TW200414251A - Method for registering a deposited material with channel plate channels, and switch produced using same - Google Patents

Method for registering a deposited material with channel plate channels, and switch produced using same Download PDF

Info

Publication number
TW200414251A
TW200414251A TW092120798A TW92120798A TW200414251A TW 200414251 A TW200414251 A TW 200414251A TW 092120798 A TW092120798 A TW 092120798A TW 92120798 A TW92120798 A TW 92120798A TW 200414251 A TW200414251 A TW 200414251A
Authority
TW
Taiwan
Prior art keywords
channel
channel plate
resist
switch
fluid
Prior art date
Application number
TW092120798A
Other languages
English (en)
Chinese (zh)
Inventor
Marvin Glenn Wong
Paul Thomas Carson
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of TW200414251A publication Critical patent/TW200414251A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00555—Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
    • B81C1/00611—Processes for the planarisation of structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H11/00—Apparatus or processes specially adapted for the manufacture of electric switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H11/00—Apparatus or processes specially adapted for the manufacture of electric switches
    • H01H11/02—Apparatus or processes specially adapted for the manufacture of electric switches for mercury switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H29/28—Switches having at least one liquid contact with level of surface of contact liquid displaced by fluid pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/018—Switches not provided for in B81B2201/014 - B81B2201/016
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0118—Processes for the planarization of structures
    • B81C2201/0121—Processes for the planarization of structures involving addition of material followed by removal of parts of said material, i.e. subtractive planarization
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Geometry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)
  • Manufacture Of Switches (AREA)
TW092120798A 2003-01-22 2003-07-30 Method for registering a deposited material with channel plate channels, and switch produced using same TW200414251A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/349,712 US6809277B2 (en) 2003-01-22 2003-01-22 Method for registering a deposited material with channel plate channels, and switch produced using same

Publications (1)

Publication Number Publication Date
TW200414251A true TW200414251A (en) 2004-08-01

Family

ID=31715575

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092120798A TW200414251A (en) 2003-01-22 2003-07-30 Method for registering a deposited material with channel plate channels, and switch produced using same

Country Status (5)

Country Link
US (2) US6809277B2 (enExample)
JP (1) JP2004228085A (enExample)
DE (1) DE10344571A1 (enExample)
GB (1) GB2397695B (enExample)
TW (1) TW200414251A (enExample)

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CA2975855C (en) 2015-02-04 2025-09-23 Twist Bioscience Corporation SYNTHETIC GENE COMPOSITIONS AND ASSEMBLY METHODS
CA2975852A1 (en) 2015-02-04 2016-08-11 Twist Bioscience Corporation Methods and devices for de novo oligonucleic acid assembly
WO2016172377A1 (en) 2015-04-21 2016-10-27 Twist Bioscience Corporation Devices and methods for oligonucleic acid library synthesis
KR20180050411A (ko) 2015-09-18 2018-05-14 트위스트 바이오사이언스 코포레이션 올리고핵산 변이체 라이브러리 및 그의 합성
WO2017053450A1 (en) 2015-09-22 2017-03-30 Twist Bioscience Corporation Flexible substrates for nucleic acid synthesis
EP3384077A4 (en) 2015-12-01 2019-05-08 Twist Bioscience Corporation FUNCTIONALIZED SURFACES AND MANUFACTURE THEREOF
WO2018038772A1 (en) 2016-08-22 2018-03-01 Twist Bioscience Corporation De novo synthesized nucleic acid libraries
EP4664304A3 (en) 2016-09-21 2026-01-21 Atlas Data Storage, Inc. Nucleic acid based data storage
GB2573069A (en) 2016-12-16 2019-10-23 Twist Bioscience Corp Variant libraries of the immunological synapse and synthesis thereof
WO2018156792A1 (en) 2017-02-22 2018-08-30 Twist Bioscience Corporation Nucleic acid based data storage
CA3056388A1 (en) 2017-03-15 2018-09-20 Twist Bioscience Corporation Variant libraries of the immunological synapse and synthesis thereof
WO2018231864A1 (en) 2017-06-12 2018-12-20 Twist Bioscience Corporation Methods for seamless nucleic acid assembly
IL271205B2 (en) 2017-06-12 2025-02-01 Twist Bioscience Corp Methods for assembling continuous nucleic acids
CN111566125A (zh) 2017-09-11 2020-08-21 特韦斯特生物科学公司 Gpcr结合蛋白及其合成
CN111565834B (zh) 2017-10-20 2022-08-26 特韦斯特生物科学公司 用于多核苷酸合成的加热的纳米孔
IL312616B2 (en) 2018-01-04 2025-08-01 Twist Bioscience Corp Dna-based digital information storage
EP3814497A4 (en) 2018-05-18 2022-03-02 Twist Bioscience Corporation POLYNUCLEOTIDES, REAGENTS AND METHODS FOR NUCLEIC ACID HYBRIDIZATION
EP3902816A4 (en) 2018-12-26 2022-09-14 Twist Bioscience Corporation HIGH-PRECISION DE NOVO POLYNUCLEOTIDE SYNTHESIS
CA3131689A1 (en) 2019-02-26 2020-09-03 Twist Bioscience Corporation Variant nucleic acid libraries for glp1 receptor
KR20210144698A (ko) 2019-02-26 2021-11-30 트위스트 바이오사이언스 코포레이션 항체 최적화를 위한 변이 핵산 라이브러리
EP3987019A4 (en) 2019-06-21 2023-04-19 Twist Bioscience Corporation Barcode-based nucleic acid sequence assembly
CN115023440B (zh) 2019-09-23 2025-09-12 特韦斯特生物科学公司 结合CD3ε的抗体
US12091777B2 (en) 2019-09-23 2024-09-17 Twist Bioscience Corporation Variant nucleic acid libraries for CRTH2
AU2020400030B2 (en) 2019-12-09 2026-05-21 Twist Bioscience Corporation Variant nucleic acid libraries for adenosine receptors

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Also Published As

Publication number Publication date
US20040140187A1 (en) 2004-07-22
DE10344571A1 (de) 2004-08-05
JP2004228085A (ja) 2004-08-12
GB2397695A (en) 2004-07-28
GB2397695B (en) 2006-03-01
GB0400159D0 (en) 2004-02-11
US6809277B2 (en) 2004-10-26
US20050032379A1 (en) 2005-02-10
US6911611B2 (en) 2005-06-28

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