JP3936309B2 - Slot plate used for substrate support and substrate cassette using the slot plate - Google Patents

Slot plate used for substrate support and substrate cassette using the slot plate Download PDF

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Publication number
JP3936309B2
JP3936309B2 JP2003151433A JP2003151433A JP3936309B2 JP 3936309 B2 JP3936309 B2 JP 3936309B2 JP 2003151433 A JP2003151433 A JP 2003151433A JP 2003151433 A JP2003151433 A JP 2003151433A JP 3936309 B2 JP3936309 B2 JP 3936309B2
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Prior art keywords
substrate
slot plate
slot
plate
shelf
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JP2004134737A (en
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俊凱 黄
明輝 張
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沛▲きん▼半導体工業股▲ふん▼有限公司
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)

Description

【０００１】
【発明の属する技術分野】
本発明は、平面ディスプレイの製造過程に用いられる基板カセットに関し、特に基板支承に用いられるスロットプレートに関するものである。
【０００２】
【従来の技術】
平面ディスプレイの製造過程において、基板の運搬と移動は特別なカセットを必要とする。複数の基板を支承して同時に運送するための複数棚片構造が該カセットに設けられている。
【０００３】
特許文献１は基板カセット１を提示している。該基板カセットはフレームとフレームに架設された複数のプラスチック丸棒を有する。プラスチック丸棒の周方向に溝を多数設け、そろばん珠の形の外観を有する溝付き丸棒を構成することにより、基板は、溝付き丸棒の対応する溝間に出入、収容される。基板はカセットに収容された場合に、該基板は各溝付き丸棒の対応する溝間に位置決めしなければいけない。そうしないと、基板はカセットに傾斜差込みを起こす恐れがある。不便であるので、改良の必要がある。
【０００４】
特許文献２は基板支承用側板構造を提示している。該基板支承用側板が、構造的には、背肉部から舌状の棚片が所定のピッチでカセット内部側に向けて平行に張り出し、その棚片はその自由端側にいくほど上方になるように傾斜し、その棚片の棚面はその両端側よりも中央部が若干高くなるような山形構造に形成される。該構造にはただ棚片の中央部のみで基板を支承し、したがって、基板の支承構造と基板との接触面積を減少できる。それなのに、棚片の中央部は支承基板辺縁内の部分であることから、摩擦により基板を破壊する。かつ、棚片の表面に張り出す中央部を有することから、基板の位置決め及びガイドに不利である。
【０００５】
前記を鑑みて、一種のクリーニングしやすい基板キャリヤ及び一体化の基板キャリヤにあるリテーニングバーが必要とされている。
【０００６】
【特許文献１】
日本国特許第２５５２５６５号明細書
【特許文献２】
台湾特許第２６０８２２号明細書
【０００７】
【発明が解決しようとする課題】
本発明は、基板との摩擦を減少できる基板支承用スロットプレートを提供することを主な目的とする。
【０００８】
本発明は、位置決めしやすくて、基板を収容しやすい基板支承用スロットプレートを提供することを他の目的とする。
【０００９】
本発明は、基板との摩擦を減少でき、かつ、位置決めしやすくて、基板を収容しやすい基板支承用スロットプレートを提供することを他の目的とする。
【００１０】
【課題を解決するための手段】
前記の目的を達成するために、本発明の基板支承用スロットプレートを提供する。該スロットプレートは一つの樹脂板及び少なくとも二つの金属棒を含む。複数の棚片は該樹脂板の表面から所定の間隙を隔てて延設され、各二つの棚片の間に支承用スロットになる。また、該棚片は斜面であり、棚片の自由端から複数の突出部を延出する。該樹脂板の裏の面に少なくとも二つの貫通部材を有し、該貫通部材は棚片と垂直し、少なくとも二つの金属棒を対応して収容する。
【００１１】
