TW200506353A - Method and apparatus for detecting faults in transparent material - Google Patents
Method and apparatus for detecting faults in transparent materialInfo
- Publication number
- TW200506353A TW200506353A TW093107076A TW93107076A TW200506353A TW 200506353 A TW200506353 A TW 200506353A TW 093107076 A TW093107076 A TW 093107076A TW 93107076 A TW93107076 A TW 93107076A TW 200506353 A TW200506353 A TW 200506353A
- Authority
- TW
- Taiwan
- Prior art keywords
- partial volume
- radiation source
- light
- detecting faults
- source
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N2021/1765—Method using an image detector and processing of image signal
- G01N2021/177—Detector of the video camera type
- G01N2021/1772—Array detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8845—Multiple wavelengths of illumination or detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
- G01N2021/8962—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod for detecting separately opaque flaws and refracting flaws
Landscapes
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Pathology (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Treatment Of Fiber Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10316707A DE10316707B4 (de) | 2003-04-04 | 2003-04-04 | Verfahren und Vorrichtung zur Erkennung von Fehlern in transparentem Material |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200506353A true TW200506353A (en) | 2005-02-16 |
TWI339264B TWI339264B (en) | 2011-03-21 |
Family
ID=33016269
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093107076A TWI339264B (en) | 2003-04-04 | 2004-03-17 | Method and apparatus for detecting faults in transparent material |
Country Status (9)
Country | Link |
---|---|
US (1) | US7292332B2 (zh) |
EP (2) | EP2278304A1 (zh) |
JP (2) | JP2004309481A (zh) |
KR (1) | KR101136804B1 (zh) |
CN (1) | CN100504364C (zh) |
AT (1) | ATE542128T1 (zh) |
DE (1) | DE10316707B4 (zh) |
ES (1) | ES2379257T3 (zh) |
TW (1) | TWI339264B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI412736B (zh) * | 2009-12-04 | 2013-10-21 | Delta Electronics Inc | 基板內部缺陷檢查裝置及方法 |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1706730A1 (en) * | 2003-12-30 | 2006-10-04 | Agency for Science, Technology and Research | Method and apparatus for detection of inclusions in glass |
DE102005044206B4 (de) * | 2005-09-15 | 2014-05-28 | Krones Aktiengesellschaft | Verfahren zur Qualitätskontrolle von Kunststoffbehältern |
US7567344B2 (en) * | 2006-05-12 | 2009-07-28 | Corning Incorporated | Apparatus and method for characterizing defects in a transparent substrate |
US7369240B1 (en) | 2006-07-20 | 2008-05-06 | Litesentry Corporation | Apparatus and methods for real-time adaptive inspection for glass production |
US7880156B2 (en) * | 2006-12-27 | 2011-02-01 | Honeywell International Inc. | System and method for z-structure measurements using simultaneous multi-band tomography |
DE102007003023B4 (de) * | 2007-01-20 | 2009-05-07 | Sick Ag | Optoelektronischer Sensor und Verfahren zum Lichtdurchlässigkeitstest der Schutzscheibe durch Totalreflexion |
US7551274B1 (en) | 2007-02-28 | 2009-06-23 | Lite Sentry Corporation | Defect detection lighting system and methods for large glass sheets |
US20100195096A1 (en) * | 2009-02-04 | 2010-08-05 | Applied Materials, Inc. | High efficiency multi wavelength line light source |
EP2253948B1 (de) * | 2009-05-22 | 2013-01-09 | Dr. Schenk GmbH Industriemesstechnik | Vorrichtung und Verfahren zum optischen Untersuchen eines Gegenstandes |
NL2004949A (en) * | 2009-08-21 | 2011-02-22 | Asml Netherlands Bv | Inspection method and apparatus. |
DE102009050711A1 (de) * | 2009-10-26 | 2011-05-05 | Schott Ag | Verfahren und Vorrichtung zur Detektion von Rissen in Halbleitersubstraten |
US8618929B2 (en) | 2011-05-09 | 2013-12-31 | Honeywell International Inc. | Wireless conveyor belt condition monitoring system and related apparatus and method |
DE102011109793B4 (de) * | 2011-08-08 | 2014-12-04 | Grenzbach Maschinenbau Gmbh | Verfahren und Vorrichtung zur sicheren Detektion von Materialfehlern in transparenten Werkstoffen |
DE202011104160U1 (de) | 2011-08-08 | 2011-12-21 | Grenzbach Maschinenbau Gmbh | Vorrichtung zur sicheren Detektion von Materialfehlern in transparenten Werkstoffen |
DE102011113670A1 (de) | 2011-09-20 | 2013-03-21 | Schott Ag | Beleuchtungsvorrichtung, Inspektionsvorrichtung und Inspektionsverfahren für die optische Prüfung eines Objekts |
TWI607212B (zh) * | 2013-01-16 | 2017-12-01 | 住友化學股份有限公司 | Image generation device, defect inspection device, and defect inspection method |
CN103592311B (zh) * | 2013-11-26 | 2016-09-07 | 英利集团有限公司 | 用于探测硅块内部缺陷的红外探测装置及探测方法 |
CN103926257A (zh) * | 2014-04-25 | 2014-07-16 | 桂林电子科技大学 | 一种基于太赫兹时域光谱仪的镜片缺陷的检测方法 |
KR102200691B1 (ko) * | 2014-06-02 | 2021-01-13 | 삼성디스플레이 주식회사 | 검사장치 |
DE102014008596B4 (de) * | 2014-06-10 | 2016-01-28 | Grenzebach Maschinenbau Gmbh | Vorrichtung und Verfahren zur schnellen und sicheren Messung von Verzerrungsfehlern in einem produzierten Floatglas - Band |
EP3420535B1 (en) | 2016-02-26 | 2022-09-07 | University Of Southern California | Optimized volumetric imaging with selective volume illumination and light field detection |
KR102499831B1 (ko) * | 2016-05-23 | 2023-02-14 | 코닝 인코포레이티드 | 글라스 시트의 무중력 형상 예측 방법 및 무중력 형상 기반 글라스 시트 품질 관리 방법 |
CN105866137B (zh) * | 2016-06-15 | 2018-11-30 | 秦皇岛可视自动化设备有限公司 | 一种压延钢化玻璃边缘缺陷在线检测装置及方法 |
US10289930B2 (en) * | 2017-02-09 | 2019-05-14 | Glasstech, Inc. | System and associated for online measurement of the optical characteristics of a glass sheet |
WO2019041087A1 (zh) * | 2017-08-28 | 2019-03-07 | 深圳市兴华炜科技有限公司 | 透明物体的测试方法及相关产品 |
DE102017008406B4 (de) * | 2017-09-07 | 2023-07-20 | Heuft Systemtechnik Gmbh | Inspektionsvorrichtung und ein Verfahren mit Farbbeleuchtung |
CN111712473B (zh) * | 2018-03-07 | 2022-02-25 | 佳殿玻璃有限公司 | 基于波长分析检测浮法玻璃中的夹杂物方法和系统 |
CN108613872B (zh) * | 2018-06-13 | 2019-03-12 | 山东科技大学 | 透明类岩石试件裂隙扩展监测系统及方法 |
CN108918554A (zh) * | 2018-07-25 | 2018-11-30 | 哈工大机器人(合肥)国际创新研究院 | 基于光纤原理透明异形件缺陷检测方法和设备 |
US10481097B1 (en) | 2018-10-01 | 2019-11-19 | Guardian Glass, LLC | Method and system for detecting inclusions in float glass based on spectral reflectance analysis |
CN109444166B (zh) * | 2018-12-04 | 2021-07-23 | 电子科技大学 | 一种大口径光学元件表面吸收型缺陷分布快速成像的方法 |
IT201900005568A1 (it) * | 2019-04-10 | 2020-10-10 | Deltamax Automazione S R L | Metodo per l’identificazione di difetti di lastre trasparenti e relativo sistema |
JP2022003325A (ja) * | 2020-06-23 | 2022-01-11 | 株式会社小糸製作所 | 表面検査装置および表面検査システム |
CN112683912A (zh) * | 2020-11-27 | 2021-04-20 | 成都数之联科技有限公司 | 一种布面缺陷视觉检测方法及其装置 |
US11867630B1 (en) | 2022-08-09 | 2024-01-09 | Glasstech, Inc. | Fixture and method for optical alignment in a system for measuring a surface in contoured glass sheets |
Family Cites Families (23)
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FR2500630A1 (fr) * | 1981-02-25 | 1982-08-27 | Leser Jacques | Procede pour la recherche des defauts des feuilles de verre et dispositif mettant en oeuvre ce procede |
US4401893A (en) * | 1981-07-29 | 1983-08-30 | Intec Corporation | Method and apparatus for optically inspecting a moving web of glass |
DE3418283A1 (de) * | 1984-05-17 | 1985-12-12 | Schott Glaswerke, 6500 Mainz | Verfahren zum nachweis von fehlstellen in transparenten materialien |
US4808813A (en) * | 1986-05-05 | 1989-02-28 | Hughes Aircraft Company | Self contained surface contamination sensor for detecting external particulates and surface discontinuities |
JPS63165738A (ja) * | 1986-12-27 | 1988-07-09 | Dainippon Printing Co Ltd | 透明基板用欠陥検査装置 |
JPH06294749A (ja) * | 1993-04-09 | 1994-10-21 | Nippon Electric Glass Co Ltd | 板ガラスの欠点検査方法 |
JP3436326B2 (ja) * | 1995-01-31 | 2003-08-11 | 旭硝子株式会社 | 透明板状体の欠点検査方法及び装置 |
JP3036733B2 (ja) * | 1995-03-24 | 2000-04-24 | 富士写真フイルム株式会社 | 透明体の欠陥検出装置 |
US5790247A (en) * | 1995-10-06 | 1998-08-04 | Photon Dynamics, Inc. | Technique for determining defect positions in three dimensions in a transparent structure |
DE19643017C1 (de) * | 1996-10-18 | 1998-04-23 | Innomess Ges Fuer Messtechnik | Verfahren für die Ermittlung von optischen Fehlern in großflächigen Scheiben |
JPH10185829A (ja) * | 1996-12-20 | 1998-07-14 | Matsushita Electric Ind Co Ltd | 透明平面体表面の欠陥検査方法及びその装置 |
JP3847898B2 (ja) | 1997-06-09 | 2006-11-22 | 株式会社東芝 | 放射性廃棄物の固化処理装置 |
NL1006378C2 (nl) * | 1997-06-23 | 1998-12-24 | Tno | Werkwijze en inrichting voor het inspecteren van een voorwerp met betrekking tot verstoringen. |
JP3422935B2 (ja) | 1997-07-17 | 2003-07-07 | Hoya株式会社 | 透光性物質の不均一性検査方法及びその装置並びに透明基板の選別方法 |
DE19813073A1 (de) * | 1998-03-25 | 1999-09-30 | Laser Sorter Gmbh | Verfahren und Vorrichtung zur Bestimmung der optischen Qualität und zur Detektion von Fehlern von Flachglas und anderen optisch transparenten Materialien, insbesondere von Drips, Fäden und Linien |
DE19813072A1 (de) * | 1998-03-25 | 1999-09-30 | Laser Sorter Gmbh | Verfahren und Vorrichtung zur Bestimmung der optischen Qualität und zur Detektion von Fehlern von Flachglas und anderen optisch transparenten Materialien |
JPH11352019A (ja) * | 1998-06-05 | 1999-12-24 | Sony Corp | 光透過型反射防止用光学機能フィルムの表面反射率測定方法とその装置、および、光透過型反射防止用光学機能フィルムの製造方法 |
JP3673649B2 (ja) * | 1998-08-27 | 2005-07-20 | Hoya株式会社 | 透光性物質の不均一性検査方法及びその検査装置 |
CA2252308C (en) * | 1998-10-30 | 2005-01-04 | Image Processing Systems, Inc. | Glass inspection system |
JP2000346802A (ja) * | 1999-03-26 | 2000-12-15 | Sony Corp | 素子内部検査装置および方法 |
DE20121763U1 (de) * | 2001-01-20 | 2003-04-30 | Visotec Gmbh | Vorrichtung zur Überprüfung von scheibenförmigen Werkstücken auf Oberflächen- oder Einschlußfehler |
JP4132046B2 (ja) * | 2001-07-05 | 2008-08-13 | 日本板硝子株式会社 | シート状透明体の欠点を検査する装置 |
DE10221945C1 (de) | 2002-05-13 | 2003-07-31 | Schott Glas | Verfahren und Vorrichtung zur Ermittlung von Fehlstellen in einem kontinuierlich fortbewegten Band aus transparentem Material |
-
2003
- 2003-04-04 DE DE10316707A patent/DE10316707B4/de not_active Expired - Fee Related
-
2004
- 2004-02-11 EP EP10187717A patent/EP2278304A1/de not_active Withdrawn
- 2004-02-11 EP EP04003014A patent/EP1477793B1/de not_active Expired - Lifetime
- 2004-02-11 ES ES04003014T patent/ES2379257T3/es not_active Expired - Lifetime
- 2004-02-11 AT AT04003014T patent/ATE542128T1/de active
- 2004-03-17 TW TW093107076A patent/TWI339264B/zh not_active IP Right Cessation
- 2004-03-29 US US10/812,161 patent/US7292332B2/en not_active Expired - Fee Related
- 2004-03-30 KR KR1020040021511A patent/KR101136804B1/ko not_active IP Right Cessation
- 2004-03-31 JP JP2004104006A patent/JP2004309481A/ja active Pending
- 2004-04-05 CN CNB2004100342556A patent/CN100504364C/zh not_active Expired - Fee Related
-
2011
- 2011-11-25 JP JP2011256916A patent/JP2012037538A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI412736B (zh) * | 2009-12-04 | 2013-10-21 | Delta Electronics Inc | 基板內部缺陷檢查裝置及方法 |
Also Published As
Publication number | Publication date |
---|---|
EP1477793B1 (de) | 2012-01-18 |
EP2278304A1 (de) | 2011-01-26 |
ES2379257T3 (es) | 2012-04-24 |
EP1477793A2 (de) | 2004-11-17 |
DE10316707A1 (de) | 2004-11-04 |
CN1536350A (zh) | 2004-10-13 |
JP2004309481A (ja) | 2004-11-04 |
EP1477793A3 (de) | 2004-11-24 |
ATE542128T1 (de) | 2012-02-15 |
JP2012037538A (ja) | 2012-02-23 |
US7292332B2 (en) | 2007-11-06 |
TWI339264B (en) | 2011-03-21 |
US20040207839A1 (en) | 2004-10-21 |
DE10316707B4 (de) | 2006-04-27 |
KR20040086764A (ko) | 2004-10-12 |
KR101136804B1 (ko) | 2012-04-19 |
CN100504364C (zh) | 2009-06-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |