TW200406039A - Cartridge for substrate - Google Patents

Cartridge for substrate Download PDF

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Publication number
TW200406039A
TW200406039A TW092117854A TW92117854A TW200406039A TW 200406039 A TW200406039 A TW 200406039A TW 092117854 A TW092117854 A TW 092117854A TW 92117854 A TW92117854 A TW 92117854A TW 200406039 A TW200406039 A TW 200406039A
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TW
Taiwan
Prior art keywords
substrate
support
substrate cassette
patent application
item
Prior art date
Application number
TW092117854A
Other languages
Chinese (zh)
Other versions
TWI242830B (en
Inventor
Takenori Yoshizawa
Kouji Ohtsuki
Katsumi Okada
Hiroki Matsuguma
Original Assignee
Sharp Kk
Starlite Ind
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Priority claimed from JP2002205043A external-priority patent/JP2004042984A/en
Priority claimed from JP2003086599A external-priority patent/JP4033014B2/en
Priority claimed from JP2003086600A external-priority patent/JP4033015B2/en
Application filed by Sharp Kk, Starlite Ind filed Critical Sharp Kk
Publication of TW200406039A publication Critical patent/TW200406039A/en
Application granted granted Critical
Publication of TWI242830B publication Critical patent/TWI242830B/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Printing Plates And Materials Therefor (AREA)

Abstract

The purpose of the invented cartridge for substrate is to provide a substrate cartridge where the bending deformation generated by the cartridge has no influence on the accommodated substrate and the weight increase of cartridge itself is suppressed to the best even when partial portion of the lower frame of the cartridge contacted by the support portion of the support apparatus for supporting cartridge is used to support the entire cartridge weight where large size substrate is accommodated. The cartridge for substrate of the invention is formed such that it is capable of accommodating plural substrates, and plural support bodies are disposed between the upper frame body and the lower frame body. The lower frame body, which is formed to have a shape formed of 4 squares stacked in a 2x2 matrix composed of two sheds crossing each other and a tetragon, is provided with the enhancement shed, which starts from the position having the first distance along one of the sheds from the intersection of two sheds and extends to the position having the second distance from the corner portion of the tetragonal frame along the straight line part of the tetragonal frame such that it is not intersected with the other one of the sheds.

Description

200406039 (1) 玖、發明說明 【發明所屬之技術領域】 該發明是關於基板用匣，更詳細地說，是關於能夠多 段收容要多面搭載顯示器用面板裝置的母板’或者大型顯 示器用基板的同時，對於尺寸不同的顯示器用基板的多段 收容也是可能的基板用匣。200406039 (1) 发明 Description of the invention [Technical field to which the invention belongs] This invention relates to a substrate cassette, and more specifically, to a motherboard capable of accommodating a multi-faceted display panel device or a large-size display substrate in multiple stages. At the same time, it is also possible to accommodate a plurality of stages of display substrates with different sizes.

【先前技術】 近年來，伴隨著顯示器的大型化，所欲收容在匣內的 基板尺寸也有大型化的趨勢。因此，就需要有可收納大型 基板的基板用匣。但是，爲要實現大型基板可收納的基板 用匣，產生有種種問題。[Prior Art] In recent years, with the increase in the size of displays, the size of substrates to be housed in a cassette has also tended to increase. Therefore, there is a need for a substrate cassette that can accommodate a large substrate. However, there are various problems in order to realize a substrate cassette for storing large substrates.

首先，第1問題點是：收容在匣內的基板全體重量會 增加，爲要支撐該重量，匣強度需謀求強化，目前爲止以 田字形框體所構成的匣底面的下框體強度需要強化。針對 於此’習知的匣下框體，已提案有日本特許文獻1所記載 之以格子狀框體構成的下框體等。 接著，第2問題點是：基板是使用縱橫尺寸爲 650mmx750mm，厚度爲1.1mm或0.7mm尺寸的基板，但 在將該基板收容在匣內時，是以側部棚片支撐基板的兩側 部’習知，爲要抑制基板的彎曲變形，而將上下收納間隔 變小時’如日本特許文獻2所記載般，已提案有匣的有效 寬度爲W，側部棚片的突出長度爲l，當W爲400 mm以 上時，L/W是設定成1/1〇〜1/4。 -5- «47 (2) (2)200406039 但是，如上述公報中所記載的匣，就利用從支撐體突 設的側部棚片以其端部來支撐玻璃基板的方法而言，當基 板變得更大時彎曲變形就會變大而無法應對。例如：以 6 5 0mm X 8 3 0mm尺寸的基板而言，即使厚度爲1.1mm時其 彎曲變形就大，更何況是厚度爲〇.7mm時彎曲變形就會 變成加倍以上。 因此，如日本特許文獻3所記載般，新揭示有：於左 右的側部框架間隔著指定距離架設有多段的樑構件，於該 樑構件上形成有基板出入用機器手臂叉可出入之上方爲開 放的空隙部，及在比該空隙部還高的位置從裡面側支撐基 板的基板支撐部構造的匣。 此外，第3問題點是：伴隨著顯示器的大型化，雖然 所欲收容在匣內的基板尺寸也有大型化的趨勢，但中型或 小型的顯示器用基板也依然被使用著，從匣的有效率使用 觀點出發，1台匣內可收納不同尺寸基板的方法是於摸索 中。因此，習知，是藉由具備有如日本特許文獻5或特許 文獻6所記載之機構的匣來實現該方法。日本特許文獻5 所記載之匣，是平行配設的一對框體是設有棚片是隔著間 隔配設於上下形成有保持溝的支撐構件，藉由框體彼此連 結成的滑動軌道的伸縮，以應對所欲收納的基板寬度，可 調整匣寬度的基板用匣。另外，日本特許文獻6所記載之 匣，是在上框體和下框體間架設有於上下方向在每個指定 間隔突設有基板載放支撐用棚片的複數支撐體所形成的匣 中，設有可將支撐體要安裝在上框體及下框體上的安裝位 -6 - (3) (3)200406039 置’應對於所欲收納的基板寬度，移動在匣寬度方向的機 【曰本特許文獻1】 特開2001-127146號公報。 【曰本特許文獻2】 特開平9-36219號公報。 【曰本特許文獻3】 特開平11-35089號公報。 【曰本特許文獻4】 特開平1 1 - 1 7692 1號公報。 【曰本特許文獻5】 特開平10-322056號公報。 【曰本特許文獻6】 特開平11-171287號公報。 【發明內容】 〔發明內容所欲解決之課題〕 上述％ 1問題點的狀況，是當以日本特許文獻1所記 載之多數使用加強棧的格子狀框體來構成匣的下框體時， 因匣其本身的重量會增加，使要放置匣的地板等建築物的 強度等也受到影響。此外，大型基板並不僅是放置在平坦 的地板上而已，於搬運時有時需要堆積在堆高機上，或需 要裝塡在各種支撐裝置上，於如此狀況時，即使是以這些 支撐裝置的支撐部所接觸之匣下框體局部的部份來支撐已 (4) (4)200406039 收容有基板的匣全重量時，也必需使匣所產生的彎曲變形 不會波及影響到已收容的基板，所以就需要有可充分滿足 該條件，並且可極力抑制本身重量增加的匣。即，本發明 第1課題，是提供一種即使是以匣支撐用支撐裝置的支撐 部所接觸之匣下框體局部的部份來支撐已收容有大型基板 的匣全重量，也不會使匣所產生的彎曲變形波及影響到已 收容的基板，並且可極力抑制本身重量增加的基板用匣。 接著，上述第2問題點的狀況，是日本特許文獻3所 記載之構造的匣，雖然於原理上即使基板變得更大也可適 用，但若考慮到基板的彎曲變形及機器手臂叉的上下移動 時，各段構成用的樑構件上下尺寸就必須要非常大，，因 此上下間距會變大，使基板的收容效率變得非常差。然而 ，於日本特許文獻4中，是記載有將於上下方向在每個指 定間隔突設有基板載置支撐用棚片的複數支撐體，連結在 上框體和下下框體間形成平行六面體矩形的箱型構造的大 型基板用匣，其爲上述側部棚片是於金屬製的支撐銷前端 物包覆有合成樹脂製的前端套，對形成在上述支撐體上下 方向的每一定間隔上的插入孔嵌入上述支撐銷的基端部， 槪該支撐體的內面側突設有側部棚片所形成的大型基板用 匣。因此，要在如此構成下解決上述問題的本發明第2課 題，是提供一種可將例如尺寸爲1 3 50mmxl 650mm，厚度 爲0.7mm以下之非常大的玻璃基板或合成樹脂製的薄片 狀基板在收容效率高的狀況下，穩定支撐收容的同時，對 基板出入用機器手臂叉的出入也是容易的基板用匣。 -8- (5) (5)200406039 此外，上述第3問題點的狀況，是於日本特許文獻5 所記載之匣中，需要配合所欲收納的基板，來調整上下四 處滑動軌道的伸縮’需花費功夫。另外，於日本特許文獻 6所記載之匣中，是需要將支撐體要安裝在上框體及下框 框體上的上下四處安裝位置，應對著所欲收納的基板寬度 ，於匣寬度方向進行移動調整，所以和日本特許文獻5所 曰己載之E相问，需花費功夫。即，上述兩厘，均有需要應 對著所欲收納的基板寬度來調整匣寬度所謂的需花費功夫 的問題。因此，爲要解決該問題，本發明第3課題，是提 供一種不需要配合所欲收納的基板寬度來調整匣寬度的基 板用匣。 〔用以解決課題之手段〕 首先，對要解決上述第1課題的基板用匣進行說明。 該基板用匣，其可收納複數基板，是於上框體和下框體間 架設有複數支撐體的基板用匣，其上述下框體，是在具備 著以相互交叉的2支棧和四角形框所構成的大致呈田字形 部份的同時，具備有從上述2支棧的交點沿著該2支棧中 的一方棧離有第1距離的位置開始，與上述2支棧中的另 一方棧不相交地，延伸到從四角形框的角部沿著四角形框 的直線部份離有第2距離的位置爲止的加強棧。 此外，針對其可收納複數基板，於上框體和下框體間 架設有複數支撐體的同時，其上述下框體，是在具備著以 相互交叉的2支棧和四角形框所構成的大致呈田字形部份 -9 - (6) (6)200406039 的基板用匣，是可構成爲具備有從上述2支棧的交點沿著 該2支棧中的一方棧離有第1距離的位置開始，與上述2 支棧中的另一方棧不相交地，延伸至上述四角形框的角部 爲止的加強棧，或者是，也可構成爲具備有從上述2支棧 的交點開始，延伸至從上述四角形框的角部沿著上述四角 形框的直線部份離有第2距離的位置爲止的加強棧。 於上述基板用匣中，上述第1距離，最好是比上述_ 方棧和上述加強棧的交點起，與上述2支棧中的另一方棧 不相交地，至沿著上述一方棧相交在上述四角形框上的交 點爲止的距離速小。另外，上述第2距離，最好是比上述 四角形框和上述加強棧的交點起，至沿著包括著該交點的 上述四角形框的直線部份相交在上述一方棧或上述另一方 棧上的交點爲止的距離還小。 於上述基板用匣中，在上述支撐體上以突設有上述基 板載置支撐用棚片爲佳。 此外，於上述基板用匣中，上述第1距離，是以 80〜200mm爲佳。另外，上述第2距離，是以80〜200mm 爲佳。 又，於上述基板用匣中，上述上框體也可構成爲大致 呈田字形框體。 接著，對要解決上述第2課題的基板用匣進行說明。 該基板用匣，是將於上下方向在每個指定間隔上突設有上 述基板載置支撐用側部棚片的支撐體，連結在上框體和下 框體間形成爲平行六面體矩形箱型構造的基板用匣，其特 -10- (7) (7)200406039 徵爲上述側部棚片，是在上述基板收容用的匣有效寬度爲 W，該側部棚片的突出長爲 L時，其關係是設定成 l/4<L/W<l/2。 此外，本發明之基板用匣，也可構成爲是將於上下方 向在每個指定間隔上突設有上述基板載置支撐用側部棚片 的支撐體，連結在上框體和下框體間形成爲平行六面體矩 形的箱型構造的基板用匣，上述側部棚片，是在上述基板 收容用的匣有效寬度爲W，該側部棚片的突出長爲L時 ，其關係是設定成1/4 <L/W< 1/2的同時，位於兩側上的側 部棚片前端的間隔D至少是設定成基板出入用機器手臂 叉可通過的間隔。 於此，上述側部棚片，爲棒狀或板狀，其主要部份是 以金屬材或陶瓷材或碳纖和合成樹脂的複合材製作而成， 至少於其前端部是設有上述基板載置支撐用的載置支撐部 〇 此外，上述側部棚片，以在金屬製上述支撐銷的至少 前端部和基部設有上述基板載置支撐用的合成樹脂製載置 支撐部爲佳。於該狀況，上述側部棚片的支撐銷全長都是 以氟素烤漆或以合成樹脂包覆著爲佳。 另外，最好是於上述支撐體在每一定間隔形成有貫穿 內外的安裝孔，在留有上述支撐銷的基端然後於基端部上 一體形成有接合於該支撐體內側面的合成樹脂製保持構件 的同時，於該支撐銷的基端形成有螺軸部，以該螺軸部是 從內方插入在上述支撐體的安裝孔並且是將上述保持構件 -11 - (8) (8)200406039 接合在支撐體內面側的狀態，從外側對上述螺軸部螺合螺 帽，在上述支撐體上形成爲突設著側部棚片。 接著，最好是於設置在上述側部棚片的支撐銷基端部 上的保持構件，設有上述基板側緣抵接止動用的緩衝部。 其次，對要解決上述第3課題的基板用匣進行說明。 該基板用匣，是將配設在左右，於上下方向在每個指定間 隔於內側突設有基板載置支撐用側部棚片的複數支撐體， 連結在上框體和下框體間形成爲平行六面體矩形箱型構造 的同時，爲至少可收容2種類寬度不同上述基板的基板用 匣，其特徵爲於上述側部棚片的前端部，設有上述基板左 右側部載置支撐用的側部載置支撐部的同時，於上述側部 棚片的基端部，設有可抵接止動第1基板左端或右端的外 側側止動件，於上述側部棚片的中途部，設有有可抵接止 動比上述第1基板還寬度窄的第2基板左端或右端的內側 側止動件。 於上述基板用匣中，在同一上述側部棚片上，也可具 備有要各別應對於寬度不同的複數上述第2基板的上述內 側側止動件。 此外，於上述基板用匣中，最好是將配合著上述基板 深度尺寸而附設的可拆裝的中央部支撐體，立設在欲收容 的上述基板後端邊位置上，連結於上述上框體和上述下框 體的同時，於上述中央支撐體上在前方的每個指定間隔突 設有上述基板載置支撐用的後部棚片，於該後部棚片前端 部上設有上述基板後部載置支撐用的後部載置支撐部。 -12- (9) (9)200406039 另外，於上述基板用匣中，上述後部載置支撐部的上 端位置，最好是形成爲要比可將被載置支撐在該後部載置 支撐部上的上述基板於同時載置支撐的上述側部棚片上所 設置的上述側部載置支撐部的上端位置還高。 接著，於上述基板用匣中，最好是將上述內側側止動 件的上端高度，形成爲等於上述側部載置支撐部的上端高 度。 此外，於上述基板用匣中，最好是將被設置成比上述 內側側止動件的上述上端還低位置上的上述第2基板左端 或右端保持用的保持部和從該保持部豎立的限制部具備在 上述內側側止動件上的同時，將上述後部棚片的高度設定 成上述第2基板的上述左端及上述右端是比上述側部載置 支撐部還低。 又，於上述基板用匣中，也可將上述後部棚片的長度 設定成上述後部載置支撐部是可載置支撐著上述基板的大 致呈中心部。 另外，於上述基板用匣中，也可於上述後部棚片的基 端部，設有上述基板後端抵接止動用的後部棚片後止動件 〇 此外，於上述基板用匣中，也可於上述側部棚片，備 有可抵接止動著上述基板後端的同時於上下方向具撓性的 側部棚片後止動件。 又，於上述基板用匣中，也可於最前部的左右上述支 撐體上，將上述側部棚片取代成是突設有具備著上述基板 -13· (10) (10)200406039 前端抵接止動用的前止動件。 【實施方式】 〔發明之實施形態〕 接著，根據圖面對本發明之實施形態進行詳細說明。 第1圖爲本發明第1實施例的基板用匣透視圖，第2圖爲 其平面圖。於第1圖及第2圖中，第1實施例的基板用匣 ，是形成爲平行六面體矩形箱型構造，其是構成爲在縱向 爲長度方向的長方形下框體2和縱向同樣爲長度方向的長 方形上框體〗間，架設有：8支側部支撐體3和2支後部 支撐體6及2支角支撐體1〇。該基板用匣的尺寸，是形 成爲可收納縱爲1800mm、橫爲1500 mm以上的基板。圖 中’箭頭符號J，是表示要插入在第1實施例的基板用匣 內的基板S的插入方向，此與上述縱方向同方向。 第3圖爲下框體2的局部放大圖。於第2圖及第3圖 中’下框體2，在具備有：以下框體縱桿2a和下框體橫 椁2b所形成的四角形框；及，設置在該四角形框內，以 相互交叉的2支棧下框體縱棧2c和下框體橫棧2d所構成 的大致呈田字形部份的同時，具備有從上述2支棧的交點 2g沿著該2支棧中一方棧的下框體縱棧2c離有第1距離 的基點2h開始，與上述2支棧中另一方棧的下框體橫棧 2d不相交地，延伸至從四角形框的角2f沿著四角形框的 下框體縱桿2a直線部份離有第2距離的到點2j爲止的加 強棧2e。另，於第2圖及第3圖中，角2f是下框體縱桿 -14- (11) (11)200406039 2a中心_和下框體橫桿2b中心線的交點；交點2g是下 框體縱棧2c中心線和下框體橫棧2d中心線的交點；基點 2h是下框體縱棧2c中心線和加強棧2e中心線的交點； 到點2 j是下框體縱桿2 a中心線和加強棧2 e中心線的交 點。又，縱桿中點2 η是下框體縱桿2 a中心線和下框體橫 棧2d中心線的交點，橫桿中點2p是下框體橫桿2b中心 線下框體縱棧2 c中心線的交點。 因此，上述第1距離，是交點2 g至基點2 h的距離， 其爲第3圖中的L11。該第1距離L11，是設定成要比「 從一方棧的下框體縱棧2c和加強棧2 e的交點基點2h起 ，與另一方棧的下框體橫棧2d不相交地，至沿著上述一 方棧的下框體縱棧2c相交在上述四角形框的下框體橫桿 2b上的交點橫桿中點2p爲止的」距離L 1 2還小。 另外，上述第2距離，是角2 f至到點2 j的距離，其 爲第3圖中的L2 1。該第2距離L2 1，是設定成要比「從 四角形框的下框體縱桿2a和加強棧2e的交點到點2j起 ’至沿著包括有該到點2 j的四角形框的下框體縱桿2 a直 線部份相交在另一方棧的下框體橫棧2d上的交點縱桿中 點2 η爲止的」距離L 2 2還小。 將上述加強棧2e，架設成並不從交點2g開始而是從 離該交點2有距離的基點2h開始，並非延伸至角2f而是 延伸至離該角2f有距離的到點2j。其原因在於當要載置 基板用匣時’爲使其定位而具備在載置場所上從平面看爲 大致呈正方形的匣定位導件1 2，如第4 ( a ) 、（ b )圖所 -15- (12) 200406039 不，因是嵌入在下框體2的角2f內側四角落，以及 入在下框體縱棧2c和下框體橫棧2d的交點2g周圍 成的四角落’所以可確保該定位空間。因此，上述第 離L11及第2距離L21，只要形成爲從平面看爲大致 方形的匣定位導件的一邊大致長度即可，但該指定距 於實用上是爲80〜20 0 mm。於此，第1距離l 1 1和第 離L21，並非要設定成相同不可，視狀況設定成不同 。第4圖中，圖號13是具備有該匣定位導件12的匣 導件台。 另，如第4(a)圖所示，當只使用具備有可對 體2的角2f內側四角落進行嵌入的厘定位導件12的 位導件台13時，也可將第1距離L11爲零。該狀況 第1 4 ( a )圖的第5實施例所示，是將加強棧2t設置 下框體縱棧2c和下框體橫棧2d的交點2g開始，延 從四角形框的角部2 f沿著下框体縱桿2 a直線部份離 2距離L21的到點2j。此外，如第4 ( b )圖所示， 使用具備有可對下框體縱棧2c和下框體橫棧2d的 2g周圍所形成的四角落進行嵌入的E定位導件12的 位導件台13時，也可將第2距離L12爲零。該狀況 第1 4 ( b )圖的第6實施例所示，是將加強棧2u設 從下框體縱棧2c和下框體橫棧2d的交點2g沿著下 縱棧2c離有第1距離的基點2h開始，與下框體橫 不相交地，延伸至上述四角形框的角部2f。 上框體1，是由：上框體縱桿la和上框體橫桿 是嵌 所形 1距 呈正 離， 2距 亦可 定位 下框 匣定 ，如 成從 伸至 有第 當只 交點 匣定 ，如 置成 框體 棧2d lb所 -16- (13) (13)200406039 形成的四角形框；將該四角形框的框面分成2個橫向的上 框體縱棧lc;與該上框體縱棧lc交叉並且是將上框體縱 桿1 a和上框體橫桿1 b所形成的四角形框的框面分成2個 縱向的上框體橫棧1 d所構成。此外，側部支撐體3、3 · • •，是立設在下框體2的下框體縱桿2a上架設在下框 體縱桿2a和上框體1的上框體縱桿1 a間；後部支撐體6 、6是立設在下框體2的後方的下體橫桿2b上架設在下 體橫桿2b和上框體1後方的上框體橫桿1 b間；立設在下 框體2的下框體縱桿2a和前方下框體橫桿2b所形成的角 上的角支撐體10、1〇是架設在上框體1的上框體縱桿la 和前方上框體橫桿1 b所形成的角間。另外，做爲側部支 撐體3的加強用，設有水平加強棧8和斜加強棧9。First, the first problem is that the overall weight of the substrate contained in the box will increase. In order to support this weight, the strength of the box needs to be strengthened. The strength of the lower frame of the bottom surface of the box formed by the field-shaped frame so far needs to be strengthened . With regard to this conventional box lower case, a lower case having a grid-like case described in Japanese Patent Document 1 has been proposed. Next, the second problem is that the substrate uses a substrate having a size of 650 mm x 750 mm in length and width and a thickness of 1.1 mm or 0.7 mm. However, when the substrate is housed in a cassette, both sides of the substrate are supported by side sheds. 'It is known that the upper and lower storage intervals are reduced in order to suppress the bending deformation of the substrate.' As described in Japanese Patent Document 2, it has been proposed that the effective width of the cassette is W, and the protruding length of the side panel is l. When W is 400 mm or more, L / W is set from 1/1 to 1/4. -5- «47 (2) (2) 200406039 However, as for the cassette described in the above publication, in the method of supporting a glass substrate with its end portion using a side shed sheet protruding from a support, when the substrate As it gets larger, the bending deformation becomes larger and cannot be coped with. For example: For a substrate of size 650mm X 830mm, the bending deformation is large even when the thickness is 1.1mm, not to mention that the bending deformation is more than doubled when the thickness is 0.7mm. Therefore, as described in Japanese Patent No. 3, it is newly disclosed that a plurality of beam members are set up on the left and right side frames at a predetermined distance, and the beam members are formed with a robot arm fork for entering and exiting the substrate as follows: An open gap portion, and a cassette having a substrate support portion structure that supports the substrate from the back side at a position higher than the gap portion. In addition, the third problem is that with the enlargement of the display, although the size of the substrate to be accommodated in the box also tends to increase, the medium or small-sized display substrate is still being used, and the efficiency of the box is reduced. From the viewpoint of use, the method of accommodating substrates of different sizes in one box is to explore. Therefore, it is known that this method is realized by a cassette provided with a mechanism described in Japanese Patent Document 5 or Patent Document 6. The box described in Japanese Patent Document 5 is a pair of frames arranged in parallel. It is provided with a slab. It is a sliding rail formed by supporting members formed with holding grooves above and below through a space. The slide rails are connected to each other by the frames. The substrate cassette can be expanded and contracted to accommodate the width of the substrate to be stored, and the cassette width can be adjusted. In addition, the box described in Japanese Patent Document 6 is a box formed by a plurality of support bodies in which the substrates for supporting and supporting slabs are protrudingly provided at predetermined intervals between the upper frame and the lower frame. , There is a mounting position where the support is to be mounted on the upper frame and the lower frame-6-(3) (3) 200406039 Set the machine that should move in the box width direction for the width of the substrate to be stored. Japanese Patent Application Publication No. 2001-127146. [Japanese Patent Document 2] Japanese Patent Application Laid-Open No. 9-36219. [Japanese Patent Document 3] Japanese Patent Application Laid-Open No. 11-35089. [Japanese Patent Document 4] Japanese Patent Application Laid-Open No. 1 1-1 7692 1. [Japanese Patent Document 5] Japanese Patent Application Laid-Open No. 10-322056. [Japanese Patent Document 6] Japanese Patent Application Laid-Open No. 11-171287. [Summary of the Invention] [Problems to be Solved by the Invention] The situation of the above-mentioned problem of% 1 is that when the lower frame of the cassette is formed by using a lattice-shaped frame of a reinforcement stack as described in most of Japanese Patent Document 1, because The weight of the box itself will increase, and the strength of the building on which the box is to be placed will also be affected. In addition, large substrates are not only placed on a flat floor. They may need to be stacked on a stacker or mounted on various support devices during transportation. In such a situation, even with these support devices, The part of the lower frame of the box contacted by the support part to support the entire weight of the box containing the substrate (4) (4) 200406039. It is also necessary to prevent the bending deformation generated by the box from affecting the already contained substrate. Therefore, it is necessary to have a cassette that can fully meet this condition and can suppress the increase of its weight as much as possible. That is, the first object of the present invention is to provide a cassette that does not cause the cassette to be full, even if it supports the entire weight of the cassette in which a large substrate has been accommodated, with a part of the lower casing of the cassette that the supporting portion of the cassette supporting support device contacts. The resulting bending deformation affects a substrate that has already been accommodated, and can suppress the increase in weight of the substrate cassette as much as possible. Next, the situation of the second problem mentioned above is a cassette with a structure described in Japanese Patent Document 3. Although it is applicable in principle even if the substrate becomes larger, if the bending deformation of the substrate and the up and down of the robot arm fork are taken into consideration When moving, the upper and lower dimensions of the beam members used for the construction of each stage must be very large, so the upper and lower distances will be increased, and the substrate storage efficiency will be very poor. However, in Japanese Patent Document 4, it is described that a plurality of support bodies are provided with a substrate-mounting support slab protruding at each predetermined interval in the up-down direction, and are connected in parallel to form an upper six and a lower lower frame. The rectangular substrate box-shaped large substrate cassette is a side cover in which the front end of a metal support pin is covered with a synthetic resin front end cover, and is fixed to each of the upper and lower directions formed on the support. An insertion hole in the interval is fitted into a base end portion of the support pin, and a large substrate box formed by a side shed is protruded from an inner surface side of the support body. Therefore, in order to solve the above-mentioned problem, the second problem of the present invention is to provide a very large glass substrate or a synthetic resin sheet substrate having a size of 1 3 50 mm × l 650 mm and a thickness of 0.7 mm or less. In the case of high storage efficiency, it is also easy to insert and remove the substrate fork into and out of the robot arm fork while supporting and stably storing the substrate. -8- (5) (5) 200406039 In addition, the situation of the third problem mentioned above is in the box described in Japanese Patent Document 5, and it is necessary to cooperate with the substrate to be stored to adjust the expansion and contraction of the upper and lower sliding rails. Spend time. In addition, in the box described in Japanese Patent Document 6, it is necessary to mount the support body at four upper and lower mounting positions on the upper frame body and the lower frame body, and move in the width direction of the box in accordance with the width of the substrate to be stored. Adjustment, so it takes time to ask about E already contained in Japanese Patent Literature 5. That is, in both cases, it is necessary to adjust the width of the cassette according to the width of the substrate to be stored, which is a problem that requires labor. Therefore, in order to solve this problem, a third object of the present invention is to provide a substrate cassette without adjusting the cassette width in accordance with the width of the substrate to be stored. [Means for Solving the Problems] First, a substrate cassette for solving the above-mentioned first problem will be described. This substrate cassette is capable of accommodating a plurality of substrates, and is a substrate cassette having a plurality of supporting members interposed between an upper frame and a lower frame. The lower frame is provided with two stacks and a quadrangle which intersect each other. The frame is formed in a substantially field-shaped portion, and is provided with a position at a first distance from the intersection of the two stacks along one of the two stacks and the other of the two stacks. The stacks do not intersect, and the reinforcement stack extends to a position at a second distance from the corner of the quadrangular frame along the straight portion of the quadrangular frame. In addition, for the plurality of substrates that can be accommodated, a plurality of support members are provided between the upper frame body and the lower frame body, and the lower frame body is generally provided with two stacks and a quadrangular frame that intersect each other. The field-shaped part -9-(6) (6) 200406039 can be configured to have a position at a first distance from the intersection of the two stacks along one of the two stacks Initially, the reinforcing stack extending to the corner of the quadrangular frame without intersecting the other stack of the two stacks may be configured to include a reinforcement stack extending from the intersection of the two stacks to A corner of the quadrangular frame is a reinforcement stack along a straight portion of the quadrangular frame at a second distance from the position. In the substrate cassette, the first distance is preferably not more than the intersection of the _ square stack and the reinforcement stack, and does not intersect with the other stack of the two branch stacks, and intersects along the one stack. The distance to the intersection on the quadrangular frame is small. In addition, it is preferable that the second distance is from an intersection point of the quadrangular frame and the reinforcement stack to an intersection point on the one stack or the other stack along a straight line portion of the quadrangular frame including the intersection point. The distance so far is still small. In the substrate cassette, it is preferable that the support is provided with the substrate on the support in a protruding manner. In the substrate cassette, the first distance is preferably 80 to 200 mm. The second distance is preferably 80 to 200 mm. Further, in the substrate cassette, the upper frame may be configured as a substantially field-shaped frame. Next, a substrate cassette for solving the second problem will be described. The substrate cassette is a support body provided with the above-mentioned substrate mounting support side sheds protruding from the vertical direction at every designated interval, and is connected to form a parallelepiped rectangle between the upper frame and the lower frame. The box-shaped substrate box has a special feature of -10- (7) (7) 200406039. The effective width of the box for receiving the substrate is W, and the protruding length of the side plate is At L, the relationship is set to l / 4 < L / W < l / 2. In addition, the substrate cassette according to the present invention may be configured as a support body provided with the above-mentioned substrate mounting support side sheds protruding from the vertical direction at every predetermined interval, and connected to the upper frame body and the lower frame body. The side box sheet is formed in a parallelepiped rectangular box-shaped substrate box. When the effective width of the side box sheet is W and the protrusion length of the side box sheet is L, there is a relationship. It is set to 1/4 < L / W < 1/2, and the interval D of the front end of the side shed on both sides is set to at least the interval through which the robot arm forks for board access can pass. Here, the side shed sheet is rod-shaped or plate-shaped, and its main part is made of metal material or ceramic material or composite material of carbon fiber and synthetic resin, and at least the front end portion is provided with the substrate carrier. Placement support part for placement support. Preferably, the side shelf sheet is provided with a synthetic resin placement support part for the substrate placement support at least a front end portion and a base portion of the metal support pin. In this case, the support pins of the side sheds are preferably covered with fluorine paint or synthetic resin. In addition, it is preferable that the support body is formed with mounting holes penetrating inside and outside at regular intervals, and a synthetic resin holding member that is joined to the inner surface of the support body is integrally formed on the base end portion with the support pin and the base end portion. At the same time, a screw shaft portion is formed at the base end of the support pin, and the screw shaft portion is inserted into the mounting hole of the support body from the inside and the holding member -11-(8) (8) 200406039 is joined In a state where the inner surface of the support body is supported, the nut is screwed onto the screw shaft portion from the outside, and a side shed is formed on the support body in a protruding manner. Next, it is preferable that the holding member provided at the base end portion of the support pin of the side panel is provided with a buffer portion for abutting the side edge of the substrate. Next, a substrate cassette for solving the third problem will be described. The substrate cassette is a plurality of support bodies which are arranged on the left and right, and are provided with substrate supporting side sheds protruding from the inside at predetermined intervals in the up-down direction, and are connected between the upper frame and the lower frame. It is a parallelepiped rectangular box structure, and it is a substrate cassette that can accommodate at least two types of substrates with different widths. It is characterized in that the left and right side portions of the substrate are placed on the front end of the side shed. At the same time as the supporting portion is placed on the side, an outer side stopper is provided at the base end portion of the side slab to abut against the left or right end of the first substrate, and is halfway through the side slab. The inner portion is provided with an inner side stopper that can abut against the left end or the right end of the second substrate having a width narrower than that of the first substrate. In the substrate cassette, the inner side stopper may be provided on the same side shed sheet, each of which has a plurality of second substrates having different widths. Further, in the substrate cassette, it is preferable that a detachable central support body attached in accordance with the depth dimension of the substrate is erected at a rear edge position of the substrate to be accommodated and connected to the upper frame. At the same time as the body and the lower frame, the central support body is provided with a rear shelf plate for supporting the substrate at each specified interval in the front, and a rear surface of the substrate is provided on the front end of the rear shelf plate. The supporting part is placed at the rear for supporting. -12- (9) (9) 200406039 In the above-mentioned substrate cassette, it is preferable that the upper end position of the rear mounting support portion is formed so as to be able to be supported on the rear mounting support portion. The position of the upper end of the substrate placed on the side shed sheet which is simultaneously supported is still high. Next, in the substrate cassette, it is preferable that the height of the upper end of the inner-side stopper is formed to be equal to the height of the upper end of the side-mounting support portion. Further, in the substrate cassette, it is preferable that a holding portion for holding the left or right end of the second substrate which is provided at a position lower than the upper end of the inner side stopper, and a holding portion standing up from the holding portion. The restricting portion is provided on the inner side stopper, and sets the height of the rear shelf sheet so that the left end and the right end of the second substrate are lower than the side portion supporting support. Further, in the substrate cassette, the length of the rear shelf sheet may be set so that the rear mounting support portion is a substantially central portion that can support the substrate. In addition, in the substrate cassette, the base end portion of the rear panel may be provided with a rear panel rear stopper for stopping the rear end of the substrate. In addition, in the substrate cassette, The side shed sheet can be provided with a side shed sheet rear stopper which can abut against and stop the rear end of the substrate and is flexible in the vertical direction. In the substrate cassette, the side sheds may be provided on the left and right support bodies at the foremost portion to be provided with the substrate -13 · (10) (10) 200406039. Front stop for stop. [Embodiment] [Embodiment of Invention] Next, an embodiment of the present invention will be described in detail with reference to the drawings. Fig. 1 is a perspective view of a substrate cassette according to a first embodiment of the present invention, and Fig. 2 is a plan view thereof. In FIGS. 1 and 2, the substrate cassette according to the first embodiment is formed in a parallelepiped rectangular box structure, and has a rectangular lower frame 2 having a longitudinal direction and a longitudinal direction. Between the rectangular upper frame in the length direction, 8 side support bodies 3, 2 rear support bodies 6 and 2 angle support bodies 10 are set up. The size of the substrate cassette is designed to accommodate substrates with a length of 1800 mm and a width of 1500 mm or more. The arrow symbol J in the figure indicates the insertion direction of the substrate S to be inserted into the substrate cassette of the first embodiment, and this is the same direction as the above-mentioned vertical direction. FIG. 3 is a partially enlarged view of the lower frame 2. In Figs. 2 and 3, the 'lower frame 2 is provided with: a quadrangular frame formed by the following frame longitudinal bars 2a and the lower frame cross 2b; and provided in the quadrangular frame so as to cross each other The two-stack lower frame vertical stack 2c and the lower-frame horizontal stack 2d form a substantially field-shaped portion, and are provided with an intersection 2g from the intersection of the two stacks along one of the two stacks. The vertical frame 2c of the frame starts from the base point 2h with a first distance, and does not intersect with the lower frame horizontal stack 2d of the other stack of the two branches, and extends from the corner 2f of the quadrilateral frame to the lower frame of the quadrilateral frame. The reinforcement stack 2e up to the point 2j with a second distance from the straight portion of the body vertical bar 2a. In addition, in Figs. 2 and 3, the angle 2f is the intersection point of the lower frame longitudinal bar -14- (11) (11) 200406039 2a center_ and the lower frame crossbar 2b center line; the intersection point 2g is the lower frame The intersection of the centerline of the vertical stack 2c and the centerline of the lower frame horizontal stack 2d; the base point 2h is the intersection of the centerline of the lower frame vertical stack 2c and the centerline of the reinforcement stack 2e; to point 2j is the lower frame vertical rod 2a The intersection of the centerline and the centerline of the reinforcement stack 2e. The midpoint 2 of the vertical bar is the intersection of the centerline of the lower frame vertical bar 2a and the centerline of the lower frame horizontal stack 2d, and the middle point 2p of the horizontal bar is the lower frame vertical stack 2 c the intersection of the centerline. Therefore, the first distance is the distance from the intersection point 2 g to the base point 2 h, which is L11 in FIG. 3. The first distance L11 is set to be "not starting from the intersection point 2h of the lower frame vertical stack 2c and the reinforcement stack 2e of one stack, and not intersecting with the lower frame horizontal stack 2d of the other stack, The distance L 1 2 until the intersection of the lower frame vertical stack 2c of the one stack and the intersection point 2p on the lower frame crossbar 2b of the quadrangular frame is small. The second distance is the distance from the angle 2 f to the point 2 j, and it is L2 1 in the third figure. The second distance L2 1 is set to be "from the intersection of the lower frame longitudinal bar 2a of the quadrangular frame and the reinforcement stack 2e to the point 2j" to the lower frame along the quadrangular frame including the point 2j. The distance “L 2 2” between the vertical part of the body vertical bar 2 a and the intersection point 2 η of the vertical bar on the lower frame horizontal stack 2 d of the other stack is still small. The reinforcement stack 2e is set up so that it does not start from the intersection 2g but from a base point 2h that is a distance from the intersection 2 and does not extend to the angle 2f but extends to a point 2j that is a distance from the angle 2f. The reason for this is that when a substrate cassette is to be placed, a cassette positioning guide 12 that is substantially square in a plan view on the placement site is provided for positioning, as shown in Figs. 4 (a) and (b). -15- (12) 200406039 No, because it is embedded in the four corners inside the corner 2f of the lower frame 2 and the four corners formed around the intersection 2g of the lower frame vertical stack 2c and the lower frame horizontal stack 2d, so it can be ensured The positioning space. Therefore, the above-mentioned second distance L11 and second distance L21 may be formed to have an approximate length of one side of the cassette positioning guide which is substantially square when viewed from a plane, but the designated distance is 80 to 200 mm in practical terms. Here, the first distance l 1 1 and the first distance L21 are not required to be set to be the same, and they are set to be different depending on the situation. In Fig. 4, Fig. 13 is a magazine guide table provided with the magazine positioning guide 12. As shown in Figs. In addition, as shown in FIG. 4 (a), when only the bit guide table 13 provided with the centrifugal positioning guide 12 capable of inserting the inside four corners of the corner 2f of the body 2 is used, the first distance L11 may be set. Is zero. As shown in the fifth embodiment of FIG. 14 (a) in this situation, the reinforcement stack 2t is set at the intersection 2g of the lower frame vertical stack 2c and the lower frame horizontal stack 2d, and extends from the corner 2f of the quadrangular frame. Along the straight part of the lower frame 2a, the point 2j from the distance L21 from 2 is reached. Further, as shown in FIG. 4 (b), a position guide provided with an E positioning guide 12 capable of embedding four corners formed around the lower frame vertical stack 2c and the lower frame horizontal stack 2d is used. When the stage 13 is used, the second distance L12 may be zero. In this situation, as shown in the sixth embodiment of FIG. 14 (b), the reinforcing stack 2u is set from the intersection 2g of the lower frame vertical stack 2c and the lower frame horizontal stack 2d along the lower vertical stack 2c. The base point of the distance starts at 2h, extends transversely without intersecting with the lower frame, and extends to the corner 2f of the aforementioned quadrangular frame. The upper frame 1 is composed of: the upper frame vertical rod la and the upper frame crossbar are embedded in a shape of 1 distance is positive, 2 distances can also be positioned in the lower frame box, such as from the extension to the first intersection box The quadrilateral frame formed by placing a frame stack 2d lb -16- (13) (13) 200406039; divide the frame surface of the quadrangular frame into two horizontal upper frame vertical stacks lc; and the upper frame The vertical stack lc intersects and is formed by dividing the frame surface of the quadrangular frame formed by the upper frame longitudinal bar 1 a and the upper frame cross bar 1 b into two vertical upper frame horizontal stacks 1 d. In addition, the side supports 3, 3 • • • are erected between the lower frame longitudinal bar 2a and the upper frame longitudinal bar 1 a of the lower frame 2 on the lower frame 2; The rear support bodies 6 and 6 are erected between the lower body crossbar 2b and the upper frame crossbar 1b at the rear of the lower frame 2; The corner support bodies 10 and 10 at the corners formed by the lower frame longitudinal bar 2a and the front lower frame crossbar 2b are the upper frame longitudinal bar la and the front upper frame cross bar 1 b which are mounted on the upper frame 1. The angle formed. In addition, a horizontal reinforcing stack 8 and an oblique reinforcing stack 9 are provided for reinforcing the side support 3.