本発明は基板カセットを提供し、該基板カセットは少なくとも一つのフレーム及び一対の基板支承用スロットプレートを備える。該基板支承用スロットプレートは一つの樹脂板及び少なくとも二つの金属棒を含む。該樹脂板の表面から所定の間隙を隔てて延設する複数の棚片の間に支承用スロットになる。また、該棚片は斜面であり、棚片の自由端から複数の突出部を延出する。該樹脂板の裏の面に少なくとも二つの貫通部材を有し、該貫通部材は棚片と垂直し、少なくとも二つの金属棒を対応して収容する。該フレームは基板を収容する収容空間となる。少なくとも一対の基板支承用スロットプレートは前記金属棒により該収容空間の相対向する側面に設置される。
【００１２】
【発明の実施の形態】
以下、図面を参照しながら下記の詳しい説明により、本発明の特徴をさらに明らかにすることができる。
【００１３】
図１と図２を示すように、本発明の基板支承用スロットプレート１０は樹脂板１１及び二つの金属棒１３を含む。該樹脂板１１の表面から所定の間隙を隔てて延設する複数の棚片１５の間に支承用スロット１７になる。樹脂板１１を貫通する長穴１７１の少なくとも一つは支承スロット１７に開口する。樹脂板１１の一対の側板背肉部に二つの貫通部材１８を有する（図６に示す）。該貫通部材１８は棚片１５に対してほぼ垂直し、それぞれ一つの金属棒１３を収容する。樹脂板１１を前記金属棒１３に錠止するために、該貫通部材１８の１対の相対向する側面から多数のアーチ状の錠止部１９が張り出し、貫通部材１８と同様に円筒形となる。したがって、スロットプレート１０を形成する。該金属棒１３はスロットプレート１０の強度を高めることに用いられる。かつスロットプレート１０を基板カセット２０（図５に示す）に固定して設置することが便利である。そのほか、基板を運搬する場合に、スロットプレート１０との摩擦によって生じる静電気の蓄積を効果的に防止する。
【００１４】
図３と図４を示すように、棚片１５の上表面が該自由端と接近すればするほど、該自由端は下方に向けて傾斜する。該棚片１５に自由端から延出する複数の突出部１５１を有することによって、基板（図示せず）が支承用スロット１７に収容される時、棚片１５はガイド及び良い位置決め効能を提供でき、基板が支承用スロット１７に収容された後、実に突出部１５１のみ基板の辺縁を支えて、それゆえに、基板と棚片１５との接触面積を減少でき、かつ摩擦によって基板の破壊及び摩耗粉などの塵埃を生じる恐れが減少できる。しかも棚片１５は樹脂板１１の表面に対して下方へ傾斜する。
【００１５】
図５は本発明の基板カセットである。該基板カセットはフレーム３０及び少なくとも一対の基板支承用スロット１０を含む。該フレーム３０は基板を収容する収容空間（図示せず）となり、金属棒１３とフレーム３０の結合により、少なくとも一対の基板支承用スロットプレート１０を収容空間の相対向する側面に平行に対向設置する。前記一対のスロットプレート１０が設けられる一対の棚片１５は一つの基板を対応して支承する。
【００１６】
図６は本発明の基板カセット２０のフレーム３０とスロットプレート１０とを結合する見取図である。貫通部材から張り出す金属棒１３の部分は方形の突出部１３１であり、該方形の突出部１３１の端面１３３にねじ１３５を有する。フレーム２０に方形の溝３０１を設け、金属棒１３両端の方形の突出部１３１を収容でき、溝３０１に貫通孔３０３を有する。ボルト（図示せず）は方形の溝３０１にある貫通孔を貫通して、方形の突出部１３１の端面１３３に設けられたねじ１３５と結合することによって、スロットプレート１０をフレーム３０にロックできる。
【００１７】
本発明において基板カセットのフレーム３０とスロットプレート１０との結合はほかの多種の実施方式がある。例えば、金属棒１３の両端に軸の方向と垂直するねじを有し、フレームに丸穴を開口し、金属棒１３の両端を収容するためのものである。金属棒１３の両端を収容する丸穴まで貫通する貫通孔をフレーム３０の側面に設ける。ボルトはフレーム３０の側面にある貫通孔を貫通して、金属棒１３の両端にあるねじと結合することによって、スロットプレート１０をフレーム３０にロックできる。
【００１８】
本発明において基板支承用スロットプレートの棚片１５の上表面が該自由端と接近すればするほど、該自由端は下方に向けて傾斜する。それゆえに、基板の辺縁だけ支承して、摩擦によって基板の破壊及び摩耗粉などの塵埃を生じる恐れを減少できる。かつ棚片は実に突出部のみ基板の辺縁を支えて、基板と棚片との接触面積を減少できることによって、摩耗粉などの塵埃を生じる恐れを減少できる。そのほか、基板が支承用スロットに収容される時、棚片はガイド及び良い位置決め効能を提供でき、本発明の基板カセットは位置決めしやすくて、基板を収容しやすい効能がある。
【００１９】
総じて、本発明の多数の特徴及び長所など、その構造及び機能が共に前述の記載により掲げられている。また前記の説明は、本発明に基づきなしうる細部の修正或は変更など、いずれも本発明の請求範囲に属するものとする。
【図面の簡単な説明】
【図１】本発明における本発明のスロットプレートの正面側斜視図である。
【図２】本発明における本発明のスロットプレートの裏面側斜視図である。
【図３】本発明における本発明のスロットプレートの側面図である。
【図４】本発明における本発明のスロットプレートの平面図である。
【図５】本発明における本発明の基板カセットの正面側斜視図である。
