US20040069728A1 - Cassette - Google Patents

Cassette Download PDF

Info

Publication number
US20040069728A1
US20040069728A1 US10/678,522 US67852203A US2004069728A1 US 20040069728 A1 US20040069728 A1 US 20040069728A1 US 67852203 A US67852203 A US 67852203A US 2004069728 A1 US2004069728 A1 US 2004069728A1
Authority
US
United States
Prior art keywords
cassette
supporting plate
wing
main body
wing panels
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/678,522
Inventor
Chun-Kai Huang
Ming-Hui Chang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Foxsemicon Integrated Technology Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Assigned to FOXSEMICON INTEGRATED TECHNOLOGY, INC. reassignment FOXSEMICON INTEGRATED TECHNOLOGY, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHANG, MING-HUI, HUANG, CHUN-KAI
Publication of US20040069728A1 publication Critical patent/US20040069728A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates

Definitions

  • the present invention relates to a supporting plate and a cassette using the same, and more particularly to a supporting plate used in transporting substrates.
  • cassettes are useful for holding or stowing the substrates to keep them from contacting, and thus damaging each other.
  • a conventional cassette described in JP Yodogawa Kasei publication number H04-139741 comprises a pair of frames and a plurality of resin-made rods fixed to the frames. Moreover, the resin-made rod is provided with a plurality of annular slots for supporting substrates. In use, annular slots neighbor resin-made rods aren't successive, so the substrates to be inserted to the cassette may be slantways or be damaged.
  • FIG. 1 Another conventional substrate-supporting side board of cassette described in US Yodogawa Kasei U.S. Pat. No. 5,584,401, comprises a metal core, and overlay and a plurality of tongue-shaped shelf members extending from the overlay.
  • the shelf members are in parallel and inwardly of the cassette frame with an upward inclination toward free ends thereof, the supporting surface of each shelf member being slightly elevated in the center with respect to its flanks.
  • the tongue-shaped shelf member with protrusion in center made touch area between the substrates and the shelf member decrease, but the substrates may be scraped to damage because the center protrusion must touch with middle acting part of the substrates, not edges of the substrates, to support the substrates, moreover it is difficult to insert the substrates to the right position due to the disconnecting supporting surface.
  • An object of the invention is to provide a cassette which is easy to insert the substrates to right positions without damage.
  • a cassette for accommodating the substrates comprises a pair of frames, and at least a pair of supporting plates fixed to the frames.
  • Each two supporting plates face each other, and each supporting plate defines a plurality of wing panels on an inward facing side, each wing panel comprises a plurality of protrusions extending from a free side of each wing panel, and the wing panels slope down.
  • the wing panels being so positioned that a group of wing panels in a same horizontal plane cooperate with each other to stow one substrate.
  • the wing panels with the protrusion provide a guiding mechanism which can't make the substrates miss right positions, and on the right positions, the substrates are supported by a group of wing panels in a same horizontal plane and area of that the substrates touch with wing panels is only edges of the substrates.
  • FIG. 1 is a perspective view of a supporting plate according to the present invention
  • FIG. 2 is another perspective view of the supporting plate according to the present invention.
  • FIG. 3 is a side plan view of the supporting plate of FIG. 1;
  • FIG. 4 is a top plan view of the supporting plate of FIG. 1;
  • FIG. 5 is a perspective view of a cassette with two pairs of supporting plates shown in FIG. 1;
  • FIG. 6 is an explosive view of a part of the cassette shown in FIG. 5.
  • a supporting plate 10 is used in a cassette for accommodating substrates, and comprises a main body 11 and two stiff shafts 13 .
  • the main body 11 may be made of resin, such as, by injection molding.
  • the main body 11 comprises a plurality of wing panels 15 extending from the main body 11 , and the wing panels 15 are spaced apart from one another a predetermined distance.
  • Each wing panel 15 provides a plurality of protrusions 151 extending from free side of each wing panel 15 , and the wing panels 15 slope down.
  • a space interval 17 is defined between neighboring wing panels 15 , each space interval 17 provides at least a hole 171 through the main body 11 for dispersing heat and cutting the cost.
  • the main body 11 further comprises two through grooves 18 (see FIG. 6) in back side of the main body 11 for receiving two stiff shafts 13 respectively, the through grooves 18 are formed perpendicularly basically to the wing panels 15 .
  • the through grooves 18 define a plurality of holding members 19 from two sides of the through grooves 18 .
  • the stiff shafts 13 may be made of metal, which can improve the strength of the supporting plate 11 and eliminate static electricity generated due to friction in the insertion or removal of the substrates.
  • the stiff shafts 13 further comprises coupling ends 131 in each end, and defines threaded holes 135 in opposite end surface 133 thereof.
  • the wing panels 15 slope down, that is to say, if a lower surface (not labeled) of each wing panel 15 is horizontal, thickness of each wing panel 15 gradually become thinner from root (not labeled) of each wing panel 15 to free end (not labeled) of each wing panel 15 , so thickness of each protrusion 151 is thinnest.
  • the lower surface can be sloped down as an upper surface does to make each wing panel 15 sloping down.
  • the wing panels 15 with the protrusion 151 provide a guiding mechanism which can't make the substrates miss right positions, and on the right positions, the substrates are supported by a group of wing panels 15 in a same horizontal plane and area of that the substrates touch with wing panels 15 is only edges of the substrates 13 .
  • FIG. 5 and FIG. 6 are shown a cassette 20 using the supporting plate 10 according to the present invention.
  • the cassette 20 comprises a pair of frames 30 and at least a pair of supporting plates 10 , the frames 30 and the supporting plates 10 form a space for accommodating substrates by the means of the stiff shafts 13 and a plurality of screws (not labeled).
  • the frames 30 define a plurality of recesses 301 for coupling with the coupling ends 131 of the stiff shafts 13 , and each recess 301 defines a threaded hole through the frame 30 .
  • wing panels 15 are face inward, the stiff shafts 13 are assembled with the supporting plates 10 , and are received in the through grooves 18 , the coupling ends 131 positioned in the recesses 301 respectively.
  • a plurality of screws fixes the supporting plates 10 and the frames 30 through the threaded hole 303 and 135 .

