TW200624594A - Abrasion resistant coatings by plasma enhanced chemical vapor deposition - Google Patents
Abrasion resistant coatings by plasma enhanced chemical vapor depositionInfo
- Publication number
- TW200624594A TW200624594A TW094137823A TW94137823A TW200624594A TW 200624594 A TW200624594 A TW 200624594A TW 094137823 A TW094137823 A TW 094137823A TW 94137823 A TW94137823 A TW 94137823A TW 200624594 A TW200624594 A TW 200624594A
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- vapor deposition
- chemical vapor
- plasma enhanced
- enhanced chemical
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/22—Polysiloxanes containing silicon bound to organic groups containing atoms other than carbon, hydrogen and oxygen
- C08G77/26—Polysiloxanes containing silicon bound to organic groups containing atoms other than carbon, hydrogen and oxygen nitrogen-containing groups
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
- C23C16/402—Silicon dioxide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D2201/00—Polymeric substrate or laminate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/50—Multilayers
- B05D7/52—Two layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31652—Of asbestos
- Y10T428/31663—As siloxane, silicone or silane
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US62369004P | 2004-10-29 | 2004-10-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200624594A true TW200624594A (en) | 2006-07-16 |
Family
ID=36319603
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094137823A TW200624594A (en) | 2004-10-29 | 2005-10-28 | Abrasion resistant coatings by plasma enhanced chemical vapor deposition |
Country Status (11)
Country | Link |
---|---|
US (1) | US20070264508A1 (zh) |
EP (1) | EP1807548A2 (zh) |
JP (1) | JP2008518109A (zh) |
KR (1) | KR20070072900A (zh) |
CN (1) | CN101048533A (zh) |
BR (1) | BRPI0516670A (zh) |
CA (1) | CA2582286A1 (zh) |
MX (1) | MX2007005123A (zh) |
RU (1) | RU2007119782A (zh) |
TW (1) | TW200624594A (zh) |
WO (1) | WO2006049794A2 (zh) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8216679B2 (en) * | 2005-07-27 | 2012-07-10 | Exatec Llc | Glazing system for vehicle tops and windows |
US8313812B2 (en) | 2005-11-30 | 2012-11-20 | The Boeing Company | Durable transparent coatings for aircraft passenger windows |
US20070196633A1 (en) * | 2005-11-30 | 2007-08-23 | Coak Craig E | Durable transparent coatings for polymeric substrates |
WO2008042128A1 (en) * | 2006-10-03 | 2008-04-10 | Dow Global Technologies, Inc. | Improved plasma electrode |
FR2909187B1 (fr) * | 2006-11-23 | 2009-01-02 | Essilor Int | Article d'optique comportant un revetement anti-abrasion et anti-rayures bicouche, et procede de fabrication |
JP4420052B2 (ja) * | 2007-04-06 | 2010-02-24 | 東洋製罐株式会社 | 蒸着膜を備えたプラスチック成形品の製造方法 |
CN101679597B (zh) * | 2007-05-21 | 2015-08-19 | 路博润高级材料公司 | 聚氨酯聚合物 |
JP2010535291A (ja) * | 2007-07-30 | 2010-11-18 | ダウ グローバル テクノロジーズ インコーポレイティド | 大気圧プラズマ化学蒸着方法 |
US20100255216A1 (en) * | 2007-11-29 | 2010-10-07 | Haley Jr Robert P | Process and apparatus for atmospheric pressure plasma enhanced chemical vapor deposition coating of a substrate |
WO2009104407A1 (ja) * | 2008-02-20 | 2009-08-27 | ダイキョーニシカワ株式会社 | 樹脂成形体 |
US8389107B2 (en) | 2008-03-24 | 2013-03-05 | Biovation, Llc | Cellulosic biolaminate composite assembly and related methods |
JP2011515605A (ja) | 2008-03-24 | 2011-05-19 | バイオベーション,エルエルシー | バイオラミネート合成組立部品および関連する方法 |
US8163357B2 (en) * | 2009-03-26 | 2012-04-24 | Signet Armorlite, Inc. | Scratch-resistant coatings with improved adhesion to inorganic thin film coatings |
JP5776132B2 (ja) * | 2009-04-03 | 2015-09-09 | 凸版印刷株式会社 | 成膜装置 |
US8206794B2 (en) * | 2009-05-04 | 2012-06-26 | The Boeing Company | System and method for applying abrasion-resistant coatings |
JP2011144412A (ja) | 2010-01-13 | 2011-07-28 | Honda Motor Co Ltd | プラズマ成膜装置 |
JP2011252085A (ja) | 2010-06-02 | 2011-12-15 | Honda Motor Co Ltd | プラズマ成膜方法 |
GB201112077D0 (en) * | 2011-07-14 | 2011-08-31 | Surface Innovations Ltd | A method of producing a functionalised surface and surfaces made thereby |
KR101702471B1 (ko) * | 2011-08-26 | 2017-02-03 | 엑사테크 엘.엘.씨. | 유기 수지 라미네이트, 이의 제조 및 이용 방법, 및 이를 포함하는 제품 |
US9168719B2 (en) * | 2011-09-06 | 2015-10-27 | Honeywell International Inc. | Surface treated yarn and fabric with enhanced physical and adhesion properties and the process of making |
RU2477763C1 (ru) * | 2012-01-11 | 2013-03-20 | Федеральное Государственное Автономное Образовательное Учреждение Высшего Профессионального Образования "Сибирский Федеральный Университет" (Сфу) | Способ получения полимерного нанокомпозиционного материала |
WO2013113875A1 (en) | 2012-02-02 | 2013-08-08 | Centre De Recherche Public Henri Tudor | Superamphiphobic surfaces by atmospheric plasma polymerization |
JP6042156B2 (ja) * | 2012-09-27 | 2016-12-14 | 学校法人慶應義塾 | 積層体とその製造方法 |
JP2014133408A (ja) * | 2012-12-10 | 2014-07-24 | Sumitomo Chemical Co Ltd | 表面処理積層フィルム及びそれを用いた偏光板 |
JP6135847B2 (ja) * | 2013-03-11 | 2017-05-31 | 国立大学法人名古屋大学 | 撥水性薄膜の製造方法および撥水処理装置 |
CN103485219A (zh) * | 2013-10-14 | 2014-01-01 | 无锡通用钢绳有限公司 | 一种钢丝绳 |
JP6521584B2 (ja) * | 2014-07-17 | 2019-05-29 | 株式会社小糸製作所 | 透光性樹脂部材 |
TW201704019A (zh) * | 2015-04-30 | 2017-02-01 | 康寧公司 | 含具有適度黏附性、殘留強度及透光性之膜的玻璃物件 |
EP3117907B1 (de) * | 2015-07-13 | 2017-10-25 | HEC High End Coating GmbH | Verfahren zur herstellung beschichteter substrate |
CN110770285A (zh) * | 2017-02-06 | 2020-02-07 | M·戈瑟兰 | 在塑料支持物上物理沉积硅质颗粒以增强表面性能 |
WO2019083949A2 (en) | 2017-10-27 | 2019-05-02 | Corning Incorporated | METHODS OF TREATING A SURFACE OF AN ATMOSPHERIC PRESSURE PLASMA POLYMER MATERIAL |
TWI699441B (zh) * | 2019-06-21 | 2020-07-21 | 逢甲大學 | 大氣常壓低溫電漿鍍製抗刮疏水層的方法 |
CN111675966B (zh) * | 2020-06-09 | 2022-01-11 | 江苏菲沃泰纳米科技股份有限公司 | 一种保护涂层及其制备方法 |
CN114308574B (zh) * | 2021-12-23 | 2023-04-07 | 清华大学 | 用于不粘锅的涂层及其制备方法、用于不粘锅的复合层及不粘锅 |
Family Cites Families (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3415796A (en) * | 1966-03-24 | 1968-12-10 | Rohm & Haas | Extruded matte finish acrylic film |
US3473949A (en) * | 1966-05-09 | 1969-10-21 | Gen Motors Corp | Method of forming acrylic resin surface coatings |
US3562235A (en) * | 1968-06-07 | 1971-02-09 | Rohm & Haas | Multistage emulsion polymerization of alkyl acrylates and alkyl methacrylates |
US3654069A (en) * | 1969-11-12 | 1972-04-04 | Rohm & Haas | Polystyrene laminate and adhesive-coated film for lamination to polystyrene |
US3812205A (en) * | 1970-04-13 | 1974-05-21 | Rohm & Haas | Process for preparing graftlinked heteropolymer film |
US3900673A (en) * | 1972-08-28 | 1975-08-19 | Libbey Owens Ford Co | Automotive glazing structure |
US4059469A (en) * | 1974-02-01 | 1977-11-22 | Libbey-Owens-Ford Company | Glazing units, methods of making the same and adhesion promoters therefor |
CA1077787A (en) * | 1975-11-21 | 1980-05-20 | National Aeronautics And Space Administration | Abrasion resistant coatings for plastic surfaces |
US4242403A (en) * | 1976-08-02 | 1980-12-30 | Libbey-Owens-Ford Company | Automotive glazing units and method of producing the same |
US4374955A (en) * | 1980-06-11 | 1983-02-22 | California Institute Of Technology | N-Butyl acrylate polymer composition for solar cell encapsulation and method |
US4435476A (en) * | 1982-08-18 | 1984-03-06 | Foster Grant Corporation | Method of making an abrasion resistant coating on a solid substrate and articles produced thereby |
US4737379A (en) * | 1982-09-24 | 1988-04-12 | Energy Conversion Devices, Inc. | Plasma deposited coatings, and low temperature plasma method of making same |
US4469743A (en) * | 1983-03-14 | 1984-09-04 | E. I. Du Pont De Nemours And Company | Polyvinyl butyral laminates |
US4666808A (en) * | 1983-04-01 | 1987-05-19 | Kyocera Corp. | Amorphous silicon electrophotographic sensitive member |
DE3413019A1 (de) * | 1984-04-06 | 1985-10-17 | Robert Bosch Gmbh, 7000 Stuttgart | Verfahren zum aufbringen einer duennen, transparenten schicht auf der oberflaeche optischer elemente |
FR2631346B1 (fr) * | 1988-05-11 | 1994-05-20 | Air Liquide | Revetement protecteur multicouche pour substrat, procede de protection de substrat par depot par plasma d'un tel revetement, revetements obtenus et leurs applications |
US5134021A (en) * | 1990-01-04 | 1992-07-28 | Toray Industries, Inc. | Anti-fogging film |
FR2661688B1 (fr) * | 1990-05-02 | 1992-07-17 | Air Liquide | Revetement multicouche pour substrat polycarbonate et procede d'elaboration d'un tel revetement. |
US5126208A (en) * | 1990-10-12 | 1992-06-30 | Dow Corning Corporation | Optical laminates |
US5527629A (en) * | 1990-12-17 | 1996-06-18 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process of depositing a layer of silicon oxide bonded to a substrate of polymeric material using high pressure and electrical discharge |
FR2673633B1 (fr) * | 1991-03-06 | 1993-06-11 | Air Liquide | Revetement multicouche pour substrat polycarbonate. |
US5224441A (en) * | 1991-09-27 | 1993-07-06 | The Boc Group, Inc. | Apparatus for rapid plasma treatments and method |
US5298587A (en) * | 1992-12-21 | 1994-03-29 | The Dow Chemical Company | Protective film for articles and method |
FR2704558B1 (fr) * | 1993-04-29 | 1995-06-23 | Air Liquide | Procede et dispositif pour creer un depot d'oxyde de silicium sur un substrat solide en defilement. |
US5433786A (en) * | 1993-08-27 | 1995-07-18 | The Dow Chemical Company | Apparatus for plasma enhanced chemical vapor deposition comprising shower head electrode with magnet disposed therein |
US5718967A (en) * | 1995-10-13 | 1998-02-17 | The Dow Chemical Company | Coated plastic substrate |
US6106659A (en) * | 1997-07-14 | 2000-08-22 | The University Of Tennessee Research Corporation | Treater systems and methods for generating moderate-to-high-pressure plasma discharges for treating materials and related treated materials |
DE69840654D1 (de) * | 1997-10-20 | 2009-04-23 | Univ California | Aufbringen von beschichtungen mit einem plasmastrahl unter atmosphärendruck |
JP2002502688A (ja) * | 1998-02-05 | 2002-01-29 | エムパ エステー−ガレン アイトゲネシッシェ マテリアールプリューフングス−ウント フォルシュングスアンシュタルト | 極性ポリマー類似コーティング |
US6705127B1 (en) * | 1998-10-30 | 2004-03-16 | Corning Incorporated | Methods of manufacturing soot for optical fiber preforms and preforms made by the methods |
US6774018B2 (en) * | 1999-02-01 | 2004-08-10 | Sigma Laboratories Of Arizona, Inc. | Barrier coatings produced by atmospheric glow discharge |
US20020129902A1 (en) * | 1999-05-14 | 2002-09-19 | Babayan Steven E. | Low-temperature compatible wide-pressure-range plasma flow device |
DE29919142U1 (de) * | 1999-10-30 | 2001-03-08 | Agrodyn Hochspannungstechnik G | Plasmadüse |
GB9928781D0 (en) * | 1999-12-02 | 2000-02-02 | Dow Corning | Surface treatment |
US6376064B1 (en) * | 1999-12-13 | 2002-04-23 | General Electric Company | Layered article with improved microcrack resistance and method of making |
DE10011276A1 (de) * | 2000-03-08 | 2001-09-13 | Wolff Walsrode Ag | Verwendung eines indirrekten atomosphärischen Plasmatrons zur Oberflächenbehandlung oder Beschichtung bahnförmiger Werkstoffe sowie ein Verfahren zur Behandlung oder Beschichtung bahnförmiger Werkstoffe |
DK1326718T3 (da) * | 2000-10-04 | 2004-04-13 | Dow Corning Ireland Ltd | Fremgangsmåde og apparat til dannelse af en belægning |
KR20030063380A (ko) * | 2000-11-14 | 2003-07-28 | 세끼쑤이 케미컬 가부시기가이샤 | 상압 플라즈마 처리 방법 및 그 장치 |
GB0113751D0 (en) * | 2001-06-06 | 2001-07-25 | Dow Corning | Surface treatment |
US6815014B2 (en) * | 2002-02-05 | 2004-11-09 | Dow Global Technologies Inc. | Corona-generated chemical vapor deposition on a substrate |
US7109070B2 (en) * | 2002-08-07 | 2006-09-19 | Schot Glas | Production of a composite material having a biodegradable plastic substrate and at least one coating |
WO2005049228A2 (en) * | 2003-09-09 | 2005-06-02 | Dow Global Technologies Inc. | Glow discharge-generated chemical vapor deposition |
JP2008514813A (ja) * | 2004-09-27 | 2008-05-08 | ダウ グローバル テクノロジーズ インコーポレーテッド | プラズマ強化化学蒸着による多層被膜 |
-
2005
- 2005-10-06 JP JP2007538950A patent/JP2008518109A/ja not_active Withdrawn
- 2005-10-06 KR KR1020077009630A patent/KR20070072900A/ko not_active Application Discontinuation
- 2005-10-06 WO PCT/US2005/035887 patent/WO2006049794A2/en active Application Filing
- 2005-10-06 CN CNA2005800372094A patent/CN101048533A/zh active Pending
- 2005-10-06 MX MX2007005123A patent/MX2007005123A/es unknown
- 2005-10-06 US US11/663,799 patent/US20070264508A1/en not_active Abandoned
- 2005-10-06 EP EP05808443A patent/EP1807548A2/en not_active Withdrawn
- 2005-10-06 BR BRPI0516670-5A patent/BRPI0516670A/pt not_active IP Right Cessation
- 2005-10-06 CA CA 2582286 patent/CA2582286A1/en not_active Abandoned
- 2005-10-06 RU RU2007119782/04A patent/RU2007119782A/ru not_active Application Discontinuation
- 2005-10-28 TW TW094137823A patent/TW200624594A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
WO2006049794A2 (en) | 2006-05-11 |
JP2008518109A (ja) | 2008-05-29 |
CN101048533A (zh) | 2007-10-03 |
BRPI0516670A (pt) | 2008-09-16 |
US20070264508A1 (en) | 2007-11-15 |
CA2582286A1 (en) | 2006-05-11 |
KR20070072900A (ko) | 2007-07-06 |
RU2007119782A (ru) | 2008-12-10 |
EP1807548A2 (en) | 2007-07-18 |
WO2006049794A3 (en) | 2006-08-24 |
MX2007005123A (es) | 2007-06-25 |
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