JP2004134737A - Slot plate for bearing substrate and substrate cassette using slot plate - Google Patents

Slot plate for bearing substrate and substrate cassette using slot plate Download PDF

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Publication number
JP2004134737A
JP2004134737A JP2003151433A JP2003151433A JP2004134737A JP 2004134737 A JP2004134737 A JP 2004134737A JP 2003151433 A JP2003151433 A JP 2003151433A JP 2003151433 A JP2003151433 A JP 2003151433A JP 2004134737 A JP2004134737 A JP 2004134737A
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Japan
Prior art keywords
substrate
slot
plate
slot plate
shelf
Prior art date
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Granted
Application number
JP2003151433A
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Japanese (ja)
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JP3936309B2 (en
Inventor
Shungai Ko
黄　俊凱
Ming-Hui Chang
張　明輝
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Foxsemicon Integrated Technology Inc
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Foxsemicon Integrated Technology Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates

Abstract

<P>PROBLEM TO BE SOLVED: To provide a slot plate for bearing substrate in which friction with a substrate can be reduced. <P>SOLUTION: With regard to the slot plate 10 for bearing substrate and the substrate cassette using the slot plate 10, the slot plate 10 includes one resin plate 11 and at least two metal rods. A plurality of shelf pieces 15 extend while being spaced apart from the surface of the resin plate 11 by a specified gap. The shelf piece 15 is an inclining surface and a plurality of protrusions 151 extend from the free end of the shelf piece 15. A frame locks at least a pair of shelf pieces 15 to form a cassette for containing glass substrates. Since the shelf piece 15 of the substrate bearing slot plate 10 is inclining, only the side edge of the substrate is born and the shelf pieces 15 support the side edge of the substrate only at the protrusions 151 thus reducing the possibility of generating dust, e.g. wear debris, through friction. <P>COPYRIGHT: (C)2004,JPO

Description

【０００１】
【発明の属する技術分野】
本発明は、平面ディスプレイの製造過程に用いられる基板カセットに関し、特に基板支承に用いられるスロットプレートに関するものである。
【０００２】
【従来の技術】
平面ディスプレイの製造過程において、基板の運搬と移動は特別なカセットを必要とする。複数の基板を支承して同時に運送するための複数棚片構造が該カセットに設けられている。
【０００３】
特許文献１は基板カセット１を提示している。該基板カセットはフレームとフレームに架設された複数のプラスチック丸棒を有する。プラスチック丸棒の周方向に溝を多数設け、そろばん珠の形の外観を有する溝付き丸棒を構成することにより、基板は、溝付き丸棒の対応する溝間に出入、収容される。基板はカセットに収容された場合に、該基板は各溝付き丸棒の対応する溝間に位置決めしなければいけない。そうしないと、基板はカセットに傾斜差込みを起こす恐れがある。不便であるので、改良の必要がある。
【０００４】
特許文献２は基板支承用側板構造を提示している。該基板支承用側板が、構造的には、背肉部から舌状の棚片が所定のピッチでカセット内部側に向けて平行に張り出し、その棚片はその自由端側にいくほど上方になるように傾斜し、その棚片の棚面はその両端側よりも中央部が若干高くなるような山形構造に形成される。該構造にはただ棚片の中央部のみで基板を支承し、したがって、基板の支承構造と基板との接触面積を減少できる。それなのに、棚片の中央部は支承基板辺縁内の部分であることから、摩擦により基板を破壊する。かつ、棚片の表面に張り出す中央部を有することから、基板の位置決め及びガイドに不利である。
【０００５】
前記を鑑みて、一種のクリーニングしやすい基板キャリヤ及び一体化の基板キャリヤにあるリテーニングバーが必要とされている。
【０００６】
【特許文献１】
日本国特許第２５５２５６５号明細書
【特許文献２】
台湾特許第２６０８２２号明細書
【０００７】
【発明が解決しようとする課題】
本発明は、基板との摩擦を減少できる基板支承用スロットプレートを提供することを主な目的とする。
【０００８】
本発明は、位置決めしやすくて、基板を収容しやすい基板支承用スロットプレートを提供することを他の目的とする。
【０００９】
本発明は、基板との摩擦を減少でき、かつ、位置決めしやすくて、基板を収容しやすい基板支承用スロットプレートを提供することを他の目的とする。
【００１０】
【課題を解決するための手段】
前記の目的を達成するために、本発明の基板支承用スロットプレートを提供する。該スロットプレートは一つの樹脂板及び少なくとも二つの金属棒を含む。複数の棚片は該樹脂板の表面から所定の間隙を隔てて延設され、各二つの棚片の間に支承用スロットになる。また、該棚片は斜面であり、棚片の自由端から複数の突出部を延出する。該樹脂板の裏の面に少なくとも二つの貫通スロットを有し、該貫通スロットは棚片と垂直し、少なくとも二つの金属棒を対応して収容する。
【００１１】
本発明は基板カセットを提供し、該基板カセットは少なくとも一つのフレーム及び一対の基板支承用スロットプレートを備える。該基板支承用スロットプレートは一つの樹脂板及び少なくとも二つの金属棒を含む。該樹脂板の表面から所定の間隙を隔てて延設する複数の棚片の間に支承用スロットになる。また、該棚片は斜面であり、棚片の自由端から複数の突出部を延出する。該樹脂板の裏の面に少なくとも二つの貫通スロットを有し、該貫通スロットは棚片と垂直し、少なくとも二つの金属棒を対応して収容する。該フレームは基板を収容する収容空間となる。少なくとも一対の基板支承用スロットプレートは前記金属棒により該収容空間の相対向する側面に設置される。
【００１２】
【発明の実施の形態】
以下、図面を参照しながら下記の詳しい説明により、本発明の特徴をさらに明らかにすることができる。
【００１３】
図１と図２を示すように、本発明の基板支承用スロットプレート１０は樹脂板１１及び二つの金属棒１３を含む。該樹脂板１１の表面から所定の間隙を隔てて延設する複数の棚片１５の間に支承用スロット１７になる。樹脂板１１を貫通する長穴１７１の少なくとも一つは支承スロット１７に開口する。樹脂板１１の一対の側板背肉部に二つの貫通スロット１８を有する（図６に示す）。該貫通スロット１８は棚片１５に対してほぼ垂直し、それぞれ一つの金属棒１３を収容する。樹脂板１１を前記金属棒１３に錠止するために、該貫通スロット１８の１対の相対向する側面から多数のアーチ状の錠止部１９が張り出し、貫通スロット１８と同様に円筒形となる。したがって、スロットプレート１０を形成する。該金属棒１３はスロットプレート１０の強度を高めることに用いられる。かつスロットプレート１０を基板カセット２０（図５に示す）に固定して設置することが便利である。そのほか、基板を運搬する場合に、スロットプレート１０との摩擦によって生じる静電気の蓄積を効果的に防止する。
【００１４】
図３と図４を示すように、棚片１５の上表面が該自由端と接近すればするほど、該自由端は下方に向けて傾斜する。該棚片１５に自由端から延出する複数の突出部１５１を有することによって、基板（図示せず）が支承用スロット１７に収容される時、棚片１５はガイド及び良い位置決め効能を提供でき、基板が支承用スロット１７に収容された後、実に突出部１５１のみ基板の辺縁を支えて、それゆえに、基板と棚片１５との接触面積を減少でき、かつ摩擦によって基板の破壊及び摩耗粉などの塵埃を生じる恐れが減少できる。しかも棚片１５は樹脂板１１の表面に対して下方へ傾斜する。
【００１５】
図５は本発明の基板カセットである。該基板カセットはフレーム３０及び少なくとも一対の基板支承用スロット１０を含む。該フレーム３０は基板を収容する収容空間（図示せず）となり、金属棒１３とフレーム３０の結合により、少なくとも一対の基板支承用スロットプレート１０を収容空間の相対向する側面に平行に対向設置する。前記一対のスロットプレート１０が設けられる一対の棚片１５は一つの基板を対応して支承する。
【００１６】
図６は本発明の基板カセット２０のフレーム３０とスロットプレート１０とを結合する見取図である。貫通スロットから張り出す金属棒１３の部分は方形の突出部１３１であり、該方形の突出部１３１の端面１３３にねじ１３５を有する。フレーム２０に方形の溝３０１を設け、金属棒１３両端の方形の突出部１３１を収容でき、溝３０１に貫通孔３０３を有する。ボルト（図示せず）は方形の溝３０１にある貫通孔を貫通して、方形の突出部１３１の端面１３３に設けられたねじ１３５と結合することによって、スロットプレート１０をフレーム３０にロックできる。
【００１７】
本発明において基板カセットのフレーム３０とスロットプレート１０との結合はほかの多種の実施方式がある。例えば、金属棒１３の両端に軸の方向と垂直するねじを有し、フレームに丸穴を開口し、金属棒１３の両端を収容するためのものである。金属棒１３の両端を収容する丸穴まで貫通する貫通孔をフレーム３０の側面に設ける。ボルトはフレーム３０の側面にある貫通孔を貫通して、金属棒１３の両端にあるねじと結合することによって、スロットプレート１０をフレーム３０にロックできる。
【００１８】
本発明において基板支承用スロットプレートの棚片１５の上表面が該自由端と接近すればするほど、該自由端は下方に向けて傾斜する。それゆえに、基板の辺縁だけ支承して、摩擦によって基板の破壊及び摩耗粉などの塵埃を生じる恐れを減少できる。かつ棚片は実に突出部のみ基板の辺縁を支えて、基板と棚片との接触面積を減少できることによって、摩耗粉などの塵埃を生じる恐れを減少できる。そのほか、基板が支承用スロットに収容される時、棚片はガイド及び良い位置決め効能を提供でき、本発明の基板カセットは位置決めしやすくて、基板を収容しやすい効能がある。
【００１９】
総じて、本発明の多数の特徴及び長所など、その構造及び機能が共に前述の記載により掲げられている。また前記の説明は、本発明に基づきなしうる細部の修正或は変更など、いずれも本発明の請求範囲に属するものとする。
【図面の簡単な説明】
【図１】本発明における本発明のスロットプレートの正面側斜視図である。
【図２】本発明における本発明のスロットプレートの裏面側斜視図である。
【図３】本発明における本発明のスロットプレートの側面図である。
【図４】本発明における本発明のスロットプレートの平面図である。
【図５】本発明における本発明の基板カセットの正面側斜視図である。
【図６】本発明における本発明のスロットプレートは金属棒によりフレームに設けられる分解斜視図である。
【符号の説明】
１０　スロットプレート
１１　樹脂板
１３　金属棒
１５　棚片
１７　支承用スロット
１８　貫通スロット
１９　錠止部
２０　基板カセット
３０　フレーム
１３１　方形の突出部
１３３　端面
１３５　ねじ
１５１　突出部
１７１　長穴
３０１　方形の溝
３０３　貫通孔[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a substrate cassette used in a manufacturing process of a flat panel display, and more particularly to a slot plate used for supporting a substrate.
[0002]
[Prior art]
In the process of manufacturing a flat panel display, transport and movement of a substrate require a special cassette. The cassette is provided with a plurality of shelf structures for supporting a plurality of substrates and transporting the substrates at the same time.
[0003]
Patent Document 1 proposes a substrate cassette 1. The substrate cassette has a frame and a plurality of plastic round bars provided on the frame. By providing a large number of grooves in the circumferential direction of the plastic round bar to form a grooved round bar having an abacus-shaped appearance, the substrate can be moved into and out of the corresponding grooves of the grooved round bar. When the substrate is stored in the cassette, it must be positioned between the corresponding grooves of each grooved rod. Otherwise, the substrate may be tilted into the cassette. It is inconvenient and needs to be improved.
[0004]
Patent Document 2 proposes a side plate structure for supporting a substrate. Structurally, the substrate supporting side plate has a tongue-shaped shelf extending parallel to the inside of the cassette at a predetermined pitch from the back meat portion, and the shelf increases upward as it approaches the free end. The shelf surface of the shelf piece is formed in a chevron structure in which the central portion is slightly higher than the both end sides. In this structure, the substrate is supported only at the center of the shelf, so that the contact area between the substrate support structure and the substrate can be reduced. Nevertheless, since the central portion of the shelf is within the periphery of the supporting substrate, the substrate is broken by friction. In addition, since it has a central portion protruding from the surface of the shelf, it is disadvantageous for positioning and guiding the substrate.
[0005]
In view of the foregoing, there is a need for a type of substrate carrier that is easy to clean and a retaining bar on the integrated substrate carrier.
[0006]
[Patent Document 1]
Japanese Patent No. 25552565 [Patent Document 2]
Specification of Taiwan Patent No. 260822 [0007]
[Problems to be solved by the invention]
SUMMARY OF THE INVENTION An object of the present invention is to provide a slot plate for supporting a substrate, which can reduce friction with the substrate.
[0008]
Another object of the present invention is to provide a slot plate for supporting a substrate which is easy to position and easily accommodates a substrate.
[0009]
Another object of the present invention is to provide a slot plate for supporting a substrate, which can reduce friction with the substrate, can be easily positioned, and can easily accommodate the substrate.
[0010]
[Means for Solving the Problems]
To achieve the above object, a slot plate for supporting a substrate according to the present invention is provided. The slot plate includes one resin plate and at least two metal bars. The plurality of shelves extend from the surface of the resin plate with a predetermined gap therebetween, and serve as bearing slots between each two shelves. Also, the shelf is a slope and extends a plurality of protrusions from the free end of the shelf. The back side of the resin plate has at least two through slots, which are perpendicular to the shelf and accommodate at least two metal bars in a corresponding manner.
[0011]
The present invention provides a substrate cassette, which includes at least one frame and a pair of substrate supporting slot plates. The slot plate for supporting a substrate includes one resin plate and at least two metal bars. It becomes a support slot between a plurality of shelves extending from the surface of the resin plate with a predetermined gap. Also, the shelf is a slope and extends a plurality of protrusions from the free end of the shelf. The back side of the resin plate has at least two through slots, which are perpendicular to the shelf and accommodate at least two metal bars in a corresponding manner. The frame serves as a housing space for housing the substrate. At least one pair of slot plates for supporting the substrate is installed on the opposing side surfaces of the housing space by the metal bar.
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the features of the present invention can be further clarified by the following detailed description with reference to the drawings.
[0013]
As shown in FIGS. 1 and 2, the slot plate 10 for supporting a board of the present invention includes a resin plate 11 and two metal rods 13. A support slot 17 is formed between a plurality of shelf pieces 15 extending from the surface of the resin plate 11 with a predetermined gap therebetween. At least one of the long holes 171 penetrating the resin plate 11 opens into the bearing slot 17. The resin plate 11 has two through slots 18 in a pair of side plate back portions (shown in FIG. 6). The through slots 18 are substantially perpendicular to the shelves 15 and each accommodate one metal bar 13. In order to lock the resin plate 11 to the metal rod 13, a number of arch-shaped locking portions 19 project from a pair of opposite side surfaces of the through slot 18, and have a cylindrical shape like the through slot 18. . Therefore, the slot plate 10 is formed. The metal rod 13 is used to increase the strength of the slot plate 10. Further, it is convenient to fix and install the slot plate 10 in the substrate cassette 20 (shown in FIG. 5). In addition, when transporting the substrate, accumulation of static electricity generated by friction with the slot plate 10 is effectively prevented.
[0014]
As shown in FIGS. 3 and 4, the closer the upper surface of the shelf 15 is to the free end, the more the free end is inclined downward. By having a plurality of protrusions 151 extending from the free end of the shelf 15, the shelf 15 can provide a guide and a good positioning effect when a substrate (not shown) is accommodated in the support slot 17. After the substrate is received in the support slot 17, only the protrusion 151 supports the edge of the substrate, and therefore the contact area between the substrate and the shelf 15 can be reduced, and the destruction and wear of the substrate due to friction. The possibility of generating dust such as powder can be reduced. Moreover, the shelf 15 is inclined downward with respect to the surface of the resin plate 11.
[0015]
FIG. 5 shows a substrate cassette of the present invention. The substrate cassette includes a frame 30 and at least one pair of substrate supporting slots 10. The frame 30 serves as a housing space (not shown) for housing a substrate, and at least a pair of board supporting slot plates 10 are opposed to and parallel to opposing side surfaces of the housing space by coupling the metal bar 13 and the frame 30. . A pair of shelf pieces 15 provided with the pair of slot plates 10 support one substrate correspondingly.
[0016]
FIG. 6 is a perspective view for connecting the frame 30 and the slot plate 10 of the substrate cassette 20 of the present invention. The portion of the metal bar 13 that protrudes from the through slot is a rectangular protrusion 131, which has a screw 135 on an end surface 133 of the rectangular protrusion 131. A rectangular groove 301 is provided in the frame 20 to accommodate the rectangular protrusions 131 at both ends of the metal rod 13, and the groove 301 has a through hole 303. Bolts (not shown) penetrate through holes in the rectangular groove 301 and are coupled to screws 135 provided on the end surface 133 of the rectangular protrusion 131, so that the slot plate 10 can be locked to the frame 30.
[0017]
In the present invention, the connection between the frame 30 of the substrate cassette and the slot plate 10 can be implemented in various other ways. For example, it has a screw perpendicular to the axial direction at both ends of the metal bar 13, has a round hole opened in the frame, and accommodates both ends of the metal bar 13. A through hole penetrating to a round hole that accommodates both ends of the metal bar 13 is provided on the side surface of the frame 30. The slot plate 10 can be locked to the frame 30 by the bolts penetrating through holes in the side surface of the frame 30 and being connected to screws at both ends of the metal bar 13.
[0018]
In the present invention, as the upper surface of the shelf 15 of the slot plate for supporting a substrate approaches the free end, the free end is inclined downward. Therefore, only the edge of the substrate is supported, thereby reducing the possibility of destruction of the substrate and generation of dust such as abrasion powder due to friction. In addition, since the shelf supports the edge of the substrate only at the protruding portion, and the contact area between the substrate and the shelf can be reduced, the possibility of generating dust such as abrasion powder can be reduced. In addition, when the substrate is accommodated in the support slot, the shelf piece can provide a guide and a good positioning effect, and the substrate cassette of the present invention is easy to position and easily accommodates the substrate.
[0019]
In general, the structure and function of the present invention, including its many features and advantages, are all set forth in the foregoing description. All of the above description, such as modification or change of details that can be made based on the present invention, belongs to the scope of the present invention.
[Brief description of the drawings]
FIG. 1 is a front perspective view of a slot plate of the present invention in the present invention.
FIG. 2 is a rear perspective view of the slot plate of the present invention in the present invention.
FIG. 3 is a side view of the slot plate of the present invention in the present invention.
FIG. 4 is a plan view of the slot plate of the present invention in the present invention.
FIG. 5 is a front perspective view of the substrate cassette of the present invention in the present invention.
FIG. 6 is an exploded perspective view of the slot plate of the present invention provided on the frame by a metal bar.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Slot plate 11 Resin plate 13 Metal rod 15 Shelf piece 17 Support slot 18 Through slot 19 Locking part 20 Board cassette 30 Frame 131 Square projection 133 End face 135 Screw 151 Projection 171 Slot hole 301 Square groove 303 Through hole

Claims (8)

表面から所定の間隙を隔てて延設される複数の棚片は斜面であり、各二つの棚片の間が支承用スロットになり、棚片の自由端から複数の突出部を延出し、裏面に少なくとも二つの貫通スロットを有するような樹脂板と、
前記樹脂板に有する貫通スロットに対応して収容する少なくとも二つの金属棒と、
を備えることを特徴とする基板支承用スロットプレートである。The plurality of shelves extending at a predetermined gap from the front surface are slopes, a space between each two shelves becomes a bearing slot, a plurality of protrusions extend from the free end of the shelf, and the back surface. A resin plate having at least two through slots,
At least two metal rods accommodated corresponding to the through slots provided in the resin plate,
And a slot plate for supporting a substrate. 前記樹脂板を貫通する少なくとも一つの長穴を各スロットに有することを特徴とする請求項１に記載の基板支承用スロットプレート。2. The slot plate for supporting a board according to claim 1, wherein each slot has at least one elongated hole penetrating the resin plate. 棚片の上表面が該自由端と接近すればするほど、該自由端は下方に向けて傾斜していることを特徴とする請求項１に記載の基板支承用スロットプレート。The slot plate according to claim 1, wherein the free end is inclined downward as the upper surface of the shelf piece approaches the free end. 前記棚片は樹脂板の表面に対して下方へ傾斜することを特徴とする請求項１に記載の基板支承用スロットプレート。2. The slot plate according to claim 1, wherein the shelf is inclined downward with respect to a surface of the resin plate. 前記樹脂板を前記金属棒に錠止するために、該貫通スロットの１対の相対向する側面から多数のアーチ状の錠止部が張り出していることを特徴とする請求項１に記載の基板支承用スロットプレート。2. The substrate according to claim 1, wherein a plurality of arch-shaped locking portions project from a pair of opposing side surfaces of the through slot to lock the resin plate to the metal bar. Slot plate for bearing. 前記貫通スロットは前記棚片の面方向とほぼ垂直することを特徴とする請求項５に記載の基板支承用スロットプレート。6. The slot plate for supporting a substrate according to claim 5, wherein the through slot is substantially perpendicular to a surface direction of the shelf. 前記金属棒の両端に方形の突出部を有し、かつ該端面にねじを有することを特徴とする請求項６に記載の基板支承用スロットプレート。7. The slot plate for supporting a board according to claim 6, wherein the metal bar has rectangular projections at both ends and a screw at the end face. 前記金属棒の両端に軸の方向と垂直するねじを有することを特徴とする請求項６に記載の基板支承用スロットプレート。7. The slot plate for supporting a board according to claim 6, wherein a screw perpendicular to an axis direction is provided at both ends of the metal bar.
JP2003151433A 2002-10-09 2003-05-28 Slot plate used for substrate support and substrate cassette using the slot plate Expired - Fee Related JP3936309B2 (en)

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