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)

Abstract

The present invention relates to a supporting plate (10) and a cassette (20) for accommodating substrates using the same. The supporting plate includes a main body (11) and at least two stiff shafts (13). The main body includes a plurality of wing panels (15) extending from the main body and at least two through grooves (18). A space interval (17) is defined between neighboring wing panels, each wing panel comprises a plurality of protrusions (151) extending from the free side of each wing panel, and the wing panels slope down. The two stiff shafts being received in the two through grooves.

Description

    BACKGROUND OF THE INVENTION
  • 1. Field of the Invention [0001]
  • The present invention relates to a supporting plate and a cassette using the same, and more particularly to a supporting plate used in transporting substrates. [0002]
  • 2. Description of the Related Art [0003]
  • In handing substrates, such as glass substrates for LCDs, cassettes are useful for holding or stowing the substrates to keep them from contacting, and thus damaging each other. [0004]
  • A conventional cassette described in JP Yodogawa Kasei publication number H04-139741, comprises a pair of frames and a plurality of resin-made rods fixed to the frames. Moreover, the resin-made rod is provided with a plurality of annular slots for supporting substrates. In use, annular slots neighbor resin-made rods aren't successive, so the substrates to be inserted to the cassette may be slantways or be damaged. [0005]
  • Another conventional substrate-supporting side board of cassette described in US Yodogawa Kasei U.S. Pat. No. 5,584,401, comprises a metal core, and overlay and a plurality of tongue-shaped shelf members extending from the overlay. The shelf members are in parallel and inwardly of the cassette frame with an upward inclination toward free ends thereof, the supporting surface of each shelf member being slightly elevated in the center with respect to its flanks. The tongue-shaped shelf member with protrusion in center made touch area between the substrates and the shelf member decrease, but the substrates may be scraped to damage because the center protrusion must touch with middle acting part of the substrates, not edges of the substrates, to support the substrates, moreover it is difficult to insert the substrates to the right position due to the disconnecting supporting surface. [0006]
  • For the above reason, an improved cassette which is easy to insert the substrates to right positions without damage is desired. [0007]
    • SUMMARY OF THE INVENTION
  • An object of the invention is to provide a cassette which is easy to insert the substrates to right positions without damage. [0008]
  • In order to achieve the object set forth above, a cassette for accommodating the substrates comprises a pair of frames, and at least a pair of supporting plates fixed to the frames. Each two supporting plates face each other, and each supporting plate defines a plurality of wing panels on an inward facing side, each wing panel comprises a plurality of protrusions extending from a free side of each wing panel, and the wing panels slope down. Furthermore, the wing panels being so positioned that a group of wing panels in a same horizontal plane cooperate with each other to stow one substrate. [0009]
  • Due to this structure, when the substrates are inserted the space intervals between neighbor wing panels, the wing panels with the protrusion provide a guiding mechanism which can't make the substrates miss right positions, and on the right positions, the substrates are supported by a group of wing panels in a same horizontal plane and area of that the substrates touch with wing panels is only edges of the substrates. [0010]
  • Other objects, advantages and novel features of the invention will become more apparent from the following detailed description of the preferred embodiment of the invention as illustrated in the accompanying drawings, in which:[0011]
    • BRIEF DESCRIPTION OF THE INVENTION
  • FIG. 1 is a perspective view of a supporting plate according to the present invention; [0012]
  • FIG. 2 is another perspective view of the supporting plate according to the present invention; [0013]
  • FIG. 3 is a side plan view of the supporting plate of FIG. 1; [0014]
  • FIG. 4 is a top plan view of the supporting plate of FIG. 1; [0015]
  • FIG. 5 is a perspective view of a cassette with two pairs of supporting plates shown in FIG. 1; [0016]
  • FIG. 6 is an explosive view of a part of the cassette shown in FIG. 5.[0017]
    • DETAILED DESCRIPTION OF THE INVENTION
  • Reference will be made to the drawings to describe the invention in detail. [0018]
  • Referring to FIG. 1 and FIG. 2, a supporting [0019] plate 10 according to the present invention is used in a cassette for accommodating substrates, and comprises a main body 11 and two stiff shafts 13. The main body 11 may be made of resin, such as, by injection molding. The main body 11 comprises a plurality of wing panels 15 extending from the main body 11, and the wing panels 15 are spaced apart from one another a predetermined distance. Each wing panel 15 provides a plurality of protrusions 151 extending from free side of each wing panel 15, and the wing panels 15 slope down. A space interval 17 is defined between neighboring wing panels 15, each space interval 17 provides at least a hole 171 through the main body 11 for dispersing heat and cutting the cost. The main body 11 further comprises two through grooves 18 (see FIG. 6) in back side of the main body 11 for receiving two stiff shafts 13 respectively, the through grooves 18 are formed perpendicularly basically to the wing panels 15. For holding the stiff shafts tightly, the through grooves 18 define a plurality of holding members 19 from two sides of the through grooves 18. The stiff shafts 13 may be made of metal, which can improve the strength of the supporting plate 11 and eliminate static electricity generated due to friction in the insertion or removal of the substrates. The stiff shafts 13 further comprises coupling ends 131 in each end, and defines threaded holes 135 in opposite end surface 133 thereof.
  • Referring to FIG. 3 and FIG. 4, the [0020] wing panels 15 slope down, that is to say, if a lower surface (not labeled) of each wing panel 15 is horizontal, thickness of each wing panel 15 gradually become thinner from root (not labeled) of each wing panel 15 to free end (not labeled) of each wing panel 15, so thickness of each protrusion 151 is thinnest. Surely, the lower surface can be sloped down as an upper surface does to make each wing panel 15 sloping down. Due to this structure, when the substrates are inserted the space intervals 17 between neighbor wing panels 15, the wing panels 15 with the protrusion 151 provide a guiding mechanism which can't make the substrates miss right positions, and on the right positions, the substrates are supported by a group of wing panels 15 in a same horizontal plane and area of that the substrates touch with wing panels 15 is only edges of the substrates 13.
  • FIG. 5 and FIG. 6 are shown a [0021] cassette 20 using the supporting plate 10 according to the present invention. The cassette 20 comprises a pair of frames 30 and at least a pair of supporting plates 10, the frames 30 and the supporting plates 10 form a space for accommodating substrates by the means of the stiff shafts 13 and a plurality of screws (not labeled). The frames 30 define a plurality of recesses 301 for coupling with the coupling ends 131 of the stiff shafts 13, and each recess 301 defines a threaded hole through the frame 30.
  • In assembly, [0022] wing panels 15 are face inward, the stiff shafts 13 are assembled with the supporting plates 10, and are received in the through grooves 18, the coupling ends 131 positioned in the recesses 301 respectively. A plurality of screws fixes the supporting plates 10 and the frames 30 through the threaded hole 303 and 135.
  • It is to be understood, however, than even though numerous characteristics and advantages of the present invention have been set forth in the foregoing description, together with details of the structure and function of the invention, the disclosure is illustrative only, and changes may be made in detail, especially in matters of shape, size, and arrangement of parts within the principles of the invention to the extent indicated by the broad general meaning of the terms in which the appended claims are expressed. [0023]

Claims (19)

What is claimed is:
1. A supporting plate for supporting substrates, comprising:
a main body having a plurality of wing panels extending from the main body and at least two through grooves,
at least two stiff shafts being received in the two through grooves,
wherein each wing panel comprises a plurality of protrusions extending from the free side of each wing panel, and the wing panels slope down.
2. The supporting plate as described in claim 1, wherein the wing panels are spaced apart from one another a predetermined distance.
3. The supporting plate as described in claim 1, wherein each space interval defines at least a hole through the main body.
4. The supporting plate as described in claim 1, wherein the main body defines a plurality of holding member for holding the stiff rods in the through grooves.
5. The supporting plate as described in claim 1, wherein the through grooves are formed perpendicular to the wing panels.
6. The supporting plate as described in claim 1, wherein the stiff shaft is made of metal.
7. The supporting plate as described in claim 1, wherein the stiff shaft defines threaded holes in opposite ends thereof.
8. A cassette for accommodating a plurality of substrates in mutual isolation, comprising:
a pair of frames, and
at least a pair of supporting plate fixed to the frames, each supporting plate comprising:
a main body having a plurality of wing panels extending from the main body and at least two through grooves,
at least two stiff shafts being received in the two through grooves,
wherein space interval is defined between neighboring wing panels, each wing panel comprises a plurality of protrusions extending from the free side of each wing panel, and the wing panels slope down.
9. The cassette as described in claim 8, wherein the wing panels are spaced apart from one another a predetermined distance.
10. The cassette as described in claim 8, wherein each space interval defines at least a hole through the main body.
11. The cassette as described in claim 8, wherein the main body defines a plurality of holding member for holding the stiff rods in the through grooves.
12. The cassette as described in claim 8, wherein the through grooves are formed perpendicular to the wing panels.
13. The cassette as described in claim 8, wherein the stiff shaft is made of metal.
14. The cassette as described in claim 8, wherein the stiff shaft defines threaded holes in opposite ends thereof.
15. The cassette as described in claim 8, wherein the stiff shaft forms a coupling end and defines a threaded hole in each end.
16. The cassette as described in claim 8, wherein the frame forms recesses for receiving the coupling ends of the stiff rods and through holes in the recesses.
17. A cassette for supporting substrates, comprising:
a pair of frames, and
at least a pair of supporting plates fixed to the frames,
wherein each two supporting plates face each other, and each supporting plate defines a plurality of wing panels on an inward facing side, each wing panel comprises a plurality of protrusions extending from a free side of each wing panel, and the wing panels slope down.
18. The cassette as described in claim 17, wherein the wing panels are spaced apart from one another a predetermined distance.
19. The cassette as described in claim 17, wherein each space interval defines at least a hole through the main body.
US10/678,522 2002-10-09 2003-10-03 Cassette Abandoned US20040069728A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW091216036U TW553195U (en) 2002-10-09 2002-10-09 Substrate supporting slot plate and substrate cassette using the same
TW91216036 2002-10-09

Publications (1)

Publication Number Publication Date
US20040069728A1 true US20040069728A1 (en) 2004-04-15

Family

ID=31885777

Family Applications (1)

Application Number Title Priority Date Filing Date
US10/678,522 Abandoned US20040069728A1 (en) 2002-10-09 2003-10-03 Cassette

Country Status (3)

Country Link
US (1) US20040069728A1 (en)
JP (1) JP3936309B2 (en)
TW (1) TW553195U (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050023231A1 (en) * 2003-08-01 2005-02-03 Chui-Kai Huang Substrate supporting rod and substrate cassette using the same
US20060011507A1 (en) * 2004-05-26 2006-01-19 Daisuke Uchida Supporting bar for substrate cassette
US20060231515A1 (en) * 2005-04-15 2006-10-19 Innolux Display Corp. Adjustable cassette for substrates
US20100003629A1 (en) * 2008-07-02 2010-01-07 Jung Won-Woong Substrate firing device
US20120080354A1 (en) * 2010-10-01 2012-04-05 Hydis Technologies Co., Ltd. Cassette for Loading Substrate
US20140262929A1 (en) * 2013-03-18 2014-09-18 Shenzhen China Star Optoelectronics Technology Co., Ltd. Drawer type cushioning packaging device for liquid crystal glass
US8919563B2 (en) 2008-01-13 2014-12-30 Entegris, Inc. Methods and apparatus for large diameter wafer handling
US20220093434A1 (en) * 2020-09-22 2022-03-24 Gudeng Precision Industrial Co., Ltd. Supporting shelf module and wafer container using same

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6015905B2 (en) * 2012-05-25 2016-10-26 パナソニックＩｐマネジメント株式会社 Packing material
JP7205848B2 (en) * 2018-02-15 2023-01-17 株式会社リニア・サーキット Casing for substrate storage

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4153164A (en) * 1978-06-13 1979-05-08 Kasper Instruments, Inc. Carrier for semiconductive wafers
US4515104A (en) * 1983-05-13 1985-05-07 Asq Boats, Inc. Contiguous wafer boat
US4676008A (en) * 1986-05-16 1987-06-30 Microglass, Inc. Cage-type wafer carrier and method
US4872554A (en) * 1987-07-02 1989-10-10 Fluoroware, Inc. Reinforced carrier with embedded rigid insert
US5452795A (en) * 1994-11-07 1995-09-26 Gallagher; Gary M. Actuated rotary retainer for silicone wafer box
US5584401A (en) * 1994-07-29 1996-12-17 Yodogawa Kasei Kabushiki Kaisha Substrate-supporting side boards and a cassette utilizing the boards
US6092981A (en) * 1999-03-11 2000-07-25 Applied Materials, Inc. Modular substrate cassette
US6378538B1 (en) * 1999-12-13 2002-04-30 Advanced Micro Devices, Inc. Durable, multi-piece rotor for spray acid tools
US20020113027A1 (en) * 2001-02-20 2002-08-22 Mitsubishi Denki Kabushiki Kaisha Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer
US20030010672A1 (en) * 2001-07-12 2003-01-16 Anthony Simpson Thin wafer carrier
US6523701B1 (en) * 1999-09-06 2003-02-25 Yodogawa Kasei Kabushiki Kaisha Elongated rib for cassette and substrate cassette
US6607381B2 (en) * 2001-05-16 2003-08-19 Mitsubishi Denki Kabushiki Kaisha Auxiliary heat-insulating jig
US6776289B1 (en) * 1996-07-12 2004-08-17 Entegris, Inc. Wafer container with minimal contact
US6796439B2 (en) * 2001-05-11 2004-09-28 Heraeus Quarzglas Gmbh & Co. Kg Vertical type wafer supporting jig

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4153164A (en) * 1978-06-13 1979-05-08 Kasper Instruments, Inc. Carrier for semiconductive wafers
US4515104A (en) * 1983-05-13 1985-05-07 Asq Boats, Inc. Contiguous wafer boat
US4676008A (en) * 1986-05-16 1987-06-30 Microglass, Inc. Cage-type wafer carrier and method
US4872554A (en) * 1987-07-02 1989-10-10 Fluoroware, Inc. Reinforced carrier with embedded rigid insert
US5584401A (en) * 1994-07-29 1996-12-17 Yodogawa Kasei Kabushiki Kaisha Substrate-supporting side boards and a cassette utilizing the boards
US5452795A (en) * 1994-11-07 1995-09-26 Gallagher; Gary M. Actuated rotary retainer for silicone wafer box
US6776289B1 (en) * 1996-07-12 2004-08-17 Entegris, Inc. Wafer container with minimal contact
US6092981A (en) * 1999-03-11 2000-07-25 Applied Materials, Inc. Modular substrate cassette
US6523701B1 (en) * 1999-09-06 2003-02-25 Yodogawa Kasei Kabushiki Kaisha Elongated rib for cassette and substrate cassette
US6378538B1 (en) * 1999-12-13 2002-04-30 Advanced Micro Devices, Inc. Durable, multi-piece rotor for spray acid tools
US20020113027A1 (en) * 2001-02-20 2002-08-22 Mitsubishi Denki Kabushiki Kaisha Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer
US6796439B2 (en) * 2001-05-11 2004-09-28 Heraeus Quarzglas Gmbh & Co. Kg Vertical type wafer supporting jig
US6607381B2 (en) * 2001-05-16 2003-08-19 Mitsubishi Denki Kabushiki Kaisha Auxiliary heat-insulating jig
US20030010672A1 (en) * 2001-07-12 2003-01-16 Anthony Simpson Thin wafer carrier

