TW200707816A - Three-axis magnetic sensor and manufacturing method therefor - Google Patents
Three-axis magnetic sensor and manufacturing method thereforInfo
- Publication number
- TW200707816A TW200707816A TW095109283A TW95109283A TW200707816A TW 200707816 A TW200707816 A TW 200707816A TW 095109283 A TW095109283 A TW 095109283A TW 95109283 A TW95109283 A TW 95109283A TW 200707816 A TW200707816 A TW 200707816A
- Authority
- TW
- Taiwan
- Prior art keywords
- magneto
- axis sensor
- resistive
- manufacturing
- magnetic sensor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N59/00—Integrated devices, or assemblies of multiple devices, comprising at least one galvanomagnetic or Hall-effect element covered by groups H10N50/00 - H10N52/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005077010A JP4984408B2 (ja) | 2005-03-17 | 2005-03-17 | 磁気センサおよびその製法 |
JP2005091256 | 2005-03-28 | ||
JP2005090581A JP4940565B2 (ja) | 2005-03-28 | 2005-03-28 | 磁気センサの製造方法 |
JP2006032124A JP4735304B2 (ja) | 2006-02-09 | 2006-02-09 | 三軸磁気センサおよびその製造方法 |
JP2006032125A JP4735305B2 (ja) | 2006-02-09 | 2006-02-09 | 三軸磁気センサおよびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200707816A true TW200707816A (en) | 2007-02-16 |
TWI307977B TWI307977B (en) | 2009-03-21 |
Family
ID=36991775
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW097125332A TWI361503B (en) | 2005-03-17 | 2006-03-17 | Three-axis magnetic sensor and manufacturing method therefor |
TW097125334A TWI360243B (en) | 2005-03-17 | 2006-03-17 | Three-axis magnetic sensor and manufacturing metho |
TW095109283A TWI307977B (en) | 2005-03-17 | 2006-03-17 | Three-axis magnetic sensor and manufacturing method therefor |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW097125332A TWI361503B (en) | 2005-03-17 | 2006-03-17 | Three-axis magnetic sensor and manufacturing method therefor |
TW097125334A TWI360243B (en) | 2005-03-17 | 2006-03-17 | Three-axis magnetic sensor and manufacturing metho |
Country Status (7)
Country | Link |
---|---|
US (2) | US20090027048A1 (zh) |
EP (1) | EP1860451B1 (zh) |
KR (1) | KR100950615B1 (zh) |
BR (1) | BRPI0608019A2 (zh) |
CA (1) | CA2601130A1 (zh) |
TW (3) | TWI361503B (zh) |
WO (1) | WO2006098431A1 (zh) |
Families Citing this family (73)
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JP2008270471A (ja) | 2007-04-19 | 2008-11-06 | Yamaha Corp | 磁気センサ及びその製造方法 |
EP2003462B1 (en) | 2007-06-13 | 2010-03-17 | Ricoh Company, Ltd. | Magnetic sensor and production method thereof |
JP5170679B2 (ja) * | 2008-01-29 | 2013-03-27 | 日立金属株式会社 | 磁気センサおよび回転角度検出装置 |
DE102008041859A1 (de) | 2008-09-08 | 2010-03-11 | Robert Bosch Gmbh | Magnetfeldsensoranordnung zur Messung von räumlichen Komponenten eines magnetischen Feldes |
US8289019B2 (en) * | 2009-02-11 | 2012-10-16 | Infineon Technologies Ag | Sensor |
DE102009024268B4 (de) | 2009-06-05 | 2015-03-05 | Integrated Dynamics Engineering Gmbh | Magnetfeldkompensation |
KR101608339B1 (ko) * | 2009-06-08 | 2016-04-11 | 삼성전자주식회사 | 위치 측정 장치 및 방법, 및 이동체 |
DE112010002899T5 (de) | 2009-07-13 | 2012-06-14 | Hitachi Metals, Ltd. | Verfahren zur Herstellung eines Magnetowiderstandseffektelements, eines Magnetsensors, einer Drehwinkel-Erfassungsvorrichtung |
US8390283B2 (en) | 2009-09-25 | 2013-03-05 | Everspin Technologies, Inc. | Three axis magnetic field sensor |
FR2955942B1 (fr) * | 2010-01-29 | 2013-01-04 | Centre Nat Rech Scient | Magnetometre integre et son procede de fabrication |
US20110234218A1 (en) * | 2010-03-24 | 2011-09-29 | Matthieu Lagouge | Integrated multi-axis hybrid magnetic field sensor |
US8518734B2 (en) | 2010-03-31 | 2013-08-27 | Everspin Technologies, Inc. | Process integration of a single chip three axis magnetic field sensor |
US20120007597A1 (en) * | 2010-07-09 | 2012-01-12 | Invensense, Inc. | Micromachined offset reduction structures for magnetic field sensing |
US8395381B2 (en) * | 2010-07-09 | 2013-03-12 | Invensense, Inc. | Micromachined magnetic field sensors |
US9645204B2 (en) | 2010-09-17 | 2017-05-09 | Industrial Technology Research Institute | Magnetic field sensors and sensng circuits |
US20120068698A1 (en) * | 2010-09-17 | 2012-03-22 | Industrial Technology Research Institute | Structure of tmr and fabrication method of integrated 3-axis magnetic field sensor and sensing circuit |
IT1403421B1 (it) | 2010-12-23 | 2013-10-17 | St Microelectronics Srl | Sensore magnetoresistivo integrato, in particolare sensore magnetoresistivo triassiale e suo procedimento di fabbricazione |
US9000763B2 (en) | 2011-02-28 | 2015-04-07 | Infineon Technologies Ag | 3-D magnetic sensor |
CN202013413U (zh) | 2011-04-06 | 2011-10-19 | 江苏多维科技有限公司 | 单一芯片桥式磁场传感器 |
JP2013016609A (ja) * | 2011-07-04 | 2013-01-24 | Alps Electric Co Ltd | 磁気検出素子及びそれを用いた磁気センサ、並びに、磁気検出素子の製造方法 |
CN102426344B (zh) * | 2011-08-30 | 2013-08-21 | 江苏多维科技有限公司 | 三轴磁场传感器 |
CN102385043B (zh) * | 2011-08-30 | 2013-08-21 | 江苏多维科技有限公司 | Mtj三轴磁场传感器及其封装方法 |
JP5464198B2 (ja) * | 2011-11-24 | 2014-04-09 | Tdk株式会社 | 三次元磁界センサおよびその製造方法 |
CN102564383B (zh) * | 2011-12-13 | 2014-06-18 | 北京东方计量测试研究所 | 基于轴面角确定三轴磁传感器轴间角的方法 |
US8957487B2 (en) | 2012-01-04 | 2015-02-17 | Industrial Technology Research Institute | Tunneling magneto-resistor reference unit and magnetic field sensing circuit using the same |
TWI452319B (zh) * | 2012-01-09 | 2014-09-11 | Voltafield Technology Corp | 磁阻感測元件 |
US9116198B2 (en) * | 2012-02-10 | 2015-08-25 | Memsic, Inc. | Planar three-axis magnetometer |
DE102012204835A1 (de) * | 2012-03-27 | 2013-10-02 | Robert Bosch Gmbh | Sensor, Verfahren zum Herstellen eines Sensors und Verfahren zum Montieren eines Sensors |
US20130257423A1 (en) * | 2012-04-03 | 2013-10-03 | Isentek Inc. | Hybrid magnetic sensor |
KR101376541B1 (ko) * | 2012-05-22 | 2014-03-19 | 조선대학교산학협력단 | 이종 자기 센서를 이용하는 결함 탐상 장치 |
US20140062470A1 (en) * | 2012-08-29 | 2014-03-06 | Meng-Huang Lai | Three-dimensional in-plane magnetic sensor |
JP2014089087A (ja) | 2012-10-30 | 2014-05-15 | Yamaha Corp | オフセットキャンセル回路 |
TWI449939B (zh) * | 2012-12-11 | 2014-08-21 | Inst Information Industry | 利用電磁鐵陣列以決定一電子裝置對應一物件之3d位置的方法及系統 |
ITTO20121067A1 (it) | 2012-12-12 | 2014-06-13 | St Microelectronics Srl | Sensore magnetoresistivo integrato in una piastrina per il rilevamento di campi magnetici perpendicolari alla piastrina nonche' suo procedimento di fabbricazione |
US9244134B2 (en) * | 2013-01-15 | 2016-01-26 | Infineon Technologies Ag | XMR-sensor and method for manufacturing the XMR-sensor |
US9297863B2 (en) * | 2013-03-15 | 2016-03-29 | Meng-Huang Lai | Planarized three-dimensional (3D) magnetic sensor chip |
TWI513993B (zh) | 2013-03-26 | 2015-12-21 | Ind Tech Res Inst | 三軸磁場感測器、製作磁場感測結構的方法與磁場感測電路 |
US9377327B2 (en) * | 2013-06-28 | 2016-06-28 | Analog Devices Global | Magnetic field direction sensor |
TWI493209B (zh) * | 2013-07-05 | 2015-07-21 | Voltafield Technology Corp | 一種單晶片三軸磁阻感測裝置 |
DE102013107821A1 (de) * | 2013-07-22 | 2015-01-22 | Sensitec Gmbh | Mehrkomponenten-Magnetfeldsensor |
DE102014202770B4 (de) * | 2014-02-14 | 2019-04-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | 3d magnetfeldsensor und verfahren zu dessen herstellung |
CN104197828B (zh) * | 2014-08-20 | 2017-07-07 | 江苏多维科技有限公司 | 一种单芯片偏轴磁电阻z‑x角度传感器和测量仪 |
US10288697B2 (en) | 2015-01-13 | 2019-05-14 | Stmicroelectronics S.R.L. | AMR-type integrated magnetoresistive sensor for detecting magnetic fields perpendicular to the chip |
CN104596605B (zh) | 2015-02-04 | 2019-04-26 | 江苏多维科技有限公司 | 一种磁自动化流量记录器 |
EP3059601B1 (en) * | 2015-02-12 | 2017-09-13 | Alps Electric Co., Ltd. | Magnetometric sensor and current sensor |
US9778324B2 (en) | 2015-04-17 | 2017-10-03 | Apple Inc. | Yoke configuration to reduce high offset in X-, Y-, and Z-magnetic sensors |
US10317285B2 (en) * | 2015-07-13 | 2019-06-11 | The Boeing Company | System and method for measuring optical resolution with an optical resolution target assembly |
WO2017023235A1 (en) * | 2015-07-31 | 2017-02-09 | Compagnie Generale Des Etablissements Michelin | Device and method for inspection of polymeric material with ferrous reinforcement |
EP3385740B1 (en) | 2015-12-03 | 2023-09-20 | Alps Alpine Co., Ltd. | Magnetism detecting device and method for manufacturing same |
US9841469B2 (en) | 2016-01-26 | 2017-12-12 | Nxp Usa, Inc. | Magnetic field sensor with multiple sense layer magnetization orientations |
US9897667B2 (en) | 2016-01-26 | 2018-02-20 | Nxp Usa, Inc. | Magnetic field sensor with permanent magnet biasing |
US10545196B2 (en) * | 2016-03-24 | 2020-01-28 | Nxp Usa, Inc. | Multiple axis magnetic sensor |
US10145907B2 (en) | 2016-04-07 | 2018-12-04 | Nxp Usa, Inc. | Magnetic field sensor with permanent magnet biasing |
US9933496B2 (en) | 2016-04-21 | 2018-04-03 | Nxp Usa, Inc. | Magnetic field sensor with multiple axis sense capability |
WO2017194475A1 (en) * | 2016-05-09 | 2017-11-16 | Biomagnetik Park Gmbh | Apparatus for measuring a biomagnetic field |
US11647678B2 (en) | 2016-08-23 | 2023-05-09 | Analog Devices International Unlimited Company | Compact integrated device packages |
US10697800B2 (en) * | 2016-11-04 | 2020-06-30 | Analog Devices Global | Multi-dimensional measurement using magnetic sensors and related systems, methods, and integrated circuits |
US11628275B2 (en) | 2018-01-31 | 2023-04-18 | Analog Devices, Inc. | Electronic devices |
US10753989B2 (en) * | 2018-08-27 | 2020-08-25 | Allegro Microsystems, Llc | Magnetoresistance element with perpendicular or parallel magnetic anistropy |
JP6986002B2 (ja) | 2018-11-26 | 2021-12-22 | Tdk株式会社 | 磁気センサ装置 |
JP7455511B2 (ja) * | 2019-02-25 | 2024-03-26 | Tdk株式会社 | 磁気センサ及びその製造方法 |
JP6886222B2 (ja) * | 2019-03-19 | 2021-06-16 | Tdk株式会社 | 磁気センサ |
CN113811738A (zh) | 2019-06-11 | 2021-12-17 | 株式会社村田制作所 | 磁传感器、磁传感器阵列、磁场分布测定装置及位置确定装置 |
JP7070532B2 (ja) | 2019-11-19 | 2022-05-18 | Tdk株式会社 | 磁気センサ |
CN110927637A (zh) * | 2019-11-30 | 2020-03-27 | 北京航空航天大学青岛研究院 | 一种三轴mtj磁场传感器及其制备方法 |
US11719772B2 (en) | 2020-04-01 | 2023-08-08 | Analog Devices International Unlimited Company | AMR (XMR) sensor with increased linear range |
RU2746309C1 (ru) * | 2020-09-07 | 2021-04-12 | Общество С Ограниченной Ответственностью "Крокус Наноэлектроника" (Ооо "Крокус Наноэлектроника") | Магниточувствительный сенсор со сниженным показателем коэрцитивной силы (варианты) |
US11630168B2 (en) * | 2021-02-03 | 2023-04-18 | Allegro Microsystems, Llc | Linear sensor with dual spin valve element having reference layers with magnetization directions different from an external magnetic field direction |
CN112995861B (zh) * | 2021-03-01 | 2022-12-23 | 歌尔微电子股份有限公司 | 传感器和电子设备 |
US11493567B2 (en) | 2021-03-31 | 2022-11-08 | Tdk Corporation | Magnetic sensor device and magnetic sensor system |
US11686788B2 (en) | 2021-07-08 | 2023-06-27 | Tdk Corporation | Magnetic sensor device and magnetic sensor system |
US11971461B2 (en) | 2021-09-21 | 2024-04-30 | Tdk Corporation | Sensor having protruding surface |
US11719771B1 (en) | 2022-06-02 | 2023-08-08 | Allegro Microsystems, Llc | Magnetoresistive sensor having seed layer hysteresis suppression |
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US4385975A (en) * | 1981-12-30 | 1983-05-31 | International Business Machines Corp. | Method of forming wide, deep dielectric filled isolation trenches in the surface of a silicon semiconductor substrate |
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JPH11305055A (ja) | 1998-04-22 | 1999-11-05 | Sharp Corp | 光導波路の製造方法及び光導波路製造のためのマスタ原板の製造方法 |
US6344951B1 (en) * | 1998-12-14 | 2002-02-05 | Alps Electric Co., Ltd. | Substrate having magnetoresistive elements and monitor element capable of preventing a short circuit |
