CN216919401U

CN216919401U - Coating carrier and coating equipment

Info

Publication number: CN216919401U
Application number: CN202123042770.7U
Authority: CN
Inventors: 李国庆; 张凡; 满小花; 王应斌; 文鸥; 肖荣峰
Original assignee: Shenzhen Headquarter SC New Energy Technology Corp
Current assignee: Shenzhen Headquarter SC New Energy Technology Corp
Priority date: 2021-12-06
Filing date: 2021-12-06
Publication date: 2022-07-08
Anticipated expiration: 2031-12-06

Abstract

The utility model discloses a film coating carrier and film coating equipment, wherein the film coating carrier comprises a pocket plate, a first supporting beam, a connecting piece and a second supporting beam, the connecting piece is spliced with the first supporting beam and the pocket plate, a gap is formed between a polished rod part and the inner wall of a first mounting hole, a gap is formed between a flange part and the pocket plate, the pocket plate is provided with a plurality of inserting strips, the second supporting beam is provided with a plurality of inserting holes, the inserting strips are inserted into the inserting holes, and gaps are formed between the inserting strips and the inner wall of the inserting holes; the coating equipment comprises a coating carrier. According to the utility model, gaps exist between the connecting piece and the pocket plate, gaps exist between the pocket plate and the first supporting beam, gaps exist between the inserting strips and the second supporting beam at two sides of the pocket plate connected with the second supporting beam, so that the edge of the pocket plate is allowed to expand outwards, the periphery of the pocket plate can be freely expanded by heating, the risk of deformation of the pocket plate due to expansion limitation is reduced, and the coating quality of a silicon wafer is improved.

Description

Coating carrier and coating equipment

Technical Field

The utility model relates to the technical field of battery coating, in particular to a coating carrier and coating equipment.

Background

In the photovoltaic industry, silicon wafers to be plated are carried by a carrier, the silicon wafers are fed into a closed film plating environment in batches, and film plating is carried out at high temperature. Because the coating temperature is high, the carrier is influenced by high temperature and has an expansion trend, in the related technology, a pocket plate for bearing the silicon wafer in the carrier is fixed on an outer frame through butt clamps or screws, and the pocket plate cannot expand freely after being heated to generate deformation, so that the coating thickness of the silicon wafer is influenced, and even waste parts are formed.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to solving at least one of the problems of the prior art. Therefore, the utility model provides a coating carrier which can freely expand when heated and has small deformation.

The utility model also provides a coating device with the coating carrier.

According to the embodiment of the first aspect of the utility model, the plating carrier comprises:

the pocket plate is provided with at least one pocket plate, the pocket plate is provided with a plurality of film coating clamping grooves, the film coating clamping grooves are used for placing silicon wafers, and the pocket plate is provided with a plurality of first mounting holes;

the two first supporting beams extend along a first direction and are respectively arranged on two opposite sides of the pocket plate, and a plurality of second mounting holes are formed in the first supporting beams;

the connecting pieces are provided with a plurality of threaded parts, polished rod parts and flange parts, the threaded parts and the polished rod parts are sequentially connected with the flange parts, the connecting pieces are inserted into the first mounting holes and the second mounting holes, the threaded parts are in threaded connection with the inner walls of the second mounting holes, the polished rod parts penetrate through the first mounting holes and have gaps with the inner walls of the first mounting holes, the flange parts are positioned outside the first mounting holes, and gaps are formed between the end faces, close to one side of the pocket plate, of the flange parts and the pocket plate;

the second supporting beam is provided with two at least, the second supporting beam extends along the second direction, first direction with the second direction is perpendicular, each the both ends of second supporting beam respectively with two first supporting beam is connected, and is a plurality of second supporting beam interval distribution, the pocket board is located adjacently between the second supporting beam, the pocket board is provided with a plurality of cuttings along the second direction interval, the second supporting beam is provided with a plurality of jacks along the second direction, the cuttings insert to in the jack, and the cuttings with the clearance has between the inner wall of jack.

The coating carrier disclosed by the embodiment of the utility model at least has the following beneficial effects:

according to the film coating carrier provided by the embodiment of the utility model, the pocket plate is connected with the two sides of the first supporting beam, a gap is formed between the connecting piece and the pocket plate to allow the pocket plate to expand along the axial direction and the radial direction of the connecting piece, and gaps are formed between the cutting strips and the second supporting beam at the two sides of the pocket plate connected with the second supporting beam to allow the edge of the pocket plate to expand outwards, so that the periphery of the pocket plate can be freely expanded by heating, the risk of deformation of the pocket plate due to expansion limitation is reduced, and the film coating quality of a silicon wafer is improved.

According to some embodiments of the utility model, the polished rod portion protrudes from an outer surface of the threaded portion, one end of the polished rod portion abuts against the first support beam, and a length of the polished rod portion is greater than a thickness of the pocket plate.

According to some embodiments of the utility model, the insertion hole and the second mounting hole are located in the same plane at a center in a thickness direction of the pocket plate.

According to some embodiments of the utility model, the insertion holes are arranged on two sides of the second support beam between two adjacent pocket plates, and the insertion holes on two sides are distributed in a staggered manner.

According to some embodiments of the present invention, the first support beam includes a transition plate and a mounting beam, the transition plate has a first connection section and a second connection section bent to each other, the second mounting hole is disposed in the first connection section, the first connection section is connected to the pocket plate, and the second connection section is connected to the mounting beam.

According to some embodiments of the present invention, the second connecting section has a plurality of third mounting holes, the mounting beam has a plurality of fourth mounting holes, the connecting element is inserted into the third mounting hole and the fourth mounting holes, the threaded portion is screwed to an inner wall of the fourth mounting hole, the polish rod portion is inserted into the third mounting hole and has a gap with an inner wall of the third mounting hole, the flange portion is located outside the third mounting hole, a gap is formed between an end surface of the flange portion close to one side of the second connecting section and the second connecting section, and an insertion direction of the connecting element to the first connecting section is perpendicular to an insertion direction of the connecting element to the second connecting section.

According to some embodiments of the present invention, the mounting beam further includes a plurality of positioning pins, the positioning pins are distributed at intervals along the first direction, the positioning pins are inserted into the mounting beam and the second connecting section, and the positioning pins are parallel to the insertion direction of the connecting member into the second connecting section.

According to some embodiments of the utility model, the wing beam extends along the second direction, the wing beam is connected to one side of the second support beam, which is away from the pocket plate, the second support beam is provided with a fifth mounting hole, the wing beam is provided with a sixth mounting hole, the connecting piece is inserted into the fifth mounting hole and the sixth mounting hole, the threaded portion is in threaded connection with the inner wall of the fifth mounting hole, the polished rod portion is arranged in the sixth mounting hole in a penetrating manner, a gap is formed between the polished rod portion and the inner wall of the sixth mounting hole, the flange portion is located outside the sixth mounting hole, and a gap is formed between the end face, which is close to one side of the wing beam, of the flange portion and the wing beam.

According to some embodiments of the utility model, the spar includes a first bending section and a second bending section, the first bending section is provided with the sixth mounting hole, and the second bending section protrudes in a direction away from the second support beam relative to the first bending section.

The plating device according to an embodiment of a second aspect of the utility model includes:

the coating carrier of the first aspect embodiment;

the coating device is internally provided with a coating cavity, and the coating cavity is used for placing the coating carrier.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The utility model is further described with reference to the following figures and examples, in which:

FIG. 1 is a schematic structural diagram of a coating carrier according to an embodiment of the present invention;

FIG. 2 is an exploded view of one embodiment of the coating carrier of FIG. 1;

FIG. 3 is a schematic view of the construction of the pocket plate of FIG. 1;

FIG. 4 is a schematic structural view of the second support beam of FIG. 1;

FIG. 5 is a cross-sectional view of the pocket plate of FIG. 1 at the connection to a first support beam;

FIG. 6 is a cross-sectional view of the mounting beam of FIG. 1 at the connection with the first coupling section;

FIG. 7 is a cross-sectional view of the spar of FIG. 1 at the connection to a second support beam;

figure 8 is a side view of the spar of figure 1.

Reference numerals:

the bag plate 100, the coating clamping groove 110, the first mounting hole 120, the inserting strip 130 and the ID block 140; a first support beam 200, a second mounting hole 210, a transition plate 220, a first connection section 221, a second connection section 222, a third mounting hole 223, a mounting beam 230, a fourth mounting hole 231; a second support beam 300, a jack 310, a fifth mounting hole 320; a connector 400, a threaded portion 410, a polished rod portion 420, a flange portion 430; a positioning pin 500; a spar 600, a sixth mounting hole 610, a first bend 620, and a second bend 630.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

In the description of the present invention, it should be understood that the orientation or positional relationship referred to in the description of the orientation, such as the upper, lower, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

In the description of the present invention, the meaning of a plurality is one or more, the meaning of a plurality is two or more, and the above, below, exceeding, etc. are understood as excluding the present numbers, and the above, below, within, etc. are understood as including the present numbers. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

In the description of the present invention, unless otherwise explicitly limited, terms such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific contents of the technical solutions.

In the description of the present invention, reference to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Referring to fig. 1 and 2, in an embodiment of the present invention, a coating carrier for supporting a silicon wafer to be coated is provided, the coating carrier includes a pocket plate 100, a first support beam 200 and a second support beam 300, the first support beam 200 extends along a first direction, the second support beam 300 extends along a second direction, the first direction and the second direction are perpendicular to each other, the first support beam 200 and the second support beam 300 enclose a frame-shaped structure, the pocket plate 100 is disposed inside the frame-shaped structure and is connected to the first support beam 200 and the second support beam 300, and the first support beam 200 and the second support beam 300 support the pocket plate 100. Specifically, at least one pocket plate 100 is arranged, the pocket plate 100 is provided with a plurality of coating clamping grooves 110, the coating clamping grooves 110 are used for placing silicon wafers to be coated, and the coating clamping grooves 110 are hollowed out so that gas in a coating cavity can deposit on the silicon wafers conveniently; the two first supporting beams 200 are respectively disposed at two opposite sides of the pocket plate 100 and connected to the pocket plate 100, at least two second supporting beams 300 are disposed, two ends of each second supporting beam 300 are respectively connected to the two first supporting beams 200, the first supporting beams 200 are perpendicular to the second supporting beams 300, so that the first supporting beams 200 and the second supporting beams 300 are combined to form a frame-shaped structure, and the pocket plate 100 is disposed between two adjacent second supporting beams 300.

Referring to fig. 3 and 5, the pocket plate 100 is provided with a plurality of first mounting holes 120, the first support beam 200 is provided with a plurality of second mounting holes 210, the second mounting holes 210 are distributed at intervals along a first direction, the coating carrier further includes a connector 400, the connector 400 has a threaded portion 410, a polished rod portion 420 and a flange portion 430, the threaded portion 410, the polished rod portion 420 and the flange portion 430 are sequentially connected, and the connector 400 is inserted into the pocket plate 100 and the first support beam 200 and is inserted into the first mounting holes 120 and the second mounting holes 210, so that the pocket plate 100 is connected to the first support beam 200. Specifically, the pocket plate 100 and a partial region of the first support beam 200 are stacked, the threaded portion 410 is screwed with an inner wall of the second mounting hole 210, the polished rod portion 420 is inserted into the first mounting hole 120, and an outer diameter of the polished rod portion 420 is smaller than an inner diameter of the first mounting hole 120, so that a gap is formed between the polished rod portion 420 and the inner wall of the first mounting hole 120, and the gap allows the pocket plate 100 to freely expand along a radial direction of the polished rod portion 420; the flange part 430 is positioned outside the first mounting hole 120, the outer diameter of the flange part 430 is larger than the inner diameter of the first mounting hole 120 to prevent the pocket plate 100 from falling off from the coupling member 400, and a gap is provided between the end surface of the flange part 430 near the pocket plate 100 side and the pocket plate 100, the gap allowing the pocket plate 100 to freely expand in the axial direction of the polish rod part 420; thus, the connector 400 connects the pocket plate 100 to the first support beam 200 and does not restrict the pocket plate 100 from expanding in different directions when heated, reducing the risk of deformation of the pocket plate 100.

Referring to fig. 3 and 4, the pocket plate 100 is provided with a plurality of insert bars 130 at intervals along the second direction, the second support beam 300 is provided with a plurality of insert holes 310 along the second direction, the insert bars 130 are inserted into the insert holes 310, and a gap is formed between the insert bars 130 and the inner walls of the insert holes 310. The pocket plate 100 is connected with the second support beam 300 in a plugging manner, the assembly efficiency is high, and the gap between the insertion bar 130 and the insertion hole 310 allows the edge of the pocket plate 100 to expand towards the outside, thereby improving the expansion degree of the pocket plate 100.

Therefore, in the coating carrier provided in the embodiment of the present invention, gaps exist between the connection member 400 and the pocket plate 100 at both sides where the pocket plate 100 is connected to the first support beam 200, allowing the pocket plate 100 to expand in the axial and radial directions of the connection member 400, gaps exist between the insertion strips 130 and the second support beam 300 at both sides where the pocket plate 100 is connected to the second support beam 300, and allowing the edges of the pocket plate 100 to expand outward, so that the outer periphery of the pocket plate 100 can freely expand by heating, the risk of deformation of the pocket plate 100 due to expansion limitation is reduced, and the coating quality of a silicon wafer is improved.

It should be noted that the first mounting hole 120 and the second mounting hole 210 correspond to each other in position, so that they are communicated with each other for the insertion of the connector 400; the insertion strip 130 corresponds to the position of the insertion hole 310 to facilitate the insertion of the pocket plate 100 with the second support beam 300. The axial direction of the connector 400 is the connection direction of the threaded portion 410, the polish rod portion 420 and the flange portion 430, and the radial direction of the connector 400 is the direction intersecting the axial center of the connector 400 in a plane perpendicular to the axial direction of the connector 400; the axial and radial arrangements do not mean that the polished rod portion 420 and the flange portion 430 have a cylindrical structure, and the first mounting hole 120 may be a circular, elliptical, or kidney-shaped hole.

In addition, since the first support beam 200 is a guide rail when the coating carrier is transferred to the coating cavity, in order to avoid the vibration during the transfer process from affecting the connection between the first support beam 200 and the pocket plate 100, in the embodiment of the present invention, the pocket plate 100 and the first support beam 200 are connected by the connecting member 400, the connecting member 400 is screwed with the first support beam 200, and the pocket plate 100 is limited, so that the pocket plate 100 is stably connected with the first support beam 200; the second support beam 300 is less affected by the transmission vibration, and the pocket board 100 is connected with the second support beam 300 in a plugging manner, so that the assembly efficiency is high.

It is conceivable that the centers of the insertion hole 310 and the second mounting hole 210 in the thickness direction of the pocket plate 100 are located in the same plane, so that the pocket plate 100 is balanced after being connected to the first support beam 200 and the second support beam 300, and different coating slots 110 are located at the same height, which is beneficial to improving the uniformity of the coating thickness of the silicon wafer. In one embodiment, the insert bar 130 is in contact with the inner wall of the insertion hole 310 in the thickness direction of the pocket plate 100 to ensure stable support of the pocket plate 100 by the second support beam 300, and the insert bar 130 is spaced from the inner wall of the insertion hole 310 in the circumferential direction of the pocket plate 100 to allow the edge of the pocket plate 100 to freely expand toward the outer circumference.

In addition, there is a gap between the side of the second support beam 300 facing the pocket plate 100 and the edge of the pocket plate 100, and the gap has a margin for the edge of the pocket plate 100 to expand outward, thereby increasing the expansion margin of the pocket plate 100 outward.

The second support beam 300 is provided with at least two, and when the second support beam 300 is two, the pocket plate 100 is provided with one, and the two second support beams 300 are located right at both sides of the pocket plate 100. Fig. 1 shows a case with three second support beams 300, when there are more than three second support beams 300, at least one second support beam 300 is connected with pocket plates 100 on both sides, at this time, the two sides of the second support beam 300 between two adjacent pocket plates 100 should be provided with insertion holes 310 for insertion of the pocket plates 100 on both sides, and the insertion holes 310 on both sides are distributed in a staggered manner to avoid mutual interference of the insertion strips 130 on both sides of the second support beam 300; correspondingly, as shown in fig. 3, the inserts 130 on both sides of the pocket board 100 can also be staggered along the second direction to cooperate with the staggered insertion holes 310.

As shown in fig. 5, the polish rod part 420 is protrudingly disposed with respect to the outer surface of the threaded part 410, one end of the polish rod part 420 abuts against the first support beam 200, and the length of the polish rod part 420 is greater than the thickness of the pocket plate 100, where the length of the polish rod part 420 should be understood as the distance of the polish rod part 420 in the axial direction of the connector 400. By providing the protruding polish rod portion 420, on the one hand, axial play of the connector 400 is avoided, and on the other hand, it is convenient to set the length of the polish rod portion 420 to such an extent that a gap is formed between the flange portion 430 and the pocket plate 100.

In the embodiment of the present invention, as shown in fig. 2 and 5, the first support beam 200 includes a transition plate 220 and a mounting beam 230, the transition plate 220 has a first connection section 221 and a second connection section 222 bent with each other, the second mounting hole 210 is disposed on the first connection section 221, the first connection section 221 can be stacked with the pocket plate 100 in the thickness direction of the pocket plate 100, so that the connection member 400 can be inserted through the first connection section 221 to connect the first connection section 221 and the mounting beam 230, and the mounting beam 230 is used for transferring a coated carrier. The first connection section 221 and the second connection section 222 bent with each other are disposed so that the first connection section 221 can be attached to the surface of the pocket plate 100, and the second connection section 222 can be attached to the surface of the mounting beam 230, thereby facilitating the assembly of the pocket plate 100 and the first support beam 200.

As shown in fig. 6, the second connecting section 222 is provided with a plurality of third mounting holes 223, the mounting beam 230 is provided with a plurality of fourth mounting holes 231, the connecting member 400 is inserted into the third mounting holes 223 and the fourth mounting holes 231, so that the threaded portion 410 is screwed with the inner walls of the fourth mounting holes 231, the polish rod portion 420 is inserted into the third mounting holes 223 and has a gap with the inner walls of the third mounting holes 223, the flange portion 430 is located outside the third mounting holes 223, and a gap is formed between the end surface of the flange portion 430 close to one side of the second connecting section 222 and the second connecting section 222. The second connection section 222 is connected to the mounting beam 230 by the connection member 400, and the second connection section 222 can expand along the thickness direction and toward the outer side thereof, so that the transition plate 220 also has the capability of expanding freely when heated.

In addition, the plugging direction of the connector 400 to the first connection section 221 is perpendicular to the plugging direction of the connector 400 to the second connection section 222, the plugging direction of the connector 400 is the stacking direction of the first connection section 221 and the pocket plate 100, and the stacking direction of the second connection section 222 and the mounting beam 230 is matched, so that the transition plate 220 can be conveniently connected with the mounting beam 230 and the pocket plate 100; moreover, because the inserting direction of the connecting piece 400 is different, the pocket plate 100 and the transition plate 220 can expand along different directions, and the expansion degree of freedom of the coating carrier is high.

In order to further improve the connection strength between the transition plate 220 and the mounting beam 230 and avoid the pocket plate 100 from deviating due to transmission vibration, in an embodiment of the present invention, a plurality of positioning pins 500 are further provided, the positioning pins 500 are distributed at intervals along the first direction, the positioning pins 500 are inserted into the mounting beam 230 and the second connecting section 222, the positioning pins 500 are parallel to the insertion direction of the connecting member 400 to the second connecting section 222, the outer surface of the positioning pins 500 contacts the mounting beam 230, a gap exists between the outer surface of the positioning pins 500 and the second connecting section 222, allowing the second connecting section 222 to have a certain amount of expansion relative to the mounting beam 230, but the positioning pins 500 limit the mounting beam 230 and the second connecting section 222 in the radial direction thereof, so as to avoid the second connecting section 222 from excessively deviating relative to the mounting beam 230.

As shown in fig. 1 and 2, the coating carriers further include a spar 600, the spar 600 extends along the second direction, the spar 600 is connected to a side of the second support beam 300 away from the pocket plate 100, and the spar 600 is used for overlapping adjacent coating carriers to prevent the coating gas in different layers from moving. Specifically, the second support beam 300 and the spar 600 are connected through the connector 400, as shown in fig. 7 and 8, the second support beam 300 has a fifth mounting hole 320, the spar 600 has a sixth mounting hole 610, the connector 400 is inserted into the fifth mounting hole 320 and the sixth mounting hole 610, the threaded portion 410 is screwed with an inner wall of the fifth mounting hole 320, the polished rod portion 420 is inserted into the sixth mounting hole 610 and has a gap with the inner wall of the sixth mounting hole 610, the flange portion 430 is located outside the sixth mounting hole 610, a gap is formed between an end surface of the flange portion 430 close to one side of the spar 600 and the spar 600, and the spar 600 can expand along the thickness direction and towards the outside thereof, so that the spar 600 also has the capability of freely expanding when heated. In addition, the spar 600 may be restrained by the positioning pin 500, as with the second support beam 300.

It should be noted that the connecting member 400 for connecting the second connecting section 222 with the mounting beam 230 and for connecting the spar 600 with the second support beam 300 has the polished rod portion 420 also protruding with respect to the threaded portion 410, and the polished rod portion 420 and the threaded portion 410 form a stepped structure so as to set the gap between the connecting member 400 and the connected components in the axial direction and to avoid the connecting member 400 from moving in the axial direction.

In addition, as shown in fig. 8, the spar 600 further includes a first bending section 620 and a second bending section 630 bent with each other, the first bending section 620 is provided with a sixth mounting hole 610, and the second bending section 630 protrudes in a direction away from the second support beam 300 relative to the first bending section 620; the protruding second bending section 630 may be used for overlapping between adjacent coating carriers, and the first bending section 620 is bent relative to the second bending section 630, so that the first bending section 620 can be attached to the second support beam 300, and the assembly of the spar 600 to the second support beam 300 is facilitated.

It should be noted that, in the embodiment of the present invention, the pocket plate 100 and the first connecting section 221, the second connecting section 222 and the mounting beam 230, and the spar 600 and the second supporting beam 300 are all connected by the connecting member 400, and since the connecting member 400 has gaps between the connecting member 400 and the connecting member in the axial direction and the radial direction, the coating carrier has a higher degree of freedom of expansion; moreover, because the gap value is small, if the gap between the connecting piece 400 and the connecting part in the axial direction is about 0.2mm, the stability of the connection between different parts in the coating carrier is not influenced.

In addition, the pocket board 100 is further provided with an ID block 140, and the ID block 140 is used for marking the pocket board 100, so as to facilitate recording of the pocket board 100 and tracking of subsequent processes.

The embodiment of the utility model also provides coating equipment which comprises the coating carrier and a coating device, wherein a coating cavity is arranged in the coating device, the coating cavity can be used for placing the coating carrier, coating gas is introduced into the coating cavity, and the coating gas is deposited on the surface of a silicon wafer carried on the coating carrier to realize coating of the silicon wafer.

The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the gist of the present invention. Furthermore, the embodiments of the present invention and the features of the embodiments may be combined with each other without conflict.

Claims

1. Coating film carrier, its characterized in that includes:

the second supporting beam is provided with two at least, the second supporting beam extends along the second direction, first direction with the second direction is perpendicular, each the both ends of second supporting beam respectively with two the first supporting beam is connected, a plurality of second supporting beam interval distribution, the pocket board is located adjacently between the second supporting beam, the pocket board is provided with a plurality of cuttings along the second direction interval, the second supporting beam is provided with a plurality of jacks along the second direction, the cuttings insert to in the jack, and the cuttings with the clearance has between the inner wall of jack.

2. The plating carrier of claim 1, wherein the polish rod portion protrudes from an outer surface of the threaded portion, one end of the polish rod portion abuts against the first support beam, and a length of the polish rod portion is greater than a thickness of the pocket plate.

3. The plating carrier of claim 1, wherein the center of the insertion hole and the second mounting hole along the thickness direction of the pocket plate are located in the same plane.

4. The plating carrier of claim 1, wherein the insertion holes are disposed on two sides of the second support beam between two adjacent pocket plates, and the insertion holes on the two sides are distributed in a staggered manner.

5. The carrier of any one of claims 1 to 4, wherein the first support beam comprises a transition plate and a mounting beam, the transition plate has a first connecting section and a second connecting section bent from each other, the second mounting hole is disposed in the first connecting section, the first connecting section is connected to the pocket plate, and the second connecting section is connected to the mounting beam.

6. The plating carrier of claim 5, wherein the second connection section defines a plurality of third mounting holes, the mounting beam defines a plurality of fourth mounting holes, the connecting element is inserted into the third mounting holes and the fourth mounting holes, the threaded portion is screwed to an inner wall of the fourth mounting holes, the polish rod portion is inserted into the third mounting holes and has a gap with an inner wall of the third mounting holes, the flange portion is located outside the third mounting holes, a gap is provided between an end surface of the flange portion near the second connection section and the second connection section, and an insertion direction of the connecting element to the first connection section is perpendicular to an insertion direction of the connecting element to the second connection section.

7. The plating carrier of claim 6, further comprising a plurality of positioning pins, wherein the positioning pins are distributed at intervals along the first direction, the positioning pins are inserted into the mounting beam and the second connecting section, and the positioning pins are parallel to the insertion direction of the connecting member to the second connecting section.

8. The plating carrier of any one of claims 1 to 4, further comprising a wing beam, wherein the wing beam extends along the second direction, the wing beam is connected to a side of the second support beam facing away from the pocket plate, the second support beam is provided with a fifth mounting hole, the wing beam is provided with a sixth mounting hole, the connecting member is inserted into the fifth mounting hole and the sixth mounting hole, the threaded portion is in threaded connection with an inner wall of the fifth mounting hole, the polished rod portion is inserted into the sixth mounting hole and has a gap with the inner wall of the sixth mounting hole, the flange portion is located outside the sixth mounting hole, and a gap is formed between an end face of the flange portion, which is close to the side of the wing beam, and the wing beam.

9. The plating carrier of claim 8, wherein the spar includes a first bending section and a second bending section that are bent from each other, the first bending section defines the sixth mounting hole, and the second bending section protrudes away from the second support beam relative to the first bending section.

10. Coating equipment, its characterized in that includes:

the plating carrier of any one of claims 1 to 9;