147920A1 (en) 2003-12-30 2005-07-07 Chia-Hui Lin Method and system for immersion lithography
EP1716454A1 (en) 2004-02-09 2006-11-02 Carl Zeiss SMT AG Projection objective for a microlithographic projection exposure apparatus
JP4625673B2 (ja) * 2004-10-15 2011-02-02 株式会社東芝 露光方法及び露光装置
JP3976046B2 (ja) * 2004-11-11 2007-09-12 ソニー株式会社 露光装置および半導体装置の製造装置、位相シフトマスクおよび設計方法
US7501227B2 (en) * 2005-08-31 2009-03-10 Taiwan Semiconductor Manufacturing Company System and method for photolithography in semiconductor manufacturing

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI402894B (zh) * 2008-06-18 2013-07-21 Hynix Semiconductor Inc 使用混合式輔助特徵系統形成半導體裝置圖案之方法
US8679729B2 (en) 2008-06-18 2014-03-25 SK Hynix Inc. Method for forming patterns of semiconductor device by using mixed assist feature system
US9040228B2 (en) 2008-06-18 2015-05-26 SK Hynix Inc. Method for forming patterns of semiconductor device by using mixed assist feature system

Also Published As

Publication number Publication date
NL2000103C2 (nl) 2007-08-07
US8178289B2 (en) 2012-05-15
KR100747625B1 (ko) 2007-08-08
DE102006062993B3 (de) 2021-03-11
DE102006015722A1 (de) 2007-03-22
IL174923A (en) 2011-06-30
DE102006015722B4 (de) 2020-05-14
FR2891066A1 (fr) 2007-03-23
CN1924706A (zh) 2007-03-07
CN103345120A (zh) 2013-10-09
JP2007067376A (ja) 2007-03-15
US20090136876A1 (en) 2009-05-28
KR20070025954A (ko) 2007-03-08
FR2891066B1 (fr) 2018-02-02
SG130083A1 (en) 2007-03-20
IL174923A0 (en) 2006-10-05
NL2000103A1 (nl) 2007-03-01
US20070048678A1 (en) 2007-03-01
TWI311339B (en) 2009-06-21
US7501227B2 (en) 2009-03-10

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees