TW200704835A - Multilayered substrate obtained via wafer bonding for power applications - Google Patents

Multilayered substrate obtained via wafer bonding for power applications

Info

Publication number
TW200704835A
TW200704835A TW095121507A TW95121507A TW200704835A TW 200704835 A TW200704835 A TW 200704835A TW 095121507 A TW095121507 A TW 095121507A TW 95121507 A TW95121507 A TW 95121507A TW 200704835 A TW200704835 A TW 200704835A
Authority
TW
Taiwan
Prior art keywords
silicon
wafer
wafer bonding
obtained via
substrate obtained
Prior art date
Application number
TW095121507A
Other languages
English (en)
Chinese (zh)
Inventor
Godfrey Augustine
Jeffrey D Hartman
Erica C Elvey
Paul A Tittel
Original Assignee
Northrop Grumman Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northrop Grumman Corp filed Critical Northrop Grumman Corp
Publication of TW200704835A publication Critical patent/TW200704835A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
    • H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
    • H01L21/2007—Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/185—Joining of semiconductor bodies for junction formation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Recrystallisation Techniques (AREA)
  • Element Separation (AREA)
  • Thin Film Transistor (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
TW095121507A 2005-06-17 2006-06-16 Multilayered substrate obtained via wafer bonding for power applications TW200704835A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US69123505P 2005-06-17 2005-06-17
US11/326,439 US20060284167A1 (en) 2005-06-17 2006-01-06 Multilayered substrate obtained via wafer bonding for power applications

Publications (1)

Publication Number Publication Date
TW200704835A true TW200704835A (en) 2007-02-01

Family

ID=37057348

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095121507A TW200704835A (en) 2005-06-17 2006-06-16 Multilayered substrate obtained via wafer bonding for power applications

Country Status (4)

Country Link
US (1) US20060284167A1 (enExample)
JP (1) JP2009501434A (enExample)
TW (1) TW200704835A (enExample)
WO (1) WO2006138422A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11387101B2 (en) 2016-06-14 2022-07-12 QROMIS, Inc. Methods of manufacturing engineered substrate structures for power and RF applications
TWI793755B (zh) * 2016-06-14 2023-02-21 美商克若密斯股份有限公司 用於功率及rf應用的工程基板結構
TWI795577B (zh) * 2018-07-12 2023-03-11 日商東京威力科創股份有限公司 基板處理系統及基板處理方法

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US7456443B2 (en) * 2004-11-23 2008-11-25 Cree, Inc. Transistors having buried n-type and p-type regions beneath the source region
CN101573786B (zh) * 2007-02-08 2011-09-28 硅绝缘体技术有限公司 高散热性基片的制造方法
US8461626B2 (en) * 2007-07-09 2013-06-11 Freescale Semiconductor, Inc. Hetero-structure field effect transistor, integrated circuit including a hetero-structure field effect transistor and method for manufacturing a hetero-structure field effect transistor
US8217498B2 (en) * 2007-10-18 2012-07-10 Corning Incorporated Gallium nitride semiconductor device on SOI and process for making same
US8143654B1 (en) * 2008-01-16 2012-03-27 Triquint Semiconductor, Inc. Monolithic microwave integrated circuit with diamond layer
WO2009128776A1 (en) * 2008-04-15 2009-10-22 Vallin Oerjan Hybrid wafers with hybrid-oriented layer
US8536629B2 (en) 2009-02-24 2013-09-17 Nec Corporation Semiconductor device and method for manufacturing the same
JP5404135B2 (ja) * 2009-03-31 2014-01-29 株式会社ブリヂストン 支持基板、貼り合わせ基板、支持基板の製造方法、及び貼り合わせ基板の製造方法
US8822306B2 (en) * 2010-09-30 2014-09-02 Infineon Technologies Ag Method for manufacturing a composite wafer having a graphite core, and composite wafer having a graphite core
US8741739B2 (en) * 2012-01-03 2014-06-03 International Business Machines Corporation High resistivity silicon-on-insulator substrate and method of forming
US8735219B2 (en) 2012-08-30 2014-05-27 Ziptronix, Inc. Heterogeneous annealing method and device
TWI538018B (zh) * 2013-03-27 2016-06-11 Ngk Insulators Ltd Semiconductor substrate for composite substrate
WO2018186156A1 (ja) * 2017-04-07 2018-10-11 パナソニックＩｐマネジメント株式会社 グラファイト複合フィルム及びその製造方法
CN107742606B (zh) * 2017-10-30 2024-04-02 桂林电子科技大学 一种键合晶圆的结构及其制备方法
US11664357B2 (en) * 2018-07-03 2023-05-30 Adeia Semiconductor Bonding Technologies Inc. Techniques for joining dissimilar materials in microelectronics
CN112368828A (zh) * 2018-07-03 2021-02-12 伊文萨思粘合技术公司 在微电子学中用于接合异种材料的技术
CN109273526B (zh) * 2018-10-24 2024-06-14 江西华讯方舟智能技术有限公司 一种高性能晶体管及其制造方法
CN111697071B (zh) * 2019-03-11 2023-11-24 比亚迪半导体股份有限公司 Mos场效应晶体管及制备的方法、电子设备
CN110491826B (zh) * 2019-07-31 2020-09-29 北京工业大学 化合物半导体单晶薄膜层的转移方法及单晶GaAs-OI复合晶圆的制备方法
WO2021188846A1 (en) 2020-03-19 2021-09-23 Invensas Bonding Technologies, Inc. Dimension compensation control for directly bonded structures
WO2022184630A1 (en) * 2021-03-01 2022-09-09 Umicore Compound semiconductor layered structure and process for preparing the same
CN114530421B (zh) * 2022-01-19 2025-07-01 中国科学院上海微系统与信息技术研究所 一种器件的制备方法及其结构

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US20030087503A1 (en) * 1994-03-10 2003-05-08 Canon Kabushiki Kaisha Process for production of semiconductor substrate
US5759908A (en) * 1995-05-16 1998-06-02 University Of Cincinnati Method for forming SiC-SOI structures
US6194290B1 (en) * 1998-03-09 2001-02-27 Intersil Corporation Methods for making semiconductor devices by low temperature direct bonding
US6328796B1 (en) * 1999-02-01 2001-12-11 The United States Of America As Represented By The Secretary Of The Navy Single-crystal material on non-single-crystalline substrate
US6242324B1 (en) * 1999-08-10 2001-06-05 The United States Of America As Represented By The Secretary Of The Navy Method for fabricating singe crystal materials over CMOS devices
FR2817394B1 (fr) * 2000-11-27 2003-10-31 Soitec Silicon On Insulator Procede de fabrication d'un substrat notamment pour l'optique, l'electronique ou l'optoelectronique et substrat obtenu par ce procede
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JP2005129825A (ja) * 2003-10-27 2005-05-19 Sumitomo Chemical Co Ltd 化合物半導体基板の製造方法
US20050211982A1 (en) * 2004-03-23 2005-09-29 Ryan Lei Strained silicon with reduced roughness
US7365374B2 (en) * 2005-05-03 2008-04-29 Nitronex Corporation Gallium nitride material structures including substrates and methods associated with the same

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11387101B2 (en) 2016-06-14 2022-07-12 QROMIS, Inc. Methods of manufacturing engineered substrate structures for power and RF applications
TWI793755B (zh) * 2016-06-14 2023-02-21 美商克若密斯股份有限公司 用於功率及rf應用的工程基板結構
TWI839076B (zh) * 2016-06-14 2024-04-11 美商克若密斯股份有限公司 用於功率及rf應用的工程基板結構
US12009205B2 (en) 2016-06-14 2024-06-11 QROMIS, Inc. Engineered substrate structures for power and RF applications
US12217957B2 (en) 2016-06-14 2025-02-04 QROMIS, Inc. Engineered substrate structures for power and RF applications
TWI894863B (zh) * 2016-06-14 2025-08-21 美商克若密斯股份有限公司 用於功率及rf應用的工程基板結構
TWI795577B (zh) * 2018-07-12 2023-03-11 日商東京威力科創股份有限公司 基板處理系統及基板處理方法

Also Published As

Publication number Publication date
US20060284167A1 (en) 2006-12-21
JP2009501434A (ja) 2009-01-15
WO2006138422A1 (en) 2006-12-28

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