TW200410884A - Glass substrate transferring system - Google Patents

Glass substrate transferring system Download PDF

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Publication number
TW200410884A
TW200410884A TW092130314A TW92130314A TW200410884A TW 200410884 A TW200410884 A TW 200410884A TW 092130314 A TW092130314 A TW 092130314A TW 92130314 A TW92130314 A TW 92130314A TW 200410884 A TW200410884 A TW 200410884A
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TW
Taiwan
Prior art keywords
glass substrate
conveyor
conveying
horizontal
driving
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TW092130314A
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Chinese (zh)
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TWI232838B (en
Inventor
Chang-Ha Lee
Kee-Sung Cho
Suk-Joon Kim
Sung-Cheal Kim
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Samsung Corning Prec Glass Co
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Publication of TW200410884A publication Critical patent/TW200410884A/en
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Publication of TWI232838B publication Critical patent/TWI232838B/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B65G47/54—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another at least one of which is a roller-way
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/56—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from inclined or vertical conveyor sections
    • B65G47/57—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from inclined or vertical conveyor sections for articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C03B29/04—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way
    • C03B29/06—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way with horizontal displacement of the products
    • C03B29/08—Glass sheets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133302—Rigid substrates, e.g. inorganic substrates

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention discloses a glass substrate transferring system, wherein a glass substrate loaded horizontally can be unloaded at aslant stand. The present invention includes a system body, a horizontal transfer means for transferring a glass substrate horizontally with supporting peripheral ends thereof, an air floating means for floating the glass substrate by blowing of air placed on the horizontal transfer means, a titling means for tilting the horizontal transfer means and the air floating means in order for the glass substrate placed on the horizontal transfer means to be slant and a slant transfer means installed for transferring the glass substrate in aslant slant with supporting a lower end thereof. In accordance with the present invention, the glass substrate horizontally loaded from a cleaning station may be continuously unloaded to an inspection station in aslant stand. Also, a transfer line of the glass substrate may be constituted of in-line structure where a position of the glass substrate can be changed from a horizontal position to a slant position stably and simply as well as a physical contact of the glass substrate can be reduced. Further, conversion, to a flexible production system, where a various size of glass substrates can be inspected, may be executed simply and efficiently by a simple job change. Still further, productivity may be improved and production cost may also be reduced remarkably by simplifying s layout thereof.

Description

200410884 玖、發明說明： 【潑^明所屬^技術^領域】 本發明涉及玻璃基板的輸送系統，具體地說，涉及能使在水平 方向裝載的玻璃基板在傾斜立起陳態下卸載的玻璃基板輸送系 5 統。 衆所周知，在 TFT-LCD (Thin Film Transistor_Liquid Crystal Display ) > POP ( Plasma Display Panel)，EL ( Electro Luminescent) 等平板顯示器製造領域中使用的玻璃基板，經過玻璃熔融爐中熔融 1〇的熔融玻璃成型爲平板的成型工序、和進行切斷使其符合初級規格 的切斷工序製造後，通過清洗和檢驗工序分選出合格和不合格産品。 作爲一個例子’從本申請人的韓國專利申請2002一30386號來 看’在玻璃基板清洗處（Cleaning Station)，將已通過清洗工序的玻 瑪基板裝入稱爲盒（cassette)的容器後，轉移到檢查處（Inspecti〇n station )，放置在容器中的玻璃基板由輸送裝置（handier)卸載並 農载到檢查處。在檢查處，檢查存在於玻璃基板中的氣泡、石粒等 雜物的混入、污染、刮痕、齒輪碎屑、切削碎屑、裂紋等缺陷。 專利文獻··韓國專利申請20〇2 — 30386號。 爲防止玻璃基板的污染’玻璃基板的清洗處和檢查處爲清 〇潔室，但是，由於使用容器和輸送裝置，清潔室的佈局變複雜， 爲了確保工作人員和輸送裝置的活動路線，存在必須使清潔室 的面積增加到必要以上的問題。不僅如此，由於工作人員和輸 送裝置的動作在清潔室産生的紊流的影響，微粒附著在玻璃基 板上産生污染而增加不合格率，存在大量生産性能低劣、生産 5 200410884 成本增加的問題。 再者，在玻璃基板裝載和卸載之際，由於輸送裝置産生的物理 接觸和撞擊，恐怕玻璃基板産生刮痕、裂紋等缺陷的可能性相當高， 存在浪費時間增多、産量降低的問題。特別是由於在能由輸送裝置 5的夾鉗進行夾緊的玻璃基板的夾緊區域容許在各邊緣起8mm以内進 行夾持，因此，在大型、薄型玻璃基板的情況下，依靠夾鉗的夾緊 難以支樓玻璃基板的重量’同時，玻璃基板因撓性變形而變得易於 破裂，會導致安全事故。因而，確實需要開發從清洗處到檢查處能 夠一條線上輸送玻璃基板的技術，但事實上還沒有開發出能夠穩定 10 地將玻璃基板在線一條線上輸送的技術。 【發明内容3 本發明鑒於上述事實，其目的在於提供玻璃基板的輸送系統， 該系統能將在水平方向裝載的玻璃基板在傾斜立起的狀態下卸載。 本發明的另一個目的在於提供玻璃基板的輸送系統，該系 15 統能使玻璃基板的物理接觸最小化，能使玻璃基板穩定地、容 易地從水平狀態轉換到傾斜狀態。 本發明的再一個目的在於提供玻璃基板的輸送系統，該系 統能通過簡單的工作轉換，非常容易且有效地實施向靈活性生 産系統的轉換，所述靈活性生産系統能檢查各種尺寸的玻璃基 20 板。 本發明的又一個目的在於提供玻璃基板的輸送系統，該系統能 通過串聯玻璃基板的輸送線使産量提高且使配置簡單化，就能大大地 降低生産成本。 爲達到上述目的，本發明的玻璃基板輸送系統的特徵在 6 200410884 於，該系統包括：系統底盤；水平輸送裝置，設置在前述系統底 盤上，能支撐玻璃基板兩端的周緣部分並進行水平輸送；浮動 裝置’通過空氣吹送使裝載在前述水平輸送裝置上的前述玻璃 基板浮升；傾斜裝置’使前述水平輸送裝置傾斜，以使裝載在 5前述水平輸送裝置上的前述玻璃基板能傾斜立起；傾斜輸送裝 置，没置在前述傾斜裝置上，能支撐傾斜立起的前述玻璃基板 的下端並進行輸送。 按照本發明的玻璃基板的輸送系統，能使來自清洗處的水 平裝載的玻璃基板在檢查處以傾斜立起的狀態連續卸載，在使 ίο玻璃基板的物理接觸最小化的同時，能穩定且容易地將玻璃基 板從水平狀態轉換到傾斜狀態，從而能夠在線形成玻璃基板的 輸送系統。再者，能通過簡單的工作轉換，非常容易且有效地 實施向靈活性生産系統的轉換，所述靈活性生產系統能檢查各 種尺寸的玻璃基板。而且，由於在線化玻璃基板的輸送線使産 15量提高且使配置簡單化，具有能大大降低生産成本的效果。 圖式簡單說明 第1圖是表示本發明輸送系統的結構的正視圖。 第2圖是表示本發明輸送系統的結構的俯視圖。 第3圖是表示本發明輸送系統的結構的側視圖。 20 第4圖是表示本發明輸送系統中傾斜裝置傾斜到玻璃基板的傾 斜位置的狀態的正視圖。 第5圖是表示在本發明輸送系統中水平輸送裝置結構的俯視圖。 第6-A2圖和第圖是表示本發明輸送系統中空氣浮動裝置吹 氣管的正視圖和截面圖。 7 200410884 第7圖是表示本發明輸送系統巾旋轉編碼n結構的正視圖。 第8圖是表示本發明輸送系統中間隔調節裝置和第五帶傳動裝 置結構的正視圖。 & 第9圖是部分表示本發明輸送系統中另一例水平輸送裝置和間 5 隔調節裝置的側視圖。 第10圖是第9圖的俯視圖。 L· "ίΓ ]| 下面，根據附圖，詳細說明本發明的玻璃基板輸送系統的優選 實施例。 10 料’參照第1圖，按照本發明的輪送系統，能夠在玻璃基板i 的清洗處和檢查處之間將玻璃基板i的輸送線串聯構成，例如，能 夠輸送長(mm)x寬(mm)A小爲約37Gx物〜测χ丨綱厚度爲約 0.4〜1.1mm的玻璃基板1。 蒼照第1-5圖，本發明的輸送裝置具有系統底盤1〇，在系統底 I5盤10的上部以支撐玻璃基板i的兩端並水平輸送的方式設置有水平 輸送裝置20。水平輸送裝置20由設置在系統底盤1〇的兩側部的第 -輸送機21和第二輸送機22構成。第一和第二輸送機21、^各自 的輸送機框架2la、22a，沿著玻璃基板丨的輸送方向並列設置在系 統底盤10上部的兩側部；在輸送機框架21a、22a上， 20 1兩端（即，當玻璃基板i立起設置時的下端la和上端⑻的雜 部分的多她 21b、21b-卜 21b.2、22b、221M、22b-2，以軸 21c、 22c爲中心配置成隔著規定間隔可自由旋轉地安裝。 第-和第二輸送機2：1、22的輕2lb、22b，在第1區動裝置23的 作動下旋轉。第-驅動裝置23具備：供給驅動力的词服馬達^、橫 8 200410884 牙第和第—輸达機21及22並自由旋轉地設置的主動轴μ '將伺 服馬達24的驅動力傳遞到主動軸25的第—帶傳動裝置％、將主動 軸25的旋轉力傳遞給第一輸送機21的各她多個第二帶傳 動裝置27、將主動軸25的旋轉力傳遞給第二輸送機22的各個親挪 5的第三帶傳動裝置28。 10 15 20 。弟1圖_ ’第-帶傳動裝置26由翻服馬達24的驅動旋轉 的主動輪26a、安裝在主動軸25的—端的從動輪施、捲繞在主動輪 遍和從動輪施上的帶26c構成。如第5圖詳示，第二帶傳動裝置 字主動軸25的方疋轉力依次傳遞給相互靠近的第一輸送機η的報 21b第一讀動裝置27具有：交替安裝在輕训的轴a上的多 個主動輪27a、與各自的主動輪27a對應的交替安裝在_的條 上的多個從祕27b、捲繞在相互職料對主動輪π和從動輪 2壯7b上的帶27e。如圖2、4和5所示’第三帶傳動裝置μ具有：安 衣在主動轴25上的主動輪28a、安裝在親22b的抽级上的多個從 動輪28b、捲繞在主動輪28a和從動輪2扑上的帶说。在本實施例 中’第-至第三帶傳動裝置26、27、28各自的主動輪in 和從動輪26b、27b、鳥及帶-、说、孤也能替換成驅動定時齒 輪、從動定時齒輪和同步皮帶。進-步，第二和第三帶傳動裝置27、 28能替換成由主動鏈輪、從動鏈輪和鏈構成的鏈傳動裝置。在第2、4 和5圖中不出，主動軸25能與第—和第二輸送機& π的親灿、 饥:的-個，例如最下游觀m_2、2爪2的軸a、瓜連接成一 體’最上游親21b]、22b_l的軸21c、22e由從動轴29連接成一體。 在該實施例中也能作如下設置，將已有的軸承安裝在第一和第二輸 送機2卜22的各自的輸送機框架⑴、瓜上，主動軸25和從動轴 9 200410884 29各自的兩端由軸承支撐。 如第2、5圖所示，本發明的輸送系統具有阻擋由水平輸送裝置 20輸送的玻璃基板1並進行排列的制動單元3〇。制動單元％由擋 塊31和致動器32構成；擔塊31分別安裝在水平輸送裝置2〇下游 5兩側，以便能擔住玻璃基板1的輸送方向前端兩側；致動器％使擔 塊31在擔住玻璃基板i的輸送方向前端的阻擋位置和容許玻璃基板 1輸送的解除位置之間轉動。 茶照第2、3、6-A和6-B圖，本發明的輸送系統具有空氣浮 動裝置40，該空氣浮動裝置40使由第一和第二輸送機21、22的親 g 10 21b、22b支撐下端ia和上端lb並進行輸送的玻璃基板1，從輥2化、 22b上浮起來。該空氣浮動裝置40具有沿玻璃基板1的輸送方向設 置的、沿縱向形成有多個面向玻璃基板1噴出空氣的噴嘴孔41a的 吹氣管41。多個吹氣管41設置成排列在位於底板42上面的任意水 平平面上。在第2和3圖中示出了 5個吹氣管形成等間隔的配置，但 15是，這是示例性的，吹氣管41的數量和位置能夠適當地變化，使玻 璃基板1穩定浮升。 如第1、6 — β圖所示，供給空氣的空氣供給裝置43與空氣浮動 t 裝置4〇的吹氣管41相連。空氣供給裝置43由産生空氣的鼓風機44、 和過濾來自鼓風機44的空氣並供給吹氣管41的空氣篩檢程式45構 成支八機;料由供給驅動力的馬達44a和由該馬達驅動旋轉的葉輪 44b構成。在该實施例中，空氣篩檢程式45可由過濾約〇 的微 、、田粒子的 HEPA 筛檢程式（High Efficiency Particular Air Filter)構 成進步’空氣供給裝置40的鼓風機44可以替換成衆所周知的 空氣壓縮機和控制空氣流量和壓力的空氣控制單元。 10 200410884 參照弟卜5、7圖’本發明的輸送系統具有使水平輸送裝置如 和空氣浮動裝置4G相對於纽底盤10傾斜的傾斜裝置5G，以便使 在水平輸送裝置2G上水平«的玻璃基板1傾斜並立起起來。傾斜 裝置50由傾斜支架51和由軸承52支撐以使傾斜支㈣相對於系 5統底盤10轉動的轴53構成，傾斜支架51上裝載有：水平輸送裝置 20的第-和第二輸送機21、22，以及第—驅動裝置23和空氣軸 裝置40的底板42。 傾斜衣置50的軸53由第二驅動裝置54的作用而旋轉。第二驅 動裝置54由安裝在系統底盤10上並供給驅動力的伺服馬達％、將 10伺服馬達55的驅動力傳遞到軸53的第四帶傳動裝置％、以及旋轉 編碼器57構成，旋轉編碼器57檢測軸53的旋轉角度，以便能控制 伺服馬達55的驅動。第四帶傳動裝置56由安裝成通過飼服馬達％ 的驅動能旋轉的主動定時齒輪56a、安裝在輛53上的從動定時齒輪 56b、捲繞在主動定時齒輪56a和從動定時齒輪5邰上的同步皮帶π。 15 構成。 如第7圖所示，旋轉編碼器57由發光的發光感測器57a、感受 由該發光感測器57a投射的光的感光感測器57b、安裝在軸53上且 能配置在發光感測器57a和感光感測器57b之間並具有與光軸對齊 的狹縫57c的旋轉圓盤57d構成。第7圖中示出設置了 4個旋轉編 20碼器57，這4個旋轉編碼器57能根據軸53的旋轉角度來控制玻璃 基板1的水平位置和傾斜位置，但旋轉編碼器57的數量可以適當地 變化。在該實施例中，如第3圖所示，傾斜裝置5〇使玻璃基板}相 對於垂直軸線58傾斜約5 — 2〇Q的傾斜角度（0)，最好傾斜約1〇 2的傾斜角度（Θ)。 11 2〇〇41〇884 參照第1 一4圖，本發明的輸送系統具有支撐玻璃基板1的下端 la並進行輸送的傾斜輸送裝置60，把傾斜輸送裝置60的第三輪送 機61設置成能與傾斜裝置50的傾斜支架51上的第一輸送機21平 行。把第二輸送機61的輪送機支架gla沿玻璃基板1的輸送方向2 5並列設置，以便能靠近傾斜裝置50的傾斜支架51上的第一輪送機 21 ;在輸送機支架61a上，多個輥61b在對應的軸61c上分別自由旋 轉地安裝著。軸61c相互以規定間隔隔離開。在輥6比的外表面形 成有穩定地容納玻璃基板1下端la以防止脫離的v字形槽61d。 參照第2一5圖，第三輸送機61的輥61b依靠第三驅動裝置62 1〇的作動而旋轉。第三驅動裝置62由供給驅動力的伺服馬達63、能由 該伺服馬達63驅動旋轉地靠近輥61b且沿輸送機支架61a的縱向安 裝的軸64、將軸64的旋轉力傳遞給第三輸送機61的各個輥61b的 齒輪裝置65構成。齒輪裝置65由多個主動齒輪65a和多個從動齒 輪65b構成，主動齒輪65a安裝在位於靠近各個輥61b的軸料上， I5從動齒輪65b安裝在輕61b各自的軸61c ±以與主動齒輪65a嚙合。 在該實施例中，第三輸送機61可由第三驅動裝置62來旋轉且安裝 在輸送機支架61a-側的主動輪、安裝在輸送機支架6U另一侧的驅 動輪、捲繞在主動輪和驅動輪上的帶構成。而且，第三驅動裝置62 的軸64和齒輪裝置65可替換成將伺服馬達63的驅動力傳遞到概_ 20的帶傳動裝置。 參照第2 — 5、8圖，本發明的輸送系統具有使第二輸送機22相 於第輸送機21運動的間隔調節裝置7〇,以便能調節第一輸送機 21和第二輸送機22之間的間隔。通過間隔調節裝置7〇調節第一輸 送機21和第二輸送機22之間的間隔，能支撐大小不同的玻璃基板i 12 200410884 的下端la和上端lb並進行輸送。間隔調節褒置7〇 _可自由旋轉地 相互並列設置在傾斜支架51上部的第—和第二推_杆仏及 71b、安裝成沿第-和第二推動螺杆71a及m作螺旋運動並固定在 第二輸送機22的輸送機支架瓜上的滾珠轴套η、引導輸送機支架 5 22a的線性運動的線性運動導向裝置73 '供給使第—和第二推動螺 杆7la及71b旋轉的驅動力的伺服馬達74、將饲服馬達％的驅動力 傳遞給第-和第二推動螺杆71a及71b的第五帶傳動裝置乃構成。 第-和第二推動螺杆？la及71b的前端受到安裝在傾斜支架Μ 上的安裝托架76的轴承77的支撑。線性運動導向裝置73由多個導 10向杆73a和介於第二輸送機22的輸送機支架22a和導向杆乃a之間 的滚珠轴套73b構成，所述多個導向杆仏貫通第二輪送機22的輪 达機支架22a和安裝托架％並相互並列設置，以允許第二輸送機u 的線性運動。在該實_中，_運動導向裝置73可由並列設置在 傾斜支架51上面的_對導向軌道和沿該導向軌道能滑動且被安裝在 15輸送機支架22a下面的一對滑塊構成。 第⑽傳動裝4 75由依翻服馬達74的麟進行旋轉的主動 輪75a、分別安裝在第一和第二推動螺杆了以及爪上的第一和第二 攸動輪75b及75c、捲繞在主動輪75a和第一從動輪幾上的第一帶 75d、捲繞在第一和第二從動輪75b及w上的第二帶仏構成。圖 2〇 2 '圖4和圖5中示出的是交替安裝著的第-和第二推動螺杆71a及 71b和3個導向杆73a的結構，但導向杆的數量可以適當地變化。 >第1 2圖，爲了連續地輸送玻璃基板1，本發明的輸送系 統具有a又置在系統底盤1〇的上游的進入側水平輸送裝置8〇和設置 在系、、充底盤10的下游的排出側傾斜輸送裝置9〇。進入側水平輸送裝 13 H可料魏斜輸送來自妓處的玻魏板i的水平輸送褒置 :-和第二輸送機21、22同樣的輸送機81、82胸 傾斜輸送裝置90可以由與使傾 、斜輪迗裝置61輸送的玻璃基板i傾 •進行輸送的空氣浮動裝置4G的錢管41及傾斜輸送裝置6〇的 弟二輪达機61同樣的吹氣管91和輸送機％構成。 10 …圖斤丁本心B月的輪送系統具有作爲控制裝置的控制哭 刚’用於系統的控制，控制器刚㈣可編程邏輯_ (P^grammaMe lc)gie e。伽丨）控制水平輸送裝置2q、制動單元％、 气予動衣置40傾斜裝置5〇、傾斜輪送裝置⑹、間隔調節裝置 7〇等的純躺。控繼⑽能夠與鱗基板丨輸送線上配置的衆 所周知的電顧步’通過電腦_網在整個輪送壯—體控制和管 理玻璃基板1的輸送。 第9、10圖中示出了另一個適用于本發明的輸送系統的水平輸 运衣置。參照第9、10圖，另一個例子中的水平輸送裝置12〇具有 !5同傾斜裝置50 _斜支架51分離且設置在系統底盤1〇上的第二輸 送機122。第二輸送機122的輸送機支架122a可移動地設置在系統 底盤10的上部；在輸送機支架122a上，支撐玻璃基板丨上端lb周 緣部分的多個輥122b分別可自由旋轉地安裝在相應的軸122c上。 軸122c相互以規定的間隔隔離開。在親i22b的外表面，形成有能 20 對玻㈣基板1上端lb進行支撐排列的凸緣i22d。另外，第一和第二 輸送機21、122的輥21b、122b能依靠供給驅動力的驅動裝置123 進行旋轉。驅動裝置123可以是和前面所說明的第三驅動裝置62同 樣的結構。驅動裝置123的結構及作動說明參照第三驅動裝置62的 結構及作動。 14 200410884 水平輸送裝置120具有使第二輸送機移動以便能夠調節第二輸 迗機122相對於第一輸送機21的間隔的間隔調節裝置170。間隔調 節裝置170由設置在系統底盤1〇的上面並供給驅動力的伺服馬達 171、由伺服馬達171驅動旋轉的主動定時齒輪172、在玻璃基板1 5的輸送方向的橫向遠離該主動定時齒輪172配置的從動定時齒輪 173、 捲繞在主動定時齒輪172和從動定時齒輪173上的同步皮帶 174、 使第二輪送機122的輸送機支架122a和同步皮帶174固定的 連接件175、相對於系統底盤10引導輸送機支架122a的線性運動的 線性運動導向機構Π6構成。線性運動導向機構176由安裝在系統 底i 10上面位於玻璃基板1的輪送方向橫向兩側的一對導向執道 176a、安裝在輸送機支架122a下面沿該導向執道口如滑動的一對滑 塊176b構成。 下面，說明具有這種結構的本發明的玻璃基板的輸送系統的作 用。 15 參照第1、2和5圖，在傾斜裝置50的傾斜支架51保持水平且 第一和第二輸送機21、22的輥21b、22b配置在同一平面的狀態下， 把由進入側水平輸送裝置80的輸送機81、82水平輸送的玻璃基板i 輸送到第-和第二輸送機2；1、22上，玻璃基板i的下端la和上端 lb的周緣分由敢上游輥21b-1、22b-1支撐。第一驅動裝置23的伺 2〇服馬達24 一驅動，伺服馬達24的驅動力就通過第一帶傳動裝置％ 的主動輪26a、從動輪26b和帶26c傳遞到主動軸25 ;主動軸25使 最下游輥21b-2、22b-2旋轉。最下游輥21b_2、22b-2的旋轉力分別 通過第二帶傳動裝置27的主動輪27a、從動輪27b、帶27c和第三帶 傳動裝置28的主動輪28a、從動輪28b、帶28c傳遞到各個輥21b、 15 200410884 疋車^的秦t 21b、22b通過滾動運動使玻璃基板1水平輸送。 另方面，如第6-A、6-B圖所示，當空氣供給裝置43的鼓風 機工作，將空氣供給空氣浮動裝置40的吹氣管41時，破螭義板 1利用吹氣管41的噴嘴吹出的空氣力從第-和第二輸送機21、 5 22的輪2lb、22b浮升例如約〇.5mm，並繼續進行輸送。從而，由於 月b夠在除了下端la和上端比的部分不進行物理接觸的狀態下輪送 玻璃基板1，因此能有效地防止因物理接觸在玻璃基板1上產生的缺 例如刮痕、裂紋等；還能夠有效地防止大型玻璃基板1 ,例如手 (mm)x寬(mm)大小爲約73〇χ 92〇以上的玻璃基板丨的撓性變形。 1〇 如第2圖所示，由水平輸送裝置20的第一和第二輸送機21、以 和空氣浮動裝置40水平輸送的玻璃基板1的輸送方向的前端，被位 於阻止位置的制動單元30的擋塊31擋住，使第一驅動裝置23的伺 服馬達24停止工作。第二驅動裝置54的伺服馬達55 一開始驅動， 伺服馬達55的驅動力就由第四帶傳動裝置56的主動定時齒輪5如、 15從動定時齒輪56b和同步皮帶56c傳遞到軸53，如第3圖中箭頭A 所不，由軸承52軸支撐的軸53使傾斜支架51從水平位置傾斜到傾 斜位置。如第7圖所示，旋轉編碼器57檢測出軸53的旋轉角度， 並把疑轉編碼器57的檢測信號輸入給控制器1〇〇。控制器根據 從旋轉編碼器57輸入的檢測信號控制馬達44a的驅動速度，從而控 20 制通過吹氣管41的噴嘴孔41a吹氣産生的空氣力。即，爲了不使由 傾斜裝置50的傾斜運動傾斜立起的玻璃基板1從第一和第二輸送機 21、22脫離，要隨著玻璃基板1的傾斜角度（0 )使空氣力逐漸減 小。 參照第3、4圖，由傾斜裝置50的傾斜運動傾斜立起的玻璃基 16 200410884 板1，利用自重在沿著第一和第二輸送機21、22的輥21b、22b滑動 的同時下降。下降的_基板1的下端在落在形成於第三輸送機61 的辕61b上的槽61d中的同時受到支撐。此時，玻璃基板i的下端 la和上端lb的周緣部分，在作爲夾緊區域所允許的8mm之内從下 5端1a和上端lb接觸到第一輸送機21的輥21b和第二輸送機22的輥 22b。 參照第卜3圖，在第三輸送機61的輥仙支樓玻璃基板i的 下端ib時，根據控制器100的控制，制動單元3〇的致動器32被驅 動’使擔塊從阻擔位置旋轉到解除位置。在第三驅動裝置62的伺服 | 10馬達63被驅動時，依靠伺服馬達63的驅動使軸64旋轉。軸料的 旋轉力通過齒輪裝置6S社動齒輪—和從動齒輪柳傳遞到第三 輸送機61的親61b，輕61b通過滾動運動將傾斜立起的玻璃基板1 輸送到下游。200410884 (1) Description of the invention: [Technical field of splashing ^^] The present invention relates to a conveying system for glass substrates, and in particular, to a glass substrate capable of unloading a glass substrate loaded in a horizontal direction in an oblique standing state. Conveying system 5 systems. It is well known that glass substrates used in the field of flat panel display manufacturing such as TFT-LCD (Thin Film Transistor_Liquid Crystal Display) > POP (Plasma Display Panel), EL (Electro Luminescent), etc. After the glass is formed into a flat plate and the cutting process is carried out so that it meets the primary specifications, the product is sorted through the cleaning and inspection processes to select qualified and unqualified products. As an example, 'see Korean Patent Application No. 2002-30386 of the present applicant', in a glass substrate cleaning station (Cleaning Station), after the glass substrate that has passed through the cleaning process is put into a container called a cassette, It is transferred to an inspection station (Inspection station), and the glass substrate placed in the container is unloaded by a handier and is agriculturally carried to the inspection station. At the inspection site, inspect for defects such as the inclusion of air bubbles, stones, and other debris in the glass substrate, contamination, scratches, gear chips, cutting chips, and cracks. Patent Documents ·· Korean Patent Application No. 002-30386. In order to prevent contamination of the glass substrate, the cleaning and inspection areas of the glass substrate are clean rooms. However, the layout of the clean room becomes complicated due to the use of containers and conveying devices. The problem of increasing the area of the clean room to more than necessary. Not only that, due to the effects of turbulence in the clean room caused by the actions of workers and transport devices, particles adhere to the glass substrate and cause contamination to increase the failure rate. There are problems of poor mass production performance and increased production costs. Furthermore, when loading and unloading the glass substrate, due to physical contact and impact from the conveying device, the possibility that the glass substrate may generate defects such as scratches and cracks is quite high, and there is a problem of increased time wastage and reduced yield. In particular, the clamping area of the glass substrate that can be clamped by the clamps of the conveying device 5 allows clamping within 8 mm from each edge. Therefore, in the case of large and thin glass substrates, the clamping by the clamps is required. It is difficult to support the weight of the glass substrate of the building. At the same time, the glass substrate is easily broken due to flexible deformation, which may cause a safety accident. Therefore, it is necessary to develop a technology capable of conveying glass substrates on one line from a cleaning place to an inspection place, but in fact, no technology has been developed that can stably convey glass substrates on one line. [Summary of the Invention 3] The present invention has been made in view of the above-mentioned facts, and an object thereof is to provide a glass substrate conveying system capable of unloading a glass substrate loaded in a horizontal direction in an inclined state. Another object of the present invention is to provide a conveying system for a glass substrate. This system can minimize the physical contact of the glass substrate, and can stably and easily change the glass substrate from a horizontal state to an inclined state. Another object of the present invention is to provide a glass substrate conveying system, which can easily and efficiently implement a conversion to a flexible production system through simple work conversion, which can inspect glass substrates of various sizes. 20 plates. Another object of the present invention is to provide a glass substrate conveying system, which can increase the yield and simplify the configuration through the conveying line of the glass substrate in series, and can greatly reduce the production cost. In order to achieve the above object, the glass substrate conveying system of the present invention is characterized in 6 200410884. The system includes: a system chassis; a horizontal conveying device, arranged on the aforementioned system chassis, capable of supporting peripheral portions of both ends of the glass substrate and performing horizontal conveyance; The floating device 'lifts the glass substrate loaded on the horizontal conveying device by air blowing; the tilting device' tilts the horizontal conveying device so that the glass substrate loaded on the 5 horizontal conveying device can tilt upright; The inclined conveying device is not placed on the inclined device, and can support and convey the lower end of the glass substrate standing upright. According to the glass substrate conveying system of the present invention, the horizontally loaded glass substrate from the cleaning place can be continuously unloaded in an inclined state at the inspection place, while minimizing physical contact of the glass substrate, it can be stable and easily By changing the glass substrate from a horizontal state to an inclined state, a transport system for the glass substrate can be formed online. Furthermore, the conversion to a flexible production system, which can inspect glass substrates of various sizes, can be carried out very easily and efficiently with a simple work conversion. In addition, because the on-line glass substrate conveying line increases the output and simplifies the configuration, it has the effect of greatly reducing the production cost. Brief Description of the Drawings Fig. 1 is a front view showing the structure of a conveying system according to the present invention. Fig. 2 is a plan view showing a configuration of a conveyance system according to the present invention. Fig. 3 is a side view showing the structure of the conveying system of the present invention. Fig. 4 is a front view showing a state in which the tilting device is tilted to the tilted position of the glass substrate in the conveying system of the present invention. Fig. 5 is a plan view showing the structure of a horizontal conveying device in the conveying system of the present invention. Figs. 6-A2 and Fig. 6 are a front view and a cross-sectional view showing a blow pipe of an air floating device in the delivery system of the present invention. 7 200410884 FIG. 7 is a front view showing the structure of the rotary coding n of the towel of the conveying system of the present invention. Fig. 8 is a front view showing the structure of the interval adjusting device and the fifth belt driving device in the conveying system of the present invention. & Fig. 9 is a side view partially showing another example of a horizontal conveying device and an interval adjusting device in the conveying system of the present invention. Fig. 10 is a plan view of Fig. 9. L · " ίΓ] | Hereinafter, a preferred embodiment of the glass substrate conveying system of the present invention will be described in detail with reference to the accompanying drawings. With reference to FIG. 1, according to the carousel system of the present invention, the conveyance line of the glass substrate i can be configured in series between the cleaning position and the inspection position of the glass substrate i. For example, it can convey length (mm) x width ( mm) A is a glass substrate 1 having a thickness of about 37 Gx to a thickness of about 0.4 to 1.1 mm. According to FIGS. 1-5, the conveying device of the present invention has a system chassis 10, and a horizontal conveying device 20 is provided on the upper part of the system bottom I5 tray 10 to support both ends of the glass substrate i and convey horizontally. The horizontal conveyor 20 is composed of a first conveyor 21 and a second conveyor 22 provided on both sides of the system chassis 10. The first and second conveyors 21 and 22 are respectively arranged side by side on the upper side of the system chassis 10 along the conveying direction of the glass substrates. On the conveyor frames 21a and 22a, 20 1 Both ends (ie, when the glass substrate i stands up, the lower end la and the upper end of the miscellaneous part are more than 21b, 21b-bu 21b.2, 22b, 221M, 22b-2, and are arranged around the shafts 21c, 22c. It is rotatably installed at predetermined intervals. The 2nd and 2nd conveyors 2: 1, 22 are 2lb and 22b lighter, and are rotated by the first zone moving device 23. The first driving device 23 is provided with: The power of the servo motor ^, horizontal 8 200410884, the first and the first-the drive shaft 21 and 22 and freely arranged driving shaft μ 'transmits the driving force of the servo motor 24 to the first drive belt 25 of the drive shaft% . Transmit the rotational force of the driving shaft 25 to each of the plurality of second belt drives 27 of the first conveyor 21, and transmit the rotational force of the driving shaft 25 to each of the third belts 5 of the second conveyor 22. Transmission device 28. 10 15 20. Brother 1 Figure _ 'The first belt transmission device 26 is driven by the turning motor 24 The driving wheel 26a, the driven wheel installed at the end of the driving shaft 25, and the belt 26c wound around the driving wheel and the driven wheel are formed. As shown in FIG. 5, the second belt transmission means the driving shaft 25. The first reading device 27 has a plurality of driving wheels 27a that are alternately installed on the lightly-trained shaft a, and the corresponding driving wheels 27a corresponding to the respective driving wheels 27a. A plurality of slaves 27b, which are alternately installed on the _ strips, and a belt 27e wound around the mutual driving pair driving wheel π and the driven wheels 2 and 7b. As shown in Figs. 2, 4 and 5, the third belt transmission device μ has: a driving wheel 28a mounted on the driving shaft 25, a plurality of driven wheels 28b mounted on the pumping stage of the pro 22b, a belt wound on the driving wheel 28a and the driven wheel 2 flapping. In this embodiment The driving wheels in and driven wheels 26b, 27b, birds, and belts of the first to third belt transmission devices 26, 27, and 28, respectively, can be replaced with driving timing gears, driven timing gears, and timing belts. -Further, the second and third belt drives 27, 28 can be replaced with a chain transmission consisting of a driving sprocket, a driven sprocket and a chain. As shown in Figures 2, 4, and 5, the driving shaft 25 can communicate with the first and second conveyors & π, such as the most downstream, such as the most downstream view m_2, 2 claw 2 The shafts a and melons are connected into one body, and the shafts 21c and 22e of 22b_1 are connected together by the driven shaft 29. In this embodiment, the following arrangements can also be made, and the existing bearings can be installed in the first and On the respective conveyor frames ⑴ and 22 of the second conveyor 22 and 22, both ends of the driving shaft 25 and the driven shaft 9 200410884 29 are supported by bearings. As shown in Figs. 2 and 5, the conveying system of the present invention includes a braking unit 30 that blocks and arranges the glass substrates 1 conveyed by the horizontal conveying device 20. The braking unit 31 is composed of a stopper 31 and an actuator 32; the weights 31 are respectively installed on both sides of the downstream 5 of the horizontal conveying device 20 so as to be able to support both sides of the front end of the glass substrate 1 in the conveying direction; The block 31 rotates between a blocking position supporting the front end of the glass substrate i in the conveyance direction and a release position allowing the glass substrate 1 to be conveyed. According to Figs. 2, 3, 6-A and 6-B, the conveying system of the present invention has an air floating device 40 which causes the first and second conveyors 21, 22 to be connected to each other 10 21b, The glass substrate 1 supported by the lower end ia and the upper end 1b and conveyed at 22b rises from the roller 2b and 22b. The air floating device 40 includes a blower pipe 41 provided in the conveyance direction of the glass substrate 1 and having a plurality of nozzle holes 41a for ejecting air toward the glass substrate 1 in the longitudinal direction. The plurality of blowing pipes 41 are arranged in an arbitrary horizontal plane above the bottom plate 42. In Figs. 2 and 3, five blow pipes are arranged at equal intervals, but 15 is an example, and the number and position of the blow pipes 41 can be appropriately changed so that the glass substrate 1 stably floats. As shown in Figs. 1 and 6-β, the air supply device 43 for supplying air is connected to the blowing pipe 41 of the air floating device 40. The air supply device 43 is composed of a blower 44 that generates air, and an air screening program 45 that filters the air from the blower 44 and supplies it to the blow pipe 41. The motor 44a is provided with a driving force and an impeller driven by the motor. 44b constitution. In this embodiment, the air screening program 45 may be formed by a HEPA screening program (High Efficiency Particular Air Filter) that filters about 0 micron and micro particles. The blower 44 of the air supply device 40 may be replaced with a well-known Air compressor and air control unit that controls air flow and pressure. 10 200410884 With reference to Figures 5 and 7, the conveying system of the present invention has a tilting device 5G that tilts a horizontal conveying device such as an air floating device 4G with respect to the button chassis 10, so that the glass substrate on the horizontal conveying device 2G is horizontally « 1 Tilt and stand up. The tilting device 50 is composed of a tilting bracket 51 and a shaft 53 supported by a bearing 52 to rotate the tilting support relative to the chassis 10. The tilting bracket 51 is loaded with the first and second conveyors 21 of the horizontal conveyor 20 , 22, and the bottom plate 42 of the first driving device 23 and the air shaft device 40. The shaft 53 of the tilted garment set 50 is rotated by the action of the second driving device 54. The second driving device 54 is composed of a servo motor% mounted on the system chassis 10 and supplying driving force, a fourth belt transmission device which transmits the driving force of the 10 servo motor 55 to the shaft 53, and a rotary encoder 57. The device 57 detects the rotation angle of the shaft 53 so that the driving of the servo motor 55 can be controlled. The fourth belt transmission device 56 includes a driving timing gear 56a installed to rotate by the driving power of the feeding motor%, a driven timing gear 56b mounted on the vehicle 53, a driving timing gear 56a, and a driven timing gear 5 邰. On the timing belt π. 15 poses. As shown in FIG. 7, the rotary encoder 57 includes a light-emitting sensor 57 a that emits light, a light-sensitive sensor 57 b that senses light projected by the light-emitting sensor 57 a, and is mounted on the shaft 53 and can be disposed on the light-emitting sensor. A rotating disk 57d having a slit 57c aligned with the optical axis between the sensor 57a and the photosensitive sensor 57b. Fig. 7 shows that four rotary encoders 20 encoders 57 are provided. These four rotary encoders 57 can control the horizontal position and tilt position of the glass substrate 1 according to the rotation angle of the shaft 53, but the number of rotary encoders 57 It can be changed appropriately. In this embodiment, as shown in FIG. 3, the tilting device 50 tilts the glass substrate} with respect to the vertical axis 58 by an inclination angle (0) of about 5-2Q, preferably by an inclination angle of about 102 (Θ). 11 2〇41〇884 Referring to FIGS. 1-4, the conveying system of the present invention includes an inclined conveying device 60 that supports and conveys the lower end 1a of the glass substrate 1, and a third roller 61 of the inclined conveying device 60 is set to It can be parallel to the first conveyor 21 on the tilt stand 51 of the tilting device 50. The second conveyor 61 is arranged side by side along the conveying direction 25 of the glass substrate 1 so as to be close to the first conveyor 21 on the inclined support 51 of the tilting device 50; on the conveyor support 61a, Each of the plurality of rollers 61b is rotatably mounted on a corresponding shaft 61c. The shafts 61c are separated from each other at a predetermined interval. A V-shaped groove 61d is formed on the outer surface of the roller 6 to stably receive the lower end 1a of the glass substrate 1 to prevent detachment. 2 to 5, the roller 61 b of the third conveyor 61 is rotated by the operation of the third driving device 62 10. The third driving device 62 is driven by a servo motor 63 that supplies a driving force, a shaft 64 that is rotatably close to the roller 61b and is mounted in the longitudinal direction of the conveyor bracket 61a, and transmits the rotational force of the shaft 64 to the third conveyor. The gear device 65 of each roller 61b of the machine 61 is comprised. The gear device 65 is composed of a plurality of driving gears 65a and a plurality of driven gears 65b. The driving gear 65a is installed on the shaft material located near each roller 61b, and the I5 driven gear 65b is installed on the respective shaft 61c of the light 61b. The gear 65a is meshed. In this embodiment, the third conveyor 61 can be rotated by the third driving device 62 and installed on the driving wheel of the conveyor bracket 61a-side, the driving wheel installed on the other side of the conveyor bracket 6U, and wound on the driving wheel And the belt on the drive wheel. Further, the shaft 64 and the gear device 65 of the third driving device 62 may be replaced with a belt transmission device that transmits the driving force of the servo motor 63 to the motor 20. Referring to FIGS. 2 to 5 and 8, the conveying system of the present invention has an interval adjusting device 70 for moving the second conveyor 22 relative to the second conveyor 21 so that the first conveyor 21 and the second conveyor 22 can be adjusted. Interval. The interval between the first conveyor 21 and the second conveyor 22 is adjusted by the interval adjusting device 70, and the lower end la and upper end lb of glass substrates i 12 200410884 of different sizes can be supported and conveyed. The interval adjustment device 70_ is rotatably arranged side by side with the first and second push rods 71 and 71b provided on the upper portion of the inclined bracket 51, and is installed to make a spiral movement along the first and second push screws 71a and m and is fixed. The ball bearing sleeve η on the conveyor bracket of the second conveyor 22, and the linear motion guide 73 which guides the linear movement of the conveyor bracket 5 22a to supply the driving force for rotating the first and second pushing screws 7la and 71b. The servo motor 74 is constituted by a fifth belt transmission that transmits the driving force of the feeding motor to the first and second driving screws 71a and 71b. The first and second push screw? The front ends of la and 71b are supported by bearings 77 of a mounting bracket 76 mounted on the tilt bracket M. The linear motion guide device 73 is composed of a plurality of guide rods 73a and a ball sleeve 73b interposed between the conveyor support 22a and the guide rods a of the second conveyor 22, and the plurality of guide rods 仏 pass through the second The conveyor support 22a and the mounting bracket of the conveyor 22 are arranged side by side to allow the linear movement of the second conveyor u. In this embodiment, the motion guide 73 may be constituted by a pair of guide rails arranged side by side on the inclined bracket 51 and a pair of sliders which can slide along the guide rails and are installed under the conveyor bracket 22a. The first driving gear 4 75 is driven by the driving wheel 75a of the turn-over motor 74, the first and second driving screws 75b and 75c mounted on the first and second driving screws, and the claws, respectively. The first belt 75d on the wheel 75a and the first driven wheel, and the second belt lap wound on the first and second driven wheels 75b and w. The structure of the first and second push screws 71a and 71b and the three guide rods 73a alternately installed is shown in FIG. 202 ', FIG. 4 and FIG. 5, but the number of guide rods may be appropriately changed. > Figures 12 and 2 show that in order to continuously convey the glass substrate 1, the conveying system of the present invention has an entry-side horizontal conveying device 80 positioned upstream of the system chassis 10 and a downstream of the charging chassis 10 The discharge side of the inclined conveying device 90. The horizontal conveying device on the entry side 13 H can be conveyed obliquely. The horizontal conveying set of the glass plate i from the prostitutes:-The same conveyors 81 and 82 as the second conveyor 21 and 22. The chest inclined conveying device 90 can be composed of The glass substrate i transported by the tilting and tilting wheel assembly 61 is tilted. The money tube 41 of the air floating device 4G and the second blower 61 of the tilting transport device 60 have the same blower tube 91 and conveyor. 10… Tujin Benxin ’s month-by-month carousel system has a control device as a control device. It ’s used for system control, and the controller is just programmable logic (P ^ grammaMe lc) gie e. (Gamma)) Controls the pure lying of the horizontal conveying device 2q, the braking unit%, the air moving device 40 tilt device 50, the tilt carousel device ⑹, and the interval adjustment device 70. The control panel can be connected to the well-known electronic step provided on the scale substrate 丨 conveying line ′ through the computer network to control and manage the conveyance of the glass substrate 1 throughout the entire cycle. Figures 9 and 10 show another horizontal transport device suitable for use in the transport system of the present invention. Referring to Figs. 9 and 10, the horizontal conveying device 120 in another example has a second conveyer 122 separated from the tilting device 50 and the inclined support 51 and provided on the system chassis 10. The conveyor support 122a of the second conveyor 122 is movably disposed on the upper part of the system chassis 10. On the conveyor support 122a, a plurality of rollers 122b supporting the peripheral portion of the upper end lb of the glass substrate 丨 are rotatably installed on the corresponding ones. Shaft 122c. The shafts 122c are separated from each other at a predetermined interval. On the outer surface of the pro-i22b, a flange i22d capable of supporting and arranging the upper end lb of the glass substrate 1 is formed. In addition, the rollers 21b, 122b of the first and second conveyors 21, 122 can be rotated by a driving device 123 that supplies a driving force. The driving device 123 may have the same structure as the third driving device 62 described above. The structure and operation of the driving device 123 will be described with reference to the structure and operation of the third driving device 62. 14 200410884 The horizontal conveyor 120 has an interval adjusting device 170 that moves the second conveyor so that the interval between the second conveyor 122 and the first conveyor 21 can be adjusted. The interval adjusting device 170 includes a servo motor 171 provided on the system chassis 10 and supplying driving force, an active timing gear 172 driven to rotate by the servo motor 171, and a distance away from the active timing gear 172 in the lateral direction of the conveyance direction of the glass substrate 15. The configured driven timing gear 173, a timing belt 174 wound around the driving timing gear 172 and the driven timing gear 173, a connecting member 175 that fixes the conveyor bracket 122a of the second roller 122 and the timing belt 174, and A linear motion guide mechanism Π6 is formed on the system chassis 10 to guide the linear motion of the conveyor support 122a. The linear motion guide mechanism 176 is composed of a pair of guide rails 176a mounted on the bottom of the system i 10 and located on both sides in the lateral direction of the glass substrate 1 in the feeding direction, and a pair of slides installed under the conveyor support 122a. Block 176b is formed. The operation of the glass substrate transport system of the present invention having such a structure will be described below. 15 With reference to FIGS. 1, 2 and 5, the tilting bracket 51 of the tilting device 50 is kept horizontal and the rollers 21b and 22b of the first and second conveyors 21 and 22 are arranged on the same plane, and the entry side is horizontally transported. The conveyors 81 and 82 of the device 80 horizontally convey the glass substrate i to the first and second conveyors 2; 1, 22, and the peripheral edges of the lower end la and the upper end lb of the glass substrate i are divided by the upstream roller 21b-1, 22b-1 support. As soon as the servo motor 24 of the first driving device 23 is driven, the driving force of the servo motor 24 is transmitted to the driving shaft 25 through the driving belt 26a, the driven wheel 26b, and the belt 26c of the first belt transmission device; The most downstream rollers 21b-2, 22b-2 rotate. The rotational forces of the most downstream rollers 21b_2 and 22b-2 are transmitted to the driving wheels 27a, the driven wheels 27b, the belt 27c of the second belt transmission device 27, and the driving wheels 28a, the driven wheels 28b, and the belt 28c of the third belt transmission device 28, respectively. Each of the rollers 21b, 15 200410884, and the rollers 21b and 22b transport the glass substrate 1 horizontally by a rolling motion. On the other hand, as shown in FIGS. 6-A and 6-B, when the blower of the air supply device 43 is operated and the air is supplied to the air blowing tube 41 of the air floating device 40, the breaking plate 1 is blown out by the nozzle of the air blowing tube 41 The air power of the first and second conveyors 21, 5 and 22 is lifted, for example, about 0.5 mm from the wheels 2lb, 22b, and the conveyance is continued. Therefore, since the month b is sufficient to rotate the glass substrate 1 in a state where physical contact is not performed except for a portion other than the lower end la and the upper end, it is possible to effectively prevent defects such as scratches, cracks, and the like generated on the glass substrate 1 due to physical contact. ; It is also possible to effectively prevent the large glass substrate 1 from being deformed flexibly, for example, a glass substrate with a hand (mm) x width (mm) size of about 73 × 920. 10 As shown in FIG. 2, the first and second conveyors 21 of the horizontal conveying device 20 and the front end of the glass substrate 1 conveyed horizontally with the air floating device 40 are stopped by the braking unit 30 located at the blocking position. The stopper 31 blocks the servo motor 24 of the first driving device 23 to stop working. As soon as the servo motor 55 of the second driving device 54 starts to drive, the driving force of the servo motor 55 is transmitted to the shaft 53 by the driving timing gear 5 such as the 15 driven timing gear 56 b and the timing belt 56 c of the fourth belt transmission 56 such as The arrow A in FIG. 3 indicates that the shaft 53 supported by the bearing 52 tilts the tilt bracket 51 from the horizontal position to the tilt position. As shown in FIG. 7, the rotary encoder 57 detects the rotation angle of the shaft 53, and inputs a detection signal of the suspected rotary encoder 57 to the controller 100. The controller controls the driving speed of the motor 44a according to the detection signal input from the rotary encoder 57 so as to control the air force generated by blowing through the nozzle hole 41a of the blowing pipe 41. That is, in order not to disengage the glass substrate 1 erected by the tilting motion of the tilting device 50 from the first and second conveyors 21 and 22, the air force is gradually reduced in accordance with the tilt angle (0) of the glass substrate 1. . Referring to Figs. 3 and 4, the glass substrate 16 200410884 plate 1 erected by the inclination of the inclination device 50 is lowered while sliding along the rollers 21b and 22b of the first and second conveyors 21 and 22. The lower end of the lowered _ substrate 1 is supported while falling in the groove 61 d formed on the 辕 61 b of the third conveyor 61. At this time, the peripheral edges of the lower end la and the upper end lb of the glass substrate i contact the roller 21b and the second conveyor of the first conveyor 21 from the lower 5 end 1a and the upper end lb within 8 mm as the clamping area. 22 of the roller 22b. Referring to FIG. 3B, when the lower end ib of the glass substrate i of the roller centrifugal floor of the third conveyor 61 is controlled by the controller 100, the actuator 32 of the braking unit 30 is driven to cause the load to stop the load. The position is rotated to the released position. When the servo | 10 motor 63 of the third driving device 62 is driven, the shaft 64 is rotated by the drive of the servo motor 63. The rotational force of the shaft material is transmitted to the parent 61b of the third conveyor 61 through the gear device 6S and the driven gear willow, and the light 61b conveys the inclined glass substrate 1 downstream through the rolling motion.

然後，把由傾斜輸送裝置6G的第三輸送機61輸送的玻璃基板1 is輸送到續接在系統底盤10下游的排出側傾斜輸送裝置9〇上，排出 麵斜輸送裝置90轉錢㈣和輸賴％將_敍丨輸關 檢查處才木用攸足種系統底盤1〇的上游把水平輸送的玻璃基板工在 I 傾斜立起狀悲下輸送到下游輸送作業，在清洗處和檢查處之間能連 續地保持玻璃基板1的輸送，因此，能提高玻璃基板i的産量。 2〇 參照第4、5圖，在根據本發明的檢查系統改變玻璃基板i的大 小亚進行輸送的情沉下，爲了符合玻璃基板1的大小，實施由間隔 調節裝置70調節第一輪送機21和第二輸送機22之間的間隔的工作 轉換（job change)。間隔調節裝置7〇的伺服馬達％ 一驅動，伺服 馬達74的驅動力就能由第五帶傳動裝置75的主動輪75a、第一和第 17 200410884 二從動輪75b及75c以及第一和第二帶75d及75e傳遞到第一和第一 推動螺杆71a、71b。第一和第二推動螺杆71a、71b由安裝托架％ 的軸承77軸支撐；沿第一和第二推動螺杆71a、71b作螺旋運動的 滾珠軸套72使第二輸送機22相對於第一輸送機21運動，並調節第 5 一和第二輸送機21、22之間的間隔。此時，線性運動導向裝置乃 的滾珠軸套73b在沿導向杆73a滑動的同時，引導第二輪送機22的 線性運動。爲了能夠符合這種玻璃基板丨的大小，利用對第一和第 二輸送機21、22之間的間隔進行調節的工作轉換，就能夠非常容易 且有效地實施向靈活性生産系統的轉換。 1〇 參照第9、10圖，利用傾斜裝置50的傾斜運動，使裝载在傾斜 支架51上的第-輸送機2卜空氣浮動裝置4〇的吹氣管41和第三輸 达機61傾斜，第二輸送機122就會固定在系統底盤1〇上。利用第 一和第二輸送機21、122的輥21b、122b的滾動運動，把被輸送的 玻璃基板1的上$ lb支撑並排列在第二輸送冑122的輕㈣上形 15 成的凸緣122d上。 使間隔調節裝置no的伺服馬達m驅動後使主動定時齒輪π 旋轉時’捲繞在從動定時齒輪172倾動定時齒輪173上的同步皮帶 m就開始移動，由連接件175和同步皮帶m連接的第二輸送機122Then, the glass substrate 1 is conveyed by the third conveyor 61 of the inclined conveying device 6G to the discharge-side inclined conveying device 90 continued to the downstream of the system chassis 10, and the discharging surface inclined conveying device 90 turns money and conveys. Mr. Lai% __ 丨 The transport inspection department only uses the upstream of the chassis system 10 to transport the horizontally conveyed glass substrates to the downstream conveyance operation in a tilted state, at the cleaning and inspection places. Since the conveyance of the glass substrate 1 can be continuously maintained, the yield of the glass substrate i can be improved. 20. Referring to FIGS. 4 and 5, when the size of the glass substrate i is changed and conveyed according to the inspection system of the present invention, in order to conform to the size of the glass substrate 1, the first feeding machine is adjusted by the interval adjusting device 70. An interval job change between 21 and the second conveyor 22. As soon as the servo motor of the interval adjusting device 70 is driven, the driving force of the servo motor 74 can be driven by the fifth driving wheel 75a of the belt driving device 75, the first and the 17th 200410884 the second driven wheels 75b and 75c, and the first and the second The belts 75d and 75e are passed to the first and first push screws 71a, 71b. The first and second push screws 71a, 71b are axially supported by bearings 77 of the mounting bracket; a ball sleeve 72 that makes a spiral movement along the first and second push screws 71a, 71b makes the second conveyor 22 relative to the first The conveyor 21 moves and adjusts the interval between the fifth first and second conveyors 21 and 22. At this time, the ball sleeve 73b of the linear motion guide device guides the linear motion of the second roller 22 while sliding along the guide rod 73a. In order to be able to meet the size of such a glass substrate, the conversion to a flexible production system can be implemented very easily and efficiently by using a work conversion that adjusts the interval between the first and second conveyors 21 and 22. 10, referring to FIGS. 9 and 10, using the tilting motion of the tilting device 50, the blower 41 and the third conveyer 61 of the first-conveyor 2 and air-floating device 40 mounted on the tilting bracket 51 are tilted. The second conveyor 122 is fixed on the system chassis 10. Utilizing the rolling motion of the rollers 21b, 122b of the first and second conveyors 21, 122, the upper lb of the glass substrate 1 being conveyed is supported and arranged on the light flange of the second conveyance 胄 122 to form a flange 122d. When the servo motor m of the interval adjusting device no is driven and the driving timing gear π is rotated, the timing belt m wound around the driven timing gear 172 and the tilt timing gear 173 starts to move, and is connected by the connecting member 175 and the timing belt m. Second conveyor 122

的輸送機支架122a就和辭皮帶174 _起連動，如第9 _箭頭B 所示。線性運動導向機構Π6的滑塊176在沿導向杆i76a滑動的同 時引導第二輸送機m的線性運動。從而，能夠料且有效地實施 工作轉換來調節第-和第二輸送機2卜122之間的間隔以符合玻璃 基板1的大小。 、上雖兒明了本發明的優選實施例，但在不背離本發明 18 5 權利要求保缦的範圍内，本領域技術人員能作出各種改變。 【圖式簡單說明】 第1圖是表示本發明輸送系統的結構的正視圖。 第2圖是表示本發明輸送系統的結構的俯視圖。 第3圖是表示本發明輸送系統的結構的側視圖。 第4圖是表示本發明輸送系統中傾斜裝置傾斜到玻璃基板的傾 斜位置的狀態的正視圖。 弟5圖是表示在本發明輸送系統中水平輪送裝置結構的俯視圖。 10 第6-A、6-B圖是表示本發明輸送系統中空氣浮動裝置吹氣管的 正視圖和截面圖。 第7圖是表示本發明輸送系統中旋轉編碼器結構的正視圖。 第8圖是表示本發明輸送系統中間隔調節裝置和第五帶傳動壯 置結構的正視圖。 衣 15 第9圖是部分表示本發明輸送系統中另一例水平輪送 隔調節裝置的側視圖。 間 第10圖是第 9圖的俯視圖。 【圖式主^ 要元件代表符號表】 玻璃反· · · 1 第二^送機·· .22 下端...la 輥".21b、21b-l、 上端".lb 22b-卜 22b-2 輸送方向...2 軸,"21c、22c 系統底盤,··1〇 第一驅動裝置...23 水平輸钱置…如 伺服馬達...24 第一輸送機...21 主動轴…25 19 200410884 第一帶傳動裝置...26 第二帶傳動裝置...27 第三帶傳動裝置...28 主動輪...26a、27a、28a 從動輪·· .26b、27b、28b 帶...26c、27c、28c 從動軸...29 制動單元...30 擋塊...31 致動器…32 空氣浮動裝置…40 喷嘴孔…41a 吹氣管...41 底板...42 空氣供給裝置…43 言挪幾".44 馬達·. .44a 葉輪...44b 空氣篩檢程式...45 傾斜裝置…50 傾斜支架…51 軸承...52 轴· · .53 第二驅動裝置...54 伺月艮馬達...55 第四帶傳動裝置·. .56 旋轉編碼器"·57 主動定時齒輪...56a 從動定時齒輪...56b 同步皮帶...56c 發光感測器…57a 感光感測器...57b 狹縫...57c 旋轉圓盤...57d 垂直轴線…58 傾斜角度...Θ 傾斜輸送裝置...60 第三輸送機…61 輸送機支架…61a 幸昆…61b 轴...61c V字形槽...61d 第三驅動裝置...62 伺服馬達…63 軸...64 齒輪裝置...65 主動齒輪...65a 從動齒輪·· .65bThe conveyor support 122a is linked to the belt 174, as shown by the 9th arrow B. The slider 176 of the linear motion guide mechanism Π6 guides the linear motion of the second conveyor m while sliding along the guide rod i76a. Thereby, it is possible to carry out the job conversion efficiently and effectively to adjust the interval between the first and second conveyors 122 and 122 to conform to the size of the glass substrate 1. Although the above describes the preferred embodiments of the present invention, those skilled in the art can make various changes without departing from the scope of the claims of the present invention. [Brief Description of the Drawings] Fig. 1 is a front view showing the structure of the conveying system of the present invention. Fig. 2 is a plan view showing a configuration of a conveyance system according to the present invention. Fig. 3 is a side view showing the structure of the conveying system of the present invention. Fig. 4 is a front view showing a state where the tilting device is tilted to the tilted position of the glass substrate in the conveying system of the present invention. Figure 5 is a top view showing the structure of a horizontal carousel device in the conveying system of the present invention. 10 Figures 6-A and 6-B are a front view and a cross-sectional view showing a blow pipe of an air floating device in the delivery system of the present invention. Fig. 7 is a front view showing the structure of a rotary encoder in a conveying system of the present invention. Fig. 8 is a front view showing the structure of the interval adjusting device and the fifth belt drive in the conveying system of the present invention. Fig. 9 Fig. 9 is a side view partially showing another example of the horizontal roller interval adjusting device in the conveying system of the present invention. Figure 10 is a top view of Figure 9. [Representation of the main elements in the diagrams] Table of glass reversal · · · 1 second ^ machine · .22 lower end ... la roller " .21b, 21b-l, upper end " .lb 22b- 卜 22b -2 Conveying direction ... 2 axes, " 21c, 22c system chassis, ... 10th first drive unit ... 23 Horizontal money input ... such as servo motor ... 24 first conveyor ... 21 Drive shaft ... 25 19 200410884 First belt drive ... 26 Second belt drive ... 27 Third belt drive ... 28 Drive wheels ... 26a, 27a, 28a Driven wheels ... 26b, 27b, 28b with ... 26c, 27c, 28c driven shaft ... 29 brake unit ... 30 stop ... 31 actuator ... 32 air floating device ... 40 nozzle hole ... 41a blow pipe ... 41 Base plate ... 42 Air supply device ... 43 Motors ... 44 Motor ... 44a Impeller ... 44b Air screening program ... 45 Tilt device ... 50 Tilt bracket ... 51 Bearing ... 52 Shaft .53 second drive unit ... 54 motor drive ... 55 fourth belt drive ... 56 rotary encoder " 57 active timing gear ... 56a driven timing gear ... 56b Timing belt ... 56c Illuminated sensor ... 57a Photosensitive sensor ... 57b Slit ... 57c Rotating disc ... 57d Vertical axis ... 58 Tilt angle ... Θ Tilt conveyor ... 60 Third conveyor ... 61 Conveyor support ... 61a Xingkun ... 61b Shaft ... 61c V-groove ... .61d Third drive ... 62 Servo motor ... 63 Shaft ... 64 Gear unit ... 65 Drive gear ... 65a Drive gear ... 65b

20 200410884 間隔調節裝置...70 第一推動螺杆...71 a 第二推動螺杆../71b 滾珠軸套…72 線性運動導向裝置…73 導向杆...73a 滾珠軸套…7¾ 伺服馬達...74 第五帶傳動裝置…75 主動輪...75a 第一和第二^動輪...75b、75c 第一帶…75d 第二帶...75e 安裝托架...76 轴承...77 進入側水平輸置…80 輸送機·· .8卜82 排出側傾斜輸送裝置...90 吹氣管...91 輸送機...92 控制器...100 水平輸魏置…120 第二^送機…122 輸送機支架...122a 幸昆…122b 軸…122c 凸緣…122d 驅動裝置...123 間隔調節裝置...170 伺服馬達…171 主動定時齒輪...172 從動定時齒輪...173 同步皮帶...174 連接件…175 線性運動導向機構…176 導向執道…176a 滑塊...176b20 200410884 Interval adjustment device ... 70 First push screw ... 71 a Second push screw ... / 71b Ball bushing ... 72 Linear motion guide ... 73 Guide rod ... 73a Ball bushing ... 7¾ Servo motor ... 74 Fifth belt drive ... 75 Driving wheels ... 75a First and second moving wheels ... 75b, 75c First belt ... 75d Second belt ... 75e Mounting bracket ... 76 Bearing ... 77 Horizontal input on the inlet side ... 80 Conveyor ... 8 8 82 Inclined delivery on the discharge side ... 90 Blowpipe ... 91 Conveyor ... 92 Controller ... 100 Horizontal input … 120 Second conveyor… 122 Conveyor bracket ... 122a Xingkun ... 122b Shaft ... 122c Flange ... 122d Drive ... 123 Interval adjustment ... 170 Servo motor ... 171 Active timing gear ... 172 Driven timing gear ... 173 Timing belt ... 174 Connector ... 175 Linear motion guide mechanism ... 176 Guidance guide ... 176a Slider ... 176b

21twenty one

Claims (1)

2υ〇41〇884 拾、申請專利範圍： L 一種玻璃基板的輸送系統，其特徵在於，包括·· 系統底盤； 水平輸送裝置，設置在前述系統底盤上，能支撐破璃基板兩 5 端的周緣部分並進行水平輸送； 傾斜裝置，使前述水平輸送裝置傾斜，以使裝载在前述水平 輸送裝置上的前述玻璃基板能傾斜立起； 傾斜輸送裝置，設置在前述傾斜裝置上，能支撐傾斜立起的 前述玻璃基板的下端並進行輸送。 10 2.如申請專利範圍第1項的玻璃基板的輸送系統，其特徵在於， 前述水平輸送裝置具備： 第一輸送機，設置在前述系統底盤一側，且具有支撐前述玻 璃基板一端周緣部分的多個輕^ ; 第二輸送機，與前述第一輸送機並列設置在前述系統底盤的 15 另一側，且具有支撐前述玻璃基板另一端周緣部分的多個輥， 第一驅動裝置，使前述第一和第二輸送機的輥旋轉。 3.如申請專利範圍第2項的玻璃基板的輸送系統，其特徵在於， 其中前述第一驅動裝置具備·· 伺服馬達，安裝在前述傾斜裝置上，供給驅動力； 20 主動軸，橫穿前述水平輸送裝置的第一和第二輸送機， 自由旋轉地設置； 第一帶傳動裝置，將前述伺服馬達的驅動力傳遞到前述 主動軸； 多個第二帶傳動裝置，將前述主動軸的旋轉力依次傳遞 22 至J相互罪近的前述第一輸送機的輥上； 第二帶傳動裝置，將前述主動軸的旋轉力傳遞到前述第 一輪送機的輥上。 4.如申請專利範圍第2或3項的玻璃基板的輪送系统，其特徵在 於’遂具有間陶節裝置，使前述第二輪送機相對於前述第一 輪送機線性運動，以便調整前述水平輸送裝置的第一和第二輸 送機之間的間隔。 5·如申請專利範圍第4項的玻璃基板的輸送系統，其特·於， 前述間隔調節裝置具備： 多個第一推動螺杆和第二推動螺杆，在前述傾斜裝置上部自 由旋轉地相互並列設置； 滾珠軸套，安裝成能沿前述第一和第二推動螺杆作螺旋運 動’且固定在前述第二輸送機上； 線性運動導向機構，引導前述第二輸送機的線性運動； 第一.驅動裝置，包括：安裝在前述傾斜裝置上並供給驅 動力的伺服馬達、和將前述伺服馬達的驅動力傳遞到前述 第一和第二推動螺杆的第五帶傳動裝置。 6·如巾請專鄕圍第1或2項的玻璃基板的輸送系統 ，其特 itiL在於，還具有制動單元，阻擔並排列由前述水平輸送裝 置輸送的前述玻璃基板， 前述制動單元包括：擋塊，分別安裝在前述水平輸送裝 置的下游兩側，以能夠阻擋前述玻璃基板的輸送方向前端 的兩側，以及致動器，使前述擋塊在阻擔前述玻璃基板的 輸送的阻擔位置和允許輪送的解除位置之間轉動。 23 •如申清專利範圍第J項的玻璃基板的輸送系統，其特徵在於，還 具有空氣稍裝置，通過空氣吹送使裝載在前述水平輸送裝置上 的則逑破璃基板浮升；前述傾斜裝置使前述空氣浮動裝置傾斜。 8·如申明專利範圍第7項的玻璃基板的輸送系統，其特徵在 5 於，其中前述空氣浮動裝置具備·· 夕個吹乳管，沿前述玻璃基板的輸送方向設置在前述傾 斜衣置上邛，且沿縱向形成有對著前述玻璃基板噴出空氣 的多個噴嘴孔； 鼓風機，産生供給前述吹氣管的空氣； 10 $氣篩檢程式，過瀘、來自前述鼓風機的空氣並供給前述多個吹 氣管。 9.如申請專利範圍第7或8項的玻璃基板的輸送系統，其特徵在 於，前述傾斜裝置具備： 衣載有錢水平輸送裝置和空氣浮練置的傾斜支架； 15 使則迷傾斜支架相對於前述系統底盤轉動的軸； 一第二驅較置，财安裝在前料統底盤上並供給能夠使 前述軸旋轉的驅動力的伺服馬達、和將前述伺服馬達的驅 動力傳遞到前述軸的第四帶傳動裝置； 旋轉編碼器，檢測出前述軸的旋轉角度，以便控制前述第 20 二驅動裝置伺服馬達。 瓜如申請專利範圍第！項的玻璃基板的輪送系統，其特徵在於，前 述傾斜輪送裝置具備： 第三輸送機，具有支馳前述傾斜裝置傾斜立起的前述玻璃基 板下端的多個輥； 24 第一驅動衣置’具有安裝在前述傾斜裝置上並供給驅動力的伺 服馬達、安裝成能通過前述伺服馬達的驅動而旋轉的轴、將前述轴 的旋轉力傳_前述第三輪送機的親的齒輪裝置。 11.如申请專利範圍第i項的玻璃基板的輸送系统其特徵在 5 於，還具備： 進入側水平輪送裝置，配置在前述线縫上游，且具 有將前述玻璃基板水平裝載在前述水平輸送裝置上並進行 輸送的輸送機； 排出側傾斜輸送裝置，配置在前述系統底盤下游，且具有輸送 10 從前述傾斜輸送裝置卸載的前述玻璃基板的吹氣管、和輸送機。 12· —種玻璃基板的輸送系統，其特徵在於，具備： 系統底盤； 第一輸送機，沿前述玻璃基板的輸送方向設置在前述系統 底盤一側，且具有支撐前述玻璃基板一端周緣部分的多個 15 輥； 第二輸送機，和前述第一輸送機並列設置在前述系統底盤 的另一側，且具有支撐前述玻璃基板另一端周緣部分的多 個輥，以便和前述第一輸送機協同作動使前述玻璃基板水 平輸送； 2〇 多個吹氣管，設置在前述第一輸送機和第二輸送機之間， 以便沿前述玻璃基板的輸送方向吹送空氣使前述玻璃基板 浮升； 傾斜裝置，使前述第一輸送機和前述吹氣管傾斜，以使裝 載在前述第一輸送機和第二輸送機上的前述玻璃基板傾斜 25 200410884 立起； 第三輸送機，設置在前述傾斜裝置上，並利用多個輥支撐 傾斜立起的前述玻璃基板下端並進行輸送。 13. 如權利要求12記載的玻璃基板的輸送系統，其特徵在於，還 5 具有間隔調節裝置，使前述第二輸送機相對於前述第一輸送機線性 運動，以便調節前述第一和第二輸送機之間間隔。 14. 如權利要求13記載的玻璃基板的輸送系統，其特徵在於，前 述間隔調節裝置具備： 設置在前述系統底盤上並供給驅動力的伺服馬達； 10 通過前述伺服馬達的驅動進行旋轉的主動定時齒輪； 配置在前述玻璃基板的輸送方向的橫向上的從動定時齒輪； 捲繞在前述主動定時齒輪和從動定時齒輪上的同步皮帶； 固定前述第二輸送機和同步皮帶的連接件； 引導第二輸送機相對於前述系統底盤線性運動的線性運動導向機 15 構。 262υ〇41〇884 Scope of patent application: L A glass substrate conveying system, which is characterized by including: a system chassis; a horizontal conveying device, which is arranged on the aforementioned system chassis and can support the peripheral parts of the two ends of the broken glass substrate And carry out horizontal conveyance; a tilting device that inclines the horizontal conveying device so that the glass substrate loaded on the horizontal conveying device can stand upright; an inclined conveying device that is installed on the inclined device and can support the inclined upright The lower end of the aforementioned glass substrate is conveyed. 10 2. The glass substrate conveying system according to item 1 of the scope of the patent application, wherein the horizontal conveying device includes: a first conveyor provided on a side of the chassis of the system and having a peripheral portion supporting one end of the glass substrate; A plurality of light conveyors; a second conveyor, which is arranged in parallel with the first conveyor on the other side of the system chassis 15 and has a plurality of rollers supporting the peripheral edge portion of the other end of the glass substrate; The rollers of the first and second conveyors rotate. 3. The glass substrate conveying system according to item 2 of the scope of patent application, wherein the first driving device includes a servo motor, which is mounted on the tilting device to supply driving force; 20 a driving shaft that crosses the foregoing The first and second conveyors of the horizontal conveying device are arranged to rotate freely; the first belt transmission device transmits the driving force of the servo motor to the driving shaft; the plurality of second belt transmission devices rotate the driving shaft. The force is sequentially transmitted from 22 to the rollers of the first conveyor near each other; the second belt transmission device transmits the rotational force of the driving shaft to the rollers of the first roller. 4. The glass substrate rotation system according to item 2 or 3 of the scope of the patent application, which is characterized in that it has a ceramic device to make the second conveyor linearly move relative to the first conveyor in order to adjust. The interval between the first and second conveyors of the aforementioned horizontal conveyor. 5. The glass substrate conveying system according to item 4 of the scope of patent application, wherein the interval adjusting device includes: a plurality of first pushing screws and a second pushing screw, which are arranged side by side in a freely rotatable manner above the tilting device. Ball bearing sleeves are installed to be able to perform spiral movement along the first and second pushing screws and are fixed on the second conveyor; a linear motion guide mechanism guides the linear movement of the second conveyor; The device includes a servo motor mounted on the tilting device and supplying a driving force, and a fifth belt transmission device that transmits the driving force of the servo motor to the first and second pushing screws. 6. If you want to specialize in the glass substrate conveying system of item 1 or 2, the special itiL is that it also has a braking unit to block and arrange the glass substrate conveyed by the horizontal conveying device. The braking unit includes: Stoppers are respectively installed on both sides of the downstream side of the horizontal conveying device, so as to be able to block both sides of the front end of the glass substrate in the conveying direction, and an actuator, so that the stoppers are in a blocking position that blocks the conveyance of the glass substrate. And the release position allowing rotation. 23 • The glass substrate conveying system according to item J of the patent application scope, further comprising an air slightly device, which lifts and breaks the glass substrate to be mounted on the horizontal conveying device by air blowing; the aforementioned tilting device Tilt the aforementioned air floating device. 8. The glass substrate conveying system according to claim 7 of the patent scope, characterized in that the above-mentioned air floating device is provided with a breast pump, and is arranged on the inclined clothing along the conveying direction of the glass substrate.邛, and a plurality of nozzle holes which spray air toward the glass substrate are formed along the longitudinal direction; a blower, which generates air to be supplied to the blow pipe; 10 $ air screening program, which passes the air from the blower and supplies the plurality of Blowpipe. 9. The conveying system for a glass substrate according to item 7 or 8 of the scope of patent application, wherein the tilting device includes: a tilting bracket carrying a horizontal transporting device for the clothes and an air float; 15 the tilting bracket is opposite A shaft that rotates on the chassis of the aforementioned system; a second drive, a servo motor installed on the front chassis and supplying a driving force capable of rotating the axle, and a servo motor that transmits the driving force of the servo motor to the axle The fourth belt transmission device; a rotary encoder that detects the rotation angle of the aforementioned shaft in order to control the servo motor of the aforementioned second drive device. Guarru applies for patent scope! The glass substrate rotation system according to the item, wherein the inclined rotation device includes: a third conveyor having a plurality of rollers supporting the lower end of the glass substrate tilted up by the tilting device; 24 first driving clothes 'It has a servo motor mounted on the tilting device and supplying a driving force, a shaft mounted to be rotatable by the driving of the servo motor, and a gear device that transmits the rotational force of the shaft to the third wheel feeder. 11. The glass substrate conveying system according to item i in the patent application scope is characterized in that it further includes: an entry-side horizontal carousel device, which is arranged upstream of the seam and has a horizontal loading of the glass substrate on the horizontal conveyance Conveyor on the device and carrying out conveyance; Inclined conveying device on the discharge side, which is arranged downstream of the system chassis, and has a blow pipe for conveying the glass substrate unloaded from the inclined conveying device, and a conveyor. 12 · A glass substrate conveying system, comprising: a system chassis; a first conveyor provided along the conveying direction of the glass substrate on a side of the system chassis, and having a plurality of supporting peripheral portions of one end of the glass substrate 15 rollers; the second conveyor is arranged side by side with the first conveyor on the other side of the system chassis, and has a plurality of rollers supporting the peripheral edge portion of the other end of the glass substrate so as to cooperate with the first conveyor The glass substrate is conveyed horizontally; 20 air blowers are provided between the first conveyor and the second conveyor, so that the glass substrate is blown up by blowing air in the conveying direction of the glass substrate; The first conveyor and the blowing pipe are inclined so that the glass substrate loaded on the first conveyor and the second conveyor are inclined 25 200410884 to stand up; the third conveyor is installed on the tilting device and uses A plurality of rollers support and convey the lower end of the glass substrate, which stands upright. 13. The conveying system for a glass substrate according to claim 12, further comprising an interval adjustment device for linearly moving the second conveyor relative to the first conveyor to adjust the first and second conveyances. Space between machines. 14. The glass substrate conveying system according to claim 13, wherein the interval adjusting device includes: a servo motor provided on the system chassis and supplying a driving force; and 10, an active timing for rotation by driving of the servo motor. A gear; a driven timing gear arranged in the lateral direction of the glass substrate in the conveying direction; a timing belt wound around the driving timing gear and the driven timing gear; a connector for fixing the second conveyor and the timing belt; guide A linear motion guide mechanism for linearly moving the second conveyor relative to the aforementioned system chassis. 26
TW092130314A 2002-10-31 2003-10-30 Glass substrate transferring system TWI232838B (en)

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