TW200701099A - Method for managing semiconductor characteristic evaluation apparatus and computer program therefor - Google Patents

Method for managing semiconductor characteristic evaluation apparatus and computer program therefor

Info

Publication number
TW200701099A
TW200701099A TW095103075A TW95103075A TW200701099A TW 200701099 A TW200701099 A TW 200701099A TW 095103075 A TW095103075 A TW 095103075A TW 95103075 A TW95103075 A TW 95103075A TW 200701099 A TW200701099 A TW 200701099A
Authority
TW
Taiwan
Prior art keywords
evaluation apparatus
characteristic evaluation
computer program
semiconductor characteristic
program therefor
Prior art date
Application number
TW095103075A
Other languages
English (en)
Chinese (zh)
Inventor
Koji Ishizuka
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of TW200701099A publication Critical patent/TW200701099A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31908—Tester set-up, e.g. configuring the tester to the device under test [DUT], down loading test patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31912—Tester/user interface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW095103075A 2005-02-25 2006-01-26 Method for managing semiconductor characteristic evaluation apparatus and computer program therefor TW200701099A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005051212A JP2006237365A (ja) 2005-02-25 2005-02-25 半導体特性評価装置の管理方法及びそのプログラム

Publications (1)

Publication Number Publication Date
TW200701099A true TW200701099A (en) 2007-01-01

Family

ID=36539266

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095103075A TW200701099A (en) 2005-02-25 2006-01-26 Method for managing semiconductor characteristic evaluation apparatus and computer program therefor

Country Status (5)

Country Link
US (1) US7319940B2 (enExample)
EP (1) EP1696242A1 (enExample)
JP (1) JP2006237365A (enExample)
CN (1) CN1825131A (enExample)
TW (1) TW200701099A (enExample)

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* Cited by examiner, † Cited by third party
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US7590504B2 (en) * 2005-08-16 2009-09-15 Asset Intertech, Inc. Graphical user interface for creation of IBIST tests
US7562274B2 (en) * 2005-08-16 2009-07-14 Asset Intertech, Inc. User data driven test control software application the requires no software maintenance
US7558641B2 (en) * 2007-03-29 2009-07-07 Lam Research Corporation Recipe report card framework and methods thereof
US20100023294A1 (en) * 2008-07-28 2010-01-28 Credence Systems Corporation Automated test system and method
JP2012099603A (ja) * 2010-11-01 2012-05-24 Elpida Memory Inc ウェハテスト装置、ウェハテスト方法およびプログラム
JP6383522B2 (ja) * 2013-01-30 2018-08-29 株式会社日立ハイテクノロジーズ 異物を発塵させる装置および発塵要因分析装置
JP6200236B2 (ja) 2013-08-09 2017-09-20 ルネサスエレクトロニクス株式会社 電子装置
US11385774B2 (en) * 2014-01-06 2022-07-12 Red Hat, Inc. Intuitive workspace management
CN103809099B (zh) * 2014-03-05 2016-09-28 上海华虹宏力半导体制造有限公司 晶圆探针测试次数的检测方法
JP2020004070A (ja) * 2018-06-28 2020-01-09 ルネサスエレクトロニクス株式会社 半導体製品品質管理サーバ、半導体装置、および半導体製品品質管理システム
CN109541426B (zh) * 2018-11-21 2021-09-24 中国科学院苏州纳米技术与纳米仿生研究所南昌研究院 一种晶圆测试中测试仪自动读取参数的方法
US20220308790A1 (en) * 2021-03-24 2022-09-29 Tektronix, Inc. Test and measurement instrument having programmable acquisition history storage and restore
US20240027518A1 (en) * 2022-07-21 2024-01-25 Nanya Technology Corporation Wafer tester and wafer testing method and system
CN116666248B (zh) * 2023-07-26 2023-11-17 北京象帝先计算技术有限公司 测试结果异常确定方法、装置、电子设备及可读存储介质

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5206582A (en) * 1988-05-18 1993-04-27 Hewlett-Packard Company Control system for automated parametric test equipment
JP2724082B2 (ja) * 1992-12-18 1998-03-09 シャープ株式会社 Ｖｌｓｉプロセスのデータ解析支援システム
JPH08122411A (ja) * 1994-10-25 1996-05-17 Fujitsu Ltd 半導体装置の試験方法
JPH09320917A (ja) * 1996-05-30 1997-12-12 Matsushita Electric Ind Co Ltd 半導体のシミュレーション装置及びその方法
JPH11118884A (ja) * 1997-10-10 1999-04-30 Advantest Corp 試験システムおよびその制御方法
US7016811B2 (en) * 2001-08-15 2006-03-21 National Instruments Corporation Network-based system for configuring a programmable hardware element in a measurement system using hardware configuration programs generated based on a user specification
KR100303322B1 (ko) 1999-05-20 2001-09-26 박종섭 반도체 라인 관리를 위한 통합 자동화 시스템 및 그 방법
JP2001326151A (ja) 2000-05-16 2001-11-22 Nec Corp 半導体集積回路製作システム
US6744266B2 (en) * 2000-10-02 2004-06-01 Applied Materials, Inc. Defect knowledge library
US6701259B2 (en) * 2000-10-02 2004-03-02 Applied Materials, Inc. Defect source identifier
JP2003107022A (ja) * 2001-09-28 2003-04-09 Hitachi Ltd 欠陥検査装置及び検査方法

Also Published As

Publication number Publication date
JP2006237365A (ja) 2006-09-07
EP1696242A1 (en) 2006-08-30
US20060195298A1 (en) 2006-08-31
US7319940B2 (en) 2008-01-15
CN1825131A (zh) 2006-08-30

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