【図６】本発明における本発明のスロットプレートは金属棒によりフレームに設けられる分解斜視図である。
【符号の説明】
１０ スロットプレート
１１ 樹脂板
１３ 金属棒
１５ 棚片
１７ 支承用スロット
１８ 貫通部材
１９ 錠止部
２０ 基板カセット
３０ フレーム
１３１ 方形の突出部
１３３ 端面
１３５ ねじ
１５１ 突出部
１７１ 長穴
３０１ 方形の溝
３０３ 貫通孔[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a substrate cassette used in the manufacturing process of a flat display, and more particularly to a slot plate used for substrate support.
[0002]
[Prior art]
In the flat display manufacturing process, the transport and movement of the substrate requires a special cassette. The cassette is provided with a plurality of shelf structures for supporting and transporting a plurality of substrates simultaneously.
[0003]
Patent Document 1 presents a substrate cassette 1. The substrate cassette has a frame and a plurality of plastic round bars installed on the frame. A large number of grooves are provided in the circumferential direction of the plastic round bar, and a grooved round bar having an abacus-shaped appearance is configured, whereby the substrate is put in and out of the corresponding groove of the grooved round bar. When the substrate is housed in a cassette, the substrate must be positioned between the corresponding grooves of each grooved round bar. Otherwise, the substrate may tilt into the cassette. Since it is inconvenient, it needs to be improved.
[0004]
Patent Document 2 presents a board support side plate structure. In terms of structure, the board support side plate has a tongue-like shelf piece extending in parallel from the back portion toward the inside of the cassette at a predetermined pitch, and the shelf piece becomes higher toward the free end side. Thus, the shelf surface of the shelf piece is formed in a chevron structure in which the central portion is slightly higher than the both end sides. In this structure, the substrate is supported only at the central portion of the shelf piece, and therefore the contact area between the substrate support structure and the substrate can be reduced. Nevertheless, since the central portion of the shelf piece is a portion within the edge of the support substrate, the substrate is destroyed by friction. And since it has the center part projected on the surface of a shelf piece, it is disadvantageous for the positioning and guide of a board | substrate.
[0005]
In view of the foregoing, there is a need for a kind of easy-to-clean substrate carrier and a retaining bar on an integral substrate carrier.
[0006]
[Patent Document 1]
Japanese Patent No. 2552565 [Patent Document 2]
Taiwan Patent No. 260822 Specification [0007]
[Problems to be solved by the invention]
A main object of the present invention is to provide a slot plate for supporting a substrate that can reduce friction with the substrate.
[0008]
Another object of the present invention is to provide a board support slot plate that is easy to position and accommodates a board.
[0009]
Another object of the present invention is to provide a slot plate for supporting a substrate that can reduce friction with the substrate, can be easily positioned, and can easily accommodate the substrate.
[0010]
[Means for Solving the Problems]
In order to achieve the above object, a slot plate for supporting a substrate according to the present invention is provided. The slot plate includes one resin plate and at least two metal bars. The plurality of shelf pieces are extended from the surface of the resin plate with a predetermined gap, and serve as support slots between the two shelf pieces. Further, the shelf piece is a slope, and a plurality of protrusions extend from the free end of the shelf piece. At least two through member on the back surface of the resin plate, said through member is shelf piece and vertical, to accommodate corresponding at least two of the metal bar.
[0011]
The present invention provides a substrate cassette, which includes at least one frame and a pair of substrate support slot plates. The board support slot plate includes one resin plate and at least two metal bars. A supporting slot is formed between a plurality of shelf pieces extending from the surface of the resin plate with a predetermined gap. Further, the shelf piece is a slope, and a plurality of protrusions extend from the free end of the shelf piece. At least two through member on the back surface of the resin plate, said through member is shelf piece and vertical, to accommodate corresponding at least two of the metal bar. The frame serves as a housing space for housing the substrate. At least a pair of board support slot plates are installed on opposite sides of the accommodation space by the metal rod.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
The features of the present invention can be further clarified by the following detailed description with reference to the drawings.
[0013]
As shown in FIGS. 1 and 2, the board support slot plate 10 of the present invention includes a resin plate 11 and two metal bars 13. A supporting slot 17 is formed between a plurality of shelf pieces 15 extending from the surface of the resin plate 11 with a predetermined gap. At least one of the long holes 171 penetrating the resin plate 11 opens into the support slot 17. Two penetrating members 18 are provided in the pair of side plate back meat portions of the resin plate 11 (shown in FIG. 6). The penetrating members 18 are substantially perpendicular to the shelf pieces 15 and each receive one metal bar 13. To lock the resin plate 11 to the metal rod 13, a large number of overhang arcuate locking portion 19 of a pair opposing sides of the through-members 18, a cylindrical like the penetrating member 18 . Therefore, the slot plate 10 is formed. The metal bar 13 is used to increase the strength of the slot plate 10. In addition, it is convenient to fix the slot plate 10 to the substrate cassette 20 (shown in FIG. 5). In addition, when the substrate is transported, static electricity accumulation caused by friction with the slot plate 10 is effectively prevented.
[0014]
As shown in FIG. 3 and FIG. 4, the closer the upper surface of the shelf piece 15 is to the free end, the more the free end is inclined downward. By having a plurality of protrusions 151 extending from the free end of the shelf piece 15, the shelf piece 15 can provide a guide and a good positioning effect when a substrate (not shown) is received in the support slot 17. After the substrate is accommodated in the support slot 17, only the protrusion 151 supports the edge of the substrate, so that the contact area between the substrate and the shelf piece 15 can be reduced, and the destruction and wear of the substrate due to friction. The possibility of generating dust such as powder can be reduced. Moreover, the shelf piece 15 is inclined downward with respect to the surface of the resin plate 11.
[0015]
FIG. 5 shows a substrate cassette according to the present invention. The substrate cassette includes a frame 30 and at least a pair of substrate support slots 10. The frame 30 serves as a housing space (not shown) for housing the substrate, and by coupling the metal rod 13 and the frame 30, at least a pair of substrate support slot plates 10 are disposed opposite to each other in parallel to the opposite side surfaces of the housing space. . The pair of shelf pieces 15 provided with the pair of slot plates 10 supports a single substrate correspondingly.
[0016]
FIG. 6 is a sketch for joining the frame 30 and the slot plate 10 of the substrate cassette 20 of the present invention. The portion of the metal bar 13 that protrudes from the penetrating member is a rectangular protrusion 131, and the end surface 133 of the rectangular protrusion 131 has a screw 135. A rectangular groove 301 is provided in the frame 20 to accommodate the rectangular protrusions 131 at both ends of the metal rod 13, and the groove 301 has a through hole 303. The bolt (not shown) passes through the through hole in the rectangular groove 301 and is coupled to the screw 135 provided on the end surface 133 of the rectangular protrusion 131, whereby the slot plate 10 can be locked to the frame 30.
[0017]
In the present invention, there are various other ways of coupling the substrate cassette frame 30 and the slot plate 10. For example, the metal rod 13 has screws perpendicular to the axial direction at both ends, opens a round hole in the frame, and accommodates both ends of the metal rod 13. A through hole penetrating to the round hole that accommodates both ends of the metal rod 13 is provided on the side surface of the frame 30. The bolts can lock the slot plate 10 to the frame 30 by passing through the through-holes on the side surface of the frame 30 and coupling with the screws at both ends of the metal rod 13.
[0018]
In the present invention, as the upper surface of the shelf piece 15 of the board support slot plate approaches the free end, the free end is inclined downward. Therefore, by supporting only the edge of the substrate, it is possible to reduce the possibility that the substrate will be broken and dust such as abrasion powder will be generated due to friction. In addition, since the shelf piece supports the edge of the substrate only with the protruding portion and the contact area between the substrate and the shelf piece can be reduced, the possibility of generating dust such as wear powder can be reduced. In addition, when the substrate is accommodated in the support slot, the shelf piece can provide a guide and a good positioning effect, and the substrate cassette of the present invention is easy to position and can easily accommodate the substrate.
[0019]
In general, both the structure and function of the present invention, including the numerous features and advantages of the present invention, are listed in the foregoing description. Further, the above description is intended to be within the scope of the present invention, such as modification or change of details that can be made based on the present invention.
[Brief description of the drawings]
FIG. 1 is a front perspective view of a slot plate of the present invention in the present invention.
FIG. 2 is a rear perspective view of the slot plate of the present invention in the present invention.
FIG. 3 is a side view of the slot plate of the present invention in the present invention.
FIG. 4 is a plan view of the slot plate of the present invention in the present invention.
FIG. 5 is a front perspective view of the substrate cassette of the present invention according to the present invention.
FIG. 6 is an exploded perspective view of the slot plate of the present invention provided on the frame by a metal rod.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Slot plate 11 Resin plate 13 Metal rod 15 Shelf piece 17 Supporting slot 18 Penetration member 19 Locking part 20 Substrate cassette 30 Frame 131 Square protrusion part 133 End face 135 Screw 151 Protrusion part 171 Long hole 301 Square groove 303 Through hole

Claims (9)

同形平板状の複数の棚片が、各棚片の一端縁側に形成される貫通部材によって、隣接するもの同士間に所定の間隔を空けて上下方向に積層状態に配されてなる樹脂板と、A plurality of identical flat plate-like shelf pieces are arranged in a vertically stacked state with a predetermined interval between adjacent ones by a penetrating member formed on one edge side of each shelf piece, and
前記樹脂板の一面側に設けられた２本の金属棒と、Two metal bars provided on one side of the resin plate;
を有してなり、Having
前記樹脂板を構成する各前記棚片は、前記貫通部材が形成された側とは反対側の自由端に複数の突出部が形成されていると共に、積層方向と直交する垂直面に対して傾斜しており、Each shelf piece constituting the resin plate has a plurality of protrusions formed at a free end opposite to the side where the penetrating member is formed, and is inclined with respect to a vertical plane orthogonal to the stacking direction. And
前記貫通部材に、前記金属棒を受け入れる為の錠止部が形成されていることを特徴とする基板支承用スロットプレート。A slot plate for supporting a substrate, wherein a locking portion for receiving the metal bar is formed in the penetrating member. 前記樹脂板を貫通する少なくとも一つの長穴を各スロットに有することを特徴とする請求項１に記載の基板支承用スロットプレート。  The board support slot plate according to claim 1, wherein each slot has at least one elongated hole penetrating the resin plate. 棚片の上表面が該自由端と接近すればするほど、該自由端は下方に向けて傾斜していることを特徴とする請求項１に記載の基板支承用スロットプレート。  2. The slot plate for supporting a substrate according to claim 1, wherein the closer the upper surface of the shelf piece is to the free end, the more the free end is inclined downward. 前記棚片は樹脂板の前記積層方向と直交する前記垂直面に対して前記自由端側が低くなるように傾斜することを特徴とする請求項１に記載の基板支承用スロットプレート。2. The board support slot plate according to claim 1, wherein the shelf piece is inclined so that the free end side is lowered with respect to the vertical plane perpendicular to the stacking direction of the resin plates. 前記樹脂板を前記金属棒に錠止するために、該貫通スロットの１対の相対向する側面から多数の、円環の一部が軸方向に切り欠かれたアーチ状の錠止部が張り出していることを特徴とする請求項１に記載の基板支承用スロットプレート。In order to lock the resin plate to the metal rod, a large number of arch-shaped locking portions in which a part of a ring is cut out in the axial direction protrudes from a pair of opposite side surfaces of the through slot. The slot plate for board | substrate support of Claim 1 characterized by the above-mentioned. 前記貫通部材は前記棚片の面に略垂直とされることを特徴とする請求項５に記載の基板支承用スロットプレート。The board support slot plate according to claim 5, wherein the penetrating member is substantially perpendicular to a surface of the shelf piece. 前記金属棒の両端に方形の突出部を有し、かつ該端面にねじを有することを特徴とする請求項６に記載の基板支承用スロットプレート。  The slot plate for board | substrate support of Claim 6 which has a square protrusion part in the both ends of the said metal bar, and has a screw in this end surface. 前記金属棒の両端に前記金属棒の軸線の方向に略垂直とされるねじを有することを特徴とする請求項６に記載の基板支承用スロットプレート。Substrate support slot plate according to claim 6, characterized in that it comprises a screw which is substantially perpendicular to the axis of the metal rod on both ends of the metal bar. 少なくとも２つの、請求項１〜８のいずれか一項に記載の基板支承用スロットプレートと、これら基板支承用スロットプレートをつなぐフレームとから構成された基板カセットであって、A substrate cassette composed of at least two slot plates for supporting a substrate according to any one of claims 1 to 8 and a frame connecting the slot plates for supporting the substrate,
前記基板支承用スロットプレートは、前記棚片の前記自由端同士が向かい合うように所定間隔で対向配置され、The board support slot plate is disposed to be opposed at a predetermined interval so that the free ends of the shelf pieces face each other.
前記フレームは、それら対向配置された前記基板支承用スロットプレートの上端部同士及び下端部同士間に架け渡され、The frame is spanned between the upper end portions and the lower end portions of the board support slot plates arranged opposite to each other,
前記基板支承用スロットプレートの前記金属棒の各端部が、前記フレームに固定されてなる、基板カセット。A substrate cassette, wherein each end of the metal bar of the substrate support slot plate is fixed to the frame.
JP2003151433A 2002-10-09 2003-05-28 Slot plate used for substrate support and substrate cassette using the slot plate Expired - Fee Related JP3936309B2 (en)

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