於該基板用匣，爲要支撐著從其前方插入的基板S， 在側部支撐體3、3 ···上，朝內側突設有複數側部棚 片 5、5 · · ·。此外，爲要防止從其前方插入的基板S 朝前方飛出，於角支撐體備有飛出防止片11。 於上述第1實施例的基板用匣，雖是將下框體的加強 棧2 e架設成是從下框體縱棧2 c和下框體橫棧2 d之2支 棧的交點2g沿著該2支棧中一方棧的下框體縱棧2c離有 第1距離的基點2h開始，與上述2支棧中另一方棧的下 框體橫棧2d不相交地，延伸至從四角形框的角2f沿著四 角形框的下框體縱桿2a直線部份離有第2距離的到點2j ’但加強棧的架設位置也可與此不同。於第5圖中所示之 第2實施例的基板用匣，是將下框體2的加強棧2k架設 •17- (14) 200406039 成是從上述2支棧的交點2g沿著該2支棧中一方棧的下 框體縱棧2c離有第1距離的基點2h開始，與上述2支棧 中另一方棧的下框體橫棧2d不相交地，延伸至從四角形 框的角2f沿著四角形框的下框體橫桿2b直線部份離有第 2距離的到點2m。 於該狀況的第1距離，是與第1實施例相同，其爲交 點2g至基點2h的距離，該第1距離，是設定成要比「從 一方棧的下框體縱棧2 c和加強棧2 e的交點基點2 h起， 與另一方棧的下框體橫棧2d不相交地至沿著上述一方棧 的下框體縱棧2c相交在上述四角形框的下框體橫桿2b上 的交點橫桿中點2p爲止的」距離還小。 另一方面，第2距離雖是爲角f至到點2m的距離， 但該第2距離，是設定成要比「從四角形框的下框體橫桿 2 b和加強棧2 e的交點其爲到點2m起，至沿著包括有該 到點2m的四角形框的下框體橫桿2b直線部份相交在一 方棧的下框體縱棧2 c上的交點橫桿中點2 p爲止的」距離 還小。 該弟2貫施例的基板用匣’只有上述加強梭2 k的架 設位置是與第1實施例的基板用匣的加強棧2 e不同，其 ί也部份完全與第1實施例的基板用匣相同。 a 此外，該第2實施例的狀況，也是和第1實施例相同 ’如第4(a)圖所示，當只使用具備有可對下框體2的 角2f內側四角落進行嵌入的匣定位導件12的匣定位導件 台13時，第丨距離L11也可爲零。該狀況，如第15(To support the substrate S inserted from the front thereof, a plurality of side sheds 5 and 5 are provided on the side support bodies 3 and 3... Further, in order to prevent the substrate S inserted from the front thereof from flying out, the corner support body is provided with a fly-out prevention sheet 11. In the substrate cassette for the first embodiment, the reinforcing frame 2 e of the lower frame is set up from the intersection 2 g of the two branches of the lower frame vertical stack 2 c and the lower frame horizontal stack 2 d. The lower frame vertical stack 2c of one stack of the two stacks starts from the base point 2h with a first distance, and does not intersect with the lower frame horizontal stack 2d of the other stack of the two stacks, extending to the quadrangular frame. The angle 2f is along the lower frame longitudinal bar 2a of the quadrangular frame, and reaches the point 2j ′ at a second distance from the straight portion of the quadratic frame. However, the installation position of the reinforcement stack may be different from this. The substrate cassette for the second embodiment shown in FIG. 5 erected the reinforcement stack 2k of the lower frame 2 • 17- (14) 200406039 is formed from the intersection 2g of the two stacks along the two The lower frame vertical stack 2c of one stack in the stack starts from the base point 2h with a first distance, and does not intersect with the lower frame horizontal stack 2d of the other stack in the two stacks, and extends from the corner 2f of the quadrangular frame. The straight part of the lower frame crossbar 2b that faces the quadrangular frame is 2m away from the point with a second distance. The first distance in this situation is the same as the first embodiment, which is the distance from the intersection point 2g to the base point 2h. The first distance is set to be greater than "from the lower frame of the one stack to the vertical stack 2c and strengthen Starting from the base point 2h of the intersection point of stack 2e, it intersects with the lower frame horizontal stack 2d of the other stack to intersect with the lower frame vertical stack 2c along the one stack on the lower frame crossbar 2b of the quadrangular frame. The distance from the intersection of the crossbars to the middle point 2p is still small. On the other hand, although the second distance is the distance from the angle f to the point 2m, the second distance is set to be more than "the intersection between the lower frame crossbar 2b of the quadrangular frame and the reinforcement stack 2e. Starting from point 2m, to the intersection of the lower frame crossbar 2b which includes the quadrilateral frame of the point 2m, the line intersects at the intersection point 2p of the intersection crossbar on the lower frame vertical stack 2c of one stack. The distance is small. In the second embodiment, only the mounting position of the above-mentioned reinforcing shuttle 2 k is different from the reinforcing stack 2 e of the substrate cassette of the first embodiment, and it is also partially completely different from the substrate of the first embodiment. Use the same box. a In addition, the situation of the second embodiment is the same as that of the first embodiment. As shown in FIG. 4 (a), when only a cassette provided with four corners inside the corner 2f of the lower frame 2 can be inserted. When the cassette guide 13 of the positioning guide 12 is positioned, the first distance L11 may also be zero. The situation, as in section 15 (

-18- (15) (15)200406039 )圖所示，是將加強棧2v設置成從下框體縱棧2c和下框 體橫棧2d的交點2g開始，延伸至從四角形框的角部2f 沿著下框体橫桿2b直線部份離有第2距離L21的到點2m 。另外’如第4 ( b )圖所示，當只使用具備有可對下框 體縱棧2c和下框體橫棧2d的交點2g周圍所形成的四角 落進行嵌入的匣定位導件12的匣定位導件台13時，第2 距離L12也可爲零。該狀況，是與第14(b)圖爲相同設 有加強棧2u。 上述地實施例及第2實施例的基板用匣，是以保持著 基板在S插入在其內的狀態，用堆高機等進行搬運，或裝 塡在各種支撐裝置等內。如此般基板用匣重量支撐用的堆 高機等的搬運裝置或支撐裝置的支撐部形狀，會因搬運裝 置或支撐裝置而有所不同，此外，這些裝置的支撐部與基 板用匣接觸的部份也會有所不同。第6圖及第7圖，是針 對在支撐第1實施例的基板用匣時之支撐裝置等的支撐部 形狀和第1實施例基板用匣下框體2的關係，表示出各種 不同模式的圖，斜線部份是表示支撐裝置等的支撐部形狀 。同樣地，第8圖及第9圖，是針對第2實施例的基板用 匣表示出兩者關係各種不同模式的圖。 當藉由如此般的支撐裝置，使上述第1實施例及第2 實施例的基板用匣在保持著基板S是插入在其內的狀態下 的重量爲被支撐的狀況時，若在基板用匣產生有某種程度 一定値以上的彎曲變形時，於該基板用匣的搬運時等，收 容在其內的基板S將會受到不良的影響。因此，接著爲了 -19- (16) (16)200406039 要對上述第1實施例及第2實施例的基板用匣在藉由上述 支撐裝置等來支撐其重量時，究竟會產生何種程度的彎曲 變形進行調查，就使用AN SYS 6.0構造解析程式來進行模 擬操作的線形構造解析。於該線形構造解析中所使用的基 板用匣，如上述，其尺寸爲可收納縱爲1 8 00mm、橫爲 150 0mm以上之基板的尺寸。此外，其重量，經試算結果 第1實施例的基板用匣爲1 15.6kg，第2實施例的基板用 匣爲 1 15.7kg。 另，該模擬操作的線形構造解析，除了是對上述第1 實施例及第2實施例的基板用匣進行以外，也對習知例的 基板用匣進行。該習知例的基板用匣，其下框體的構造是 形成爲從第1實施例及第2實施例的基板用匣下框體中除 去加強棧2e或加強棧2k的狀態，及下框體爲田字形框體 ，其他的部份，包括材質及尺寸都完全和第1實施例及第 2實施例的基板用匣相同。因此該習知例的基板用匣的尺 寸和第1實施例及第2實施例的基板用匣相同，爲可收納 縱爲1 8 00mm、橫爲1 5 00mm以上之基板的尺寸。此外， 對於該習知例的基板用匣，假設其有3種類：其各部構件 的厚度是與第1實施例及第2實施例相同，重量爲 1 12.3kg的第1習知例基板用匣；藉由改變其各部構件的 厚度，使其強度有所不同，重量爲120.1kg的第2習知例 基板用匣及其重量爲123.8kg的第3習知例基板用匣。另 ’第10圖及第11圖，是針對支撐裝置等的支撐部的形狀 和上述習知例基板用匣的下框體的關係，表示出爲各種不 -20- (17) (17)200406039 同模式的圖。圖中，圖號62爲習知例基板用匣的下框體 〇 表1及表2，是表示這些線形構造解析的結果。表1 爲第1實施例及第2實施例的基板用匣的解析結果，表2 爲第1習知例及第2習知例以及第3習知例的基板用匣的 解析結果。實際的解析’如第1 2圖所示，是只針對基板 用匣的右半部進行。於該解析中，是將側部支撐體3 · · •依前後的位置順序稱爲支柱1、支柱2、支柱3、支柱4 ，將位於右側的後部支撐體6稱爲支柱5。彎曲變形量， 是表示解析結果所得値中的最大値。此外，彎曲變形發生 處的支柱No是表示該彎曲變形量最大値產生處的支柱No 。另，第12圖，雖然是表示第1實施例基板用匣的支撐 裝置等的支撐部的形狀和基板用匣的下框體2的關係模式 圖’但有點誇張表現爲第6 ( a )圖狀況時的線形構造解 析狀況。另外，於表1及表2中，是將基板用匣簡稱爲匣 -21 - (18) (18)200406039 【表1】 第1實施例的匣 第2實施例的匣 重量：115.6kg 重量：115.7kg 模式圖 彎曲變形量 (mm) 變形量發生處 支柱No 模式圖 彎曲變形量 (mm) 變形量發生處 支柱No 第6(a)圖 0.044 1 第8(a)圖 0.045 2 第6(b)圖 0.19 2 第8(b)圖 0.18 2 第6(c)圖 0.33 4 第8(c)圖 0.28 4 第6(d)圖 1.81 1 第8(d)圖 1.97 1 第6(e)圖 1.61 1 第8(e)圖 1.17 0) 第6(f)圖 0.15 1 第8(f)圖 0.13 1 第6(g)圖 1.15 1 第8(g)圖 0.97 4 第6⑻圖 0.27 2 第8⑻圖 0.23 2 第7(a)圖 0.19 2 第9(a)圖 0.18 1 第7(b)圖 1.63 1 第9⑼圖 1.62 1 第7(c)圖 0.40 4 第9(c)圖 0.35 4 第7⑹圖 0.88 4 第9(d)圖 0.80 4 第7(e)圖 0.44 (4) 第9(e)圖 0.70 4 第7(f)圖 0.25 4 第9(f)圖 0.26 4 第7(g)圖 1.21 1 第9(g)圖 1.33 1 -22- (19)200406039 【表2】 習知例的匣 第1 第2 第3 重量 1 12.3kg 120.1kg 123.8kg 模式圖 彎曲變形量 (mm ) 彎曲變形量 (mm ) 彎曲變形量 (mm ) 第 10(a)圖 0.045 0.030 0.028 第 10(b)圖 0.20 0.14 0.12 第 1 0 ( c )圖 0.34 0.25 0.22 第 10(d)圖 2.73 1.79 1.53 第 10(e)圖 2.46 1.6 1 1.37 第 10(f)圖 0.15 0.11 0.10 第 10(g)圖 1.19 0.8 1 0.7 1 第 10(h)圖 0.26 0.91 0.17 第 1 1(a)圖 0.23 0.15 0.14 第 1 1(b)圖 3.06 2.00 1.7 1 第 1 1(c)圖 0.4 1 0.30 0.26 第 1 1(d)圖 0.89 0.62 0.55 第 1 1 ( e)圖 0.80 0.56 0.49 第 1 1(f)圖 0.32 0.22 0.19 第 11(g)圖 1.67 1.11 0.95-18- (15) (15) 200406039) As shown in the figure, the reinforcement stack 2v is set to start from the intersection 2g of the lower frame vertical stack 2c and the lower frame horizontal stack 2d and extend to the corner 2f of the quadrangular frame Along the straight portion of the lower frame crossbar 2b, a point 2m from the second distance L21 is reached. In addition, as shown in FIG. 4 (b), when using only the cassette positioning guide 12 provided with four corners formed around the intersection 2g of the lower frame vertical stack 2c and the lower frame horizontal stack 2d, When the cassette positioning guide table 13 is used, the second distance L12 may be zero. This situation is the same as that shown in Fig. 14 (b), and a reinforcement stack 2u is provided. The substrate cassettes of the above-mentioned embodiments and the second embodiment are transported by a stacker or the like while the substrates are inserted in S with the substrates inserted therein, or are housed in various supporting devices and the like. The shape of a supporting device such as a conveying device such as a stacker for supporting substrate box weights or a supporting device varies depending on the conveying device or supporting device. In addition, the supporting portion of these devices is in contact with the substrate box. Servings will be different. 6 and 7 are diagrams showing the relationship between the shape of the support portion and the like of the supporting device when supporting the substrate cassette of the first embodiment and the lower case 2 of the substrate cassette of the first embodiment, showing various modes. In the figure, the oblique line portion shows the shape of a support portion such as a support device. Similarly, Figs. 8 and 9 are diagrams showing various modes of the relationship between the substrate cassette for the second embodiment. When the substrate cassettes of the first and second embodiments are supported by such a supporting device, the weight of the substrate cassette in the state in which the substrate S is inserted therein is supported. When the cassette is deformed to a certain degree or more, the substrate S stored therein will be adversely affected during the transportation of the substrate cassette. Therefore, for the purpose of -19- (16) (16) 200406039, to what extent will the substrate cassettes of the above-mentioned first and second embodiments be supported by the above-mentioned supporting device and the like? To investigate the bending deformation, we used AN SYS 6.0 structural analysis program to analyze the linear structure of the simulation operation. As described above, the substrate cassette used in the analysis of the linear structure has a size that can accommodate substrates having a length of 1 800 mm and a width of 1 500 mm or more. In addition, the weight of the substrate cassette for the first embodiment was 15.6 kg, and the weight of the substrate cassette for the second embodiment was 1 15.7 kg. In addition, the linear structure analysis of this simulation operation is performed not only on the substrate cassettes of the first and second embodiments described above, but also on the substrate cassettes of the conventional example. The structure of the lower case of the substrate cassette for this conventional example is such that the reinforcement stack 2e or the reinforcement stack 2k is removed from the lower casing of the substrate cassette for the first and second embodiments, and the lower frame The body is a field-shaped frame, and other parts, including materials and dimensions, are completely the same as those of the substrate cassette of the first embodiment and the second embodiment. Therefore, the size of the substrate cassette for this conventional example is the same as that of the substrate cassettes of the first and second embodiments, and it is a size that can accommodate substrates with a length of 1 800 mm and a width of 1500 mm or more. In addition, it is assumed that there are three types of substrate cassettes of this conventional example. The thickness of each component is the same as that of the first embodiment and the second embodiment, and the first conventional substrate cassette has a weight of 12.3 kg. ; The thickness of each component is changed to make it different in strength, the second conventional example substrate cassette having a weight of 120.1 kg and the third conventional example substrate cassette having a weight of 123.8 kg. Fig. 10 and Fig. 11 show the relationship between the shape of the support portion such as the support device and the lower frame of the substrate case for the conventional example, and it is shown as various kinds of -20- (17) (17) 200406039 Illustration of the same pattern. In the figure, reference numeral 62 is the lower frame of the conventional substrate cassette. Tables 1 and 2 show the results of analysis of these linear structures. Table 1 shows the analysis results of the substrate cassette for the first and second embodiments, and Table 2 shows the analysis results of the substrate cassette for the first, second, and third conventional examples. The actual analysis is performed only on the right half of the substrate cassette as shown in Fig. 12. In this analysis, the side support body 3 is referred to as a support column 1, a support column 2, a support column 3, and a support column 4 in the order of the front and rear positions, and a right support rear support body 6 is referred to as a support column 5. The amount of bending deformation is the largest of the 値 obtained from the analysis result. It should be noted that the pillar No where the bending deformation occurs is a pillar No where the bending deformation amount is the largest. In addition, FIG. 12 is a schematic diagram showing the relationship between the shape of the support portion and the like of the support device for the substrate cassette and the lower housing 2 of the substrate cassette in the first embodiment, but it is exaggeratedly shown in FIG. 6 (a). The linear structure in the situation analyzes the situation. In addition, in Tables 1 and 2, the substrate cassette is simply referred to as cassette-21-(18) (18) 200406039. [Table 1] Casing of the first embodiment Casing weight of the second embodiment: 115.6kg Weight: 115.7kg Schematic diagram of bending deformation amount (mm) Post No. where deformation amount occurs Schematic diagram of bending deformation amount (mm) Post No. where deformation amount occurs No. 6 (a) Fig. 0.044 1 No. 8 (a) Fig. 0.045 2 No. 6 (b Figure 0.19 2 Figure 8 (b) Figure 0.18 2 Figure 6 (c) Figure 0.33 4 Figure 8 (c) Figure 0.28 4 Figure 6 (d) Figure 1.81 1 Figure 8 (d) Figure 1.97 1 Figure 6 (e) 1.61 1 Figure 8 (e) Figure 1.17 0) Figure 6 (f) Figure 0.15 1 Figure 8 (f) Figure 0.13 1 Figure 6 (g) Figure 1.15 1 Figure 8 (g) 0.97 4 Figure 6⑻0.27 2 Figure 8 Figure 0.23 2 Figure 7 (a) 0.19 2 Figure 9 (a) Figure 0.18 1 Figure 7 (b) 1.63 1 Figure 9 (1) Figure 1.62 1 Figure 7 (c) 0.40 4 Figure 9 (c) 0.35 4 Figure 7 Figure 0.88 4 9 (d) Figure 0.80 4 7 (e) Figure 0.44 (4) 9 (e) Figure 0.70 4 7 (f) Figure 0.25 4 9 (f) Figure 0.26 4 7 (g) Figure 1.21 1 9th (g) Figure 1.33 1 -22- (19) 200406039 [Table 2] Box 1 of the conventional example 1st 2nd 3rd weight 1 12.3kg 120.1kg 123.8kg Bending deformation amount (mm) Bending Deformation (mm) Bending Deformation (mm) Figure 10 (a) 0.045 0.030 0.028 Figure 10 (b) 0.20 0.14 0.12 Figure 1 0 (c) Figure 0.34 0.25 0.22 Figure 10 (d) Figure 2.73 1.79 1.53 Figure 10 (e) Figure 2.46 1.6 1 1.37 Figure 10 (f) 0.15 0.11 0.10 Figure 10 (g) 1.19 0.8 1 0.7 1 Figure 10 (h) 0.26 0.91 0.17 Figure 1 1 (a) 0.23 0.15 0.14 Figure 1 1 (b) Figure 3.06 2.00 1.7 1 Figure 1 1 (c) 0.4 1 0.30 0.26 Figure 1 1 (d) 0.89 0.62 0.55 Figure 1 1 (e) 0.80 0.56 0.49 Figure 1 1 (f) 0.32 0.22 0.19 Figure 11 (g) 1.67 1.11 0.95

-23- (20) (20)200406039 根據表1及表2，得知第1實施例的基板用匣和第2 實施例的基板用匣的彎曲變形量的最大値也都比第1習知 例的基板用匣來得小。於實用上彎曲變形量的極限値雖是 爲2mm，但，第1實施例的基板用匣和第2實施例的基 板用匣的彎曲變形量的最大値均都在極限値以下。此外， 即使是習知例的基板用匣，對於強度加強後的第2習知例 的基板用匣及第3習知例的基板用匣來講其彎曲變形量最 大値雖也可達到第1實施例的基板用匣或第2實施例的基 板用匣的水準，但其重量卻都要比第1實施例的基板用匣 或第2實施例的基板用匣還重。因此，採用第1實施例的 基板用匣或第2實施例的基板用匣，就可提供一種匣所產 生的彎曲變形不波及影響到所收容的基板，並且已是極力 抑制其本身重量增加的基板用匣。 於上述第1實施例，是將加強棧2e設置成從下框體 縱棧2c上的基點2h開始延伸至下框體縱桿2a上的到點 2j，於第2實施例，是將加強棧2k設置成從下框體縱棧 2c上的基點2h開始延伸至下框體橫桿2b上的到點2m。 但是可不受限於此，如第1 3 ( a )圖的第3實施例所示， 加強棧2q也可設置成是從下框體橫棧2d上的基點2r開 始延伸至下匡體縱桿2 a上的到點2 j，於該狀況時的第1 距離，是爲交點2g至基點2r的距離，第2距離，是爲角 2 f至到點2 j的距離。或者是如如第1 3 ( b )圖的第4實 施例所示，加強棧2 s也可設置成是從下框體2 d上的基點 2r延伸至下框體橫桿2b上的到點2m，於該狀況時的第1 -24- (21) (21)200406039 距離，是與上述相同，爲交點2g至基點2r的距離，第2 距離，是爲角2 f至到點2 m的距離。於這些狀況中，對於 第1距離或第2距離的設定同·樣也可和上述第1實施例或 第2實施例相同。此時不論爲何種狀況，都可獲得和上述 第1實施例或第2實施例相同的作用及效果。 此外，於上述例中，若只採用如第4 ( a )圖所示般 的具備有可對下框體2的角2f內側四角落進行嵌入的匣 定位導件12的匣定位導件台13時，也可將第1距離L11 爲零。該狀況，如第15(a)圖的第7實施例所示，是設 有加強棧2v。此外，若只使用如第4 ( b )圖所示般的具 備有可對下框體縱棧2c和下框體橫棧2d的交點2g周圍 所形成的四角落進行嵌入的匣定位導件12的匣定位導件 台13時，也可將第2距離L12爲零。該狀況，如第15( b)圖的第8實施例所示，是將加強棧2w設置成從下框 體縱棧2 c和下框體橫棧2 d的交點2 g沿著下框體橫棧2 d 離有第1距離的基點2 r開始，與下框體橫棧2 d不相交地 ’延伸至上述四角形框的角部2f。 其次’是對本發明第9實施例的基板用匣進行說明。 第16圖及第17圖爲本發明第9實施例的基板用匣整體圖 ’第18圖及第19圖是表示其主要部份，圖中圖號1是表 示上框體、圖號2是表示下框體、圖號3是表示側部支撐 體、圖號24是表示前止動件、圖號25是表示後止動件、 圖號26是表示側部棚片、圖號s是表示基板、圖號r是 表示基板出入用機器手臂叉。 -25- (22) 200406039 第9實施例的基板用匣，是將外形爲長方形 1和下框體2的兩側用複數側部支撐體3、3 · · 時，將前端部間用前止動件24、24連結，又將 後止動件25、25連結而構成爲平行六面體矩形 1，是採用上述第1實施例的構成，下框體2的 是採用上述第1實施例的構成，但下框體2的構 於此，也可採用上述第2〜8實施例中的任一構成 於側部支撐體3上於上下方向在每一定間隔突設 超大型玻璃基板S載置支撐用的側部棚片26、 又其前面是形成爲具有基板S出入用開口部27 於本實施例中，雖是在兩側部分別設有大致呈等 支側部支撐體3、3 ··但因要視基板S的尺寸 性來決定所需要的側部棚片26、26 ··的片數 部支撐體3是設置成可應對於此的數量。 於此，上框體1和下框體2，是以鋁製的框 側部支撐體3是以剖面爲大致呈C字形的SUS ( 製成，前止動件24是以SUS和合成樹脂的複合 後止動件25是以合成樹脂製成。 接著，如第1 8圖及第1 9圖所示，於側部支 內側面，在每一定間隔突設有側部棚片26、26 部棚片26，爲至少是於金屬製支撐銷29的前端 板S載置支撐用合成樹脂製載置支撐部30的棚 細地說，側部棚片2 6，是在至少是金屬製支撐錐 端部和基部設有基板S載置支撐用合成樹脂製載 的上框體 連結的同 後辆部用 。上框體 構成雖也 成並不限 。此外， 有朝內的 26 · ·， 的構造。 間隔的4 或彎曲剛 ，所以側 體構成， 不銹鋼） 體製成， 撐體3的 • · °俱丨J 部設有基 片。更詳 ‘ 29的前 置支撐部 -26- (23) 200406039 30、31。於本實施例中，是將支撐銷29藉由插入成形 使載置支撐部30、31形成在其前端部和基部的同時， 支撐銷29全長均以合成樹脂包覆著。圖中圖號32爲合 樹脂包覆部。另，包覆部3 2除了以合成樹脂形成外， 可以氟素烤漆包覆著支撐銷29全長。再者，側部棚片 ，又構成爲留有支撐銷29的基端然後在基端部一體形 有可與側部支撐體3的內面側接合的合成樹脂製保持構 33的同時，於該支撐銷29的基端形成有螺軸部34，該 持構件3 3的上部是往上方延伸，形成爲可抵接止動基 S的傾斜緩衝部3 5。 此外，於側部支撐體3上，在每一定間隔形成有貫 內外的安裝孔3 6、3 6 ··，以側部棚片26構成用的支 銷2 9的螺軸部3 4是從內方插入在側部支撐體3的安裝 3 6並且保持構件3 3是接合在側部支撐體3內面側的狀 ’從外側對螺軸部3 4螺合螺帽3 7，使側部支撐體3上 成爲突設有側部棚片26。於此，支撐銷29，是以SUS 鈦金製成，載置支撐部3 0、3 1及保持構件3 3，是以具 磨損性的PEEK製成。另，側部棚片26突設在側部支 體3上的構造並不限於上述構造。例如也可構成爲是在 持構件3 3和側部支撐體3間設有間隔然後安裝支撐銷 〇 本實施例基板用匣的外形尺寸，橫寬爲1 460mm、 度爲 1990mm、深度爲 1680mm，其有效寬度 W 1 3 7〇mm。側部棚片26的上下間距爲70mm，形成有24 該 成 也 26 成 件 保 板 穿 撐 孔 態 形 或 耐 撐 保 29 局 爲 段 -27- (24) (24)200406039 。此外’側部棚片26的突出長度約爲380mm〜550mm，支 撐銷29的直徑爲1 〇mm〜1 4mm。兩側的側部棚片26、26 的前端間隔約爲61 0mm〜2 70 mm。於本明中，當有效寬度 爲W，側部棚片2 6的突出長度爲L時，其關係是設定成 l/4<L/W<l/2。套用上述具體性的數値時，若要使L/W比 1 /4還大，則側部棚片26的突出長度L就必須要比 3 42.5mm還長。於該基板用匣內，是可多段收容1 3 5 0mm X 1 65 0mm ^厚度0 · 7 mm的玻璃基板S。 接著，根據第20圖〜第22圖對本發明相關之基板用 匣中要出入基板S時的基板出入用機器手臂叉R和實際 使用該機器手臂叉來抽出放入基板S的步驟進行說明。於 本發明相關之基板用匣，因其上述L/W是設定成比1/4還 大’即因側部棚片2 6的突出長度較長，所以兩側的側部 棚片2 6、2 6的間隔和基板S相比就顯得非常狹窄，因此 以習知構造的基板移載用機器手臂叉來講就會變成支撐會 偏掉而不在基板S中央部份，使基板側緣部產生大彎曲， 除了對基板上造成有過大的壓力外，匣上下側部棚片26 ' 26的間隔若不加大是無法進行抽出放入基板。 因此，於本實施例中，是於比兩側的側部棚片26、 2 6的前端間隔D還寬度小的叉片3 8、3 8兩側突設有複數 片承接片39、39· ·，至少於各承接片39、39前端部和 基端部突設有基板S載置支撐用的合成樹脂製突出體40 ' 40。突出體40的數量、間隔及其高度，其設計條件是 當其上面載置著基板S的底面時，即使該基板S彎曲也不 •28- (25) (25)200406039 會直接接觸到叉片38、38或承接片39。另，承接片39 的構造，是與側部棚片26相同，又其突設在叉片38長度 方向的間隔是設定成與前後的側部支撐體3、3的間隔大 致呈相同。於此，當將側部棚片26的突出長度爲5 5 0mm 時，因兩側部棚片26、26的間隔D會變成270mm，所以 將叉片38、38的外側間寬度設定成約爲2 5 0mm，將承接 片39的突出長度設定成約爲400mm。如此一來，基板出 入用機器手臂叉的叉片部份的全寬，就形成約1 05 0mm。 當該叉片部份上載置著橫寬維1 3 5 0mm的基板S時，雖在 承接片3 9前端會突出約有1 5 0 m m，但該部份的彎曲變形 量只有些許。 接著，要將基板S以基板出入用機器手臂叉R來收 容在厘內時’首先是以基板S是載置在基板出入用機^&手 臂叉R叉片部份上的狀態，使叉片3 8、3 8位於兩側的側 部棚片2 6、2 6的前端間（間隔D的部份），從匣開口部 2 7進入到上下的側部棚片2 6、2 6間的間隙，在基板S的 深度端部是接近或者是接觸著後止動件25、25的狀態下 停止叉片38、38的進行。接著，當降下叉片38、38時’ 承接片39會通過前後的側部棚片26、26間往下降，以側 部棚片26、26· ·的載置部30、31載置支撐著基板S的 底面。然後，使叉片3 8、3 8進行後退使其從匣內抽出。 於此，在前止動件24、24上，因是將與側部棚片26相同 的突出物42設定在比側部棚片26還若干高的位置上’所 以是在基板S爲收容在匣內的狀態下’形成爲突出物42 -29- (26) (26)200406039 可限制基板S往前方的移動。另’要抽出收容在匣內的基 板S時，只要將上述動作相反即可。 如第2 2圖所示，基板S是於以兩側的側部棚片2 6、 26· ·載置支撐，於實際上是於以載置支出部30、31載 置支撐的狀態下，其中央部會產生下方彎曲。當側部棚片 26的長度L形成爲有效寬度W的1/4以下時，其中央部 的彎曲變形量會極端增大的同時，基板S的側緣會往上方 翹起，因基板S的中央部施加有過大的壓力，基板S的中 央部就會又往下方變形，其側緣又會往上方變形，所以上 下的側部棚片26、26的間隔會變非常大並不實用。因此 ，最好是將L/W愈大於1/4，則基板S中央部的彎曲變形 量會愈少，於同時基板S的側緣作用在側部棚片26上的 荷重會增加。因此，施加在側部棚片26前端的荷重會減 少，使側部棚片2 6本身的彎曲變形減少。另，當側部棚 片26形成爲極端長時，應對在側部棚片26中央部的基板 S部份會彎曲變形，而將會接觸於支撐銷2 9的軸部，所 以在該支撐銷29的中央部最好是也設有載置支撐部。 第23圖及第24圖，是表示側部棚片26的另一實施 形態，其是構成爲在支撐銷2 9的前端部形成有貫穿上下 的孔4 1或是凹部，於該孔4 1或是凹部嵌著有合成樹脂製 的載置支撐部30，或者是以插入成形的手法將載置支撐 部30形成爲一體’再者於支撐銷29的基端部留有基端的 螺軸部34將合成樹脂製的保持構件33同樣形成爲一體， 使載置支撐部3 1也是和保持構件3 3形成爲一體。 -30- (27) (27)200406039 此外。第25圖及第26圖，是表示側部棚片26的又 另一實施形態，其爲比第23圖及第24圖所示之側部棚片 26還更長尺度的側部棚片26，其是在支撐銷29的中央部 設有與載置支撐部30相同的載置支撐部43。其他的構成 因是相同，所以同一構成採同一圖號，省大致呈其說明。 另’於上述實施形態中，側部棚片2 6雖是以棒狀物 例示，但其也可以是膽狀物，又其主要部份除了金屬才以 外癟可採用陶瓷材或碳纖和合成樹脂的複合材，然後於該 狀況同樣是至少於其前端部設有基板S載置支撐用的載置 支撐部3 0。此外，於上述實施形態中，雖是例示著可收 容1350mmxl650mm、厚度爲〇.7mm的玻璃基板S的匣， 但也適合收容1 470mmxl 770mm、厚度爲0.7mm的玻璃基 板或更大型的基板。另外，除了玻璃基板以外，也可收容 合成樹脂製的薄片狀基板。 其次，對本發明第1 〇實施例的基板用匣進行說明。 第2 7圖，是表示第1 0實施例的基板用匣的外觀透視圖， 第28圖爲第27圖中將可拆裝的局部構件（中央部支撐體 )從匣中拆下後的透視圖，第29圖爲第1 0實施例的基板 用匣中省大致呈上框體時的平面圖。圖中，箭頭符號J， 是表示要插入在第1〇實施例的基板用匣內的基板的插入 方向。第1〇實施例的基板用匣，如第27圖及第28圖以 及第29圖所示，是形成爲平行六面體矩形的箱型構造， 其是構成爲在上框體縱桿1 a和上框體橫桿1 b所形成的長 方形上框體1與下框體縱桿2a和下框體橫竿2b所形成的 -31 - (28) (28)200406039 下框體2之間，連結著12支側部支撐體3和2支後部支 擦體44及2支角部支撐體45。於此，側部支撐體3和後 部支撐體44及角部支撐體45是相當於上述的支撐體。 上框體1，是採用上述第1實施例的構成，下框體2 的構成雖也是採用上述第1實施例的構成，但下框體的構 成並不限於此，也可採用上述第2〜8實施例中的任一構成 。此外，於左右的下框體縱桿2a上，各分別立設有6支 側部支撐體3，2支後部支撐體44是立設在下框體2最裡 側的下框體橫桿2b上，然後2支角部支撐體45是立設在 下框體縱桿2a和最前方的下框體橫桿2b所形成的角上。 於該基板用匣中，爲要能支撐從前方插入的基板，所以在 側部支撐體3上，突設有複數側部棚片4 7，在後部支撐 體44上，突設有複數最後部棚片48，然後，在角支撐體 45上，突設有複數前側部棚片50，上述各棚片是分別朝 內側突設在上下方向的每一定間隔。 於第10實施例的基板用匣內，可收容尺寸不同的大 型基板大型基板、中型基板及小型基板。大型基板，其寬 度尺寸和深度尺寸均是爲最大收納尺寸，中型基板’其寬 度尺寸是爲最大收納尺寸而其深度尺寸是比最大收納尺寸 小’小型基板其寬度尺寸和深度尺寸均是比最大收納尺寸 小。具體而言，第2 9圖中以2點虛線所示部份是表示基 板的形狀，大型基板有SA的1種類，中型基板有SB、 SC、SD及SE的4種類，小型基板有SF的1種類，合計 有6種類。 -32- (29) (29)200406039 大型基板SA其後端是以最後部棚片48載置支撐著 。中型基板靠近後端的左右側部，中型基板SB是以最裡 側的側部棚片47載置支撐著，中型基板SC是以從最裡 側算起第2片的側部棚片4 7載置支撐著，中型基板S D 是以從最裡側算起第3片的側部棚片47載置支撐著’然 後中型基板SE是以從最裡側算起第4片的側部棚片47載 置支撐著。即，深度尺寸關係是SB>SC>SD〉SE。另外’ 小型基板SF其靠近後端的左右側部是以從最裡側算起第 3片的側部棚片47載置支撐著。又，小型基板SF的深度 尺寸關係是SD > SF >SE。 於此，寬度尺寸爲可最大收納尺寸的SB、SC、SD及 S E基板，是相當於上述第1基板，比該等基板寬度小的 小型基板SF，是相當於上述第2基板。 突設在側部支撐體上的側部棚片47，如第3 0 ( a )、 (b )圖及第31圖所示，是由：金屬製的側部支撐銷47a ;該前端部所具備的側部載置支撐部47b ;側部支撐銷 47a的基端部所具備的外側側止動件47 c ;及側部支撐銷 4 7a中途部所具備的內側側止動件47d所構成。側部載置 支撐部4 7b其上端面爲平坦面，其是用來載置支撐大型基 板SA、中型基板SB(SC、SD、SE)或小型基板SF的左 右側部。外側側止動件47 c，是用來抵接止動著大型基板 SA或者是中型基板SB(SC、SD、SE)的左端或右端然 後載置支撐，其是由：上面爲平坦面的外側側止動件保持 部4 7 c 1 ;及，從該外側側止動件保持部4 7 c 1豎起的外 -33- (30) (30)200406039 側側止動件限制部47 c2所構成。外側側止動件限制部47 c2’爲要能容易抵接止動著大型基板或者是中型基板的左 端或右端，而形成爲上方是緩和傾斜於外側的斜邊。內側 側止動件47d，是用來抵接止動著小型基板SF的左端或 右端然後載置支撐，其是由：上面爲平坦面的內側側止動 件保持部4 7 d 2 ;及，從該內側側止動件保持部4 7 d 2豎起 的內側側止動件限制部47 d3所構成。另外，側部棚片47 ’如第30(b)圖所示，下述各部是構成爲：起自於內側 側止動件限制部4 7 d 3相連成的內側側止動件上端部4 7 d 1 上面高度，是形成爲和側部載置支撐部47b的上端面高度 及外側側止動件保持部47 c 1的上面高度相等，同時內側 側止動件保持部47d2的上面高度是形成爲比該高度還低 〇 此外，於角部支撐體45上，雖也可突設有上述側部 棚片47，但於第10實施例中，是將側部棚片47取代爲 突設有第3 2圖所示由··金屬製側部支撐銷5 0a ;及，該 前端部所具備的前止動件5 Ob所構成的前側部棚片5 0。 該前側部棚片50所具備的前止動件50b，其高度是形成 爲要比側部棚片47所具備的側部載置支撐部47b還高’ 藉此，如第3 3圖所示，使其具有防止收納在內的基板往 前方飛出的功能。前止動件，也可採用如第39圖所示具 有段部的前止動件50c。 在上述第1〇實施例的基板用匣內，爲要能收容寬度 尺寸和深度尺寸均比最大收納尺寸還小的小型基板SF ’ ft -34- (31) (31)200406039 如第34圖所示，是將可拆裝的中央部支撐體46立設安裝 在上述基板用匣的下框體縱棧2c上。即，在下框體的下 框體縱棧2c上面上的位置，相當於上述基板用匣所收容 的小型基板S F的後端邊中點附近的位置，於事先焊接有 L形安裝片46b。爲使中央部支撐體46的下端不接觸於該 L形安裝片4 6b，而將中央部支撐體46立設在下框體縱棧 2c上的同時，用安裝用螺栓46d和安裝用螺帽46e插入 中央部支撐體46下端的中央部支撐體安裝孔4 6a和l形 安裝片46b的L形安裝片安裝孔46c，使中央部支撐體46 固定在L形安裝片46b上。與該L形安裝片46b相同的 安裝片也焊接在上框體縱桿la的下面，將中央部支撐體 46的上端與上述同樣方式固定在該安裝片。 於中央部支撐體46上，朝前方突設有和側部支撐體 3上的側部棚片47的突設間隔爲相同間隔的小型基板SF 的載置支撐用後部棚片49。該後部棚片49，如第34圖所 示，是由金屬製後部支撐銷49a及該前端部所具備的後部 載置支撐部49b以及後部載置支撐部49b基端部上所具備 的後部棚片後止動件49c所構成。後部棚片後止動件49c ，因可抵接止動小型基板SF的後端來將其載置支撐，所 以可穩定收納著小型基板SF使其於收納中不會往前後方 向移動。後部載置支撐部49b是用來載置支撐小型基板 S F，其上面爲平坦面。此外，後部支撐銷4 9a的長度，是 形成爲可到達小型基板SF的中心附近的長度，使後部載 置支撐部49b得以載置支撐小型基板SF的中心附近。因 -35- (32) 200406039 此，藉由後部載置支撐部49b就可穩定載置支撐著小型 板SF 〇 第3 5圖，是表示小型基板SF被載置支撐在側部棚 47和後部棚片49上的狀態，第36圖是表示側部棚片 和後部棚片4 9的關係。如上述般，小型基板S F左右的 部是由側部棚片47的側部載置支撐部47b載置支撐著 同時，小型基板SF的左端及右端是由側部棚片47的內 側止動件47b抵接止動且載置支撐著。此外，如第35 及第36圖所示，後部棚片49是被安裝在中央部支撐 46上，使後部載置支撐部49b的上面高度是形成爲是 要比和後部載置支撐部49b所載置支撐爲相同的小型基 SF載置支撐用的側部棚片47的側部載置支撐部47b的 面高度還高的位置，第36圖中側部載置支撐部47b和 部載置支撐部49b的高度差L3，是設定成小型基板SF 左端及右端是要比側部載置支撐部47b的上端面還低。 外，該小型基板SF的左端及右端抵接止動且載置支撐 的內側側止動件保持部47d2的上面高度，如上述，是 定成要比側部載置支撐部47b的上面高度還低，收容在 的小型基板SF，如第35圖所示因是在緩和往上方膨脹 的彎曲狀態下，其左端及右端是被內側側止動件47d抵 止動且載置支撐著，所以小型基板SF的寬度尺寸，雖 是要比第1〇實施例的基板用匣最大收納尺寸還小，但 可防止小型基板SF在第10實施例的基板用匣內的橫向 動，於同時可將小型基板S F以穩定狀態收納在內。 ft?n 基 片 4 7 側 的 側 圖 體 在 板 上 後 的 另 用 設 內 般 接 然 卻 移 -36- (33) (33)200406039 於上述第1 〇實施例的基板用匣中，收納的小型基板 雖只有SF的1種，但並不限於此，其也可收納尺寸不同 的複數小型基板，於該狀況時，只要將內側側止動件47d 配合著該小型基板的寬度設置在側部棚片47的側部支撐 銷4 7a的最佳位置的同時，將中央部支撐體46的安裝位 置或中央部支撐體46上所突設的後部載置支撐部49b長 度等配合著該小型基板的深度成最佳設定即可。 此外，在同一側部棚片47的側部支撐銷47a上，具 備著幾個或全部欲收納寬度尺寸不同的複數小型基板分別 應對用的內側側止動件47d，就可在該同一側部棚片47 上分別收納這些寬度尺寸不同的複數小型基板。如此一來 ，就可將1台的基板用匣使用在收容寬度尺寸不同的基 板，使基板用匣的運用具彈性。 於上述第1 〇實施例的基板用匣中，若要收納大型基 板SA，或者中型基板SB、SC、SD或SE中任一中型基板 基板時，則不需要小型基板SF收納用所設置的中央部支 撐體46，若爲大型基板SA和欲收納的中型基板SB、SC 、SD或SE時，視該等深度尺寸而定，有時需拆掉中央部 支撐體46。第37圖，是表示在上述第10實施例的基板 用匣內，收容有寬度尺寸爲最大收納尺寸的大型基板SA 或者中型基板SB、SC、SD或SE中任一中型基板基板的 狀態。大型基板SA或者中型基板SB、SC、SD或SE，如 上述，該等的左端或右端是被外側側止動件47c抵接止動 且載置支撐著，該等左右的側部是被側部載置支撐部47b -37- (34) (34)200406039 載置支撐著，如第37圖所示，是被保持成波浪狀彎曲狀 態。此時，如上述，因是將側部棚片47的內側側止動件 上端部47dl的上端高度，如第30 ( a )圖所示，與側部 載置支撐部47b的上端高度相等，所以被收納在那的基板 ，是等接觸於內側側止動件上端部47dl的上端，並不破 壞均衡，因此可穩定收納大型基板或中型基板。 根據上述第10實施例的基板用匣時，因是在側部支 撐體3所突設的側部棚片47設有側部載置支撐部47b和 外側側止動件47c及內側側止動件47d，使被收納的基板 全部左右的側部是由側部載置支撐部47b載置支撐的同時 ，因是將寬度尺寸爲最大收納尺寸的大型基板及中型基板 的左端或右端由外側側止動件47c抵接止動且載置支撐著 ，將是寬度尺寸要比最大收納尺寸還小的小型基板的左端 或右端是由內側側止動件47d抵接止動且載置支撐著，所 以可提供一種不需配合所欲收納的基板來調整匣寬度的基 板用匣。 ' 於上述第1〇實施例的基板用匣中，若是將該基板用 匣使用在收容中型基板SB、SC、SD或SE，或者使用在 收容小型基板SF時，也可在側部支撐體3所突設的側部 棚片47上設有第38 ( a)圖所示的側部棚片後止動件47e 。如此一來，如第38(b)圖所示，因側部棚片後止動件 47e抵接止動著中型基板或小型基板的後端，所以可穩定 收納中型基板使其於收納中不會往後方向移動。此時，最 好是以具有撓性的樹脂等來製作側部棚片後止動件47e， ft ft# -38- (35) 200406039 使側部棚片後止動件47e的上下方向具撓性，如此一來 就有以下優點。即，在收容深度尺寸長的基板時’如 3 8 ( b )圖所示，當比具有著基板後端抵接止動用側部 片後止動件47e的側部支撐體3還前面的側部支撐體3 側部棚片後止動件47e的後端上端被覆蓋在其上面的基 重力往下方壓時，因側部棚片後止動件47e的後端會向 方降地使側部棚片後止動件47e彎曲，所以就可防止覆 在其上面的基板上強迫受力。 另外，將上述第10實施例的基板用匣使用在收容 型基板SB、SC、SD或SE時，也可倂用上述小型基板 納時所使用的中央部支撐體46。如此一來，因是將中 基板SB、SC、SD或SE的中心部附近由中央部支撐體 所突設的後部棚片49的後部載置支撐部49b載置支撐 ，所以就可穩定收納中型基板。 於上述第10實施例中，當將基板收容用的匣有效 度爲W，側部棚片47的側部支撐銷47的長度爲L時 也可將側部棚片47的側部支撐銷47的長度爲L如第9 施例所述，設定成爲 l/4<L/W<l/2，或是，設定 1/4<L/W，於同時也可將側部棚片47的側部支撐銷47 前端間隔至少是設定成基板出入用機器手臂叉能夠通過 間隔。此外，也可將側部棚片47形成爲板狀，或者將 主要部份是以第9實施例所述的金屬材或陶瓷材或碳纖 合成樹脂的複合材製成。 第 棚 的 板 下 蓋 中 收 型 46 著 寬 實 成 的 的 其 和 -39- (36) (36)200406039 〔發明效果〕 根據申請專利範圍第1〜9項所記載的基板用匣時，可 提供一種：當將收納有基板的匣裝塡在搬運用的各種支撐 裝置等上時，即使是以匣支撐用的支撐裝置等的支撐部所 接觸的匣下框體局部的部份來支撐的基板用匣時，可提供 一種：當將收納有基板的匣的全重量，匣所產生的彎曲變 形也不會波及影響到所收容的基板，並且已是極力抑制其 本身重量增加的基板用匣。 根據申請專利範圍第1 0項所記載的基板用匣時，側 部棚片，因是在基板收容用的匣有效寬度爲W，該側部棚 片的突出長度爲L時，其關係是設定成l/4<L/W<l/2，所 以其收容效率高，能夠穩定支撐收容非常大的玻璃基板的 同時，基板出入用機器手臂叉的出入也容易。 根據申請專利範圍第1 1項所記載的基板用匣時，側 部棚片，因是在基板收容用的匣有效寬度爲W，該側部棚 片的突出長度爲L時，其關係是設定成1/4 <L/W的同時 ，並將位於兩側的側部棚片前端間隔至少是設定成基板出 入用機器手臂叉能夠通過的間隔，所以其收容效率高，能 夠穩定支撐收容非常大的玻璃基板的同時，基板出入用機 器手臂叉的出入也容易。 根據申請專利範圍第1 2項所記載的基板用匣時，側 部棚片，因是爲棒狀或板狀，其主要部份是以金屬材或陶 瓷材或碳纖和合成樹脂的複合材製成，至少於其前端部設 有基板載置支撐用的載置支撐部，所以從支撐體突出的突 m -40 - (37) (37)200406039 出長度即使長也能具有充分的支撐強度。 根據申請專利範圍第1 3項所記載的基板用匣時，只 要以合成樹脂製的載置支撐部就可載置支撐基板的底面將 其收容在內，不損傷基板。 根據申請專利範圍第1 4項所記載的基板用匣時，即 使基板意外性地接觸到載置支撐部以外的側部棚片，也可 防止脆性玻璃基板受損，於同時可防止來自於金屬製支撐 銷的微粒產生。 根據申請專利範圍第1 5項所記載的基板用匣時，即 使是長尺度的側部棚片也可牢固地突設在支撐體上，此外 是將側部棚片以組裝方式設置在支出體上，所以除了側部 棚片損傷時可進行替換外，又可換裝成長度不同的側部棚 片。 根據申請專利範圍第1 6項所記載的基板用匣時，當 基板是在被收容在匣內的狀態下受到振動等使其橫向移動 時，用保持構件的緩衝部就可將其抵接止動，此外在用基 板出入用機器手臂叉取出放入基板時，也可防止基板意外 性地接觸到支撐體而受損。 根據申請專利範圍第1 7項所記載的基板用匣時，因 是在側部支撐體所突設的側部棚片上，設有側部載置支撐 部和外側側止動件及內側側止動件，使第1基板及比第1 基板還窄的第2基板該等左右的側部均被載置支撐著，於 同時又可抵接止動該等的左端及右端，所以可提供一種不 需要配合所欲收納的基板來調整匣寬度的基板用匣。 -41 - (38) (38)200406039 根據申請專利範圍第1 8項所記載的基板用匣時，因 是於同一側部棚片具備著寬度不同的複數第2基板分別應 對用的內側側止動件，所以可將寬度不同的複數第2基板 分別收納在該同一側部棚片上，使基板用匣的運用有彈性 〇 根據申請專利範圍第1 9項所記載的基板用匣時，因 是將配合著基板深度尺寸而附設的可拆裝中央部支撐體立 設在所欲收容的基板後端顛位置上，於同時中央部支撐體 因是在前方突設有具基板後部載置支撐用的後部載置支撐 部的後部棚片，所以也可收容保持著比第1基板還寬度窄 的第2基板。 根據申請專利範圍第20項所記載的基板用匣時，因 後部載置支撐部的上端位置，是形成爲要比可將被載置支 撐在該後部載置支撐部上的上述基板於同時載置支撐的上 述側部棚片上所設置的上述側部載置支撐部的上端位置還 高，所以可將比第1基板還寬度窄的第2基板以其中央部 是緩和向上膨脹般彎曲狀態來收容保持著，可穩定收納比 第1基板還寬度窄的第2基板。 根據申請專利範圍第2 1項所記載的基板用匣時，因 是將內側側止動件的上端高度與側部載置支撐部的上端高 度相等，所以第1基板會等接觸到內側側止動件的上端， 不會破壞平衡，可穩定收納第1基板。 根據申請專利範圍第22項所記載的基板用匣時，因 是在內側側止動件上具備有：被設置在比內側側止動件上 -42· (39) (39)200406039 端還低位置的第2基板的左端或右端保持用的保持部；及 ，從該保持部豎起的限制部，於同時因是將後部棚片高度 設定成第2基板的左端或右端是要比側部載置支撐部還低 ，所以當收容有比第1基板還寬度窄的第2基板時，就可 防止其在基板用匣內的橫向移動。 根據申請專利範圍第2 3項所記載的基板用匣時，因 是將後部棚片的長度設定成中央部支撐體的後部棚片所具 備的後部載置支撐部可載置支撐著基板的大致呈中心部， 所以可穩定載置支撐已被收容的基板。 根據申請專利範圍第24項所記載的基板用匣時，因 是在中央支撐體的後部棚片基端部上，設有基板後端抵接 止動用的後部棚片後止動片，所以可穩定收納基板使其於 收納中不會往後方向移動。 根據申請專利範圍第2 5項所記載的基板用匣時，因 是在側部棚片上，具備有基板後端抵接止動用的側部棚片 後止動片，所以可和申請專利範圍第8項所記載的基板用 匣相同，可穩定收納基板使其於收納中不會往後方向移動 〇 根據申請專利範圍第26項所記載的基板用匣時，因 是在最前部左右的支撐體上，將側部棚片取代爲突設有具 備著基板前端抵接止動用前止動片的前側部棚片，所以可 穩定收納基板使其於收納中不會往前方向移動。 【圖式簡單說明】 •43- (40) (40)200406039 第1圖爲第1實施例的基板用匣透視圖。 第2圖爲第1實施例的基板用匣平面圖。 第3圖爲爲第1實施例的基板用匣下框體的局部放大 平面圖。 第4(a) 、（b)圖爲示有匣定位導件的基板用匣下 框體平面圖。 第5圖爲第2實施例的基板用匣平面圖。 第6(a)〜（h)圖爲表示支撐裝置等的支撐部形狀 和第1實施例的基板用匣下框體的各種關係模式圖（其1 )° 第7(a)〜（g)圖爲表示支撐裝置等的支撐部形狀 和第1實施例的基板用匣下框體的各種關係模式圖（其2 )° 第8(a)〜（h)圖爲表示支撐裝置等的支撐部形狀 和第2實施例的基板用匣下框體的各種關係模式圖（其1 )° * 第9(a)〜（g)圖爲表示支撐裝置等的支撐部形狀 和第2實施例的基板用匣下框體的各種關係模式圖（其2 )° 第10(a)〜（h)圖爲表示支撐裝置等的支撐部形狀 和習知例的基板用匣下框體的各種關係模式圖（其1 )。 第11 (a)〜（g)圖爲表示支撐裝置等的支撐部形狀 和習知例的基板用匣下框體的各種關係模式圖（其2)。 第12圖爲誇張表現使用模式圖爲第6(a)圖時的第 -44- (41) (41)200406039 1實施例的基板用匣線形構造解析狀況圖 第13(a)圖爲第3實施例的基板用匣下框體平面圖 ，第13(b)圖爲第4實施例的基板用匣下框體平面圖。 第14(a)圖爲第5實施例的基板用匣下框體平面圖 ，第14(b)圖爲第6實施例的基板用匣下框體平面圖。 第15(a)圖爲第7實施例的基板用匣下框體平面圖 ，第15(b)圖爲第8實施例的基板用匣下框體平面圖。 第1 6圖爲第9實施例的基板用匣整體側面圖。 第17圖爲第9實施例的基板用匣正面圖。 第1 8圖爲表示第9實施例的基板用匣側部棚片和側 部支撐體的關係部份透視圖。 第19圖爲第9實施例的基板用匣側部支撐體上側部 棚片突設狀態局部省大致呈剖面圖。 第20圖爲表示第9實施例的基板用匣使用機器手臂 叉將基板要收容在匣內前的狀態簡大致呈平面圖。 第21圖爲表示第9實施例的基板用匣使用機器手臂 叉將基板收容在匣內後的狀態簡大致呈平面圖。 第22圖爲第9實施例的基板用匣的兩側側部棚片載 置支撐著基板時的載置支撐狀態簡大致呈平面圖。 第23圖爲第9實施例的基板用匣側部棚片的另一實 施形態透視圖（其1 )。 第24圖爲第9實施例的基板用匣側部棚片的另一實 施形態剖面圖（其1 )。 第25圖爲第9實施例的基板用匣側部棚片的又另一 -45- (42) (42)200406039 實施形態透視圖（其2 )。 第26圖爲第9實施例的基板用匣側部棚片的另一實 施形態剖面圖（其2 )。 第27圖爲表示第1 〇實施例的基板用匣的外觀透視圖 〇 第28圖爲將第1〇實施例的基板用匣的可拆裝的局部 構件從匣拆掉後的透視圖。 第29圖爲第1 〇實施例的基板用匣省大致呈上框體後 的狀態平面圖。 第3 0 ( a )圖爲第1 〇實施例的側部支撐體局部說明 圖，第3 0 ( b )圖爲突設在側部支撐體上的側部棚片說明 圖。 第3 1圖爲突設在第1 〇實施例的基板用匣側部支撐體 上的側部棚片透視圖。 第32圖爲突設在第1〇實施例的基板用匣角部支撐體 上的前側部棚片透視圖。 第33圖爲突設在第1〇實施例的基板用匣角部支撐體 上的前側部棚片說明圖。 第34圖爲表示第1〇實施例的基板用匣中央部支撐體 及其安裝方法的說明圖。 第35圖爲表示第1〇實施例的基板用匣中小型基板被 收容在內的狀態說明圖。 第3 6圖爲表示第1 〇實施例的基板用匣側部棚片和後 部棚片的關係說明圖。 -46 - (43) (43)200406039 第37圖爲表示第10實施例的基板用匣中大型基板或 中型基被收容在內的狀態說明圖。 第3 8 ( a )圖爲第1 〇實施例的基板用匣中具備有側 部後止動件的側部棚片透視圖’第3 8 ( b )圖爲其說明圖 〇 第39圖爲立設在第10實施例的基板用匣角部支撐體 上的前側部棚片另一實施例透視圖。 〔圖號說明〕 J :基板插入方向 S :基板 SA :大型基板 S B :中型基板 S C :中型基板 S D :中型基板 S E :中型基板 SF :小型基板 R:基板出入用機器手臂叉 1 :上框體 1 a :上框體縱桿 1 b :上框體橫桿 1 c :上框體縱棧 1 d :上框體橫棧 2 :下框體 -47- (44) (44)200406039 2a :上框體縱桿 2b :上框體橫桿 2c :上框體縱棧 2d :上框體橫棧 2 e :加強棧 2f :角 2 g :交點 2 h :基點 2j :到點 2 k :加強棧 2m :到點 2η :縱桿中點 2ρ :橫桿中點 2 q :加強棧 2r :基點 2 s :加強棧 21 :加強棧 2 u :加強棧 2 v :加強棧 2 w :加強棧 3 :側部支撐體 5 :側部棚片 6 :後部支撐體 8 :水平加強棧 -48 (45) (45)200406039 9 :斜加強棧 10 :角支撐體 1 1 :飛出防止片 1 2 :匣定位導件 1 3 :匣定位導件台 22 :下框體 2 4 :前止動件 25 :後止動件 26 :側部棚片 27 :開口部 2 9 :支撐銷 3 0、3 1 :載置支撐部 32 :包覆部 3 3 :保持構件 3 4 :螺軸部 3 5 :緩衝部 3 6 :安裝孔 3 7 :螺帽 38 :叉片 3 9 :承接片 40 :突出體 41 :孔 42 :突出物 43 :載置支撐部 •49- (46) (46)200406039 44 :後部支撐體 45 :角部支撐體 46 :中央部支撐體 46a :中央部支撐體安裝孔 46b : L形安裝片 46c· L形女裝片女裝孔 46d :安裝用螺栓 4 6 e :安裝用螺帽 47 :側部棚片 4 7 a :側部支撐銷 47b :側部載置支撐部 47c :外側側止動件 47cl :外側側止動件保持部 47c2 :外側側止動件限制部 4 7 d :內側側止動件 47dl :內側側止動件上端部 47d2 :內側側止動件保持部 47d3 :內側側止動件限制部 47e :側部棚片後止動件 48 =最後部棚片 49 :後部棚片 49a :後部支撐銷 49b :後部載置支撐部 49c :後部棚片後止動件 -50 (47) (47)200406039 50 :前側部棚片 5 0 a :側部支撐銷 5 0b :前止動件 5 0 c :前止動件 62 :習知例的基板用匣下框體 -51-23- (20) (20) 200406039 According to Tables 1 and 2, it is known that the maximum deformation amount of the bending deformation of the substrate cassette of the first embodiment and the substrate cassette of the second embodiment is also larger than that of the first example. The substrate of the example is small with a cassette. Although the limit value of the amount of bending deformation in practical use is 2 mm, the maximum value of the amount of bending deformation of the substrate cassette of the first embodiment and the substrate cassette of the second embodiment are both below the limit. In addition, even in the substrate cassette of the conventional example, the substrate cassette of the second conventional example and the substrate cassette of the third conventional example have the largest amount of bending deformation, although the strength can be increased to the first. The substrate cassette according to the embodiment or the substrate cassette according to the second embodiment is of a higher weight than the substrate cassette according to the first embodiment or the substrate cassette according to the second embodiment. Therefore, by using the substrate cassette of the first embodiment or the substrate cassette of the second embodiment, it is possible to provide a kind of bending deformation generated by the cassette that does not affect the accommodated substrate, and it has been extremely effective in suppressing its own weight increase. Substrate box. In the first embodiment, the reinforcement stack 2e is set to extend from the base point 2h on the lower frame vertical stack 2c to the point 2j on the lower frame vertical rod 2a. In the second embodiment, the reinforcement stack 2e is 2k is set to extend from the base point 2h on the lower frame vertical stack 2c to the point 2m on the lower frame crossbar 2b. However, it is not limited to this. As shown in the third embodiment of FIG. 13 (a), the reinforcement stack 2q may also be set to extend from the base point 2r on the lower frame horizontal stack 2d to the lower retractable vertical rod 2a. The first distance to the point 2j on this condition is the distance from the intersection 2g to the base point 2r, and the second distance is the distance from the angle 2f to the point 2j. Alternatively, as shown in the fourth embodiment of FIG. 13 (b), the reinforcement stack 2s may also be set to extend from the base point 2r on the lower frame 2d to the point on the lower frame crossbar 2b. 2m, the first 1-24- (21) (21) 200406039 distance in this situation is the same as above, it is the distance from the intersection 2g to the base point 2r, and the second distance is from the angle 2f to the point 2m distance. In these situations, the setting of the first distance or the second distance may be the same as that of the first embodiment or the second embodiment. Regardless of the situation at this time, the same functions and effects as those of the first embodiment or the second embodiment can be obtained. Further, in the above example, if only the cassette positioning guide table 13 provided with the cassette positioning guide 12 capable of inserting the four corners inside the corner 2f of the lower frame 2 as shown in FIG. 4 (a) is used. In this case, the first distance L11 may be zero. In this case, as shown in the seventh embodiment in Fig. 15 (a), the reinforcement stack 2v is provided. In addition, as shown in FIG. 4 (b), only the cassette positioning guide 12 provided with the four corners formed around the intersection 2g of the lower frame vertical stack 2c and the lower frame horizontal stack 2d is used. When the cassette positioning guide table 13 is positioned, the second distance L12 may be zero. In this case, as shown in the eighth embodiment of FIG. 15 (b), the reinforcement stack 2w is set from the intersection 2g of the lower frame vertical stack 2c and the lower frame horizontal stack 2d along the lower frame. The horizontal stack 2 d starts from the base point 2 r with a first distance, and extends to the corner 2f of the quadrangular frame without intersecting with the lower frame horizontal stack 2 d. Next, a substrate cassette according to a ninth embodiment of the present invention will be described. Figures 16 and 17 are overall views of a substrate cassette according to a ninth embodiment of the present invention. Figures 18 and 19 show the main parts. Figure 1 in the figure shows the upper frame, and Figure 2 is Shows the lower frame, Figure 3 shows the side support, Figure 24 shows the front stop, Figure 25 shows the rear stop, Figure 26 shows the side shed, and Figure s shows The substrate and the drawing number r indicate a robot arm fork for substrate loading and unloading. -25- (22) 200406039 The substrate cassette for the ninth embodiment uses a plurality of side support bodies 3, 3 on both sides of the rectangular shape 1 and the lower frame 2 and the front ends are used as front stops. The moving members 24 and 24 are connected, and the rear stoppers 25 and 25 are connected to form a parallelepiped rectangle 1. The structure of the first embodiment is adopted. The lower frame 2 is the structure of the first embodiment. Structure, but the structure of the lower frame 2 may be adopted here, and any of the structures described in the second to eighth embodiments may be adopted. On the side support 3, a super-large glass substrate S is protruded at regular intervals in a vertical direction. The support side sheds 26 and the front face are formed with openings 27 for accessing the substrate S. In this embodiment, the side support bodies 3 and 3 are formed on both sides of the support. -However, depending on the dimensionality of the substrate S, the required side sheds 26, 26 are determined. The number of pieces of the support 3 is provided so as to be able to respond to this number. Here, the upper frame body 1 and the lower frame body 2 are made of aluminum frame side support body 3 and are made of SUS (which has a substantially C-shaped cross section, and the front stopper 24 is made of SUS and synthetic resin). The composite rear stopper 25 is made of synthetic resin. Next, as shown in FIG. 18 and FIG. 19, side sheds 26 and 26 are protruded at regular intervals on the inner side surface of the side branch. The shed sheet 26 is a shed on which at least the front end plate S of the metal support pin 29 is placed to support the synthetic resin placement support portion 30. Specifically, the side shed sheet 26 is placed on at least a metal support cone. The upper part and the base part are provided with the upper frame body connected with the upper frame body made of synthetic resin for supporting the substrate S. The upper frame body structure is not limited. In addition, there are 26 inwardly facing Structure: The space is 4 or bending rigid, so the side body is made of stainless steel), and the support plate 3 is provided with a substrate at the J section. For more details, ‘29 ’s front support -26- (23) 200406039 30, 31. In this embodiment, the support pins 29 are formed by inserting the support pins 30 and 31 at the front end portion and the base portion, and the entire length of the support pins 29 is covered with synthetic