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7334690B2 (en) * 2003-08-01 2008-02-26 Foxsemicon Integrated Technology, Inc. Substrate supporting rod and substrate cassette using the same
US20050023231A1 (en) * 2003-08-01 2005-02-03 Chui-Kai Huang Substrate supporting rod and substrate cassette using the same
US20060011507A1 (en) * 2004-05-26 2006-01-19 Daisuke Uchida Supporting bar for substrate cassette
US20060231515A1 (en) * 2005-04-15 2006-10-19 Innolux Display Corp. Adjustable cassette for substrates
US8919563B2 (en) 2008-01-13 2014-12-30 Entegris, Inc. Methods and apparatus for large diameter wafer handling
US9592930B2 (en) 2008-01-13 2017-03-14 Entegris, Inc. Methods and apparatus for large diameter wafer handling
US20100003629A1 (en) * 2008-07-02 2010-01-07 Jung Won-Woong Substrate firing device
US9052145B2 (en) * 2008-07-02 2015-06-09 Samsung Display Co., Ltd. Substrate firing device
US8528750B2 (en) * 2010-10-01 2013-09-10 Hydis Technologies Co., Ltd. Cassette for loading substrate
US20120080354A1 (en) * 2010-10-01 2012-04-05 Hydis Technologies Co., Ltd. Cassette for Loading Substrate
US8997996B2 (en) * 2013-03-18 2015-04-07 Shenzhen China Star Optoelectronics Technology Co., Ltd. Drawer type cushioning packaging device for liquid crystal glass
US20140262929A1 (en) * 2013-03-18 2014-09-18 Shenzhen China Star Optoelectronics Technology Co., Ltd. Drawer type cushioning packaging device for liquid crystal glass
US20220093434A1 (en) * 2020-09-22 2022-03-24 Gudeng Precision Industrial Co., Ltd. Supporting shelf module and wafer container using same

Also Published As

Publication number Publication date
JP2004134737A (en) 2004-04-30
TW553195U (en) 2003-09-11
JP3936309B2 (en) 2007-06-27

Similar Documents

Publication Publication Date Title
US5890598A (en) Substrate cassette
US6273275B1 (en) Cassette for loading glass substrates
US7334690B2 (en) Substrate supporting rod and substrate cassette using the same
US20060226093A1 (en) Glass cassette for loading glass substrates of display panels
US20040069728A1 (en) Cassette
US11119539B2 (en) Display
US8559187B2 (en) Mounting apparatus for expansion card
US7780332B2 (en) Holding frame and backlight module with the same
CN1309638C (en) Thin wafer carrier
US7004614B2 (en) Backlight module
US6538710B1 (en) Backlight of a liquid crystal display device having a deformable projecting part for securely retaining a light guide while allowing expansion thereof
US20130021742A1 (en) Motherboard assembly and central processing unit expansion card
US20040170003A1 (en) Adjustable cassette for substrates
US20110075348A1 (en) Mounting apparatus for disk drive
US11096305B1 (en) Server
US20120006955A1 (en) Disk drive assembly
US8505468B2 (en) Substrate accommodating tray
US7175301B2 (en) Backlight module and a display device utilizing the same
US20110157821A1 (en) Mounting apparatus for pci card
JP3249623B2 (en) Substrate cassette
KR200246482Y1 (en) Glass cassette
JP3073548B2 (en) Display device
KR102513934B1 (en) Wafer cassette
CN216919401U (en) Coating carrier and coating equipment
CN218920476U (en) Television set

Legal Events

Date Code Title Description
AS Assignment

Owner name: FOXSEMICON INTEGRATED TECHNOLOGY, INC., TAIWAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HUANG, CHUN-KAI;CHANG, MING-HUI;REEL/FRAME:014583/0467

Effective date: 20030926

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION