TW200700166A - Coating apparatus and method of manufacturing photomask blank - Google Patents

Coating apparatus and method of manufacturing photomask blank

Info

Publication number
TW200700166A
TW200700166A TW095112394A TW95112394A TW200700166A TW 200700166 A TW200700166 A TW 200700166A TW 095112394 A TW095112394 A TW 095112394A TW 95112394 A TW95112394 A TW 95112394A TW 200700166 A TW200700166 A TW 200700166A
Authority
TW
Taiwan
Prior art keywords
nozzle
coated
tip opening
coating liquid
coating
Prior art date
Application number
TW095112394A
Other languages
English (en)
Inventor
Takahiro Ishizaki
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Publication of TW200700166A publication Critical patent/TW200700166A/zh

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F15/00—Boards, hoardings, pillars, or like structures for notices, placards, posters, or the like
    • G09F15/0006—Boards, hoardings, pillars, or like structures for notices, placards, posters, or the like planar structures comprising one or more panels
    • G09F15/0012—Boards, hoardings, pillars, or like structures for notices, placards, posters, or the like planar structures comprising one or more panels frames therefor
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F15/00—Boards, hoardings, pillars, or like structures for notices, placards, posters, or the like
    • G09F15/0006—Boards, hoardings, pillars, or like structures for notices, placards, posters, or the like planar structures comprising one or more panels
    • G09F15/0018—Boards, hoardings, pillars, or like structures for notices, placards, posters, or the like planar structures comprising one or more panels panel clamping or fastening means
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F15/00—Boards, hoardings, pillars, or like structures for notices, placards, posters, or the like
    • G09F15/0006—Boards, hoardings, pillars, or like structures for notices, placards, posters, or the like planar structures comprising one or more panels
    • G09F15/0025—Boards, hoardings, pillars, or like structures for notices, placards, posters, or the like planar structures comprising one or more panels display surface tensioning means
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F15/00—Boards, hoardings, pillars, or like structures for notices, placards, posters, or the like
    • G09F15/0006—Boards, hoardings, pillars, or like structures for notices, placards, posters, or the like planar structures comprising one or more panels
    • G09F15/0056—Boards, hoardings, pillars, or like structures for notices, placards, posters, or the like planar structures comprising one or more panels portable display standards
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F15/00—Boards, hoardings, pillars, or like structures for notices, placards, posters, or the like
    • G09F15/0068—Modular articulated structures, e.g. stands, and articulation means therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Coating Apparatus (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW095112394A 2005-04-08 2006-04-07 Coating apparatus and method of manufacturing photomask blank TW200700166A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005112801A JP2006294820A (ja) 2005-04-08 2005-04-08 塗布装置及びフォトマスクブランクの製造方法

Publications (1)

Publication Number Publication Date
TW200700166A true TW200700166A (en) 2007-01-01

Family

ID=37062625

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095112394A TW200700166A (en) 2005-04-08 2006-04-07 Coating apparatus and method of manufacturing photomask blank

Country Status (4)

Country Link
JP (1) JP2006294820A (zh)
KR (1) KR20060107378A (zh)
CN (1) CN100423852C (zh)
TW (1) TW200700166A (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100840975B1 (ko) * 2006-12-15 2008-06-24 세메스 주식회사 노즐 이송 장치 및 이를 포함하는 집적 회로 소자 제조 장치
KR20140069677A (ko) * 2012-11-29 2014-06-10 삼성디스플레이 주식회사 기판 프린팅 장치 및 기판 프린팅 방법
JP2020202228A (ja) * 2019-06-07 2020-12-17 アルバック成膜株式会社 マスクブランクの製造方法、塗布装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07204561A (ja) * 1994-01-19 1995-08-08 Mitsubishi Heavy Ind Ltd スリットノズル塗装装置
CN1086607C (zh) * 1998-12-31 2002-06-26 中国科学院金属腐蚀与防护研究所 电控喷涂器
JP3334045B2 (ja) * 1999-08-31 2002-10-15 株式会社ヒラノテクシード 塗工方法及び塗工装置
JP4481688B2 (ja) * 2003-04-10 2010-06-16 Ｈｏｙａ株式会社 基板処理装置，塗布装置、塗布方法、及び、フォトマスクの製造方法
JP2004335728A (ja) * 2003-05-07 2004-11-25 Hoya Corp 基板塗布装置及び基板塗布方法
JP2005051220A (ja) * 2003-07-17 2005-02-24 Hoya Corp レジスト膜付基板の製造方法

Also Published As

Publication number Publication date
CN100423852C (zh) 2008-10-08
CN1843637A (zh) 2006-10-11
KR20060107378A (ko) 2006-10-13
JP2006294820A (ja) 2006-10-26

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