resin. Reference numeral 32 in the figure is a resin-coated portion. In addition, the covering portion 32 may be formed of a synthetic resin, and the entire length of the support pin 29 may be covered with a fluorine baking varnish. In addition, the side shed sheet is structured such that the base end of the support pin 29 is left, and the base end is integrally formed with a synthetic resin holding structure 33 that can be joined to the inner surface side of the side support 3, and A screw shaft portion 34 is formed at a base end of the support pin 29, and an upper portion of the holding member 33 is extended upward to form an inclined buffer portion 35 that can abut the stop base S. In addition, in the side support 3, mounting holes 3 6 and 3 6 are formed at regular intervals through the inside and outside, and the screw shaft portions 34 of the supporting pins 29 for the side sheds 26 are formed from The inner side is inserted into the mounting 3 6 of the side support body 3 and the holding member 3 3 is connected to the inner surface side of the side support body 3 'to the screw shaft portion 3 4 from outside to screw the nut 3 7 to the side The support body 3 is provided with side sheds 26 protruding therefrom. Here, the supporting pin 29 is made of SUS titanium gold, and the supporting portions 30, 31 and the holding member 33 are made of abrasion-resistant PEEK. The structure in which the side panel 26 is projected on the side support 3 is not limited to the structure described above. For example, a configuration may be adopted in which a space is provided between the holding member 33 and the side support 3 and then a support pin is installed. The overall dimensions of the substrate cassette of this embodiment are 1 460 mm, a width of 1990 mm, and a depth of 1680 mm. Its effective width W 1 37 mm. The upper and lower spacings of the side sheds 26 are 70mm, 24 pieces are formed, and the 26 pieces are formed through the support holes or the support structure. The 29th round is -27- (24) (24) 200406039. In addition, the projecting length of the side panel 26 is approximately 380 mm to 550 mm, and the diameter of the support pin 29 is 10 mm to 14 mm. The space between the front ends of the side sheds 26, 26 on both sides is approximately 6 10 mm to 2 70 mm. In the present invention, when the effective width is W and the protruding length of the side panel 26 is L, the relationship is set to 1/4 < L / W < l / 2. When applying the above specific figures, if L / W is to be larger than 1/4, the protruding length L of the side panel 26 must be longer than 3 42.5 mm. In this substrate cassette, a glass substrate S capable of accommodating 1350 mm X 1650 mm with a thickness of 0 · 7 mm can be accommodated in multiple stages. Next, the substrate arm S and the robot arm fork R when the substrate S is to be inserted into and removed from the substrate magazine according to the present invention and the steps of actually using the robot arm fork to extract the substrate S will be described with reference to FIGS. 20 to 22. In the substrate cassette according to the present invention, since the above-mentioned L / W is set to be larger than 1/4 ', that is, because the protruding length of the side sheds 2 6 is long, the side sheds 2 6 on both sides, The space between 26 and 6 is very narrow compared to the substrate S. Therefore, the robot arm fork with a conventional structure for substrate transfer will become a support and will fall away from the central part of the substrate S, which will cause the side edge of the substrate. In addition to the large bending, in addition to causing excessive pressure on the substrate, the space between the upper and lower side sheds 26'26 of the cassette cannot be pulled out and placed into the substrate unless the interval is increased. Therefore, in this embodiment, a plurality of receiving pieces 39, 39 are protruded on both sides of the fork pieces 3 8, 3, which are smaller in width than the front end interval D of the side shed pieces 26, 26 on both sides. · A synthetic resin protrusion 40 ′ 40 for supporting and supporting the substrate S is protruded at least from the front end portion and the base end portion of each of the receiving pieces 39 and 39. The number, interval, and height of the protrusions 40 are designed so that when the bottom surface of the substrate S is placed on it, even if the substrate S is bent, it will not directly contact the fork piece. 28- (25) (25) 200406039 38, 38 or adapter 39. In addition, the structure of the receiving piece 39 is the same as that of the side shed piece 26, and the interval protruding in the longitudinal direction of the fork piece 38 is set to be substantially the same as the interval between the front and rear side support bodies 3, 3. Here, when the protruding length of the side sheds 26 is 550 mm, since the distance D between the sheds 26 and 26 on both sides becomes 270 mm, the width between the outer sides of the forks 38 and 38 is set to about 2 50 mm, and the protruding length of the receiving piece 39 is set to about 400 mm. In this way, the entire width of the fork piece portion of the substrate for the robot arm fork is approximately 1050 mm. When a substrate S with a width and width of 1,350 mm is placed on the fork piece part, although the front end of the receiving piece 39 will protrude by about 150 mm, the amount of bending deformation of the part is only a little. Next, when the substrate S is accommodated in a centimeter by the robot arm fork R for substrate insertion and exit ', first, the substrate S is placed on the substrate arm insertion machine ^ & arm fork R fork piece, so that the fork Sheets 3 8 and 3 8 are located between the front ends of the side shed sheets 2 6 and 2 6 (part of the space D), and enter from the box openings 2 7 to the upper and lower side shed sheets 2 6 and 2 6. The clearance between the deep ends of the substrate S is close to or comes into contact with the rear stoppers 25 and 25 to stop the progress of the fork pieces 38 and 38. Next, when the fork pieces 38 and 38 are lowered, the receiving piece 39 is lowered through the front and rear side sheds 26 and 26, and is supported by the placing portions 30 and 31 of the side sheds 26 and 26. The bottom surface of the substrate S. Then, the fork pieces 38 and 38 are retracted and pulled out from the box. Here, the front stoppers 24 and 24 have the same protrusion 42 as the side shed sheet 26 at a position slightly higher than the side shed sheet 26. Therefore, the substrate S is accommodated in In the state of the box, 'formed as a protrusion 42 -29- (26) (26) 200406039 restricts the substrate S from moving forward. On the other hand, when the substrate S stored in the cassette is to be extracted, the above operations may be reversed. As shown in FIG. 22, the substrate S is supported by the side sheds 26, 26 on both sides, and is actually supported by the placing support portions 30, 31. The central part will be bent downward. When the length L of the side shed 26 is formed to be less than 1/4 of the effective width W, the amount of bending deformation at the central portion will be extremely increased, and the side edge of the substrate S will be lifted upward. If excessive pressure is applied to the central portion, the central portion of the substrate S will be deformed downward and its side edges will be deformed upward. Therefore, the space between the upper and lower side sheds 26 and 26 becomes very large and it is not practical. Therefore, it is preferable that the larger L / W is greater than 1/4, the less the amount of bending deformation in the central portion of the substrate S, and the load on the side panel 26 at the same time as the side edge of the substrate S increases. Therefore, the load applied to the front end of the side panel 26 is reduced, and the bending deformation of the side panel 26 is reduced. In addition, when the side panel 26 is formed to be extremely long, the substrate S portion at the center of the side panel 26 should be bent and deformed, and will contact the shaft portion of the support pin 29. It is preferable that the center part of 29 is also provided with the mounting support part. 23 and 24 show another embodiment of the side panel 26. The front end portion of the support pin 29 is formed with a hole 41 or a recessed portion penetrating the upper and lower sides, and the hole 41 is formed in the hole 41. Either the mounting support portion 30 made of synthetic resin is embedded in the recessed portion, or the mounting support portion 30 is integrally formed by insert molding, or a screw shaft portion of the base end is left on the base end portion of the support pin 29. 34 also holds the holding member 33 made of synthetic resin in one piece, and the mounting support portion 31 is also integrated with the holding member 33. -30- (27) (27) 200406039 In addition. 25 and 26 are views showing still another embodiment of the side panel 26. The side panel 26 is longer than the side panel 26 shown in FIGS. 23 and 24. In the center of the support pin 29, a mounting support portion 43 similar to the mounting support portion 30 is provided. The other structures are the same, so the same structure is given the same drawing number, and the provinces will roughly describe it. In addition, in the above embodiment, although the side shed sheet 26 is exemplified by a rod-shaped object, it may also be a gall-shaped object, and its main part may be a ceramic material or a carbon fiber and a synthetic resin other than metal. In this state, a mounting support portion 30 for mounting and supporting the substrate S is provided at least at the front end portion of the composite material. In addition, in the above-mentioned embodiment, although the cassette which can accommodate the glass substrate S with a thickness of 1350 mm x 1650 mm and a thickness of 0.7 mm is exemplified, it is also suitable for containing a glass substrate of 1 470 mm x 1 770 mm and a thickness of 0.7 mm or a larger substrate. In addition to glass substrates, sheet substrates made of synthetic resin can also be accommodated. Next, a substrate cassette according to a tenth embodiment of the present invention will be described. Fig. 27 is a perspective view showing the appearance of the substrate cassette for the tenth embodiment, and Fig. 28 is a perspective view of the detachable partial member (central support) in Fig. 27 from the cassette FIG. 29 is a plan view of the substrate cassette in the tenth embodiment when it is substantially in the upper frame. In the figure, the arrow J indicates the direction in which the substrate is to be inserted into the substrate cassette of the tenth embodiment. As shown in FIGS. 27, 28, and 29, the substrate cassette for the tenth embodiment has a rectangular parallelepiped box structure, and is configured as a vertical rod 1 a on the upper frame. And -31-(28) (28) 200406039 formed by the rectangular upper frame 1 formed by the upper frame crossbar 1 b and the lower frame longitudinal rod 2a and the lower frame cross rod 2b, Twelve side support bodies 3 and two back support wipers 44 and two corner support bodies 45 are connected. Here, the side support body 3, the rear support body 44, and the corner support body 45 are equivalent to the above-mentioned support bodies. The upper frame 1 adopts the structure of the first embodiment described above, and the lower frame 2 also adopts the structure of the first embodiment described above, but the structure of the lower frame is not limited to this. Any one of the eight embodiments. In addition, six side support bodies 3 are erected on the left and right lower frame vertical bars 2a, and two rear support bodies 44 are erected on the lower frame crossbar 2b on the innermost side of the lower frame 2. Then, the two corner support members 45 are erected on the corner formed by the lower frame longitudinal bar 2a and the frontmost lower frame cross bar 2b. In order to support the substrate inserted from the front in the substrate cassette, a plurality of side sheds 47 are protruded on the side support 3, and a plurality of last sections are protruded on the rear support 44. The shed sheet 48 is then provided with a plurality of front-side shed sheets 50 on the corner support 45, and each of the shed sheets is projected inwardly at regular intervals in the up-down direction. The substrate cassette of the tenth embodiment can accommodate large substrates, large substrates, medium substrates, and small substrates of different sizes. For large substrates, the width and depth dimensions are the maximum storage size. For medium-sized substrates, 'the width dimension is the maximum storage size and its depth dimension is smaller than the maximum storage size.' For small substrates, the width and depth dimensions are larger than the maximum. Small storage size. Specifically, the shapes shown by the two dotted lines in Figures 29 and 9 indicate the shape of the substrate. There are 1 type of SA for large substrates, 4 types of SB, SC, SD, and SE for medium substrates, and SF for small substrates. There are 1 type and 6 types in total. -32- (29) (29) 200406039 The rear end of the large-size substrate SA is supported by the last shed 48. The medium-sized substrate is near the left and right sides of the rear end. The medium-sized substrate SB is supported by the innermost side shed 47, and the medium-sized substrate SC is the second side shed 4 7 from the innermost side. The medium-sized substrate SD is supported by the third side shed 47 from the innermost side, and then the medium-sized substrate SE is the fourth side of the shed 47 from the innermost side. The mounting is supported. That is, the depth dimension relationship is SB > SC > SD> SE. In addition, the small-sized substrate SF is supported on the left and right side portions near the rear end by a side shelf sheet 47 which is the third piece from the innermost side. The depth dimension relationship of the small substrate SF is SD > SF > SE. Here, the SB, SC, SD, and S E substrates having a width of the largest storage size are equivalent to the first substrate, and the small substrate SF having a width smaller than these substrates is equivalent to the second substrate. As shown in Figs. 30 (a), (b), and 31, the side shed 47 protruding from the side support is made of: a metal side support pin 47a; The side mounting support 47b provided; the outer side stopper 47c provided at the base end portion of the side support pin 47a; and the inner side stopper 47d provided at the middle portion of the side support pin 47a . The upper portion of the side portion supporting portion 47b is a flat surface, and is used to place the left and right portions supporting the large substrate SA, the medium substrate SB (SC, SD, SE) or the small substrate SF. The outer side stopper 47 c is used to abut against the left or right end of the large substrate SA or the medium-sized substrate SB (SC, SD, SE), and then mount and support it. The upper side is the outer side of the flat surface. Side stopper holding portion 4 7 c 1; and the outer side stopper holding portion 4 7 c 1 -33- (30) (30) 200406039 side stopper restricting portion 47 c2 Make up. The outer side stopper restricting portion 47 c2 'is formed so that it can easily abut against the left or right end of a large substrate or a medium-sized substrate, and the upper side is formed with a beveled edge that is gently inclined to the outside. The inner-side stopper 47d is for abutting against the left or right end of the small substrate SF and then placing and supporting it. The inner-side stopper holding portion 4 7 d 2 is: The inner-side stopper restricting portion 47 d3 erected from the inner-side stopper holding portion 4 7 d 2. In addition, as shown in FIG. 30 (b), the side shed 47 'is configured as follows: the upper end portion 4 of the inner side stopper which is formed from the inner side stopper restricting portion 4 7 d 3 is connected; The height of the upper surface 7 d 1 is formed to be equal to the height of the upper end surface of the side mounting support portion 47 b and the upper surface of the outer side stopper holding portion 47 c 1, and the upper surface of the inner side stopper holding portion 47 d2 is It is formed to be lower than this height. Further, although the above-mentioned side shed sheet 47 may be provided on the corner support 45 in a protruding manner, in the tenth embodiment, the side shed sheet 47 is replaced with a protrusion. There are a front side shed sheet 50 composed of a metal side support pin 50a as shown in Fig. 32 and a front stopper 5 Ob provided at the front end portion. The front stopper 50b provided in the front side panel 50 is formed to have a height higher than that of the side mounting support 47b provided in the side panel 47. As shown in FIG. 3 to FIG. , So that it has the function of preventing the board contained therein from flying out. As the front stopper, a front stopper 50c having a segment as shown in Fig. 39 may be used. In the substrate cassette for the tenth embodiment described above, in order to be able to accommodate a small substrate having a width dimension and a depth dimension smaller than the maximum dimension SF ft -34- (31) (31) 200406039 as shown in FIG. 34 The illustration shows that the detachable central support 46 is erected on the lower frame vertical stack 2c of the substrate cassette. That is, the L-shaped mounting piece 46b is previously soldered at a position on the upper surface of the lower frame vertical stack 2c of the lower frame, which corresponds to a position near the midpoint of the rear end side of the small substrate S F housed in the substrate cassette. In order to prevent the lower end of the central support 46 from contacting the L-shaped mounting piece 46b, the central support 46 is erected on the lower frame vertical stack 2c, and the mounting bolts 46d and the mounting nuts 46e are used. The central-portion support body 46 is inserted into the central-portion support body mounting hole 46a and the L-shaped mounting plate mounting hole 46c of the l-shaped mount piece 46b to fix the central-portion support body 46 to the L-shaped mount piece 46b. The same mounting piece as the L-shaped mounting piece 46b is also welded to the lower surface of the upper frame longitudinal bar la, and the upper end of the central support 46 is fixed to the mounting piece in the same manner as described above. On the central support 46, a rear support 49 for placing and supporting small substrates SF on the side support 47 protruding from the side support 3 is provided in a protruding manner at the same interval. As shown in FIG. 34, the rear shed sheet 49 is a rear shed provided at the base end portion of the rear mounting support portion 49b and the rear mounting support portion 49b provided at the front end portion by a metal rear support pin 49a. The rear-plate stopper 49c is configured. Since the rear stopper 49c of the rear shelf can abut against the rear end of the stopper small substrate SF to support it, it can stably store the small substrate SF so that it does not move forward or backward during storage. The rear mounting support portion 49b is used to mount and support the small substrate S F, and the upper surface is a flat surface. In addition, the length of the rear support pin 49a is formed so as to reach the vicinity of the center of the small substrate SF, so that the rear mounting support portion 49b can be placed near the center of the small substrate SF. Because -35- (32) 200406039 Therefore, the small board SF can be stably mounted and supported by the rear mounting support portion 49b. Fig. 35 shows that the small board SF is mounted and supported on the side shed 47 and the rear. Fig. 36 shows the state of the shed sheet 49. The relationship between the side shed sheet and the rear shed sheet 49 is shown in Fig. 36. As described above, the left and right portions of the small substrate SF are supported by the side mounting support portions 47b of the side sheds 47, and the left and right ends of the small substrate SF are held by the inner stops of the side sheds 47. 47b abuts against the stop and is supported by the mounting. In addition, as shown in Figs. 35 and 36, the rear shed sheet 49 is mounted on the central support 46 so that the height of the upper surface of the rear mounting support 49b is formed to be higher than that of the rear mounting support 49b. The placement support is the same small base SF placement support. The side placement support portion 47b of the side shed sheet 47 has a relatively high surface height. The side placement support portion 47b and the portion placement are shown in FIG. 36. The height difference L3 of the support portion 49b is set so that the left and right ends of the small-sized substrate SF are lower than the upper end surface of the side-mounted support portion 47b. In addition, the left and right ends of the small-sized substrate SF abut the stop and support the upper surface height of the inner side stopper holding portion 47d2, as described above, so as to be higher than the upper surface height of the side placing support portion 47b. As shown in FIG. 35, the small substrate SF accommodated in the low-profile board is low, and its left and right ends are stopped and supported by the inner side stopper 47d, so it is small. Although the width dimension of the substrate SF is smaller than the maximum storage size of the substrate cassette in the tenth embodiment, the small substrate SF can be prevented from moving laterally in the substrate cassette in the tenth embodiment, and the small The substrate SF is stored in a stable state. ft? n Substrates on the side of the 4-7 side of the board are moved in the same way as the other side of the board. -36- (33) (33) 200406039 In the substrate box of the above 10th embodiment, it is stored Although there is only one type of small substrate of SF, it is not limited to this. It can also accommodate multiple small substrates of different sizes. In this case, as long as the inner side stopper 47d is fitted to the width of the small substrate, it is set on the side. The optimal position of the side support pins 47a of the shed sheet 47 is matched with the mounting position of the center support 46 or the length of the rear support support 49b protruding from the center support 46 to the small size. The depth of the substrate can be optimally set. In addition, the side support pins 47a of the same side shed 47 are provided with several or all of the inner side stoppers 47d for supporting a plurality of small substrates with different widths, so that they can be installed on the same side. Each of the plurality of small substrates having different widths is housed on the shed sheet 47. In this way, one substrate cassette can be used for accommodating substrates having different widths, making the use of the substrate cassette flexible. In the substrate cassette for the tenth embodiment described above, if a large substrate SA or a medium substrate SB, SC, SD, or SE of any medium substrate is to be stored, the center provided for the small substrate SF storage is not required. If the partial support 46 is a large-sized substrate SA and a medium-sized substrate SB, SC, SD, or SE to be stored, depending on the depth dimension, the central support 46 may be removed. Fig. 37 shows a state in which the large-size substrate SA or the medium-sized substrate SB, SC, SD, or SE has a medium substrate substrate accommodated in the substrate cassette of the tenth embodiment. As described above, the large or small substrates SA or medium substrates SB, SC, SD, or SE are left and right ends of these substrates are abutted and stopped by the outer side stoppers 47c, and the left and right side portions are side by side. The part mounting support 47b -37- (34) (34) 200406039 The mounting support is held in a wavy, curved state as shown in FIG. 37. At this time, as described above, the height of the upper end of the upper end portion 47dl of the inner side stopper of the side shed 47 is equal to the height of the upper end of the side mounting support portion 47b as shown in FIG. 30 (a). Therefore, the substrate to be stored there is to be in contact with the upper end of the upper end portion 47d1 of the inner side stopper, and it does not disturb the balance. Therefore, it is possible to stably store a large substrate or a medium-sized substrate. In the case of the substrate cassette according to the tenth embodiment, the side sheds 47 protruding from the side support body 3 are provided with a side mounting support portion 47b, an outer side stopper 47c, and an inner side stopper. 47d, while the left and right sides of all the substrates to be stored are supported by the side mounting support 47b, the left or right ends of the large and medium-sized substrates with the largest storage dimensions are from the outer side. The stopper 47c abuts the stopper and is supported by the placement, and the left or right end of the small substrate having a width dimension smaller than the maximum storage size is abutted against the stopper 47d by the inner side stopper 47d. Therefore, it is possible to provide a substrate cassette without adjusting the width of the cassette with the substrate to be stored. '' In the substrate cassette for the tenth embodiment described above, if the substrate cassette is used for accommodating medium-sized substrates SB, SC, SD, or SE, or when it is used for accommodating small-sized substrates SF, the substrate support 3 may also be used. The protruding side shed 47 is provided with a side shed rear stopper 47e shown in FIG. 38 (a). In this way, as shown in FIG. 38 (b), since the side shelf rear stopper 47e abuts against the rear end of the medium-sized substrate or the small-sized substrate, the medium-sized substrate can be stably stored so that it is not in the storage state. Will move backwards. At this time, it is preferable to make the side shed back stopper 47e with a flexible resin or the like. Ft ft # -38- (35) 200406039 Make the side shed back stopper 47e flexible in the vertical direction. Sex, so that has the following advantages. That is, when accommodating a substrate having a long depth dimension, as shown in FIG. 3 (b), when the side support body 3 having the stopper 47e abutting against the rear end of the substrate is abutted to the front side, Part support body 3 When the upper end of the rear end of the side shed back stopper 47e is pressed downward by the base gravity covering the upper side, the rear end of the side shed back stopper 47e will be lowered sideways to make the side The back stopper 47e of the shed sheet is bent, so that it is possible to prevent a force applied to the substrate covering the shed sheet. In addition, when the substrate cassette according to the tenth embodiment is used for the storage-type substrates SB, SC, SD, or SE, the central support 46 used when the small-sized substrate is received may be used. In this way, since the center portion of the center board SB, SC, SD, or SE is near the center portion by the rear portion supporting portion 49b protruding from the center portion support body, the middle portion can be stably stored. Substrate. In the tenth embodiment described above, when the efficiency of the cassette for accommodating the substrate is W, and the length of the side support pin 47 of the side shed sheet 47 is L, the side support pin 47 of the side shed sheet 47 may be used. The length L is set to 1/4 as described in the ninth embodiment. < L / W < l / 2, or, set 1/4 < L / W, at the same time, the front end interval of the side support pins 47 of the side shed 47 can be set at least so that the robot arm fork for substrate access can pass through the interval. In addition, the side shed sheet 47 may be formed in a plate shape, or the main portion may be made of a metal material, a ceramic material, or a composite material made of a carbon fiber synthetic resin as described in the ninth embodiment. In the lower cover of the first shed, the retractable type 46 is made with a wide solid sum -39- (36) (36) 200406039 [Effects of the Invention] According to the substrate cassette described in the scope of patent applications 1 to 9, it can be Provided is a method for supporting a cassette containing a substrate on various supporting devices and the like, even if the cassette is supported by a part of the lower casing body contacted by a supporting portion such as the supporting device for the cassette support. In the case of a substrate cassette, a substrate cassette can be provided in which the bending deformation generated by the cassette does not affect the contained substrate when the entire weight of the cassette containing the substrate is affected, and the substrate cassette has been strongly suppressed from increasing its weight . According to the substrate cassette described in Item 10 of the patent application scope, since the effective width of the side shelf sheet is W for the substrate storage, and the protruding length of the side shelf sheet is L, the relationship is set. Into l / 4 < L / W < l / 2, because of its high storage efficiency, it can stably support and store very large glass substrates, and it is also easy to get in and out of the robot arm fork for substrate access. In the case of the substrate cassette according to item 11 of the scope of patent application, since the effective width of the side shelf sheet for the substrate storage is W and the protruding length of the side shelf sheet is L, the relationship is set. Into 1/4 < L / W at the same time, set the space between the front ends of the side sheds on both sides to be at least the interval that the robot arm forks for substrate access can pass through, so it has a high storage efficiency and can stably support a very large glass substrate At the same time, it is easy to get in and out of the robotic fork with a robot arm. According to the application for the substrate cassette described in Item 12 of the patent scope, the side shed sheet is rod-shaped or plate-shaped, and its main part is made of a metal material or a ceramic material or a composite material of carbon fiber and synthetic resin. As a result, at least the front end portion is provided with a mounting support portion for supporting the substrate, so that the projection m -40-(37) (37) 200406039 protruding from the support body can have sufficient support strength even with a long length. According to the substrate cassette described in claim 13 of the scope of patent application, the bottom surface of the support substrate can be placed and contained in the support substrate only by using a synthetic resin mounting support portion without damaging the substrate. When applying the substrate cassette according to item 14 of the scope of patent application, even if the substrate accidentally comes into contact with the side sheds other than the mounting support, the brittle glass substrate can be prevented from being damaged, and at the same time, it can be prevented from coming from metal. The particles of the supporting pin are generated. According to the substrate cassette described in claim 15 of the scope of patent application, even the long-length side sheds can be firmly projected on the support body, and the side sheds are assembled on the expenditure body in an assembled manner. Therefore, in addition to being replaced when the side sheds are damaged, they can also be replaced with side sheds of different lengths. When the substrate cassette according to item 16 of the scope of patent application is applied, when the substrate is moved laterally by vibration or the like while it is housed in the cassette, it can be abutted by the buffer portion of the holding member. In addition, it can also prevent the substrate from accidentally contacting the support body and damaging the substrate when it is taken out and put into the substrate with a robot arm fork for substrate loading and unloading. According to the claim for the substrate described in item 17 of the scope of patent application, because the side support piece protruding from the side support body is provided with a side mounting support portion, an outer side stopper and an inner side stop The moving parts enable the left and right sides of the first substrate and the second substrate that is narrower than the first substrate to be supported on the left and right ends of the stopper. There is no need to adjust the cassette width to match the substrate to be stored. -41-(38) (38) 200406039 According to the substrate cassette described in item 18 of the scope of patent application, because the same side shelf is provided with a plurality of inner side stops for different second substrates with different widths As the moving parts, a plurality of second substrates having different widths can be respectively stored on the same side shed, so that the use of the substrate cassette is flexible. According to the substrate cassette described in item 19 of the scope of patent application, because The detachable central support provided in accordance with the depth dimension of the substrate is erected at the rear end position of the substrate to be accommodated. At the same time, the central support is provided with a rear substrate with a substrate for support. Since the rear shelf sheet of the support portion is placed on the rear side, the second substrate having a narrower width than the first substrate can also be accommodated and held. According to the substrate cassette described in claim 20 of the scope of patent application, the upper end position of the rear mounting support portion is formed so as to be simultaneously loaded than the substrates that can be mounted and supported on the rear mounting support portion. The position of the upper end of the side mounting support provided on the side shed sheet is higher, so the second substrate having a narrower width than the first substrate can be bent in a manner such that its central portion is gently swelled upward. The second substrate, which is narrower than the first substrate, can be stably stored while being held. According to the substrate cassette described in claim 21 of the scope of patent application, since the height of the upper end of the inner side stopper is equal to the height of the upper end of the side mounting support, the first substrate waits to contact the inner side stop. The upper end of the moving member can stably store the first substrate without breaking the balance. According to the patent application for the substrate cassette described in Item 22, the inner side stopper is provided with a lower end than the inner side stopper. -42 · (39) (39) 200406039 The holding portion for holding the left or right end of the second substrate at the position; and the restricting portion erected from the holding portion, at the same time, the height of the rear shelf is set so that the left or right end of the second substrate is higher than the side portion Since the mounting support portion is also low, when a second substrate having a width narrower than that of the first substrate is accommodated, the second substrate can be prevented from moving laterally in the substrate cassette. When the substrate cassette according to Item 23 of the scope of patent application is applied, the length of the rear shelf is set to approximately the rear mounting support portion provided in the rear shelf of the center support. Since it has a central portion, it can stably mount and support a substrate that has already been accommodated. According to the patent application for the substrate cassette described in item 24, since the rear end of the rear support of the central support body is provided with a rear stopper for the rear end of the substrate, the rear stopper can be stopped. The storage substrate is stabilized so that it does not move backwards during storage. According to the application for the substrate cassette described in item 25 of the patent application scope, since the rear side of the substrate is provided with a rear side bracket stopper for the stopper on the side shelf plate, it is compatible with the patent application scope. The substrate cassette described in item 8 is the same, and it can stably store the substrate so that it does not move backward during storage. According to the substrate cassette described in item 26 of the patent application scope, it is because it is the support at the foremost side. In the above, the side shed sheet is replaced with a front side shed sheet that is provided with a front stopper for abutting against the stopper of the substrate, so that the substrate can be stably stored so as not to move forward during storage. [Brief description of the drawings] • 43- (40) (40) 200406039 Fig. 1 is a perspective view of a substrate cassette according to the first embodiment. Fig. 2 is a plan view of a substrate cassette according to the first embodiment. Fig. 3 is a partially enlarged plan view of the lower frame of the substrate cassette for the first embodiment. Figures 4 (a) and (b) are plan views of the lower frame of the substrate cassette with the cassette positioning guide. Fig. 5 is a plan view of a substrate cassette according to a second embodiment. Figures 6 (a) to (h) are schematic diagrams showing various relationships between the shape of the support portion of the supporting device and the like and the various cases of the lower frame of the substrate cassette for the first embodiment (No. 1) ° 7 (a) to (g) The figure is a schematic diagram showing various relations between the shape of the support portion of the support device and the substrate lower case of the substrate of the first embodiment (No. 2) ° The eighth (a) to (h) diagrams show the support portion of the support device and the like Shapes and various relationships between the substrate lower case of the substrate for the second embodiment (1) ° * Figures 9 (a) to (g) show the shape of the support part such as a supporting device and the substrate of the second embodiment Diagrams showing various relationships of the lower case of the box (No. 2) ° Figs. 10 (a) to (h) are diagrams showing various relations of the lower case of the substrate for the substrate showing the shape of the support portion of the supporting device and the conventional example (Its 1). Figs. 11 (a) to (g) are schematic diagrams showing various relations between the shape of a support portion such as a support device and a conventional lower case of a substrate cassette (part 2). Fig. 12 is -44- (41) (41) 200406039 when the usage pattern diagram is Fig. 6 (a). The analysis of the linear structure of the substrate cassette for the first embodiment is shown in Fig. 13 (a). A plan view of the lower frame of the substrate cassette according to the embodiment, and FIG. 13 (b) is a plan view of the lower frame of the substrate cassette according to the fourth embodiment. Fig. 14 (a) is a plan view of the lower frame of the substrate cassette for the fifth embodiment, and Fig. 14 (b) is a plan view of the lower frame of the substrate cassette for the sixth embodiment. FIG. 15 (a) is a plan view of the lower frame of the substrate cassette for the seventh embodiment, and FIG. 15 (b) is a plan view of the lower frame of the substrate cassette for the eighth embodiment. 16 is a side view of the entire substrate cassette according to the ninth embodiment. Fig. 17 is a front view of a substrate cassette according to a ninth embodiment. Fig. 18 is a perspective view showing a part of a relationship between a side shelf sheet and a side support of a substrate cassette for a ninth embodiment. Fig. 19 is a cross-sectional view showing a part of a state where the shed sheet is projected from the upper side of the substrate-side support for a substrate of the ninth embodiment in a projected state. Fig. 20 is a schematic plan view showing a state in which a substrate for a substrate cassette according to a ninth embodiment uses a robot arm to store substrates in the cassette. Fig. 21 is a schematic plan view showing a state where a substrate for a substrate cassette is stored in a cassette using a robot arm according to a ninth embodiment. Fig. 22 is a schematic plan view of the mounting support state when the sheds on both sides of the substrate cassette according to the ninth embodiment support the substrate. Fig. 23 is a perspective view (No. 1) of another embodiment of the side plate of the substrate cassette according to the ninth embodiment. Fig. 24 is a sectional view (No. 1) of another embodiment of the side plate of the substrate cassette for the ninth embodiment. Fig. 25 is still another perspective view of the embodiment-side shed sheet for a substrate cassette of the ninth embodiment. (45) (42) (42) 200406039 (2). Fig. 26 is a sectional view (No. 2) of another embodiment of the side plate of the substrate cassette according to the ninth embodiment. Fig. 27 is a perspective view showing the appearance of the substrate cassette according to the tenth embodiment. Fig. 28 is a perspective view of the substrate cassette according to the tenth embodiment with the detachable partial members removed from the cassette. Fig. 29 is a plan view showing a state where the substrate cassette for the substrate according to the tenth embodiment is substantially in the upper case. Fig. 30 (a) is a partial explanatory diagram of a side support body of the 10th embodiment, and Fig. 30 (b) is an explanatory diagram of a side roof sheet protrudingly provided on the side support body. Fig. 31 is a perspective view of a side shed sheet protrudingly provided on a side support of a substrate cassette for a substrate according to the tenth embodiment. Fig. 32 is a perspective view of a front-side shed sheet protrudingly provided on a substrate corner support of the substrate of the tenth embodiment. Fig. 33 is an explanatory view of a front side shelf sheet protrudingly provided on a substrate corner support for a substrate of the tenth embodiment. Fig. 34 is an explanatory view showing a substrate-chamber central support body and a mounting method thereof according to the tenth embodiment. Fig. 35 is an explanatory view showing a state in which small and medium-sized substrates are accommodated in the substrate cassette for the tenth embodiment. Fig. 36 is an explanatory view showing the relationship between the side plate and the rear plate of the cassette box substrate of the tenth embodiment. -46-(43) (43) 200406039 Fig. 37 is an explanatory diagram showing a state in which a large substrate or a medium substrate is accommodated in a substrate cassette according to the tenth embodiment. Fig. 38 (a) is a perspective view of a side shelf sheet provided with a side rear stopper in the substrate cassette for the tenth embodiment. Fig. 38 (b) is an explanatory view thereof. Fig. 39 is A perspective view of another embodiment of a front side shed sheet standing on a substrate corner support for a substrate of the tenth embodiment. [Illustration of drawing number] J: Board insertion direction S: Board SA: Large board SB: Medium board SC: Medium board SD: Medium board SE: Medium board SF: Small board R: Robot arm fork for board access: Upper frame 1 a: Upper frame vertical bar 1 b: Upper frame horizontal bar 1 c: Upper frame vertical stack 1 d: Upper frame horizontal stack 2: Lower frame -47- (44) (44) 200406039 2a: Upper Frame vertical bar 2b: Upper frame horizontal bar 2c: Upper frame vertical stack 2d: Upper frame horizontal stack 2 e: Reinforcement stack 2f: Corner 2 g: Intersection point 2 h: Base point 2j: To point 2k: Reinforcement stack 2m: to point 2η: midpoint of vertical bar 2ρ: midpoint of horizontal bar 2 q: reinforcement stack 2r: base point 2 s: reinforcement stack 21: reinforcement stack 2 u: reinforcement stack 2 v: reinforcement stack 2 w: reinforcement stack 3: Side support 5: Side shed sheet 6: Rear support 8: Horizontal reinforcement stack -48 (45) (45) 200406039 9: Inclined reinforcement stack 10: Corner support 1 1: Flyout prevention sheet 1 2: Cassette Positioning guide 1 3: Cassette positioning guide table 22: Lower frame 2 4: Front stopper 25: Rear stopper 26: Side shed 27: Opening 2 9: Support pin 3 0, 3 1: Placement support part 32: coating part 3 3: holding member 3 4: screw shaft part 3 5: cushioning 3 6: Mounting hole 3 7: Nut 38: Fork piece 3 9: Receiving piece 40: Protrusion 41: Hole 42: Protrusion 43: Mounting support • 49- (46) (46) 200 406 039 44: Rear support Body 45: Corner support 46: Center support 46a: Center support mounting hole 46b: L-shaped mounting piece 46c, L-shaped women's piece Women's hole 46d: Mounting bolt 4 6e: Mounting nut 47: Side shed 4 4 a: Side support pin 47b: Side mounting support 47c: Outer side stopper 47cl: Outer side stopper holding portion 47c2: Outer side stopper restricting portion 4 7 d : Inner side stopper 47dl: Inner side stopper upper end portion 47d2: Inner side stopper holding portion 47d3: Inner side stopper restricting portion 47e: Side shed rear stopper 48 = rearmost shed 49 : Rear shed 49a: Rear support pin 49b: Rear mounting support 49c: Rear shed rear stopper -50 (47) (47) 200406039 50: Front side shed 50 0 a: Side support pin 5 0b : Front stopper 5 0 c: Front stopper 62: Conventional base case lower case-51

Claims (1)

(1) (1)200406039 拾、申請專利範圍 1. 一種基板用匣，其可收納複數基板，是於上框體 和下框體間架設有複數支撐體的基板用匣，其特徵爲：上 述下框體，是具備著相互交叉的2支棧和四角形框所構成 的大致呈田字形部份的同時，具備有從上述2支棧的交點 沿著該2支棧中的一方棧離有第1距離的位置開始，與上 述2支棧中的另一方棧不相交地，延伸到從四角形框的角 部沿著四角形框的直線部份離有第2距離的位置爲止的加 強棧。 2 . —種基板用匣，其可收納複數基板，是於上框體 和下框體間架設有複數支撐體的基板用匣，其特徵爲：上 述下框體，是具備著相互交叉的2支棧和四角形框所構成 的大致呈田字形部份的同時，具備有從上述2支棧的交點 沿著該2支棧中的一方棧離有第1距離的位置開始，與上 述2支棧中的另一方棧不相交地，延伸至上述四角形框的 角部爲止的加強棧。 3 · —種基板用匣，其可收納複數基板，是於上框體 和下框體間架設有複數支撐體的基板用匣，其特徵爲：上 述下框體，是具備著相互交叉的2支棧和四角形框所構成 的大致呈田字形部份的同時，具備有從上述2支棧的交點 開始，延伸至從上述四角形框的角部沿著上述四角形框的 直線部份離有第2距離的位置爲止的加強棧。 4 ·如申請專利範圍第1項或第2項所記載的基板用 匣，其中，上述第1距離，是比上述一方棧和上述加強棧 -52- (2) (2)200406039 的交點起，與上述2支棧中的另一方棧不相交地，至沿著 上述一方棧相交在上述四角形框上的交點爲止的距離還小 〇 5 ·如申請專利範圍第1項或第3項所記載的基板用 匣’其中’上述第2距離，是比上述四角形框和上述加強 棧的交點起’至沿著包括著該交點的上述四角形框的直線 部份相交在上述一方棧或上述另一方棧上的交點爲止的距 離還小。 6 ·如申請專利範圍第1項至第5項中任一項所記載 的基板用匣’其中’在上述支撐體上突設有上述基板載置 支撐用的棚片。 7 ·如申請專利範圍第1項或第2項或第4項所記載 的基板用匣’其中，上述第1距離，是形成爲80〜200mm 〇 8 ·如申請專利範圍第1項或第3項或第5項所記載 的基板用匣，其中，上述第2距離，是形成爲80〜200mm 〇 9·如申請專利範圍第1項至第8項中任一項所記載 的基板用匣’其中’上述上框體是以大致呈田字形框體構 成。 10·如申請專利範圍第1項至第9項中任一項所記載 的基板用匣’其中’是在上述支撐體上於上下方向在每個 指定間隔突設有上述基板載置支撐用側部棚片的同時，上 述側部棚片，是在上述基板收容用的匣有效寬度爲W，該 -53- (3) (3)200406039 側部棚片的突出長度爲L時，其關係是設定成W4< L/w< 1/2 〇 1 1 .如申請專利範圍第1項至第9項中任一項所記載 的基板用匣，其中，是在上述支撐體上於上下方向在每個 指定間隔突設有上述基板載置支撐用側部棚片的同時，上 述側部棚片，是在上述基板收容用的匣有效寬度爲w，該 側部棚片的突出長度爲L時，其關係是設定成1/4<L/W 的同時，位於兩側上的側部棚片前端的間隔D至少是設 疋成基板出入用機益手臂叉可通過的間隔。 12·如申請專利範圍第1 0項或第1 1項所記載的基板 用匣，其中，上述側部棚片，爲棒狀或板狀，其主要部份 是以金屬材或陶瓷材或碳纖和合成樹脂的複合材製成，至 少於其前端部是設有上述基板載置支撐用的載置支撐部。 1 3 .如申請專利範圍第1 0項或第1 1項所記載的基板 用匣，其中，上述側部棚片，是在金屬製上述支撐銷的至 少前端部和基部設有上述基板載置支撐用的合成樹脂製載 置支撐部。 1 4 ·如申請專利範圍第1 3項所記載的基板用匣，其 中，上述側部棚片的支撐銷全長都是以氟素烤漆或以合成 樹脂包覆著。 1 5 .如申請專利範圍第1 3項或第1 4項所記載的基板 用匣，其中，是於上述支撐體在每一定間隔形成有貫穿內 外的安裝孔’在留有上述支撐銷的基端然後於基端部上一 體形成有接合於該支撐體內側面的合成樹脂製保持構件的 -54· (4) (4)200406039 同時，於該支撐銷的基端形成有螺軸部，以該螺軸部是從 內方插入在上述支撐體的安裝孔並且是將上述保持構件接 合在支撐體內面側的狀態，從外側對上述螺軸部螺合螺帽 ，在上述支撐體上形成爲突設著側部棚片。 16.如申請專利範圍第1 5項所記載的基板用匣，其 中，是於設置在上述側部棚片的支撐銷基端部上的保持構 件，設有上述基板側緣抵接止動用的緩衝部。 1 7.如申請專利範圍第1項至第1 2項中任一項所記 載的基板用匣，其中，是於配設在左右的上述支撐體上， 在內側於上下方向的每個指定間隔突設有基板載置支撐用 的側部棚片的同時，其是形成爲至少可收容2種類寬度不 同的上述基板；於上述側部棚片的前端部，設有上述基板 左右側部載置支撐用的側部載置支撐部的同時，於上述側 部棚片的基端部，設有可抵接止動第1基板左端或右端的 外側側止動件，於上述側部棚片的中途部，設有有可抵接 止動比上述第1基板還寬度窄的第2基板左端或右端的內 側側止動件。 18·如申請專利範圍第1 7項所記載的基板用匣，其 中，是在同一上述側部棚片上，具備有要各別應對於寬度 不同的複數上述第2基板的上述內側側止動件。 1 9 ·如申請專利範圍第1 7項或第1 8項所記載的基板 用匣’其中，是將配合著上述基板深度尺寸而附設的可拆 裝的中央部支撐體，立設在欲收容的上述基板後端邊位置 上，連結於上述上框體和上述下框體的同時，於上述中央 -55- (5) (5)200406039 支撐體上在前方的上述每個指定間隔突設有上述基板載置 支撐用的後部棚片，於該後部棚片前端部上設有上述基板 後部載置支撐用的後部載置支撐部。 2 0.如申請專利範圍第1 9項所記載的基板用匣，其 中，上述後部載置支撐部的上端位置，是形成爲要比可將 被載置支撐在該後部載置支撐部上的上述基板於同時載置 支撐的上述側部棚片上所設置的上述側部載置支撐部的上 端位置還高。 2 1 .如申請專利範圍第1 7項至第20項中任一項所記 載的基板用匣，其中，是將上述內側側止動件的上端高度 ，形成爲等於上述側部載置支撐部的上端高度。 2 2.如申請專利範圍第17項至第21項中任一項所記 載的基板用匣，其中，是將被設置成比上述內側側止動件 的上述上端還低位置上的上述第2基板左端或右端保持用 的保持部和從該保持部豎立的限制部具備在上述內側側止 動件上的同時，將上述後部棚片的高度，設定成上述第2 塞板的上述左端及上述右端是比上述側部載置支撐部還低 〇 23 .如申請專利範圍第1 7項至第22項中任一項所記 載的基板用匣，其中，是將上述後部棚片的長度設定成上 述後部載置支撐部是可載置支撐著上述基板的大致呈中心 部。 2 4.如申請專利範圍第1 7項至第23項中任一項所記 載的基板用匣，其中，是於上述後部棚片的基端部’設有 -56- (6)200406039 上述基板後 25. 如 載的基板用 動著上述基 止動件。 26. 如 的基板用匣 上述側部棚 動用的前止 端抵接止動用的後部棚片後止動件。 申請專利範圍第1 7項至第24項中任一項所記 匣’其中，是於上述側部棚片，備有可抵接止 板後端的同時於上下方向具撓性的側部棚片後 申請專利範圍第17項至第25項中任一項所記載 ’其中’是於最前部左右的上述支撐體上，將 片* ^^代成是突設有具備著上述基板前端抵接止 動件。 57-(1) (1) 200406039 Pickup and patent application scope 1. A substrate cassette, which can store a plurality of substrates, is a substrate cassette with a plurality of support members interposed between an upper frame and a lower frame, characterized in that: The lower frame is provided with a substantially field-shaped portion composed of two intersecting stacks and a quadrangular frame, and is provided with a distance from the intersection of the two stacks along one of the two stacks. Starting from the 1-distance position, it does not intersect the other stack of the 2 branches, and extends to the reinforcement stack from the corner of the quadrangular frame along the straight portion of the quadrangular frame to the position with the second distance. 2. A substrate cassette capable of accommodating a plurality of substrates. The substrate cassette is a substrate cassette having a plurality of supporting members interposed between an upper frame and a lower frame, wherein the lower frame is provided with two intersecting 2 The branch and the quadrangular frame are generally in the shape of a field. At the same time, it is provided from the intersection of the two branches along the first distance from one of the two branches to the two branches. The other stack in the reinforcement stack does not intersect and extends to the corners of the aforementioned quadrangular frame. 3. A substrate cassette for accommodating a plurality of substrates. The substrate cassette is a substrate cassette in which a plurality of support bodies are interposed between an upper frame and a lower frame. The lower frame is provided with two intersecting 2 The branch and the quadrangular frame are generally in the shape of a field, and from the intersection of the two branches, it extends from the corner of the quadrilateral frame along the straight line of the quadrilateral frame to a second part. Distance stack up to the position. 4 · The substrate cassette according to item 1 or item 2 of the patent application scope, wherein the first distance is from the intersection of the one stack and the reinforcement stack -52- (2) (2) 200406039, The distance from the intersection of the two stacks to the intersection of the two stacks on the quadrangular frame is smaller than that of the other two stacks. 0 · As described in item 1 or 3 of the scope of patent application The substrate box 'wherein' the second distance is from the intersection of the quadrangular frame and the reinforcement stack 'to a line portion intersecting the quadrangular frame including the intersection point on the one stack or the other stack The distance up to the intersection point is still small. 6. The substrate cassette 'wherein' as described in any one of claims 1 to 5 of the scope of the patent application, wherein the above-mentioned support body is provided with a projection plate for supporting the substrate. 7 · The substrate cassette according to item 1 or item 2 or item 4 of the scope of patent application, where the first distance is 80 to 200 mm. 0 · As item 1 or item 3 of the scope of patent application The substrate cassette according to item 5 or item 5, wherein the second distance is formed to be 80 to 200 mm. 009. The substrate cassette according to any one of claims 1 to 8 in the patent application scope. Among them, the above-mentioned upper frame is composed of a generally field-shaped frame. 10. The substrate cassette “wherein” as described in any one of the items 1 to 9 of the scope of the patent application, wherein the substrate mounting support side is protrudingly provided on the support body at vertical intervals at predetermined intervals. At the same time as the side shed sheet, the effective width of the side shed sheet in the substrate storage box is W. When the protruding length of the side shed sheet is L, the relationship is -53- (3) (3) 200406039 W4 < L / w < 1/2 〇1 1. The substrate cassette as described in any one of claims 1 to 9 of the patent application scope, wherein At the same time, the side sheds for supporting substrates are protrudingly provided at predetermined intervals, and when the effective width of the box for accommodating the substrate is w, and the protruding length of the side sheds is L, The relationship is set to 1/4 < L / W, while the interval D at the front end of the side shed on both sides is at least the interval through which the mechanical arm fork for substrate access can pass. 12. The substrate box according to item 10 or item 11 of the scope of patent application, wherein the side shed sheet is rod-shaped or plate-shaped, and the main part is made of metal or ceramic or carbon fiber It is made of a composite material made of synthetic resin, and at least a front end portion thereof is provided with a mounting support portion for supporting the substrate. 13. The substrate cassette according to item 10 or item 11 of the scope of patent application, wherein the side shed sheet is provided with the substrate on at least a front end portion and a base portion of the support pin made of metal. A support part made of synthetic resin for support. 14 · The substrate cassette according to item 13 of the scope of patent application, wherein the support pins of the side sheds are covered with fluorine paint or synthetic resin. 15. The substrate cassette according to item 13 or item 14 of the scope of patent application, wherein the support body is formed with mounting holes penetrating inside and outside at regular intervals, and the base end of the support pin is left. -54 · (4) (4) 200406039 is integrally formed on the base end portion with a synthetic resin holding member joined to the inner surface of the support body. At the same time, a screw shaft portion is formed on the base end of the support pin, and the screw The shaft portion is inserted into the mounting hole of the support body from the inside, and the holding member is joined to the inner side of the support body. The nut is screwed onto the screw shaft portion from the outside, and is formed as a protrusion on the support body. At the side shed. 16. The substrate cassette according to item 15 of the scope of patent application, wherein the holding member provided on the base end portion of the support pin of the side shelf sheet is provided with the substrate side edge abutment stopper. Buffer section. 1 7. The substrate cassette according to any one of claims 1 to 12 in the scope of the patent application, wherein the cassettes are arranged on the left and right support bodies at each specified interval in the up-down direction on the inner side. At the same time, side sheds for supporting substrates are protruded, and are formed to accommodate at least two types of the substrates with different widths. The left and right sides of the substrates are provided at the front end of the side sheds. While supporting parts are placed on the supporting side, an outer side stopper is provided at the base end portion of the side shed sheet to abut against the left or right end of the first substrate. The middle portion is provided with an inner side stopper which can abut the left end or the right end of the second substrate which is narrower in width than the first substrate. 18. The substrate cassette according to item 17 in the scope of the patent application, wherein the same side shed sheet is provided with the inner side stoppers for each of the plurality of second substrates having different widths. . 19 • The substrate cassette according to item 17 or item 18 in the scope of the patent application, wherein a detachable central support body attached to the depth dimension of the substrate is erected on the stand to be accommodated. At the rear end position of the substrate, while being connected to the upper frame and the lower frame, the central -55- (5) (5) 200406039 is provided on each of the specified intervals in front of the support body. The rear shelf sheet for substrate mounting support is provided at the front end portion of the rear shelf sheet with a rear mounting support portion for substrate back sheet support. 20. The substrate cassette according to item 19 in the scope of the patent application, wherein the upper end position of the rear mounting support portion is formed to be higher than that of the rear mounting support portion. The upper position of the substrate on the side portion supporting support provided on the side sheds which are simultaneously supported is still high. 2 1. The substrate cassette according to any one of items 17 to 20 in the scope of patent application, wherein the height of the upper end of the inside-side stopper is formed to be equal to the side-side supporting support. The upper end of the height. 2 2. The substrate cassette according to any one of claims 17 to 21 in the scope of the patent application, wherein the second cassette is provided at a position lower than the upper end of the inner side stopper. The holding portion for holding the left or right end of the substrate and the restricting portion erected from the holding portion are provided on the inner side stopper, and the height of the rear panel is set to the left end and the above-mentioned second plug plate. The right end is lower than the above-mentioned side-mounting support portion. The substrate cassette according to any one of the 17th to the 22nd patent application scope, wherein the length of the rear shelf is set to The rear mounting support portion is a substantially central portion on which the substrate may be supported. 2 4. The substrate cassette according to any one of items 17 to 23 in the scope of the patent application, wherein -56- (6) 200406039 is provided at the base end portion of the rear shelf sheet. After 25. If the substrate is loaded, the base stopper is moved. 26. A substrate box such as the aforesaid front end of the side shed is abutted against the rear stop of the rear shed. The box described in any one of the 17th to the 24th of the scope of patent application 'wherein the side shed sheet is provided with a side shed sheet which can abut the rear end of the stop plate and is flexible in the vertical direction. The “wherein” described in any of items 17 to 25 of the scope of the post-application patent is on the above-mentioned support around the foremost portion, and the sheet * ^ is replaced by a protrusion provided with abutment of the front end of the substrate. Moving parts. 57-
TW092117854A 2002-07-15 2003-06-30 Cartridge for substrate TWI242830B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002205043A JP2004042984A (en) 2002-07-15 2002-07-15 Cassette for extra large base plate
JP2003086599A JP4033014B2 (en) 2003-03-26 2003-03-26 PCB cassette
JP2003086600A JP4033015B2 (en) 2003-03-26 2003-03-26 PCB cassette

