JP4232295B2

JP4232295B2 - PCB cassette

Info

Publication number: JP4232295B2
Application number: JP30508099A
Authority: JP
Inventors: 大亥桶谷; 功夫更岡; 隆晄西郷; 靖久林原
Original assignee: Starlite Co Ltd; Sharp Corp
Current assignee: Starlite Co Ltd; Sharp Corp
Priority date: 1999-10-27
Filing date: 1999-10-27
Publication date: 2009-03-04
Anticipated expiration: 2019-10-27
Also published as: JP2001127146A

Description

【０００１】
【発明の属する技術分野】
本発明は、基板用カセットに係わり、更に詳しくはディスプレイ用のパネルデバイスを多面取りするためのマザー基板若しくは大型のディスプレイ用基板を多段に収容することが可能な基板用カセットに関する。
【０００２】
【従来の技術】
従来、この種の基板用カセットにおいて、合成樹脂製の上枠体と下枠体とを、金属と合成樹脂の複合体に基板を載支する棚片を上下方向に一定間隔に突設した支持体で連結して構成する構造は一般的である。
【０００３】
前記基板は、周縁部を除く表面に各種のプロセスによってデバイスを構成する機能性膜が形成されるため、通常は裏面周縁部を支持体から突設した棚片上に載置して支持されている。ここで、基板用カセットに基板を出し入れする際に、棚片と基板とが擦れて摩耗粉等の微細なパーティクルが発生し、下段の基板上に落下する。ここで、棚片を耐摩耗性に優れるＰＥＥＫ樹脂で作製しても、棚片と基板との摩擦によってパーティクルが発生することは原理的に避けられない。そして、このパーティクルが基板の機能性膜部分に付着すると、そのセルは不良となることが多く、所定数以上のセルが不良になれば、デバイス全体が不良品となるのである。
【０００４】
従来の小型基板の場合には、中央部の撓みは小さいため、基板の周縁部を棚片で載支することが可能であり、その場合は棚片と基板とが擦れてパーティクルが発生し、下段の基板上に付着しても、その付着部分が基板の周縁部になるためデバイスが不良となる率が低い。
【０００５】
しかし、近年はディスプレイ用のパネルデバイスの大型化に伴い、基板用カセットに収容する基板の寸法も大型化してきている。例えば、縦横６５０ｍｍ×７５０ｍｍ、厚さ１．１ｍｍ又は０．７ｍｍの大型のガラス基板が使用されるようになった。この大型基板の場合は、基板の厚みも薄いので、カセット収容状態における中央部の撓みの問題は重要である。つまり、基板の撓みが大きければ、基板用カセットへの基板の出し入れが困難になるばかりでなく、機能性膜部分が過度に曲げられると、セルの構造が破壊され不良になる。更に、多数枚の基板を効率良く収納、保管、搬送するには、カセット内において基板の撓み量を最小限に抑制することが必要である。そこで、大型基板の場合には、棚片の長さを長くし、基板の周縁から十分に中央寄り下面を載支することにより、基板の撓みを許容範囲に抑制することになるが、棚片が基板に接触する部分は、基板の機能性膜の裏面側に位置するので、小型基板では大して問題とはならなかった前述のパーティクルの付着が大きな問題となる。
【０００６】
【発明が解決しようとする課題】
本発明が前述の状況に鑑み、解決しようとするところは、支持体に突設した棚片で基板を略水平に載支し、複数の基板を多段に収容可能な基板用カセットであって、棚片と基板下面との摩擦によって摩耗粉等の微細なパーティクルが発生しても、下段の基板表面に落下することを防止し、該基板から作製するデバイスの歩留りを大幅に改善することが可能な基板用カセットを提供する点にある。
【０００７】
【課題を解決するための手段】
本発明は、前述の課題解決のために、上下方向に所定間隔毎に基板を載支する棚片を突設した複数の支持体を、上枠体と下枠体間に連結して直方体状の箱型構造となした基板用カセットであって、前記棚片は、金属製の支持ピンの先端部に、基板の下面を支持する載支部と該載支部の直下に磨耗粉を受ける受皿部とを有する有機高分子材料製の先端カバーを設けたものであり、前記支持体の上下方向に一定間隔毎に前記支持ピンの基端部を埋設又は嵌入し、該支持体の内面側に棚片を突設してなる基板用カセットを構成した。
【０００８】
ここで、前記棚片を構成する支持ピンの先端部に前記先端カバーを設けるとともに、収容する基板の側縁部に対応する中間部に有機高分子材料製のスライダーを設けてなることも好ましい。
【０００９】
ここで、前記受皿部は平面視形状が円形又は四角形であり、直径又は一辺の長さが１０〜２５ｍｍの範囲に設定してなること、前記受皿部は、周囲が中央部よりも上方へ突出した形状であることが更に好ましい。
【００１０】
【発明の実施の形態】
次に本発明の実施形態を添付した図面に基づき詳細に説明する。図１は本発明に係る基板用カセットＡの全体図、図２は本発明の要部、図３は基板Ｂを収容した状態の要部を示し、図中符号１は上枠体、２は下枠体、３は支持体、４は棚片をそれぞれ示している。
【００１１】
本発明の基板用カセットＡは、外形が長方形状の前記上枠体１と下枠体２の両側部間を、複数の支持体３，…で連結して直方体形状に構成したものであり、前記支持体３には基板Ｂを載支するための棚片４，…を上下方向に一定間隔毎に内方へ向けて突設し、また前面は前記基板Ｂを出し入れするための開口部５となっており、更に上枠体１と下枠体２の後部間に単又は複数のストッパー部材６，６を配設し、基板Ｂの後方移動を規制する構造である。ここで、本実施形態では、前記上枠体１と下枠体２とは、合成樹脂製で互いに上下対称な形状であり、つまり上下反転すれば同じ形状となる同一部材としたが、上枠体１と下枠体２は別形状としても良く、例えば上枠体１に開口窓がない閉塞タイプのものでも良い。また、前記上枠体１の下面、下枠体２の上面、支持体３，…の外側面及びストッパー部材６の後側面に図示しない閉塞板を取付け、あるいは上枠体１と下枠体２とは閉塞タイプとするとともに、支持体３，…の外側面及びストッパー部材６の後側面に図示しない閉塞板を取付け、前記開口部５に開閉蓋（図示せず）を設けることによって密閉構造とすることも可能である。
【００１２】
また、前記支持体３は、補強用の金属杆をインサート成形した金属と合成樹脂との複合部材であり、両側部に位置する支持体３，…は全て同一部材である。また、前記ストッパー部材６は、その前面側に一定間隔で突設した棚片７，…の高さを、両側部の支持体３，…の棚片４，…の高さより低く、例えば４ｍｍ低く設定したものである。当該ストッパー部材６の棚片７は、基板Ｂを載支する機能よりも、基板Ｂの過度の撓み及び基板の振動、振動による擦れを制限することが主な機能である。
【００１３】
ここで、基板用カセットＡに収容する基板Ｂは、一般的には厚みが１．１ｍｍ又は０．７ｍｍのガラス基板であり、寸法は各種のものが存在するが、液晶表示パネルを始めとして各種の表示用デバイスの寸法は大型化の傾向にあり、更にマザー基板から複数の表示用デバイスを製造する多面取りの場合には、例えば横幅×縦幅の寸法が５００ｍｍ×６００ｍｍ、５５０ｍｍ×６５０ｍｍ、６００ｍｍ×７２０ｍｍ、６５０ｍｍ×７５０ｍｍのものが主流となってきている。
【００１４】
そこで、本発明に係る基板用カセットＡは、大型で薄い基板Ｂをその撓みを最小限に抑制して載支できるように、前記棚片４の長さを長くしている。本実施形態では、前記棚片４は金属ピンで作製し、前記支持体３に圧入する構造あるいは嵌入して適宜な抜止め手段にて固定する構造となっているので、棚片４の長さは支持対象とする前記基板Ｂの寸法に応じて任意に設定することが可能であり、支持体３を共通として各種の基板寸法に対応できるのである。また、前記棚片４，…は、支持体３にインサート成形にて一体的に突設しても良い。
【００１５】
本発明の特徴は、図２及び図３に示している。つまり、前記支持体３に突設した棚片４は、金属製の支持ピン８の先端部に有機高分子材料製の先端カバー９を設け、該先端カバー９に基板Ｂの下面を支持する載支部９Ａと該載支部９Ａの直下に磨耗粉を受ける受皿部９Ｂとを有するものである。ここで、有機高分子材料としては、合成樹脂、合成ゴム、エラストマーがあり、用途、目的に応じて最適な素材を選択すれば良いが、本実施形態では好ましい素材として耐摩耗性に優れた合成樹脂を用いている。そして、前記支持ピン８の基端部を前記支持体３に埋設又は嵌入して、複数の棚片４，…を支持体３の上下方向に一定間隔毎に突設するのである。また、前記棚片４を構成する支持ピン８の長手方向中間部には、収容する基板Ｂの側縁部に対応する位置に有機高分子材料製のスライダー１０を設けている。本実施形態では、前記支持ピン８をＳＵＳ３０４で作製し、前記先端カバー９とスライダー１０とは、耐摩耗性に優れたＰＥＥＫ樹脂で作製している。尚、前記先端カバー９とスライダー１０とは一体とし、支持ピン８の略全長を外被し、前記載支部９Ａとスライダー１０を設ける部分を他の部分よりも上方へ突出させたものでも良い。ここで、前記支持ピン８の略全長を外被する場合、有機高分子材料でインサート成形する。また、前記先端カバー９及びスライダー１０は、前記基板Ｂを載支する部分となるので、導電剤を配合して導電性を付与することも好ましい。
【００１６】
ここで、前記受皿部９Ｂは、平面視形状が円形又は四角形であり、直径又は一辺の長さが１０〜２５ｍｍの範囲に設定してなることが好ましく、また平面視形状において前記載支部９Ａの垂直投影形状より大きく設定することが必要である。当該基板用カセットＡへ基板Ｂを出し入れする際、または搬送中の振動によって、前記載支部９Ａと基板Ｂの裏面との擦れによって発生した微細な摩耗粉等のパーティクルが下方に落下し、そのパーティクルを受皿部９Ｂで効果的に受け止めるためには、前記受皿部９Ｂの直径又は一辺の長さが１０ｍｍより小さいと十分ではなく、また２５ｍｍより大きいと効果が飽和するとともに部品の寸法が大きくなり過ぎて好ましくないのである。あるいは、前記受皿部９Ｂの面積は、基板Ｂの下面に接触する前記載支部９Ａの接触部分の垂直投影面積の２〜２０倍であることが好ましい。また、前記受皿部９Ｂは、周囲が中央部よりも上方へ突出した形状であることが、載支部９Ａと基板Ｂとの接触部分で発生したパーティクルを中央部の凹部に安定に堆積させることができるので更に好ましい。
【００１７】
次に、本発明に係る基板用カセットＡの各部構造を更に詳しく具体的に説明する。前記上枠体１及び下枠体２は、中心線に対して左右対称な形状で、外周枠１１の内部に縦横の格子状補強桟１２を一体形成したものであり、該外周枠１１の前記支持体３を連結する部分には若干広い面積の取付面部１３，…を形成している。前記取付面部１３を設けた位置は、両側部の前後端部とその中間に一定間隔で二ヶ所の合計四ヶ所である。
【００１８】
前記支持体３は、図２及び図３に示すように、長手方向に沿った両側部にＳＵＳ製シャフト等の金属杆１４，１４を、導電剤を配合して導電性を付与した有機高分子材料中にインサート成形したものであり、上下端には前記取付面部１３に面接合する幅広の支持面部１５，１５を形成している。更に、図３に示すように、前記金属杆１４の端部には直接タッピングによって軸方向へ向いた螺孔１６を形成するとともに、支持面部１５の中央端部にビット等の埋込ナット１７を熱圧入している。尚、この埋込ナット１７は、インサート成形、ヘリサート加工等によっても埋設することができる。そして、前記支持体３の支持面部１５を上枠体１及び下枠体２の取付面部１３，１３に接合した状態、あるいは取付面部１３に形成した取付孔１８，…に支持面部１５から突出させた金属杆１４，１４と埋込ナット１７の先端を嵌合した状態で、反対側から取付孔１８，…に挿入したボルト１９，…を前記金属杆１４，１４の螺孔１６及び埋込ナット１７に螺合して、上枠体１と下枠体２とを連結する。また、前記ストッパー部材６は、前記支持体３と同様に金属杆をインサート成形した耐磨耗性樹脂製で作製し、上枠体１と下枠体２の外周枠１１の後部間にボルト締めしている。
【００１９】
また、前記支持体３の内面側には一定間隔毎に垂直面２０，…を形成するとともに、上下の垂直面２０，２０の間には下方の垂直面２０に連続し、上方の垂直面２０に対して段部を設けた傾斜面２１を形成している。即ち、前記傾斜面２１は、下端が垂直面２０と同じ肉厚で上方になるに従って直線的に肉厚を減少させた形状である。そして、前記垂直面２０の幅方向中心には、前記棚片４の挿入孔２２を水平に形成している。従って、前記各垂直面２０，…形成した挿入孔２２，…は、前記支持体３の上下方向略全長に渡って一定間隔となっている。尚、前記垂直面２０は必ずしも必要ではなく、前記挿入孔２２を傾斜面２１に形成しても良いのである。
【００２０】
前記棚片４は、前記支持ピン８の基端部を前記支持体３の内面側から挿入孔２２に圧入して取付け又は支持ピン８を支持体３にインサート成形して突設するのである。本実施形態では、前記棚片４，…のピッチは２５ｍｍ、支持ピン８の直径は４ｍｍ、先端カバー９の載支部９Ａ及びスライダー１０の直径は７ｍｍ、受皿部９Ｂの直径は１６ｍｍに設定しているので、上下の棚片４，４の間隔は正味１８ｍｍ存在する。この上下の棚片４，４の間隔は、上段又は下段の棚片４，…に基板Ｂを載支し、該基板Ｂの中央部が撓んだ状態でも、ロボットアームによる他の基板Ｂの出し入れに全く支障がないものである。
【００２１】
ここで、前記支持体３の内面側から突出する前記棚片４の長さは、前記支持ピン８の長さで決まるが、この支持ピン８の長さは剛性が高く且つ真直度の良いＳＵＳ製としたことにより適宜に設定することが可能である。即ち、共通の支持体３を用いて、棚片４の突出長さが異なるものを作製することが容易となり、大幅なコスト低減が図れるのである。また、前記支持体３の傾斜面２１は、基板Ｂの端縁を当止する部分になるが、前述のように棚片４を支持体３の成形後に圧入すれば、この支持体３の成形金型が非常に簡単な構造となり、また金型を割る位置を支持体３の側部になるようにすれば、前記傾斜面２１にパーティングラインが生じないので好ましい。また、前記挿入孔２２は、金型の抜き方向に平行な方向になるので、支持体３の長手方向に対して正確に直交させることが可能であり、また仮に挿入孔２２に金型の抜き勾配があっても支持ピン８を圧入すれば、該支持ピン８を支持体３に対して正確に直交状態で突設することが可能である。
【００２２】
尚、前記挿入孔２２は、ボール盤等の穿孔による後加工で形成することも可能であり、更には前述のように支持ピン８を支持体３に対してインサート成形することも可能である。また、図４に示すように、前記挿入孔２２を、内側の大径孔２２Ａと外側の小径孔２２Ｂとで段部を設けて形成したものとなすとともに、前記支持ピン８の基部を挿入孔２２の形状に応じた形状となし、該挿入孔２２に嵌挿した支持ピン８の貫通部にプッシュナット２３等を装着して抜止めして取付けることも可能である。何れにしても、前記支持ピン８を支持体３の側面に突設した状態では該支持ピンは完全に回り止めされている。
【００２３】
本発明に係る基板用カセットＡに基板Ｂを収容する場合、ロボットアームによって該基板Ｂの幅方向中間部で基板Ｂの撓みが最も少ない位置を支持し、その状態で前記開口部５から挿入し、最前列の棚片４，４の上方を通過させる。しかし、それでも基板Ｂの両端部はその自重によって下方へ撓むが、その際、左右の支持体３，３の対応する棚片４，４に設けたスライダー１０，１０によって基板Ｂの端部が支持ピン８に直接接触することを防止できるので、基板用カセットＡ内にスムーズに挿入することができる。そして、基板Ｂを所定位置まで押し込んだ後、ゆっくりと基板Ｂを下ろして左右の棚片４，…に基板Ｂを載支すると、図３に示すように、基板Ｂの中央部はその自重によって下方へ撓み、両端部は逆に若干上方へ湾曲して持ち上がり、スライダー１０に対して若干浮いた状態となる。左右の棚片４，…に載支された基板Ｂは、後方への移動はストッパー部材６，６によって規制され、前方への移動は前記開口部５の両側に取付けたストッパー部材（図示せず）で規制されるのである。そして、基板用カセットＡに対する基板Ｂの出し入れの際、又は搬送中に基板Ｂの下面と棚片４の載支部９Ａとが擦れてパーティクルが発生した場合でも、そのパーティクルは下方の棚片４の受皿部９Ｂで捕捉されるので、下段の基板Ｂの機能性膜上に落下することがないのである。
【００２４】
【発明の効果】
以上にしてなる本発明の基板用カセットによれば、以下に示すような顕著な効果を奏するものである。
【００２５】
請求項１によれば、棚片と基板下面との摩擦によって摩耗粉等の微細なパーティクルが発生しても、受皿部で受けて下段の基板表面に落下することを防止するので、該基板から作製するデバイスの歩留りを大幅に改善することができる。
【００２６】
請求項２によれば、基板用カセットに対して基板を出し入れする際に、棚片に設けたスライダーによって基板の端部が支持ピンに直接接触して、破損することを防止できる。
【００２７】
請求項３によれば、基板と棚片の載支部とが擦れて発生したパーティクルを受皿部で確実に捕捉することができる。
【００２８】
請求項４によれば、受皿部の中央部の凹部でパーティクルを確実に受けることができる。
【図面の簡単な説明】
【図１】本発明に係る基板用カセットの全体簡略斜視図である。
【図２】本発明の要部である載支部と受皿部とを備えた棚片を示す部分分解斜視図である。
【図３】基板を収容した状態の部分縦断正面図である。
【図４】支持体に棚片を突設した状態の部分断面図である。
【符号の説明】
Ａ基板用カセットＢ基板
１上枠体２下枠体
３支持体４棚片
５開口部６ストッパー部材
７棚片８支持ピン
９先端カバー９Ａ載支部
９Ｂ受皿部１０スライダー
１１外周枠１２補強桟
１３取付面部１４金属杆
１５支持面部１６螺孔
１７埋込ナット１８取付孔
１９ボルト２０垂直面
２１傾斜面２２挿入孔
２３プッシュナット[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a substrate cassette, and more particularly, to a substrate cassette capable of accommodating a mother substrate or a large display substrate in multiple stages for multiple display panel devices.
[0002]
[Prior art]
Conventionally, in this type of substrate cassette, the upper and lower frame bodies made of synthetic resin are supported by protruding vertically spaced shelf pieces for mounting the substrate on a composite of metal and synthetic resin. A structure formed by connecting with a body is common.
[0003]
Since the functional film constituting the device is formed on the surface excluding the peripheral portion by various processes, the substrate is usually supported by placing the back peripheral portion on a shelf piece protruding from the support. . Here, when the substrate is taken in and out of the substrate cassette, the shelf pieces and the substrate are rubbed to generate fine particles such as wear powder and fall on the lower substrate. Here, even if the shelf piece is made of PEEK resin having excellent wear resistance, particles are inevitably generated due to friction between the shelf piece and the substrate. When these particles adhere to the functional film portion of the substrate, the cell often becomes defective. When a predetermined number of cells become defective, the entire device becomes a defective product.
[0004]
In the case of a conventional small substrate, since the deflection of the central portion is small, it is possible to support the peripheral portion of the substrate with a shelf piece, in which case the shelf piece and the substrate are rubbed to generate particles, Even if it adheres to the lower substrate, the attached portion becomes the peripheral portion of the substrate, so that the rate of device failure is low.
[0005]
However, in recent years, with the increase in the size of panel devices for displays, the size of the substrate accommodated in the substrate cassette has also increased. For example, a large glass substrate having a length and width of 650 mm × 750 mm and a thickness of 1.1 mm or 0.7 mm has come to be used. In the case of this large substrate, since the thickness of the substrate is also thin, the problem of bending of the central portion in the cassette accommodation state is important. That is, if the substrate bends greatly, it is difficult not only to put the substrate in and out of the substrate cassette, but if the functional film portion is bent excessively, the structure of the cell is destroyed and becomes defective. Furthermore, in order to efficiently store, store, and transport a large number of substrates, it is necessary to minimize the amount of substrate bending in the cassette. Therefore, in the case of a large substrate, the length of the shelf piece is increased and the lower surface near the center is sufficiently supported from the periphery of the substrate, so that the bending of the substrate is suppressed to an allowable range. Since the portion in contact with the substrate is located on the back side of the functional film of the substrate, the adhesion of the above-mentioned particles, which is not a problem with a small substrate, becomes a big problem.
[0006]
[Problems to be solved by the invention]
In view of the above-mentioned situation, the present invention intends to solve a substrate cassette in which a substrate is mounted substantially horizontally with a shelf piece protruding from a support, and a plurality of substrates can be accommodated in multiple stages, Even if fine particles such as wear powder are generated due to friction between the shelf and the lower surface of the substrate, it can be prevented from falling on the lower substrate surface, and the yield of devices fabricated from the substrate can be greatly improved. It is in providing a cassette for a substrate.
[0007]
[Means for Solving the Problems]
In order to solve the above-mentioned problems, the present invention connects a plurality of support bodies projecting shelf pieces for supporting a substrate at a predetermined interval in the vertical direction between the upper frame body and the lower frame body to form a rectangular parallelepiped shape. A cassette for a substrate having a box-type structure, wherein the shelf piece has a support portion for supporting the lower surface of the substrate at a tip end portion of a metal support pin, and a tray portion for receiving the wear powder immediately below the support portion. The base end of the support pin is embedded or fitted at regular intervals in the vertical direction of the support, and a shelf is provided on the inner surface side of the support. A cassette for a substrate formed by protruding a piece was constructed.
[0008]
Here, it is also preferable that the tip cover is provided at the tip of the support pin constituting the shelf piece, and a slider made of an organic polymer material is provided at an intermediate portion corresponding to the side edge of the substrate to be accommodated.
[0009]
Here, the saucer portion has a circular or quadrangular shape in plan view, and the diameter or length of one side is set in a range of 10 to 25 mm. The saucer portion protrudes upward from the center portion. More preferably, the shape is the same.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Next, embodiments of the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a general view of a substrate cassette A according to the present invention, FIG. 2 is a main portion of the present invention, FIG. 3 is a main portion in a state where a substrate B is accommodated. The lower frame 3, 3 is a support, and 4 is a shelf piece.
[0011]
The substrate cassette A of the present invention is configured in a rectangular parallelepiped shape by connecting the both sides of the upper frame body 1 and the lower frame body 2 having a rectangular outer shape with a plurality of support bodies 3,. The support 3 is provided with shelf pieces 4,... For supporting the substrate B in the up-down direction inwardly at regular intervals, and the front surface has an opening 5 for taking in and out the substrate B. In addition, a single or a plurality of stopper members 6 and 6 are disposed between the rear portions of the upper frame body 1 and the lower frame body 2 to restrict the backward movement of the substrate B. Here, in the present embodiment, the upper frame body 1 and the lower frame body 2 are made of synthetic resin and are vertically symmetrical with each other. The body 1 and the lower frame 2 may have different shapes. For example, the upper frame 1 may be a closed type without an opening window. Further, a closing plate (not shown) is attached to the lower surface of the upper frame 1, the upper surface of the lower frame 2, the outer surface of the support 3, and the rear surface of the stopper member 6, or the upper frame 1 and the lower frame 2. Is a closed type, and a closed plate (not shown) is attached to the outer surface of the support 3 and the rear side surface of the stopper member 6, and an opening / closing lid (not shown) is provided in the opening 5. It is also possible to do.
[0012]
Further, the support 3 is a composite member of a metal obtained by insert-molding a reinforcing metal rod and a synthetic resin, and the supports 3,... Located on both sides are the same member. In addition, the stopper member 6 has a height of the shelf pieces 7 projecting at regular intervals on the front side thereof is lower than the height of the shelf pieces 4 of the support bodies 3 on both sides, for example, 4 mm lower. It is set. The shelf piece 7 of the stopper member 6 has a main function of limiting excessive bending of the substrate B, vibration of the substrate, and rubbing due to vibration rather than a function of supporting the substrate B.
[0013]
Here, the substrate B accommodated in the substrate cassette A is generally a glass substrate having a thickness of 1.1 mm or 0.7 mm, and there are various sizes, but various types including a liquid crystal display panel. In the case of multi-chamfer manufacturing of a plurality of display devices from a mother substrate, for example, the dimensions of the display device are 500 mm × 600 mm, 550 mm × 650 mm, 600 mm. Those of × 720 mm and 650 mm × 750 mm have become mainstream.
[0014]
Therefore, in the substrate cassette A according to the present invention, the length of the shelf piece 4 is increased so that a large and thin substrate B can be supported while suppressing its bending to a minimum. In the present embodiment, the shelf piece 4 is made of a metal pin, and has a structure that is press-fitted into the support 3 or a structure that is fitted and fixed by appropriate retaining means. Can be arbitrarily set according to the size of the substrate B to be supported, and the support 3 can be used in common to cope with various substrate dimensions. Further, the shelf pieces 4,... May project integrally with the support 3 by insert molding.
[0015]
The features of the present invention are illustrated in FIGS. That is, the shelf piece 4 protruding from the support 3 is provided with a tip cover 9 made of an organic polymer material at the tip of a metal support pin 8, and the tip cover 9 supports the lower surface of the substrate B. It has a support portion 9A and a tray portion 9B that receives wear powder directly under the support portion 9A. Here, as the organic polymer material, there are synthetic resin, synthetic rubber, and elastomer, and an optimal material may be selected according to the use and purpose. However, in this embodiment, a synthetic material having excellent wear resistance is preferable. Resin is used. And the base end part of the said support pin 8 is embed | buried or inserted in the said support body 3, and several shelf pieces 4, ... are protrudingly provided in the up-down direction of the support body 3 for every fixed interval. Further, a slider 10 made of an organic polymer material is provided at a position corresponding to the side edge of the substrate B to be accommodated at the longitudinal intermediate portion of the support pin 8 constituting the shelf piece 4. In the present embodiment, the support pins 8 are made of SUS304, and the tip cover 9 and the slider 10 are made of PEEK resin having excellent wear resistance. The tip cover 9 and the slider 10 may be integrated with each other, cover the substantially entire length of the support pin 8, and project the portion provided with the supporting portion 9A and the slider 10 above the other portions. Here, when covering the substantially entire length of the support pin 8, insert molding is performed with an organic polymer material. Moreover, since the said front end cover 9 and the slider 10 become a part which supports the said board | substrate B, it is also preferable to mix | blend a electrically conductive agent and to provide electroconductivity.
[0016]
Here, it is preferable that the tray 9B has a circular or quadrangular shape in plan view, and a diameter or a length of one side is preferably set in a range of 10 to 25 mm. It is necessary to set larger than the vertical projection shape. Particles such as fine abrasion powder generated by rubbing between the support portion 9A and the back surface of the substrate B fall down when the substrate B is inserted into and removed from the substrate cassette A or due to vibration during conveyance. Is effectively not received if the diameter or the length of one side is smaller than 10 mm, and if it is larger than 25 mm, the effect is saturated and the dimensions of the parts become too large. It is not preferable. Or it is preferable that the area of the said saucer part 9B is 2-20 times the vertical projection area of the contact part of 9 A of above-mentioned support parts which contact the lower surface of the board | substrate B. As shown in FIG. Further, the tray 9B has a shape in which the periphery protrudes upward from the central portion, so that particles generated at the contact portion between the supporting portion 9A and the substrate B can be stably deposited in the concave portion of the central portion. It is more preferable because it is possible.
[0017]
Next, the structure of each part of the substrate cassette A according to the present invention will be described in more detail. The upper frame body 1 and the lower frame body 2 are symmetrical with respect to the center line, and are formed by integrally forming vertical and horizontal grid-like reinforcing bars 12 inside the outer peripheral frame 11. A part having a slightly larger area is formed in a portion connecting the support 3. The mounting surface portion 13 is provided at a total of four positions, two at regular intervals between the front and rear end portions on both sides and the middle thereof.
[0018]
As shown in FIGS. 2 and 3, the support 3 is an organic polymer provided with conductivity by adding metal rods 14, 14 such as SUS shafts on both sides along the longitudinal direction and a conductive agent. It is insert-molded in the material, and wide support surface portions 15 and 15 are formed on the upper and lower ends to be joined to the mounting surface portion 13. Further, as shown in FIG. 3, a screw hole 16 directed in the axial direction is formed by direct tapping at the end of the metal rod 14, and an embedded nut 17 such as a bit is provided at the center end of the support surface portion 15. Hot-pressed. The embedded nut 17 can also be embedded by insert molding, Helisert processing, or the like. Then, the support surface portion 15 of the support body 3 is protruded from the support surface portion 15 in a state where the support surface portion 15 is joined to the attachment surface portions 13 and 13 of the upper frame body 1 and the lower frame body 2 or in the mounting holes 18 formed in the attachment surface portion 13. With the metal rods 14 and 14 and the tips of the embedded nuts 17 fitted, bolts 19 inserted into the mounting holes 18 from the opposite side are screwed into the screw holes 16 and the embedded nuts of the metal rods 14 and 14, respectively. 17, the upper frame body 1 and the lower frame body 2 are connected. The stopper member 6 is made of a wear-resistant resin in which a metal rod is insert-molded in the same manner as the support 3, and is bolted between the rear portions of the outer frame 11 of the upper frame 1 and the lower frame 2. is doing.
[0019]
Further, vertical surfaces 20,... Are formed at regular intervals on the inner surface side of the support 3, and the lower vertical surface 20 is continuous between the upper and lower vertical surfaces 20, 20, and the upper vertical surface 20 is formed. An inclined surface 21 having a stepped portion is formed. That is, the inclined surface 21 has a shape in which the lower end has the same thickness as the vertical surface 20 and linearly decreases in thickness as it goes upward. And the insertion hole 22 of the said shelf piece 4 is formed in the width direction center of the said vertical surface 20 horizontally. Therefore, the insertion holes 22 formed in the vertical surfaces 20 are formed at regular intervals over substantially the entire length of the support 3 in the vertical direction. The vertical surface 20 is not always necessary, and the insertion hole 22 may be formed in the inclined surface 21.
[0020]
The shelf piece 4 is mounted by press-fitting the base end portion of the support pin 8 into the insertion hole 22 from the inner surface side of the support body 3 or insert-molding the support pin 8 to the support body 3 and projecting. In this embodiment, the pitch of the shelf pieces 4,... Is set to 25 mm, the diameter of the support pins 8 is set to 4 mm, the diameter of the support portion 9A and the slider 10 of the tip cover 9 is set to 7 mm, and the diameter of the tray portion 9B is set to 16 mm. Therefore, there is a net distance of 18 mm between the upper and lower shelf pieces 4 and 4. The space between the upper and lower shelf pieces 4 and 4 is such that the substrate B is placed on the upper or lower shelf pieces 4 and so on, and even if the central portion of the substrate B is bent, the other arms B are separated by the robot arm. There is no problem in taking in and out.
[0021]
Here, the length of the shelf piece 4 protruding from the inner surface side of the support 3 is determined by the length of the support pin 8, and the length of the support pin 8 is SUS having high rigidity and good straightness. It is possible to set appropriately by having made it. In other words, it becomes easy to produce the shelf pieces 4 having different projecting lengths using the common support 3, and the cost can be greatly reduced. In addition, the inclined surface 21 of the support 3 serves as a portion for stopping the edge of the substrate B. If the shelf piece 4 is press-fitted after the support 3 is formed as described above, the support 3 is formed. It is preferable that the mold has a very simple structure and that the part where the mold is to be broken is located on the side of the support 3 because no parting line is formed on the inclined surface 21. Further, since the insertion hole 22 is parallel to the mold drawing direction, the insertion hole 22 can be accurately orthogonal to the longitudinal direction of the support 3. Even if there is a gradient, if the support pin 8 is press-fitted, it is possible to project the support pin 8 in a state orthogonal to the support 3 accurately.
[0022]
The insertion hole 22 can be formed by post-processing by drilling a drilling machine or the like, and the support pin 8 can be insert-molded with respect to the support 3 as described above. Further, as shown in FIG. 4, the insertion hole 22 is formed by providing a step portion with an inner large diameter hole 22A and an outer small diameter hole 22B, and the base of the support pin 8 is inserted into the insertion hole. It is also possible to have a shape corresponding to the shape of 22 and attach the push nut 23 or the like to the through portion of the support pin 8 fitted in the insertion hole 22 so as to prevent it from being attached. In any case, in a state where the support pin 8 protrudes from the side surface of the support body 3, the support pin is completely prevented from rotating.
[0023]
When the substrate B is accommodated in the substrate cassette A according to the present invention, the robot arm supports the position where the bending of the substrate B is the least at the intermediate portion in the width direction of the substrate B, and is inserted through the opening 5 in that state. Then, it passes over the shelf pieces 4 and 4 in the front row. However, the both ends of the substrate B still bend downward due to its own weight. At that time, the end portions of the substrate B are moved by the sliders 10 and 10 provided on the corresponding shelf pieces 4 and 4 of the left and right supports 3 and 3. Since direct contact with the support pins 8 can be prevented, the substrate can be smoothly inserted into the substrate cassette A. Then, after the substrate B is pushed to a predetermined position, when the substrate B is slowly lowered and placed on the left and right shelf pieces 4,..., As shown in FIG. It bends downward, and both end portions are bent upward slightly and conversely lifted up and slightly lifted with respect to the slider 10. The substrate B mounted on the left and right shelf pieces 4,... Is restricted from moving backward by the stopper members 6, 6, and the forward movement is restricted by stopper members (not shown) attached to both sides of the opening 5. ). Even when the substrate B is inserted into or removed from the substrate cassette A or during transportation, the lower surface of the substrate B and the mounting portion 9A of the shelf piece 4 rub against each other to generate particles. Since it is captured by the tray portion 9B, it does not fall on the functional film of the lower substrate B.
[0024]
【The invention's effect】
According to the substrate cassette of the present invention as described above, the following remarkable effects can be obtained.
[0025]
According to claim 1, even if fine particles such as wear powder are generated due to friction between the shelf piece and the lower surface of the substrate, it is prevented from being received by the tray portion and falling to the lower substrate surface. The yield of the device to be manufactured can be greatly improved.
[0026]
According to the second aspect, when the substrate is taken in and out of the substrate cassette, it is possible to prevent the end portion of the substrate from being in direct contact with the support pins by the slider provided on the shelf piece and being damaged.
[0027]
According to the third aspect, particles generated by rubbing between the substrate and the support portion of the shelf piece can be reliably captured by the tray portion.
[0028]
According to the fourth aspect, particles can be reliably received by the concave portion at the center of the tray portion.
[Brief description of the drawings]
FIG. 1 is an overall simplified perspective view of a substrate cassette according to the present invention.
FIG. 2 is a partially exploded perspective view showing a shelf piece provided with a mounting portion and a saucer portion, which are the main parts of the present invention.
FIG. 3 is a partial longitudinal sectional front view of a state in which a substrate is accommodated.
FIG. 4 is a partial cross-sectional view showing a state in which a shelf piece projects from the support.
[Explanation of symbols]
A substrate cassette B substrate 1 upper frame body 2 lower frame body 3 support body 4 shelf piece 5 opening 6 stopper member 7 shelf piece 8 support pin 9 tip cover 9A mounting portion 9B saucer portion 10 slider 11 outer frame 12 reinforcement bar 13 Mounting surface portion 14 Metal bowl 15 Support surface portion 16 Screw hole 17 Embedded nut 18 Mounting hole 19 Bolt 20 Vertical surface 21 Inclined surface 22 Insertion hole 23 Push nut

Claims

A substrate cassette having a rectangular parallelepiped box-shaped structure in which a plurality of support members projecting shelf pieces for supporting substrates at predetermined intervals in the vertical direction are connected between an upper frame body and a lower frame body. The shelf piece has a tip cover made of an organic polymer material having a support part for supporting the lower surface of the substrate and a receiving part for receiving the abrasion powder immediately below the support part at the tip part of the metal support pin. It is provided, wherein the base end portion of the support pin is embedded or fitted at regular intervals in the vertical direction of the support, and a shelf piece projects from the inner surface side of the support. PCB cassette.

2. The substrate for a substrate according to claim 1, wherein the tip cover is provided at a tip portion of a support pin constituting the shelf piece, and a slider made of an organic polymer material is provided at an intermediate portion corresponding to a side edge portion of the substrate to be accommodated. cassette.

The substrate cassette according to claim 1 or 2, wherein the tray portion has a circular shape or a square shape in plan view, and a diameter or a length of one side is set in a range of 10 to 25 mm.

The cassette for a substrate according to any one of claims 1 to 3, wherein the tray portion has a shape whose periphery protrudes upward from the center portion.