US20040069728A1 - Cassette - Google Patents
Cassette Download PDFInfo
- Publication number
- US20040069728A1 US20040069728A1 US10/678,522 US67852203A US2004069728A1 US 20040069728 A1 US20040069728 A1 US 20040069728A1 US 67852203 A US67852203 A US 67852203A US 2004069728 A1 US2004069728 A1 US 2004069728A1
- Authority
- US
- United States
- Prior art keywords
- cassette
- supporting plate
- wing
- main body
- wing panels
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
Definitions
- the present invention relates to a supporting plate and a cassette using the same, and more particularly to a supporting plate used in transporting substrates.
- cassettes are useful for holding or stowing the substrates to keep them from contacting, and thus damaging each other.
- a conventional cassette described in JP Yodogawa Kasei publication number H04-139741 comprises a pair of frames and a plurality of resin-made rods fixed to the frames. Moreover, the resin-made rod is provided with a plurality of annular slots for supporting substrates. In use, annular slots neighbor resin-made rods aren't successive, so the substrates to be inserted to the cassette may be slantways or be damaged.
- FIG. 1 Another conventional substrate-supporting side board of cassette described in US Yodogawa Kasei U.S. Pat. No. 5,584,401, comprises a metal core, and overlay and a plurality of tongue-shaped shelf members extending from the overlay.
- the shelf members are in parallel and inwardly of the cassette frame with an upward inclination toward free ends thereof, the supporting surface of each shelf member being slightly elevated in the center with respect to its flanks.
- the tongue-shaped shelf member with protrusion in center made touch area between the substrates and the shelf member decrease, but the substrates may be scraped to damage because the center protrusion must touch with middle acting part of the substrates, not edges of the substrates, to support the substrates, moreover it is difficult to insert the substrates to the right position due to the disconnecting supporting surface.
- An object of the invention is to provide a cassette which is easy to insert the substrates to right positions without damage.
- a cassette for accommodating the substrates comprises a pair of frames, and at least a pair of supporting plates fixed to the frames.
- Each two supporting plates face each other, and each supporting plate defines a plurality of wing panels on an inward facing side, each wing panel comprises a plurality of protrusions extending from a free side of each wing panel, and the wing panels slope down.
- the wing panels being so positioned that a group of wing panels in a same horizontal plane cooperate with each other to stow one substrate.
- the wing panels with the protrusion provide a guiding mechanism which can't make the substrates miss right positions, and on the right positions, the substrates are supported by a group of wing panels in a same horizontal plane and area of that the substrates touch with wing panels is only edges of the substrates.
- FIG. 1 is a perspective view of a supporting plate according to the present invention
- FIG. 2 is another perspective view of the supporting plate according to the present invention.
- FIG. 3 is a side plan view of the supporting plate of FIG. 1;
- FIG. 4 is a top plan view of the supporting plate of FIG. 1;
- FIG. 5 is a perspective view of a cassette with two pairs of supporting plates shown in FIG. 1;
- FIG. 6 is an explosive view of a part of the cassette shown in FIG. 5.
- a supporting plate 10 is used in a cassette for accommodating substrates, and comprises a main body 11 and two stiff shafts 13 .
- the main body 11 may be made of resin, such as, by injection molding.
- the main body 11 comprises a plurality of wing panels 15 extending from the main body 11 , and the wing panels 15 are spaced apart from one another a predetermined distance.
- Each wing panel 15 provides a plurality of protrusions 151 extending from free side of each wing panel 15 , and the wing panels 15 slope down.
- a space interval 17 is defined between neighboring wing panels 15 , each space interval 17 provides at least a hole 171 through the main body 11 for dispersing heat and cutting the cost.
- the main body 11 further comprises two through grooves 18 (see FIG. 6) in back side of the main body 11 for receiving two stiff shafts 13 respectively, the through grooves 18 are formed perpendicularly basically to the wing panels 15 .
- the through grooves 18 define a plurality of holding members 19 from two sides of the through grooves 18 .
- the stiff shafts 13 may be made of metal, which can improve the strength of the supporting plate 11 and eliminate static electricity generated due to friction in the insertion or removal of the substrates.
- the stiff shafts 13 further comprises coupling ends 131 in each end, and defines threaded holes 135 in opposite end surface 133 thereof.
- the wing panels 15 slope down, that is to say, if a lower surface (not labeled) of each wing panel 15 is horizontal, thickness of each wing panel 15 gradually become thinner from root (not labeled) of each wing panel 15 to free end (not labeled) of each wing panel 15 , so thickness of each protrusion 151 is thinnest.
- the lower surface can be sloped down as an upper surface does to make each wing panel 15 sloping down.
- the wing panels 15 with the protrusion 151 provide a guiding mechanism which can't make the substrates miss right positions, and on the right positions, the substrates are supported by a group of wing panels 15 in a same horizontal plane and area of that the substrates touch with wing panels 15 is only edges of the substrates 13 .
- FIG. 5 and FIG. 6 are shown a cassette 20 using the supporting plate 10 according to the present invention.
- the cassette 20 comprises a pair of frames 30 and at least a pair of supporting plates 10 , the frames 30 and the supporting plates 10 form a space for accommodating substrates by the means of the stiff shafts 13 and a plurality of screws (not labeled).
- the frames 30 define a plurality of recesses 301 for coupling with the coupling ends 131 of the stiff shafts 13 , and each recess 301 defines a threaded hole through the frame 30 .
- wing panels 15 are face inward, the stiff shafts 13 are assembled with the supporting plates 10 , and are received in the through grooves 18 , the coupling ends 131 positioned in the recesses 301 respectively.
- a plurality of screws fixes the supporting plates 10 and the frames 30 through the threaded hole 303 and 135 .
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
Abstract
The present invention relates to a supporting plate (10) and a cassette (20) for accommodating substrates using the same. The supporting plate includes a main body (11) and at least two stiff shafts (13). The main body includes a plurality of wing panels (15) extending from the main body and at least two through grooves (18). A space interval (17) is defined between neighboring wing panels, each wing panel comprises a plurality of protrusions (151) extending from the free side of each wing panel, and the wing panels slope down. The two stiff shafts being received in the two through grooves.
Description
- 1. Field of the Invention
- The present invention relates to a supporting plate and a cassette using the same, and more particularly to a supporting plate used in transporting substrates.
- 2. Description of the Related Art
- In handing substrates, such as glass substrates for LCDs, cassettes are useful for holding or stowing the substrates to keep them from contacting, and thus damaging each other.
- A conventional cassette described in JP Yodogawa Kasei publication number H04-139741, comprises a pair of frames and a plurality of resin-made rods fixed to the frames. Moreover, the resin-made rod is provided with a plurality of annular slots for supporting substrates. In use, annular slots neighbor resin-made rods aren't successive, so the substrates to be inserted to the cassette may be slantways or be damaged.
- Another conventional substrate-supporting side board of cassette described in US Yodogawa Kasei U.S. Pat. No. 5,584,401, comprises a metal core, and overlay and a plurality of tongue-shaped shelf members extending from the overlay. The shelf members are in parallel and inwardly of the cassette frame with an upward inclination toward free ends thereof, the supporting surface of each shelf member being slightly elevated in the center with respect to its flanks. The tongue-shaped shelf member with protrusion in center made touch area between the substrates and the shelf member decrease, but the substrates may be scraped to damage because the center protrusion must touch with middle acting part of the substrates, not edges of the substrates, to support the substrates, moreover it is difficult to insert the substrates to the right position due to the disconnecting supporting surface.
- For the above reason, an improved cassette which is easy to insert the substrates to right positions without damage is desired.
- An object of the invention is to provide a cassette which is easy to insert the substrates to right positions without damage.
- In order to achieve the object set forth above, a cassette for accommodating the substrates comprises a pair of frames, and at least a pair of supporting plates fixed to the frames. Each two supporting plates face each other, and each supporting plate defines a plurality of wing panels on an inward facing side, each wing panel comprises a plurality of protrusions extending from a free side of each wing panel, and the wing panels slope down. Furthermore, the wing panels being so positioned that a group of wing panels in a same horizontal plane cooperate with each other to stow one substrate.
- Due to this structure, when the substrates are inserted the space intervals between neighbor wing panels, the wing panels with the protrusion provide a guiding mechanism which can't make the substrates miss right positions, and on the right positions, the substrates are supported by a group of wing panels in a same horizontal plane and area of that the substrates touch with wing panels is only edges of the substrates.
- Other objects, advantages and novel features of the invention will become more apparent from the following detailed description of the preferred embodiment of the invention as illustrated in the accompanying drawings, in which:
- FIG. 1 is a perspective view of a supporting plate according to the present invention;
- FIG. 2 is another perspective view of the supporting plate according to the present invention;
- FIG. 3 is a side plan view of the supporting plate of FIG. 1;
- FIG. 4 is a top plan view of the supporting plate of FIG. 1;
- FIG. 5 is a perspective view of a cassette with two pairs of supporting plates shown in FIG. 1;
- FIG. 6 is an explosive view of a part of the cassette shown in FIG. 5.
- Reference will be made to the drawings to describe the invention in detail.
- Referring to FIG. 1 and FIG. 2, a supporting
plate 10 according to the present invention is used in a cassette for accommodating substrates, and comprises amain body 11 and twostiff shafts 13. Themain body 11 may be made of resin, such as, by injection molding. Themain body 11 comprises a plurality ofwing panels 15 extending from themain body 11, and thewing panels 15 are spaced apart from one another a predetermined distance. Eachwing panel 15 provides a plurality ofprotrusions 151 extending from free side of eachwing panel 15, and thewing panels 15 slope down. Aspace interval 17 is defined between neighboringwing panels 15, eachspace interval 17 provides at least ahole 171 through themain body 11 for dispersing heat and cutting the cost. Themain body 11 further comprises two through grooves 18 (see FIG. 6) in back side of themain body 11 for receiving twostiff shafts 13 respectively, the throughgrooves 18 are formed perpendicularly basically to thewing panels 15. For holding the stiff shafts tightly, thethrough grooves 18 define a plurality of holdingmembers 19 from two sides of the throughgrooves 18. Thestiff shafts 13 may be made of metal, which can improve the strength of the supportingplate 11 and eliminate static electricity generated due to friction in the insertion or removal of the substrates. Thestiff shafts 13 further comprisescoupling ends 131 in each end, and defines threadedholes 135 inopposite end surface 133 thereof. - Referring to FIG. 3 and FIG. 4, the
wing panels 15 slope down, that is to say, if a lower surface (not labeled) of eachwing panel 15 is horizontal, thickness of eachwing panel 15 gradually become thinner from root (not labeled) of eachwing panel 15 to free end (not labeled) of eachwing panel 15, so thickness of eachprotrusion 151 is thinnest. Surely, the lower surface can be sloped down as an upper surface does to make eachwing panel 15 sloping down. Due to this structure, when the substrates are inserted thespace intervals 17 betweenneighbor wing panels 15, thewing panels 15 with theprotrusion 151 provide a guiding mechanism which can't make the substrates miss right positions, and on the right positions, the substrates are supported by a group ofwing panels 15 in a same horizontal plane and area of that the substrates touch withwing panels 15 is only edges of thesubstrates 13. - FIG. 5 and FIG. 6 are shown a
cassette 20 using the supportingplate 10 according to the present invention. Thecassette 20 comprises a pair offrames 30 and at least a pair of supportingplates 10, theframes 30 and the supportingplates 10 form a space for accommodating substrates by the means of thestiff shafts 13 and a plurality of screws (not labeled). Theframes 30 define a plurality ofrecesses 301 for coupling with thecoupling ends 131 of thestiff shafts 13, and eachrecess 301 defines a threaded hole through theframe 30. - In assembly,
wing panels 15 are face inward, thestiff shafts 13 are assembled with the supportingplates 10, and are received in the throughgrooves 18, the coupling ends 131 positioned in therecesses 301 respectively. A plurality of screws fixes the supportingplates 10 and theframes 30 through the threadedhole - It is to be understood, however, than even though numerous characteristics and advantages of the present invention have been set forth in the foregoing description, together with details of the structure and function of the invention, the disclosure is illustrative only, and changes may be made in detail, especially in matters of shape, size, and arrangement of parts within the principles of the invention to the extent indicated by the broad general meaning of the terms in which the appended claims are expressed.
Claims (19)
1. A supporting plate for supporting substrates, comprising:
a main body having a plurality of wing panels extending from the main body and at least two through grooves,
at least two stiff shafts being received in the two through grooves,
wherein each wing panel comprises a plurality of protrusions extending from the free side of each wing panel, and the wing panels slope down.
2. The supporting plate as described in claim 1 , wherein the wing panels are spaced apart from one another a predetermined distance.
3. The supporting plate as described in claim 1 , wherein each space interval defines at least a hole through the main body.
4. The supporting plate as described in claim 1 , wherein the main body defines a plurality of holding member for holding the stiff rods in the through grooves.
5. The supporting plate as described in claim 1 , wherein the through grooves are formed perpendicular to the wing panels.
6. The supporting plate as described in claim 1 , wherein the stiff shaft is made of metal.
7. The supporting plate as described in claim 1 , wherein the stiff shaft defines threaded holes in opposite ends thereof.
8. A cassette for accommodating a plurality of substrates in mutual isolation, comprising:
a pair of frames, and
at least a pair of supporting plate fixed to the frames, each supporting plate comprising:
a main body having a plurality of wing panels extending from the main body and at least two through grooves,
at least two stiff shafts being received in the two through grooves,
wherein space interval is defined between neighboring wing panels, each wing panel comprises a plurality of protrusions extending from the free side of each wing panel, and the wing panels slope down.
9. The cassette as described in claim 8 , wherein the wing panels are spaced apart from one another a predetermined distance.
10. The cassette as described in claim 8 , wherein each space interval defines at least a hole through the main body.
11. The cassette as described in claim 8 , wherein the main body defines a plurality of holding member for holding the stiff rods in the through grooves.
12. The cassette as described in claim 8 , wherein the through grooves are formed perpendicular to the wing panels.
13. The cassette as described in claim 8 , wherein the stiff shaft is made of metal.
14. The cassette as described in claim 8 , wherein the stiff shaft defines threaded holes in opposite ends thereof.
15. The cassette as described in claim 8 , wherein the stiff shaft forms a coupling end and defines a threaded hole in each end.
16. The cassette as described in claim 8 , wherein the frame forms recesses for receiving the coupling ends of the stiff rods and through holes in the recesses.
17. A cassette for supporting substrates, comprising:
a pair of frames, and
at least a pair of supporting plates fixed to the frames,
wherein each two supporting plates face each other, and each supporting plate defines a plurality of wing panels on an inward facing side, each wing panel comprises a plurality of protrusions extending from a free side of each wing panel, and the wing panels slope down.
18. The cassette as described in claim 17 , wherein the wing panels are spaced apart from one another a predetermined distance.
19. The cassette as described in claim 17 , wherein each space interval defines at least a hole through the main body.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW091216036U TW553195U (en) | 2002-10-09 | 2002-10-09 | Substrate supporting slot plate and substrate cassette using the same |
TW91216036 | 2002-10-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
US20040069728A1 true US20040069728A1 (en) | 2004-04-15 |
Family
ID=31885777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/678,522 Abandoned US20040069728A1 (en) | 2002-10-09 | 2003-10-03 | Cassette |
Country Status (3)
Country | Link |
---|---|
US (1) | US20040069728A1 (en) |
JP (1) | JP3936309B2 (en) |
TW (1) | TW553195U (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050023231A1 (en) * | 2003-08-01 | 2005-02-03 | Chui-Kai Huang | Substrate supporting rod and substrate cassette using the same |
US20060011507A1 (en) * | 2004-05-26 | 2006-01-19 | Daisuke Uchida | Supporting bar for substrate cassette |
US20060231515A1 (en) * | 2005-04-15 | 2006-10-19 | Innolux Display Corp. | Adjustable cassette for substrates |
US20100003629A1 (en) * | 2008-07-02 | 2010-01-07 | Jung Won-Woong | Substrate firing device |
US20120080354A1 (en) * | 2010-10-01 | 2012-04-05 | Hydis Technologies Co., Ltd. | Cassette for Loading Substrate |
US20140262929A1 (en) * | 2013-03-18 | 2014-09-18 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Drawer type cushioning packaging device for liquid crystal glass |
US8919563B2 (en) | 2008-01-13 | 2014-12-30 | Entegris, Inc. | Methods and apparatus for large diameter wafer handling |
US20220093434A1 (en) * | 2020-09-22 | 2022-03-24 | Gudeng Precision Industrial Co., Ltd. | Supporting shelf module and wafer container using same |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6015905B2 (en) * | 2012-05-25 | 2016-10-26 | パナソニックIpマネジメント株式会社 | Packing material |
JP7205848B2 (en) * | 2018-02-15 | 2023-01-17 | 株式会社リニア・サーキット | Casing for substrate storage |
Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4153164A (en) * | 1978-06-13 | 1979-05-08 | Kasper Instruments, Inc. | Carrier for semiconductive wafers |
US4515104A (en) * | 1983-05-13 | 1985-05-07 | Asq Boats, Inc. | Contiguous wafer boat |
US4676008A (en) * | 1986-05-16 | 1987-06-30 | Microglass, Inc. | Cage-type wafer carrier and method |
US4872554A (en) * | 1987-07-02 | 1989-10-10 | Fluoroware, Inc. | Reinforced carrier with embedded rigid insert |
US5452795A (en) * | 1994-11-07 | 1995-09-26 | Gallagher; Gary M. | Actuated rotary retainer for silicone wafer box |
US5584401A (en) * | 1994-07-29 | 1996-12-17 | Yodogawa Kasei Kabushiki Kaisha | Substrate-supporting side boards and a cassette utilizing the boards |
US6092981A (en) * | 1999-03-11 | 2000-07-25 | Applied Materials, Inc. | Modular substrate cassette |
US6378538B1 (en) * | 1999-12-13 | 2002-04-30 | Advanced Micro Devices, Inc. | Durable, multi-piece rotor for spray acid tools |
US20020113027A1 (en) * | 2001-02-20 | 2002-08-22 | Mitsubishi Denki Kabushiki Kaisha | Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer |
US20030010672A1 (en) * | 2001-07-12 | 2003-01-16 | Anthony Simpson | Thin wafer carrier |
US6523701B1 (en) * | 1999-09-06 | 2003-02-25 | Yodogawa Kasei Kabushiki Kaisha | Elongated rib for cassette and substrate cassette |
US6607381B2 (en) * | 2001-05-16 | 2003-08-19 | Mitsubishi Denki Kabushiki Kaisha | Auxiliary heat-insulating jig |
US6776289B1 (en) * | 1996-07-12 | 2004-08-17 | Entegris, Inc. | Wafer container with minimal contact |
US6796439B2 (en) * | 2001-05-11 | 2004-09-28 | Heraeus Quarzglas Gmbh & Co. Kg | Vertical type wafer supporting jig |
-
2002
- 2002-10-09 TW TW091216036U patent/TW553195U/en not_active IP Right Cessation
-
2003
- 2003-05-28 JP JP2003151433A patent/JP3936309B2/en not_active Expired - Fee Related
- 2003-10-03 US US10/678,522 patent/US20040069728A1/en not_active Abandoned
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4153164A (en) * | 1978-06-13 | 1979-05-08 | Kasper Instruments, Inc. | Carrier for semiconductive wafers |
US4515104A (en) * | 1983-05-13 | 1985-05-07 | Asq Boats, Inc. | Contiguous wafer boat |
US4676008A (en) * | 1986-05-16 | 1987-06-30 | Microglass, Inc. | Cage-type wafer carrier and method |
US4872554A (en) * | 1987-07-02 | 1989-10-10 | Fluoroware, Inc. | Reinforced carrier with embedded rigid insert |
US5584401A (en) * | 1994-07-29 | 1996-12-17 | Yodogawa Kasei Kabushiki Kaisha | Substrate-supporting side boards and a cassette utilizing the boards |
US5452795A (en) * | 1994-11-07 | 1995-09-26 | Gallagher; Gary M. | Actuated rotary retainer for silicone wafer box |
US6776289B1 (en) * | 1996-07-12 | 2004-08-17 | Entegris, Inc. | Wafer container with minimal contact |
US6092981A (en) * | 1999-03-11 | 2000-07-25 | Applied Materials, Inc. | Modular substrate cassette |
US6523701B1 (en) * | 1999-09-06 | 2003-02-25 | Yodogawa Kasei Kabushiki Kaisha | Elongated rib for cassette and substrate cassette |
US6378538B1 (en) * | 1999-12-13 | 2002-04-30 | Advanced Micro Devices, Inc. | Durable, multi-piece rotor for spray acid tools |
US20020113027A1 (en) * | 2001-02-20 | 2002-08-22 | Mitsubishi Denki Kabushiki Kaisha | Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer |
US6796439B2 (en) * | 2001-05-11 | 2004-09-28 | Heraeus Quarzglas Gmbh & Co. Kg | Vertical type wafer supporting jig |
US6607381B2 (en) * | 2001-05-16 | 2003-08-19 | Mitsubishi Denki Kabushiki Kaisha | Auxiliary heat-insulating jig |
US20030010672A1 (en) * | 2001-07-12 | 2003-01-16 | Anthony Simpson | Thin wafer carrier |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7334690B2 (en) * | 2003-08-01 | 2008-02-26 | Foxsemicon Integrated Technology, Inc. | Substrate supporting rod and substrate cassette using the same |
US20050023231A1 (en) * | 2003-08-01 | 2005-02-03 | Chui-Kai Huang | Substrate supporting rod and substrate cassette using the same |
US20060011507A1 (en) * | 2004-05-26 | 2006-01-19 | Daisuke Uchida | Supporting bar for substrate cassette |
US20060231515A1 (en) * | 2005-04-15 | 2006-10-19 | Innolux Display Corp. | Adjustable cassette for substrates |
US8919563B2 (en) | 2008-01-13 | 2014-12-30 | Entegris, Inc. | Methods and apparatus for large diameter wafer handling |
US9592930B2 (en) | 2008-01-13 | 2017-03-14 | Entegris, Inc. | Methods and apparatus for large diameter wafer handling |
US20100003629A1 (en) * | 2008-07-02 | 2010-01-07 | Jung Won-Woong | Substrate firing device |
US9052145B2 (en) * | 2008-07-02 | 2015-06-09 | Samsung Display Co., Ltd. | Substrate firing device |
US8528750B2 (en) * | 2010-10-01 | 2013-09-10 | Hydis Technologies Co., Ltd. | Cassette for loading substrate |
US20120080354A1 (en) * | 2010-10-01 | 2012-04-05 | Hydis Technologies Co., Ltd. | Cassette for Loading Substrate |
US8997996B2 (en) * | 2013-03-18 | 2015-04-07 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Drawer type cushioning packaging device for liquid crystal glass |
US20140262929A1 (en) * | 2013-03-18 | 2014-09-18 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Drawer type cushioning packaging device for liquid crystal glass |
US20220093434A1 (en) * | 2020-09-22 | 2022-03-24 | Gudeng Precision Industrial Co., Ltd. | Supporting shelf module and wafer container using same |
Also Published As
Publication number | Publication date |
---|---|
JP2004134737A (en) | 2004-04-30 |
TW553195U (en) | 2003-09-11 |
JP3936309B2 (en) | 2007-06-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: FOXSEMICON INTEGRATED TECHNOLOGY, INC., TAIWAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HUANG, CHUN-KAI;CHANG, MING-HUI;REEL/FRAME:014583/0467 Effective date: 20030926 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |