JP2006237365A - 半導体特性評価装置の管理方法及びそのプログラム - Google Patents

半導体特性評価装置の管理方法及びそのプログラム Download PDF

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Publication number
JP2006237365A
JP2006237365A JP2005051212A JP2005051212A JP2006237365A JP 2006237365 A JP2006237365 A JP 2006237365A JP 2005051212 A JP2005051212 A JP 2005051212A JP 2005051212 A JP2005051212 A JP 2005051212A JP 2006237365 A JP2006237365 A JP 2006237365A
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JP
Japan
Prior art keywords
test
setting data
program
wafer
history
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005051212A
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English (en)
Japanese (ja)
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JP2006237365A5 (enExample
Inventor
Koji Ishizuka
好司 石塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Priority to JP2005051212A priority Critical patent/JP2006237365A/ja
Priority to US11/333,463 priority patent/US7319940B2/en
Priority to TW095103075A priority patent/TW200701099A/zh
Priority to EP06101154A priority patent/EP1696242A1/en
Priority to CNA200610057676XA priority patent/CN1825131A/zh
Publication of JP2006237365A publication Critical patent/JP2006237365A/ja
Publication of JP2006237365A5 publication Critical patent/JP2006237365A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31908—Tester set-up, e.g. configuring the tester to the device under test [DUT], down loading test patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31912—Tester/user interface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2005051212A 2005-02-25 2005-02-25 半導体特性評価装置の管理方法及びそのプログラム Pending JP2006237365A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2005051212A JP2006237365A (ja) 2005-02-25 2005-02-25 半導体特性評価装置の管理方法及びそのプログラム
US11/333,463 US7319940B2 (en) 2005-02-25 2006-01-17 Method for managing semiconductor characteristic evaluation apparatus and computer program therefor
TW095103075A TW200701099A (en) 2005-02-25 2006-01-26 Method for managing semiconductor characteristic evaluation apparatus and computer program therefor
EP06101154A EP1696242A1 (en) 2005-02-25 2006-02-01 Method for managing semiconductor characteristic evaluation apparatus and computer program therefor
CNA200610057676XA CN1825131A (zh) 2005-02-25 2006-02-24 用于管理半导体特性评估装置的方法和其计算机程序

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005051212A JP2006237365A (ja) 2005-02-25 2005-02-25 半導体特性評価装置の管理方法及びそのプログラム

Publications (2)

Publication Number Publication Date
JP2006237365A true JP2006237365A (ja) 2006-09-07
JP2006237365A5 JP2006237365A5 (enExample) 2008-04-10

Family

ID=36539266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005051212A Pending JP2006237365A (ja) 2005-02-25 2005-02-25 半導体特性評価装置の管理方法及びそのプログラム

Country Status (5)

Country Link
US (1) US7319940B2 (enExample)
EP (1) EP1696242A1 (enExample)
JP (1) JP2006237365A (enExample)
CN (1) CN1825131A (enExample)
TW (1) TW200701099A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014119483A1 (ja) * 2013-01-30 2014-08-07 株式会社日立ハイテクノロジーズ 異物を発塵させる装置および発塵要因分析装置
US9997231B2 (en) 2013-08-09 2018-06-12 Renesas Electronics Corporation Electronic device

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7590504B2 (en) * 2005-08-16 2009-09-15 Asset Intertech, Inc. Graphical user interface for creation of IBIST tests
US7562274B2 (en) * 2005-08-16 2009-07-14 Asset Intertech, Inc. User data driven test control software application the requires no software maintenance
US7558641B2 (en) * 2007-03-29 2009-07-07 Lam Research Corporation Recipe report card framework and methods thereof
US20100023294A1 (en) * 2008-07-28 2010-01-28 Credence Systems Corporation Automated test system and method
JP2012099603A (ja) * 2010-11-01 2012-05-24 Elpida Memory Inc ウェハテスト装置、ウェハテスト方法およびプログラム
US11385774B2 (en) * 2014-01-06 2022-07-12 Red Hat, Inc. Intuitive workspace management
CN103809099B (zh) * 2014-03-05 2016-09-28 上海华虹宏力半导体制造有限公司 晶圆探针测试次数的检测方法
JP2020004070A (ja) * 2018-06-28 2020-01-09 ルネサスエレクトロニクス株式会社 半導体製品品質管理サーバ、半導体装置、および半導体製品品質管理システム
CN109541426B (zh) * 2018-11-21 2021-09-24 中国科学院苏州纳米技术与纳米仿生研究所南昌研究院 一种晶圆测试中测试仪自动读取参数的方法
US20220308790A1 (en) * 2021-03-24 2022-09-29 Tektronix, Inc. Test and measurement instrument having programmable acquisition history storage and restore
US20240027518A1 (en) * 2022-07-21 2024-01-25 Nanya Technology Corporation Wafer tester and wafer testing method and system
CN116666248B (zh) * 2023-07-26 2023-11-17 北京象帝先计算技术有限公司 测试结果异常确定方法、装置、电子设备及可读存储介质

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06188405A (ja) * 1992-12-18 1994-07-08 Sharp Corp Ｖｌｓｉプロセスのデータ解析支援システム
JPH08122411A (ja) * 1994-10-25 1996-05-17 Fujitsu Ltd 半導体装置の試験方法
JPH09320917A (ja) * 1996-05-30 1997-12-12 Matsushita Electric Ind Co Ltd 半導体のシミュレーション装置及びその方法
JPH11118884A (ja) * 1997-10-10 1999-04-30 Advantest Corp 試験システムおよびその制御方法
JP2001035760A (ja) * 1999-05-20 2001-02-09 Hyundai Electronics Ind Co Ltd 半導体生産ベイを自動的に管理するためのシステム、方法及び記録媒体

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5206582A (en) * 1988-05-18 1993-04-27 Hewlett-Packard Company Control system for automated parametric test equipment
US7016811B2 (en) * 2001-08-15 2006-03-21 National Instruments Corporation Network-based system for configuring a programmable hardware element in a measurement system using hardware configuration programs generated based on a user specification
JP2001326151A (ja) 2000-05-16 2001-11-22 Nec Corp 半導体集積回路製作システム
US6744266B2 (en) * 2000-10-02 2004-06-01 Applied Materials, Inc. Defect knowledge library
US6701259B2 (en) * 2000-10-02 2004-03-02 Applied Materials, Inc. Defect source identifier
JP2003107022A (ja) * 2001-09-28 2003-04-09 Hitachi Ltd 欠陥検査装置及び検査方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06188405A (ja) * 1992-12-18 1994-07-08 Sharp Corp Ｖｌｓｉプロセスのデータ解析支援システム
JPH08122411A (ja) * 1994-10-25 1996-05-17 Fujitsu Ltd 半導体装置の試験方法
JPH09320917A (ja) * 1996-05-30 1997-12-12 Matsushita Electric Ind Co Ltd 半導体のシミュレーション装置及びその方法
JPH11118884A (ja) * 1997-10-10 1999-04-30 Advantest Corp 試験システムおよびその制御方法
JP2001035760A (ja) * 1999-05-20 2001-02-09 Hyundai Electronics Ind Co Ltd 半導体生産ベイを自動的に管理するためのシステム、方法及び記録媒体

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014119483A1 (ja) * 2013-01-30 2014-08-07 株式会社日立ハイテクノロジーズ 異物を発塵させる装置および発塵要因分析装置
JP2014146764A (ja) * 2013-01-30 2014-08-14 Hitachi High-Technologies Corp 異物を発塵させる装置および発塵要因分析装置
KR20180085070A (ko) * 2013-01-30 2018-07-25 가부시키가이샤 히다치 하이테크놀로지즈 이물질을 발진시키는 장치 및 발진 요인 분석 장치
KR101899639B1 (ko) * 2013-01-30 2018-09-17 가부시키가이샤 히다치 하이테크놀로지즈 이물질을 발진시키는 장치 및 발진 요인 분석 장치
KR101950659B1 (ko) * 2013-01-30 2019-02-20 가부시키가이샤 히다치 하이테크놀로지즈 이물질을 발진시키는 장치 및 발진 요인 분석 장치
US10748742B2 (en) 2013-01-30 2020-08-18 Hitachi High-Tech Corporation Device for dust emitting of foreign matter and dust emission cause analysis device
US9997231B2 (en) 2013-08-09 2018-06-12 Renesas Electronics Corporation Electronic device

Also Published As

Publication number Publication date
TW200701099A (en) 2007-01-01
EP1696242A1 (en) 2006-08-30
US20060195298A1 (en) 2006-08-31
US7319940B2 (en) 2008-01-15
CN1825131A (zh) 2006-08-30

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