JP3498737B2 (ja) * | 2001-01-24 | 2004-02-16 | ヤマハ株式会社 | 磁気センサの製造方法 |
JP3971934B2 (ja) * | 2001-03-07 | 2007-09-05 | ヤマハ株式会社 | 磁気センサとその製法 |
JP3835354B2 (ja) * | 2001-10-29 | 2006-10-18 | ヤマハ株式会社 | 磁気センサ |
JP4085859B2 (ja) * | 2002-03-27 | 2008-05-14 | ヤマハ株式会社 | 磁気センサおよびその製造方法 |
JP4177032B2 (ja) * | 2002-06-04 | 2008-11-05 | 株式会社ワコー | 三次元磁気センサおよびその製造方法 |
JP4016857B2 (ja) * | 2002-10-18 | 2007-12-05 | ヤマハ株式会社 | 磁気センサ及びその製造方法 |
JP3835447B2 (ja) * | 2002-10-23 | 2006-10-18 | ヤマハ株式会社 | 磁気センサ、同磁気センサの製造方法及び同製造方法に適したマグネットアレイ |
BR0215939A (pt) * | 2002-11-29 | 2005-09-06 | Yamaha Corp | Sensor magnético e método para compensar caracterìstica dependente da temperatura de sensor magnético |
JP4050631B2 (ja) * | 2003-02-21 | 2008-02-20 | 株式会社ルネサステクノロジ | 電子デバイスの製造方法 |
EP1498744B1 (en) * | 2003-07-18 | 2011-08-10 | Yamaha Corporation | Magnetic sensor and manufacturing method therefor |
US7271586B2 (en) * | 2003-12-04 | 2007-09-18 | Honeywell International Inc. | Single package design for 3-axis magnetic sensor |
US7126330B2 (en) * | 2004-06-03 | 2006-10-24 | Honeywell International, Inc. | Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device |
US7687284B2 (en) * | 2005-01-13 | 2010-03-30 | Yamaha Corporation | Magnetic sensor and manufacturing method therefor |
WO2006098367A1 (ja) * | 2005-03-17 | 2006-09-21 | Yamaha Corporation | 磁気センサ及びその製造方法 |
-
2006
- 2006-03-17 TW TW097125332A patent/TWI361503B/zh not_active IP Right Cessation
- 2006-03-17 BR BRPI0608019-7A patent/BRPI0608019A2/pt not_active IP Right Cessation
- 2006-03-17 WO PCT/JP2006/305399 patent/WO2006098431A1/ja active Application Filing
- 2006-03-17 CA CA002601130A patent/CA2601130A1/en not_active Abandoned
- 2006-03-17 US US11/908,549 patent/US20090027048A1/en not_active Abandoned
- 2006-03-17 KR KR1020077020878A patent/KR100950615B1/ko not_active IP Right Cessation
- 2006-03-17 EP EP06729388A patent/EP1860451B1/en not_active Not-in-force
- 2006-03-17 TW TW097125334A patent/TWI360243B/zh not_active IP Right Cessation
- 2006-03-17 TW TW095109283A patent/TWI307977B/zh not_active IP Right Cessation
-
2012
- 2012-06-13 US US13/517,526 patent/US20120268113A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
TWI360243B (en) | 2012-03-11 |
EP1860451B1 (en) | 2012-06-27 |
TW200901527A (en) | 2009-01-01 |
TWI307977B (en) | 2009-03-21 |
TWI361503B (en) | 2012-04-01 |
US20090027048A1 (en) | 2009-01-29 |
WO2006098431A1 (ja) | 2006-09-21 |
CA2601130A1 (en) | 2006-09-21 |
KR20070104659A (ko) | 2007-10-26 |
US20120268113A1 (en) | 2012-10-25 |
BRPI0608019A2 (pt) | 2009-11-03 |
EP1860451A4 (en) | 2010-11-10 |
EP1860451A1 (en) | 2007-11-28 |
TW200849684A (en) | 2008-12-16 |
KR100950615B1 (ko) | 2010-04-01 |
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Legal Events
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MM4A | Annulment or lapse of patent due to non-payment of fees |