TW200639576A - Method of manufacturing gray level mask, gray level mask, and gray level mask blank - Google Patents

Method of manufacturing gray level mask, gray level mask, and gray level mask blank

Info

Publication number
TW200639576A
TW200639576A TW095106896A TW95106896A TW200639576A TW 200639576 A TW200639576 A TW 200639576A TW 095106896 A TW095106896 A TW 095106896A TW 95106896 A TW95106896 A TW 95106896A TW 200639576 A TW200639576 A TW 200639576A
Authority
TW
Taiwan
Prior art keywords
gray level
level mask
film
semi
transparent
Prior art date
Application number
TW095106896A
Other languages
English (en)
Chinese (zh)
Inventor
Masaru Mitsui
Michiaki Sano
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Publication of TW200639576A publication Critical patent/TW200639576A/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/36—Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
TW095106896A 2005-02-28 2006-02-27 Method of manufacturing gray level mask, gray level mask, and gray level mask blank TW200639576A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005054352 2005-02-28

Publications (1)

Publication Number Publication Date
TW200639576A true TW200639576A (en) 2006-11-16

Family

ID=37625148

Family Applications (2)

Application Number Title Priority Date Filing Date
TW099103293A TWI395053B (zh) 2005-02-28 2006-02-27 灰階罩幕及灰階罩幕毛胚
TW095106896A TW200639576A (en) 2005-02-28 2006-02-27 Method of manufacturing gray level mask, gray level mask, and gray level mask blank

Family Applications Before (1)

Application Number Title Priority Date Filing Date
TW099103293A TWI395053B (zh) 2005-02-28 2006-02-27 灰階罩幕及灰階罩幕毛胚

Country Status (3)

Country Link
JP (1) JP5201762B2 (ja)
KR (3) KR20060095522A (ja)
TW (2) TWI395053B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111367142A (zh) * 2018-12-26 2020-07-03 聚灿光电科技（宿迁）有限公司 一种包含不同透光性的新型光学掩膜版

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101329525B1 (ko) * 2006-10-04 2013-11-14 주식회사 에스앤에스텍 그레이톤 블랭크 마스크와 그레이톤 포토마스크 및 그제조방법
JP5064116B2 (ja) * 2007-05-30 2012-10-31 Ｈｏｙａ株式会社 フォトマスクの検査方法、フォトマスクの製造方法及び電子部品の製造方法
TWI422961B (zh) * 2007-07-19 2014-01-11 Hoya Corp 光罩及其製造方法、圖案轉印方法、以及顯示裝置之製造方法
KR101216242B1 (ko) * 2010-03-05 2013-01-18 주식회사 피케이엘 슬릿형 하프톤 패턴을 이용한 포토 마스크 제조 방법 및 이를 이용하여 제조된 포토 마스크
JP6076593B2 (ja) * 2011-09-30 2017-02-08 Hoya株式会社 表示装置製造用多階調フォトマスク、表示装置製造用多階調フォトマスクの製造方法、パターン転写方法及び薄膜トランジスタの製造方法
KR101414335B1 (ko) * 2012-06-25 2014-07-02 주식회사 피케이엘 해상도 및 초점심도가 우수한 하프톤 위상반전마스크 및 그 제조 방법
JP5686216B1 (ja) * 2013-08-20 2015-03-18 大日本印刷株式会社 マスクブランクス、位相シフトマスク及びその製造方法
JP6322607B2 (ja) * 2015-07-30 2018-05-09 Hoya株式会社 表示デバイス製造用多階調フォトマスク、表示デバイス製造用多階調フォトマスクの製造方法、及び薄膜トランジスタの製造方法
JP6761255B2 (ja) * 2016-02-15 2020-09-23 関東化学株式会社 エッチング液およびエッチング液により加工されたフォトマスク
JP6322682B2 (ja) * 2016-10-26 2018-05-09 Hoya株式会社 パターン転写方法、表示装置の製造方法、及び、多階調フォトマスク
JP6463536B1 (ja) * 2018-05-09 2019-02-06 株式会社エスケーエレクトロニクス プロキシミティ露光用フォトマスクとその製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100295385B1 (ko) * 1993-04-09 2001-09-17 기타지마 요시토시 하프톤위상쉬프트포토마스크,하프톤위상쉬프트포토마스크용블랭크스및이들의제조방법
JP3262302B2 (ja) * 1993-04-09 2002-03-04 大日本印刷株式会社 位相シフトフォトマスク、位相シフトフォトマスク用ブランクス及びそれらの製造方法
JP3289992B2 (ja) * 1993-05-11 2002-06-10 株式会社長谷工コーポレーション 建物の共用縦管収納部の構築方法とその方法に用いる収納部構成用の区画壁
JP3453435B2 (ja) * 1993-10-08 2003-10-06 大日本印刷株式会社 位相シフトマスクおよびその製造方法
JP2878143B2 (ja) * 1994-02-22 1999-04-05 インターナショナル・ビジネス・マシーンズ・コーポレイション 減衰位相シフト・マスク作成用の薄膜材料及びその作成方法
TW312820B (en) * 1996-09-26 1997-08-11 Winbond Electronics Corp Contact defined photomask and method of applying to etching
JP4290386B2 (ja) * 2002-04-26 2009-07-01 Ｈｏｙａ株式会社 ハーフトーン型位相シフトマスクブランク及びハーフトーン型位相シフトマスク
JP2004177683A (ja) * 2002-11-27 2004-06-24 Clariant (Japan) Kk 超高耐熱ポジ型感光性組成物を用いたパターン形成方法
JP4393290B2 (ja) * 2003-06-30 2010-01-06 Ｈｏｙａ株式会社 グレートーンマスクの製造方法及び薄膜トランジスタ基板の製造方法
TWI286663B (en) * 2003-06-30 2007-09-11 Hoya Corp Method for manufacturing gray tone mask, and gray tone mask
JP4521694B2 (ja) * 2004-03-09 2010-08-11 Ｈｏｙａ株式会社 グレートーンマスク及び薄膜トランジスタの製造方法
JP5161419B2 (ja) * 2004-06-22 2013-03-13 Ｈｏｙａ株式会社 グレートーンマスクブランク及びグレートーンマスクの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111367142A (zh) * 2018-12-26 2020-07-03 聚灿光电科技（宿迁）有限公司 一种包含不同透光性的新型光学掩膜版

Also Published As

Publication number Publication date
KR101269364B1 (ko) 2013-05-29
TWI395053B (zh) 2013-05-01
JP5201762B2 (ja) 2013-06-05
KR20120042809A (ko) 2012-05-03
TW201027235A (en) 2010-07-16
KR20090128354A (ko) 2009-12-15
KR20060095522A (ko) 2006-08-31
JP2011090344A (ja) 2011-05-06

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