JP4681029B2 - Single substrate transfer device and hand used therefor - Google Patents

Description

The present invention relates to a single-wafer substrate transfer device, and in particular, a single-wafer substrate such as a large glass substrate is made to have a small amount of bending due to its own weight, and the single-wafer substrate is deformed or damaged due to bending stress. The present invention relates to a single substrate transfer device that can be prevented and a hand used therefor.

Glass substrates such as liquid crystal are stored in a storage device such as a dedicated glass substrate storage cassette so as to be stored separately so as not to contact each other.
This glass substrate storage cassette is used, for example, when a liquid crystal glass substrate is transported or temporarily stored between manufacturing apparatuses in a large liquid crystal glass substrate production line.

As shown in FIG. 9, the glass substrate storage cassette has a plurality of support portions 3a ′ and 3b ′ arranged in parallel in opposite directions from both side walls 2a and 2b of the box-shaped cassette main body 1, and the cassette main body. The glass substrate 5 is put in and out by raising and lowering the hand 4 ′ of the transfer machine inserted into the space between the support portions 3a ′ and 3b ′.
The cassette body 1 requires a wide space at the center in the width direction of the cassette body 1 in order to allow the bifurcated fork-shaped hand 4 'to move up and down, so that the support portions 3a' and 3b 'have left and right side walls 2a. 2b so as to protrude relatively short from 2b.

  In this case, the glass substrate 5 accommodated in the cassette body 1 is supported by and supported by the support portions 3a ′ and 3b ′ extending from the left and right side walls 2a and 2b of the cassette body 1, respectively. Consideration is made to reduce the deflection due to its own weight.

  In addition, the hand 4 ′ of the transfer machine used for loading and unloading the glass substrate 5 into and from the cassette body 1 is designed so that the bending of the glass substrate 2 does not increase when the glass substrate 5 is lifted by the hand 4 ′. A width direction dimension L of 4 ′ is determined.

However, in recent years, as the glass substrate becomes larger and thinner, even the glass substrate having high rigidity becomes excessively bent, so that the length of the conventional supporting portion is limited to be short. In a glass substrate storage cassette or a bifurcated fork-shaped hand, the glass substrate is subject to a large amount of bending due to its own weight. As a result of the bending, the glass substrate itself is subject to a large bending stress. There was a problem.
That is, as shown in FIG. 10, when the size of the glass substrate 5 becomes larger than that in the case of FIG. 9, the glass substrate 5 accommodated in the cassette body 1 is subjected to a large bend due to its own weight. In addition, if the support portions 3 a ′ and 3 b ′ are to be extended to the center portion in the width direction of the glass substrate 5, the width direction dimension L of the hand 4 ′ must be reduced.
However, when the width direction dimension L of the hand 4 ′ is reduced, the bending of the glass substrate 5 placed on the hand 4 ′ becomes a state indicated by a dotted line in FIG. , Easy to deform or break.

In view of the problems of the conventional single-wafer substrate transfer apparatus, the present invention reduces the amount of bending of a single-wafer substrate such as a large glass substrate due to its own weight, and the single-wafer caused by bending stress. It is an object of the present invention to provide a single substrate transfer device that can prevent deformation and breakage of the substrate and a hand used therefor.

In order to achieve the above object, the single-wafer substrate transfer device according to the first aspect of the present invention extends the supporting portions in opposite directions from both sides of the storage device, while the transfer machine hand inserted into the storage device is In a single-wafer substrate transfer apparatus for moving a single-wafer substrate by moving it up and down between support portions, the support portion is composed of a plurality of parallel support members formed with a gap between opposing support portions. to together, the hand, at the vertical position of the hand, and the transverse hand supporting part of the plurality of the width direction can pass between gap of the support member for the parallel, located between said opposed support members, said horizontal hand Protruding buffer members that directly support the single-wafer substrate on the upper surface of the support portion, each of which includes a pair of longitudinal hand support portions in the length direction that are arranged side by side with a gap in the width direction connecting the support portions. Is provided.

  In order to achieve the same object, the single-wafer substrate transfer apparatus according to the second aspect of the present invention has a support unit extending from both sides of the storage device in opposite directions, while a transfer machine hand inserted into the storage device. In a single-wafer substrate transfer apparatus for moving a single-wafer substrate by moving it up and down between the support portions, an auxiliary support portion is juxtaposed at an intermediate position of the support portion, and the hand is moved up and down. A plurality of widthwise horizontal hand support portions positioned between the parallel support portions, and a pair of vertical hand support portions arranged in parallel with a gap in the width direction connecting the horizontal hand support portions, respectively. And a protruding buffer member that directly supports the single-wafer substrate is provided on the upper surface of the support portion.

In order to achieve the same object, the single-wafer substrate transfer device according to the third aspect of the present invention has support units extending in opposite directions from both sides of the storage device, while the transfer machine hand inserted into the storage device. In the single-wafer substrate transfer apparatus for taking in and out the single-wafer substrate by moving up and down between the support portions, an auxiliary support portion is juxtaposed at an intermediate position of the support portion, and the hand is moved in the width direction. It is composed of a pair of wide vertical hand support portions each having a width direction dimension of 20% or more of the width dimension of the single-wafer substrates arranged in parallel with a gap, and the single-wafer substrates are directly supported on the upper surface of the support portion. Protruding buffer members are provided.

In this case, it and this is juxtaposed auxiliary longitudinal hand supporting portion between the longitudinal hand supporting part of the pair is.

  Furthermore, in order to achieve the same object, a single-wafer substrate transfer hand according to the fourth aspect of the present invention is a single-wafer substrate transfer hand used for transferring a single-wafer substrate, wherein the hand is provided with a gap. A plurality of lateral hand support portions in the width direction arranged side by side so as to form the same plane; and a plurality of longitudinal hand support portions in the length direction connecting the lateral hand support portions. Each of the hand support portions extends in the opposite direction, and a protruding buffer member that directly supports the single-wafer substrate is provided on the upper surface of the support portion.

According to the single substrate transfer device of the present invention, the support of the single substrate by the support portion of the storage device or the hand support portion of the transfer device can be expanded to a wide range of the single substrate. The amount of bending of the single-wafer substrate can be reduced, and deformation and breakage of the single-wafer substrate due to bending stress can be prevented, thereby obtaining a high-quality single-wafer substrate processed product. it can.
Furthermore, by providing a buffer member that directly supports the single-wafer substrate on the upper surface of the support portion, the single-wafer substrate can be transferred smoothly.

  In particular, since the hand of the transfer machine is composed of a pair of vertical hand support portions arranged in parallel with a gap in the width direction, the rigidity of the hand can be increased even if the thickness of the hand is reduced. It is possible to reduce the space for inserting the hand and increase the number of sheets stored per unit capacity of the storage device.

  In addition, a plurality of glass substrates can be accommodated in the cassette by forming the support portion in the same shape and arranging a plurality of upper and lower steps inside the accommodation device.

  Further, by arranging the auxiliary vertical hand support part and the auxiliary support part in parallel, it becomes possible to handle a larger-sized sheet substrate.

DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of a single-wafer substrate transfer apparatus and a hand used therefor according to the present invention will be described based on an example in which a glass substrate is a transfer object.

1 to 2 show a first reference example of a single substrate transfer apparatus and a hand used therefor.
This single-wafer substrate transfer device is used in combination with another transfer device, and is arranged in parallel in a facing direction from the left and right side walls 2a, 2b of a box-shaped cassette body 1 as a storage device. The support members 3a and 3b are extended, and the glass substrate 5 is taken in and out by raising and lowering the hand 4 of the transfer machine 40 inserted into the cassette body 1 between the support members 3a and 3b. Yes.
In this reference example, in the single substrate transfer apparatus, the support members 3a and 3b of the glass substrate 5 are formed with a predetermined gap 7 between the support members 3a and 3b facing each other. The hand 4 is positioned between the supporting members 3a or 3b in the width direction and the supporting members 3a and 3b opposed to each other at the position where the hand 4 is moved up and down. The longitudinal hand support portion 42 is connected to the lateral hand support portion 41 in the longitudinal direction.
Further, in this single substrate transfer apparatus, the support members 3a and 3b are formed in the same shape, and are arranged in a plurality of steps in the vertical direction inside the cassette body 1.

As shown in FIG. 1A, the support members 3a and 3b are installed on the same plane to horizontally support one glass substrate 5, and support members 3a on the left and right side walls 2a and 2b. Five support members 3a and 3b are arranged in parallel on the left and right side walls 2a and 2b so that 3b is in the same position in the depth direction.
The support members 3a and 3b of the left and right side walls 2a and 2b are horizontally extended to the vicinity of the center of the cassette body 1 in the width direction.
Further, as shown in FIG. 1 (b), on the upper portions of the support members 3a and 3b, a projection shape (or projection shape) that directly supports the glass substrate 5 and is formed of an elastic body such as synthetic rubber, for example. In this reference example, the pair of left and right support members 3a and 3b support the glass substrate 5 at two points near the center and two points near the end. However, it is possible to support at 6 points or more.
Thus, the supporting members 3a and 3b extended to the vicinity of the center in the width direction of the cassette body 1 can reduce the amount of bending due to the weight of the glass substrate 5, and thereby the glass substrate due to the bending stress during storage. 5 can be prevented.

Further, the horizontal hand support portion 41 and the vertical hand support portion 42 of the hand 4 are integrally formed on the same plane in order to transfer the glass substrate 5 horizontally, and these horizontal hand support portions 41 are also formed. The vertical hand support portion 42 is formed at a position where the hand 4 is moved up and down so as not to interfere with the support members 3a and 3b.
The horizontal hand support portion 41 is formed of a plate-like member extending from the central portion in the width direction of the cassette body 1 to the vicinity of the left and right side walls 2a, 2b.
The vertical hand support portion 42 is formed of a long plate-like member that connects the plurality of horizontal hand support portions 41 at the center in the width direction of the cassette body 1.
The hand 4 includes the horizontal hand support portion 41 and the vertical hand support portion 42 as described above, so that the large glass substrate 5 is transferred so that the amount of bending due to its own weight is small, and is caused by the bending stress at the time of transport. It is possible to prevent the glass substrate 5 from being damaged.

In the single substrate transfer apparatus of this reference example, as shown in FIG. 1, support members 3a and 3b for supporting the glass substrate 5 are provided, and a predetermined gap 7 is provided between the support members 3a and 3b facing each other. The hand 4 is formed at a position where the hand 4 is inserted, and a plurality of lateral hand support portions 41 disposed between the support members 3a or 3b arranged in parallel, and the opposing support members 3a and 3b. The support members 3a and 3b can be extended to the vicinity of the central portion of the glass substrate 5, because the support members 3a and 3b are disposed between the support members 3a and 4b. Thus, the large glass substrate 5 can be accommodated so that the amount of bending due to its own weight is small, and the glass substrate 5 can be prevented from being damaged due to the bending stress at the time of accommodation.

  Furthermore, the hand 4 of the transfer machine, at the insertion position of the hand 4, a plurality of lateral hand support portions 41 in the width direction disposed between the support members 3 a or the support members 3 b arranged in parallel, and the opposing support members The width direction dimension L of the hand 4 can be increased to the vicinity of the end portion of the glass substrate 5 by being formed by the vertical hand support portion 42 disposed between 3a and 3b and connecting the horizontal hand support portion 41. Thus, the large glass substrate 5 can be transferred so that the amount of bending due to its own weight is reduced, and the glass substrate 5 can be prevented from being damaged due to bending stress during conveyance.

Incidentally, in the single-wafer substrate transfer apparatus of this reference example, the liquid crystal glass substrate 5 having a size of about 1200 × 1000 mm and, if necessary, 2000 × 1700 mm or more can be effectively stored and transferred. it can.

Next, a second reference example of the single- wafer substrate transfer device and the hand used therewith will be described with reference to FIG.
Similarly to the first reference example, the single substrate transfer device combined with the transfer device of the second reference example has a plurality of parallel arrangements in the opposing direction from the left and right side walls 2a, 2b of the box-shaped cassette body 1. The supporting member 3a or the supporting member 3b is extended, and the glass substrate 5 is put in and out by raising and lowering the hand 4 of the transfer machine inserted into the cassette body 1 between the supporting members 3a and 3b. Has been.
Then, the support members 3a and 3b of the glass substrate 5 are formed by providing a predetermined gap 7 between the support members 3a and 3b facing each other, and the hands 4 are supported in parallel at the elevation position of the hands 4. A plurality of lateral hand support portions 41 in the width direction positioned between the member 3a or the support member 3b and a longitudinal direction link between the opposing support members 3a and 3b and connecting the lateral hand support portions 41. A vertical hand support portion 42 is used.
Further, the support members 3a and 3b are formed in the same shape, and a plurality of the support members 3a and 3b are arranged in a step shape in the vertical direction inside the cassette body 1.

As shown in FIG. 3A, the support members 3a and 3b are installed on the same plane to horizontally support the glass substrate 5, and the support members 3a and 3b on the left and right side walls 2a and 2b Five support members 3a or five support members 3b are arranged in parallel so as to be in the same position in the depth direction.
The support members 3a and 3b of the left and right side walls 2a and 2b are formed to have a predetermined gap 7 between the opposing support members 3a and 3b. The position of the gap 7 is the opening of the cassette body 1. It is shifted to the left and right alternately in the depth direction from 1a.
That is, in the first, third and fifth support members 3a and 3b from the opening 1a, the support member 3a on the left side wall 2a is formed longer than the support member 3b on the right side wall 2b, and the second and fourth. In the second support members 3a and 3b, the support member 3b on the right side wall 2b is formed longer than the support member 3a on the left side wall 2a.
As shown in FIG. 3B, a buffer member that directly supports the glass substrate 5 is provided on the upper portions of the support members 3a and 3b, as in the first reference example.
The alternately extended support members 3a and 3b can further reduce the amount of bending due to the weight of the glass substrate 5 by dispersing the positions of the gaps 7 between the support members 3a and 3b. It is possible to prevent the glass substrate 5 from being damaged due to the bending stress at the time.

On the other hand, the horizontal hand support portion 41 and the vertical hand support portion 42 of the hand 4 are integrally formed on the same plane in order to transfer the glass substrate 5 horizontally.
The horizontal hand support portion 41 is formed of a plate-like member extending from the central portion in the width direction of the cassette body 1 to the vicinity of the left and right side walls 2a, 2b.
The vertical hand support portion 42 is formed of a plate-like member in the length direction that connects the plurality of horizontal hand support portions 41 in a zigzag manner at the position of the gap 7 between the support members 3a and 3b.
The hand 4 includes the horizontal hand support portion 41 and the vertical hand support portion 42 whose positions are alternately shifted, thereby further reducing the amount of bending due to the weight of the glass substrate 5. It is possible to prevent the glass substrate 5 from being damaged due to the bending stress at the time of mounting.

Next, FIGS. 4 to 5 show a first embodiment of a single substrate transfer apparatus and a hand used therefor according to the present invention.
This single-wafer substrate transfer device is intended for glass substrates and is used in combination with another transfer device. From the left and right side walls 2a and 2b of the box-shaped cassette body 1 as a storage device, the opposite direction is obtained. A plurality of support portions 3a and 3b which are arranged in parallel with each other, and a hand 4 of a transfer machine (not shown) inserted into the cassette main body 1 is moved up and down between the support portions 3a and 3b, so that the glass substrate 5 It is configured to take in and out.

In this embodiment, in the single substrate transfer device, the support portions 3a and 3b of the glass substrate 5 are formed with a gap 7 having a predetermined dimension between the support portions 3a and 3b facing each other. The hand 4 is moved between a plurality of lateral hand support portions 41 in the width direction that can pass through the gaps between the support portions 3a or the support portions 3b arranged in parallel with each other and the support portions 3a and 3b facing each other. A pair of vertical hand support portions 42 arranged side by side with a gap in between and arranged side by side with a gap in the width direction connecting the left and right horizontal hand support portions 41 respectively.
Further, in this single substrate transfer apparatus, the support portions 3a and 3b are formed in the same shape, and are arranged in a plurality of steps in the vertical direction inside the cassette body 1.

As shown in FIG. 4A, the support portions 3a and 3b are installed on the same plane in order to horizontally support one glass substrate 5, and the support portions 3a of the left and right side walls 2a and 2b. Five support portions 3a and 3b are arranged in parallel on the left and right side walls 2a and 2b so that 3b is in the same position in the depth direction.
The support portions 3a and 3b of the left and right side walls 2a and 2b are horizontally extended to the vicinity of the center of the cassette body 1 in the width direction.

  Further, as shown in FIG. 4B, a buffer member 6 that directly supports the glass substrate 5 is provided on the upper surfaces of the support portions 3a and 3b. In this embodiment, a pair of left and right support portions 3a, In 3b, the glass substrate 5 is supported at four points, two points near the center and two points near the end, but it is also possible to support the glass substrate 5 at six points or more.

  Thus, the support portions 3a and 3b extended to the vicinity of the center of the cassette body 1 in the width direction can reduce the amount of bending due to the weight of the glass substrate 5, and thereby the glass substrate caused by the bending stress during storage. 5 can be prevented from being deformed or damaged.

  Further, the horizontal hand support portion 41 and the vertical hand support portion 42 of the hand 4 are integrally formed on the same plane in order to transfer the glass substrate 5 horizontally, and these horizontal hand support portions 41 are also formed. The vertical hand support part 42 is formed at a position where it does not interfere with the support parts 3 a and 3 b when the hand 4 moves up and down.

  The horizontal hand support portion 41 is formed of a plate-like member extending from the central portion in the width direction of the cassette body 1 to the vicinity of the left and right side walls 2a, 2b.

  The vertical hand support part 42 is composed of a pair of long plates arranged in parallel with a gap of a predetermined dimension in the width direction, and each vertical hand support part 42 connects the left and right horizontal hand support parts 41 respectively. ing.

  The hand 4 includes the horizontal hand support portion 41 and the vertical hand support portion 42 as described above, so that the large glass substrate 5 is transferred so that the amount of bending due to its own weight becomes small, and the bending stress during transportation is reduced. The resulting deformation or breakage of the glass substrate 5 can be prevented.

  As described above, in the single substrate transfer apparatus according to the present embodiment, as shown in FIG. 4, the support portions 3 a and 3 b that support the glass substrate 5 are separated from each other by the gap between the support portions 3 a and 3 b facing each other. 7 and a plurality of lateral hand support portions 41 disposed between the support portions 3a or 3b arranged in parallel at the insertion position of the hand 4, and the opposite support portions 3a, Since it is constituted by the vertical hand support part 42 arranged between 3b and connecting the horizontal hand support part 41, the support parts 3a, 3b can be extended to the vicinity of the center part of the glass substrate 5, Thereby, the large glass substrate 5 can be accommodated so that the amount of bending due to its own weight becomes small, and the deformation and breakage of the glass substrate 5 due to the bending stress at the time of accommodation can be prevented.

  Then, the hand 4 of the transfer machine, at the insertion position of the hand 4, a plurality of lateral hand support portions 41 in the width direction disposed between the support portions 3 a or the support portions 3 b arranged in parallel, and the opposing support portions The width direction dimension L of the hand 4 can be increased to the vicinity of the end portion of the glass substrate 5 by being formed by the vertical hand support portion 42 disposed between 3a and 3b and connecting the horizontal hand support portion 41. Thus, the large glass substrate 5 can be transferred so that the amount of bending due to its own weight is reduced, and deformation and breakage of the glass substrate 5 due to bending stress during conveyance can be prevented.

  Incidentally, in the single-wafer substrate transfer apparatus of the present embodiment, the liquid crystal glass substrate 5 having a size of about 1200 × 1000 mm and, if necessary, 2000 × 1700 mm or more can be effectively stored and transferred. it can.

Further, since the vertical hand support portion 42 of the hand 4 is formed so as to be divided into right and left, the load on each vertical hand support portion 42 is reduced and the rigidity of the hand 4 is increased. For example, FIGS. The glass substrate 5 can be transferred in correspondence with a pedestal 8 having an auxiliary support portion 81 in the center as a storage device as shown in FIG.
The pedestal 8 supports the glass substrate 5 with left and right support portions 82 and a central auxiliary support portion 81. FIG. 6 shows a pair of wide (glass substrate 5) arranged in parallel with a gap in the width direction. shows the transfer status of the pedestal 8 of the glass substrate 5 by the vertical hand supporting portion 43 of each of the width dimension L ₀ of a width dimension L ₁ of more than 20%), as shown in this example, When the vertical hand support portion 43 is formed wide, the horizontal hand support portion 41 can be omitted.