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TW200406039A true TW200406039A (en) 2004-04-16
TWI242830B TWI242830B (en) 2005-11-01

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TW (1) TWI242830B (en)

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KR100765811B1 (en) * 2006-03-23 2007-10-12 지피에스코리아(주) Packing apparatus for thin film display Panel
JP5583516B2 (en) * 2010-08-17 2014-09-03 光洋サーモシステム株式会社 Work loader
KR101212889B1 (en) 2010-10-01 2012-12-14 하이디스 테크놀로지 주식회사 Cassette for loading Glasses
TW201238841A (en) * 2011-02-01 2012-10-01 Tera Semicon Corp Boat for supporting substrate and support unit using the same
WO2012105785A2 (en) * 2011-02-01 2012-08-09 주식회사 테라세미콘 Boat for supporting substrate and support unit using same
KR101385701B1 (en) 2011-02-01 2014-04-17 주식회사 테라세미콘 Boat for supporting substrate and support unit using the same
KR20120089192A (en) 2011-02-01 2012-08-09 주식회사 테라세미콘 Boat for supporting substrate and support unit using the same
KR101288341B1 (en) * 2011-12-19 2013-07-22 내일시스템주식회사 Method of Adjusting Pitch for Support Bar of Cassette for Loading Glass
KR101288340B1 (en) * 2011-12-19 2013-07-22 내일시스템주식회사 Method of Manufacturing Support Bar of Cassette for Loading Glass
KR101284093B1 (en) * 2012-01-19 2013-07-10 주식회사 테라세미콘 Supporting unit for substrate and substrate processing apparatus using the same
KR101380763B1 (en) * 2012-07-27 2014-04-10 주식회사 테라세미콘 Substrate supporting unit and substrate processing apparatus using the same
KR102304976B1 (en) * 2015-01-13 2021-09-27 삼성디스플레이 주식회사 Substrate cassette
JP6610518B2 (en) * 2016-11-30 2019-11-27 株式会社ダイフク Inspection device
KR101904671B1 (en) * 2017-09-29 2018-10-04 캐논 톡키 가부시키가이샤 Structure for supporting substrate, vacuum deposition apparatus including the same and deposition method
KR102133328B1 (en) * 2018-09-18 2020-07-13 (주)상아프론테크 Side support structure and cassette for loading substrate with the same
KR102262488B1 (en) * 2019-11-11 2021-06-07 황민욱 Cooling buffer with minimal deflection of support bar
KR20210151527A (en) 2020-06-05 2021-12-14 삼성전자주식회사 Open-ended type substrate receiving cassette and system thereof

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JPH09226882A (en) * 1996-02-23 1997-09-02 Dainichi Shoji Kk Cassette for substrates
JPH11171287A (en) * 1997-12-08 1999-06-29 Starlite Co Ltd Cassette for large substrate
US6092981A (en) * 1999-03-11 2000-07-25 Applied Materials, Inc. Modular substrate cassette
KR100737846B1 (en) * 1999-09-06 2007-07-12 요도가와 휴텍 가부시키가이샤 Elongated rib for cassette and substrate cassette
JP4232295B2 (en) * 1999-10-27 2009-03-04 シャープ株式会社 PCB cassette

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TWI242830B (en) 2005-11-01
CN1298040C (en) 2007-01-31
KR100554631B1 (en) 2006-02-22
CN1477693A (en) 2004-02-25
KR20040007294A (en) 2004-01-24

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