KR100361464B1 - Cassette for Loading Glass - Google Patents

Abstract

The present invention relates to a substrate storage cassette which minimizes scratches of the substrate and improves the loading capacity of the substrate.

The substrate storage cassette of the present invention comprises: a plurality of shelves installed in a side plate to support the substrates and set the length of the substrate in a lengthwise direction of 27 mm or more so as to reduce the amount of deflection of the substrates; It is provided with a plurality of stoppers composed of only vertical support members for the substrate such that the amount of deflection in the front direction and the rear direction of the substrates is the same.

According to the present invention, it is possible to load 21 or more substrates, thereby improving the logistics capacity and productivity. In addition, it is possible to minimize the scratches generated on the substrate by ensuring a sufficient amount of work space of the robot arm by keeping the amount of deflection of the substrate.

Description

Substrate storage cassette {Cassette for Loading Glass}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cassette for storing a substrate, and more particularly, to a cassette for storing a substrate while minimizing scratches of the substrate.

The substrate storage cassette is used in a semiconductor manufacturing process, a flat panel display manufacturing process, and the like. Such a cassette is mounted on a semiconductor device and a flat panel display manufacturing device, and is used as a means of moving the loaded substrate as well as loading the substrate during loading and unloading of the substrate.

1 is a perspective view showing a conventional cassette.

Referring to FIG. 1, the conventional cassette 30 is installed between the first side edges 16 and 17 and the second side edges 18 and 19 of the upper plate 2 and the lower plate 4 to form the upper plate 2. And the side plates 6 supporting the lower plate 4 and the third side surfaces 20 and 21 of the upper plate 2 and the lower plate 4 to support the upper plate 2 and the lower plate 4. A stopper 10, a plurality of first shelves 8 formed on one side of the side plate 6 in a direction opposite to each other, and a stopper 10 in a direction orthogonal to the first shelves 8. It is provided with a plurality of second shelves 12 formed on one side of the. Eight side plates 6 are installed between the upper plate 2 and the lower plate 4. That is, four side plates 6 are installed between the first side edges 16 and 17, and four side plates 6 are installed between the second side edges 18 and 19. The first shelves 8 formed on one side of the side plates 6 are regularly arranged at predetermined intervals to provide a loading space for the substrate. The first shelves 8 are provided with an inclined portion 14 having a predetermined angle as shown in FIG. 2 in order to uniformly arrange the substrates loaded in the cassette 30 and to minimize the damage of the substrate due to the impact. The inclined portion 14 uniformly arranges the substrate when the substrate is loaded from a robot arm or a conveyor not shown, and minimizes the impact of the substrate when the cassette 30 is moved. Two stoppers 10 are installed between the third side edges 20 and 21. The stoppers 10 align the substrates while stopping the substrate supplied from the conveyor. The second shelves 12 formed on one side of the stoppers 10 support the substrate loaded on the cassette 30 and minimize the impact of the substrate supplied from the conveyor. To this end, the second shelves 12 are formed with an inclined portion 14 having a predetermined angle as shown in FIG. 2. The side plate 6 and the stopper 10 of the cassette 30 are formed by attaching a polyether imide (PEI) 34 on aluminum (Al) 32 as shown in FIG. 3. Such PEI 34 has high physical strength and low coefficient of friction.

Such a cassette 30 is configured in the form shown in Table 1.

Number of shelves 20 Outline size 696 mm x 625 mm x 605 mm Length of shelf 26 mm pitch 25 mm Side plate material PEI

Referring to Table 1, 20 shelves 8 and 12 are formed in the side plate 6 and the stopper 10. That is, 20 substrates may be loaded in the conventional cassette 30. For this purpose, the pitch of the shelves 8, 12, ie the spacing of the shelves 8, 12, is 25 mm and the length of the shelves is 26 mm.

4A and 4B are diagrams showing a cassette on which a substrate is loaded.

4A and 4B, the substrate 36 is loaded on the first shelves 8 of the side plate 6 and the second shelves 12 of the stopper 10. Here, the substrate 36 and the first shelves 8 overlap by 20 mm. That is, the substrate 36 and the first shelves 8 overlap each other except 6 mm in the longitudinal direction of the first shelves 8. Since the substrate 36 loaded on the cassette 30 is formed by adding additives such as B ₂ O ₃ , BAO, etc. to SiO ₂ and Al ₂ O ₃ , deflection occurs. This deflection phenomenon is caused by the second shelves 12 different from the first side 38 and the second side 40 of the substrate 36. That is, the first side edge 38 supported by the second shelves 12 does not sag, but the second side edge 40 generates about 11 mm sag. Since the deflection between the first side 38 and the second side 40 of the substrate 36 is different, the robot arm 42 loads and unloads the substrate 36 as shown in FIGS. 5A and 5B. Scratch can occur on the substrate 36 when doing so. In addition, the robot arm 42 has a work space only by the height h1 from the second side edge 40 of the substrate 36 to the next shelf 13 of the second shelf 12 on which the substrate 36 is currently loaded. Can be secured. That is, the robot arm 42 cannot secure a sufficient working space by the deflection phenomenon of the substrate 36.

Such a cassette 30 is required to load a large number of substrates 36 in order to improve the logistics capacity and productivity at a predetermined size. However, it is difficult to load 20 or more substrates 36 due to sagging of the substrate 36. In addition, since the PEI 34 having high mechanical strength and low coefficient of friction is attached to the contact surface between the cassette 30 and the substrate 36, the impact from the outside is transmitted to the substrate 36 without filtration. Furthermore, since the PEI 34 has a low coefficient of friction, the flow of the substrate 36 occurs when the cassette 30 on which the substrate 36 is loaded is moved. Thus, the substrate 36 may be damaged even with a weak external impact. In addition, when the robot arm 42 loads and unloads the substrate 36, a collision may occur with the second shelves 12 formed in the stopper 10, and the substrate 36 may be damaged.

Accordingly, an object of the present invention relates to a cassette for storing a substrate, which minimizes damage to the substrate and improves the loading capacity of the substrate.

1 is a perspective view showing a conventional cassette.

FIG. 2 shows a detail of the shelf shown in FIG. 1; FIG.

3 is a view showing the side plate and the stopper shown in FIG.

4A and 4B show sagging phenomena of a substrate loaded in the cassette shown in FIG.

5A and 5B illustrate a process in which a robot loads / unloads a substrate loaded in the cassette shown in FIG.

6 is a perspective view showing a cassette of the present invention;

FIG. 7 shows the side plate and the stopper shown in FIG. 6; FIG.

8A and 8B illustrate a deflection phenomenon of a substrate loaded in the cassette shown in FIG.

9 is a view showing a process in which a robot loads / unloads a substrate loaded in the cassette shown in FIG. 6.

<Description of Symbols for Main Parts of Drawings>

2,52: upper plate 4,54: lower plate

6,56: side plate 8,12,13,58: shelf

10,60: stopper 14: inclined portion

16,17,18,19,20,21,38,40,62,64,66,68,70,72,80,82: side

30,50: cassette 32,74: aluminum

34: PEI 36,78: substrate

42,84: Robot arm 76: PEEE

In order to achieve the above object, the substrate storage cassette of the present invention includes a plurality of shelves installed in a side plate to support the substrates and set the length in the longitudinal direction to 27 mm or more so that the deflection amount of the substrates is reduced; It is provided with a plurality of stoppers composed of only vertical support members for the substrate such that the amount of deflection in the front direction and the rear direction of the substrates is the same.

In the substrate storage cassette of the present invention, a polyester elastomer is attached to the side plates and the stoppers so as to elastically support the substrate.

The substrate storage cassette of the present invention has a plurality of shelves installed in the side plate to support the substrates and have a length of 27 mm or more in the longitudinal direction so as to reduce the amount of deflection of the substrates, and the front and rear directions of the substrates. A plurality of stoppers composed of only vertical support members with respect to the substrate so that the amount of deflection is the same, and the polyester elastomer is attached to the side plates and the stoppers in contact with the substrate to elastically support the substrate.

Other objects and features of the present invention in addition to the above objects will become apparent from the description of the embodiments with reference to the accompanying drawings.

Hereinafter, exemplary embodiments of the present invention will be described with reference to FIGS. 6 to 9.

6 is a perspective view showing a cassette of the present invention.

Referring to FIG. 6, the cassette 50 of the present invention is installed between the first side edges 62 and 64 and the second side edges 66 and 68 of the upper plate 52 and the lower plate 54, and thus the upper plate 52. ) Is installed between the side plates 56 supporting the lower plate 54 and the third side edges 70 and 72 of the upper plate 52 and the lower plate 54 so that the upper plate 52 and the lower plate 54 are disposed. It includes a stopper 60 for supporting and a plurality of shelves 58 formed on one side of the side plate 56 in a direction facing each other. Eight side plates 56 are installed between the upper plate 52 and the lower plate 54. That is, four side plates 56 are installed between the first side edges 62 and 64, and four side plates 56 are installed between the second side edges 66 and 68. Shelves 58 formed on one side of the side plates 56 are arranged at regular intervals to provide a loading space for the substrate. Shelves 58 are inclined portion 14 having a predetermined angle as shown in Figure 2 in order to uniformly arrange the substrates loaded in the cassette 50 and to minimize the damage of the substrate due to the impact. Two stoppers 60 are installed between the third side edges 70 and 72. The stoppers 60 align the substrates while stopping the substrate supplied from the conveyor. A polyester elastomer (hereinafter referred to as "PEEE") 76 is attached to one side of the aluminum 74 as shown in FIG. 7 to the side plate 56 and the stopper 60 of the cassette 50. PEEE 76 has a high elastic force and coefficient of friction and does not deform at high temperatures. The PEEE 76 is attached to the contact surface between the substrate and the cassette 50 to minimize the flow of the substrate when the cassette 50 is moved and to absorb the impact applied to the substrate to minimize the damage to the substrate.

Such a cassette 50 is configured in the form shown in Table 2.

Number of shelves 24 Outline size 696 mm x 625 mm x 605 mm Length of shelf 41 mm pitch 21 mm Side plate material PEEE

Referring to Table 2, 24 shelves 58 are formed in the side plate 56 and the stopper 60. That is, the cassette 50 of the present invention can be loaded with 24 substrates. For this purpose, the pitch of the shelves 58, ie the spacing of the shelves 58, is 21 mm and the length is 27 mm or more, preferably 41 mm. If the lengthwise direction of the shelves 58 is long, the amount of deflection of the substrate is reduced. The amount of deflection of the shelf 58 is determined by Equation (1).

(Where Y is the deflection of the substrate, W is the distribution load of the substrate, A is the length between the shelves and the shelves facing each other, B is the overlap size of the shelves and the substrate, E is the elastic modulus of the substrate, and Iz is the cross-section of the substrate 2 The difference moment is shown.) In the present invention, W is 0.00128 kg / mm, E is 7160 kg / mm, Iz is 19.15 kg / mm, A is 520 mm, and B is 35 mm. Substituting this in Equation 1, Y is 8.8694 mm. Here, the constants W, E, and Iz cannot be changed, but B and A can be changed. That is, the deflection amount of the substrate is determined by the length of B. When the length of B, that is, the length of the shelf 58 is increased by 5 mm, the deflection amount of the substrate is calculated as shown in Table 2.

B (mm) Y (mm) 20 11.052 30 9.444 35 8.694 40 7.981 45 7.302 50 6.657 55 6.046 60 5.467 65 4.921 70 4.406 75 3.921 80 3.465

Referring to Table 3, it can be seen that as the overlap size B of the shelf 58 and the substrate increases, the deflection amount Y of the substrate decreases at a predetermined ratio. That is, in the present invention, it can be seen that the amount of deflection (Y) of the substrate is reduced by 2.358 mm as compared with the prior art. In the present invention, the overlap size of the shelf 58 and the substrate is determined between 21 mm and 80 mm.

8A and 8B are views showing a substrate loaded in a cassette.

8A and 8B, the substrate 78 is loaded by the shelves 58 of the side plate 56. Since the substrate 78 loaded on the cassette 50 is formed by adding additives such as B ₂ O ₃ and BAO to SiO ₂ and Al ₂ O ₃ , deflection occurs. The deflection phenomenon of the substrate 78 is the same on the first side edge 82 and the second side edge 80 of the substrate 78. That is, since the shelves are not formed in the stopper 60, the same deflection occurs in the first side edge 82 and the second side edge 80 of the substrate 78. As described above, since the deflections of the first side edge 82 and the second side edge 80 of the substrate 78 are the same, sufficient space is provided when the robot arm 84 loads or unloads the substrate as shown in FIG. 9. Can be. That is, the robot arm 84 may secure a workspace by the height h2 between the substrates 78.

As described above, according to the cassette for storing a substrate according to the present invention, it is possible to load 21 or more substrates, thereby improving logistics capacity and productivity. In addition, it is possible to minimize the scratches generated on the substrate by ensuring a sufficient amount of work space of the robot arm by keeping the amount of deflection of the substrate. Further, PEEE having high elastic force and coefficient of friction is attached to the contact surface between the cassette and the substrate. Therefore, the flow generated when the substrate loaded in the cassette is moved can be minimized. In addition, it is possible to minimize the damage to the substrate by absorbing the impact applied from the outside.

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.

Claims (17)

A cassette for storing a substrate having side plates provided on both sides and stoppers provided on a rear surface thereof; A plurality of shelves installed in the side plate and supporting the substrates and having a length in the longitudinal direction of 27 mm or more so as to reduce the amount of deflection of the substrates; And a plurality of stoppers composed of only vertical support members for the substrate so that the amount of deflection in the front direction and the rear direction of the substrates is the same. The method of claim 1, 21 or more shelves are formed on the side plate. The method of claim 2, 24 shelf cassette is formed on the side plate. The method of claim 1. And a stacking length of the substrate and the shelves when the substrate is loaded on the shelves is 21 mm or more. The method of claim 4, wherein The substrate holding cassette, characterized in that the overlap length of the substrate and the shelf is 35mm. The method of claim 1, The lengthwise direction of the shelves is 41mm substrate cassette, characterized in that. The method of claim 1, A cassette for substrate storage, characterized in that the gap between the shelf and the shelf is 24 mm or less. The method of claim 7, wherein A cassette for substrate storage, characterized in that the gap between the shelf and the shelf is 21 mm. A cassette for storing a substrate having side plates provided on both sides and stoppers provided on a rear surface thereof; And a polyester elastomer attached to a surface of the side plates and stoppers contacting the substrate to elastically support the substrate. In the cassette for storing the substrate having side plates provided on both sides and stoppers provided on the back side, A plurality of shelves installed on the side plate to support the substrates and set the length in the longitudinal direction to 27 mm or more so that the deflection amount of the substrates is reduced; And a plurality of stoppers composed of only vertical support members for the substrate so that the amount of deflection in the front direction and the rear direction of the substrates is the same, And a polyester elastomer attached to a surface of the side plates and stoppers contacting the substrate to elastically support the substrate. The method of claim 10, 21 or more shelves are formed on the side plate. The method of claim 10. And a stacking length of the substrate and the shelves when the substrate is loaded on the shelves is 21 mm or more. The method of claim 10, A cassette for substrate storage, characterized in that the gap between the shelf and the shelf is 24 mm or less. delete delete delete delete