TW200626868A - System and method for height profile measurement of reflecting objects - Google Patents

System and method for height profile measurement of reflecting objects

Info

Publication number
TW200626868A
TW200626868A TW094135517A TW94135517A TW200626868A TW 200626868 A TW200626868 A TW 200626868A TW 094135517 A TW094135517 A TW 094135517A TW 94135517 A TW94135517 A TW 94135517A TW 200626868 A TW200626868 A TW 200626868A
Authority
TW
Taiwan
Prior art keywords
height profile
reflecting objects
image
profile measurement
phase
Prior art date
Application number
TW094135517A
Other languages
English (en)
Inventor
Michel Cantin
Benoit Quirion
Alexandre Nikitine
Original Assignee
Solvision Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Solvision Inc filed Critical Solvision Inc
Publication of TW200626868A publication Critical patent/TW200626868A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW094135517A 2004-10-13 2005-10-12 System and method for height profile measurement of reflecting objects TW200626868A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/962,444 US7522289B2 (en) 2004-10-13 2004-10-13 System and method for height profile measurement of reflecting objects

Publications (1)

Publication Number Publication Date
TW200626868A true TW200626868A (en) 2006-08-01

Family

ID=36144884

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094135517A TW200626868A (en) 2004-10-13 2005-10-12 System and method for height profile measurement of reflecting objects

Country Status (4)

Country Link
US (1) US7522289B2 (zh)
JP (1) JP4982376B2 (zh)
TW (1) TW200626868A (zh)
WO (1) WO2006039796A1 (zh)

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JP2007114071A (ja) * 2005-10-20 2007-05-10 Omron Corp 三次元形状計測装置、プログラム、コンピュータ読み取り可能な記録媒体、及び三次元形状計測方法
WO2007061632A2 (en) * 2005-11-09 2007-05-31 Geometric Informatics, Inc. Method and apparatus for absolute-coordinate three-dimensional surface imaging
EP1999443B1 (en) 2006-03-14 2017-12-27 AMO Manufacturing USA, LLC Spatial frequency wavefront sensor system and method
US7675020B2 (en) * 2006-08-28 2010-03-09 Avago Technologies General Ip (Singapore) Pte. Ltd. Input apparatus and methods having diffuse and specular tracking modes
KR101010189B1 (ko) 2008-06-30 2011-01-21 에스엔유 프리시젼 주식회사 두께 또는 표면형상 측정방법
US20100259746A1 (en) * 2009-04-10 2010-10-14 Omron Corporation Profilometer
DE102010064593A1 (de) * 2009-05-21 2015-07-30 Koh Young Technology Inc. Formmessgerät und -verfahren
US8855403B2 (en) * 2010-04-16 2014-10-07 Koh Young Technology Inc. Method of discriminating between an object region and a ground region and method of measuring three dimensional shape by using the same
WO2012123703A1 (en) * 2011-03-17 2012-09-20 Cadscan Limited Scanner
WO2015175702A1 (en) 2014-05-14 2015-11-19 Kla-Tencor Corporation Image acquisition system, image acquisition method, and inspection system
JP6694137B2 (ja) * 2016-04-18 2020-05-13 富士通株式会社 表面検査方法、表面検査装置および表面検査プログラム
US10594920B2 (en) * 2016-06-15 2020-03-17 Stmicroelectronics, Inc. Glass detection with time of flight sensor
CN111656260B (zh) * 2018-01-24 2022-11-25 赛博光学公司 用于镜像表面的结构式光投射
JP7090446B2 (ja) * 2018-03-22 2022-06-24 株式会社キーエンス 画像処理装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2538435B2 (ja) * 1991-03-27 1996-09-25 理化学研究所 縞位相分布解析方法および縞位相分布解析装置
JP2985635B2 (ja) * 1994-01-20 1999-12-06 松下電工株式会社 表面形状３次元計測方法
DE19602445A1 (de) * 1996-01-24 1997-07-31 Nanopro Luftlager Produktions Vorrichtung und Verfahren zum Vermessen von zwei einander gegenüberliegenden Oberflächen eines Körpers
DE19643018B4 (de) * 1996-10-18 2010-06-17 Isra Surface Vision Gmbh Verfahren und Vorrichtung zum Messen des Verlaufs reflektierender Oberflächen
JPH11257930A (ja) * 1998-03-13 1999-09-24 Nidek Co Ltd 三次元形状測定装置
US7057741B1 (en) * 1999-06-18 2006-06-06 Kla-Tencor Corporation Reduced coherence symmetric grazing incidence differential interferometer
US6359692B1 (en) * 1999-07-09 2002-03-19 Zygo Corporation Method and system for profiling objects having multiple reflective surfaces using wavelength-tuning phase-shifting interferometry
JP2001311613A (ja) * 2000-02-24 2001-11-09 Satoru Toyooka スペックル干渉の画像解析における位相アンラッピング方法
JP2001343208A (ja) * 2000-03-30 2001-12-14 Fuji Photo Optical Co Ltd フーリエ変換を用いた縞解析方法および装置
JP3554816B2 (ja) * 2000-09-14 2004-08-18 和歌山大学長 矩形波格子投影によるリアルタイム形状変形計測方法
JP3500430B2 (ja) * 2001-10-12 2004-02-23 和歌山大学長 単色矩形波格子を用いる形状計測方法及び形状計測装置
TWI291040B (en) * 2002-11-21 2007-12-11 Solvision Inc Fast 3D height measurement method and system
JP4090860B2 (ja) * 2002-12-12 2008-05-28 オリンパス株式会社 ３次元形状測定装置

Also Published As

Publication number Publication date
JP4982376B2 (ja) 2012-07-25
WO2006039796A1 (en) 2006-04-20
US20060077398A1 (en) 2006-04-13
US7522289B2 (en) 2009-04-21
JP2008516245A (ja) 2008-05-15

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