In addition, as shown in FIG. 7 and FIG. 8, one or more auxiliary vertical hand support portions 42a are juxtaposed between a pair of wide vertical hand support portions 42, or as a storage device. One or more auxiliary support portions 2c, 2d, and 81 can be juxtaposed at intermediate positions between the support portions 2a, 2b, and 82 that extend in opposite directions from both sides of the cassette body 1 and the base 8.
As described above, by arranging the auxiliary vertical hand support portion 42a and the auxiliary support portions 2c, 2d, and 81 in parallel, the larger glass substrate 5 can be handled.

As mentioned above, although the transfer apparatus of the single wafer board | substrate of this invention was demonstrated based on several Example, this invention is not limited to the structure described in the said Example, The structure described in each Example The structure of the cassette body as a storage device may be appropriately changed within a range that does not deviate from the purpose, such as applying the structure of the cassette body as a storage device to the pedestal or conversely, applying the structure of the pedestal to the cassette body . In addition, an apparatus that delivers a single substrate to / from a transfer machine is not limited to a cassette or a pedestal.

The single-wafer substrate transfer apparatus of the present invention and the hand used therefor are designed to reduce the amount of bending of the single-wafer substrate such as a large glass substrate due to its own weight, and to deform or break the single-wafer substrate due to bending stress. Therefore, the present invention can be widely applied to a single-wafer substrate transfer device and a hand used therefor, and the transfer object can also be widely applied to single-wafer substrates other than glass substrates.

The 1st reference example of the transfer apparatus of a single wafer board | substrate is shown, (a) is the top view which abbreviate | omitted the top plate, (b) is a front view. It is a perspective view which shows the transfer apparatus of the single substrate of the reference example. The 2nd reference example of the transfer apparatus of a single- wafer board | substrate is shown, (a) is the top view which abbreviate | omitted the top plate, (b) is a front view. The transfer state of the single wafer transfer device of the present invention to the cassette body by the transfer device of the first embodiment is shown, (a) is a plan view with the top plate omitted, (b) is a front view, ( c) is a side view of a vertical hand support portion of the hand. The transfer state to the base by the transfer device is shown, (a) is a plan view thereof, and (b) is a front view thereof. The transfer state of the sheet | seat board transfer apparatus of this invention to the base by the transfer apparatus of 2nd Example is shown, (a) is the top view, (b) is the front view. It is the top view which abbreviate | omitted the top plate which shows the transfer state to the cassette main body by the transfer apparatus of 3rd Example of the transfer apparatus of the single substrate of this invention. It is a top view which shows the transfer state to the base by the transfer apparatus. 1 shows a conventional single-wafer substrate transfer device, (a) is a plan view in which the top plate is omitted, (b) is a front view, and (c) is a relationship between the width direction dimension of the hand and the deflection of the glass substrate. It is explanatory drawing. The conventional large-sized substrate transfer apparatus is shown, (a) is a plan view in which the top plate is omitted, (b) is a front view, and (c) is the relationship between the width direction dimension of the hand and the deflection of the glass substrate. It is explanatory drawing shown.

1 Cassette body (storage device)
DESCRIPTION OF SYMBOLS 1a Opening part 2a Left side wall 2b Right side wall 2c Auxiliary support part 3a Left support part 3b Right support part 4 Hand 40 Transfer machine 41 Horizontal hand support part 42 Vertical hand support part 42a Auxiliary vertical hand support part 43 Vertical hand Support section 5 Glass substrate (single substrate)
6 Buffer member 7 Gap 8 Pedestal (storage device)
81 Auxiliary support part in the center 82 Left and right support parts

Claims (5)

While supporting portions are respectively extended in opposite directions from both sides of the storage device, the transfer of the single-wafer substrates is performed by moving the hand of the transfer machine inserted into the storage device up and down between the support portions. in the mounting apparatus, the supporting portion, as well as composed of a plurality of parallel supporting member formed by providing a gap between the support portion opposing, the hand, at the vertical position of the hand, gap between the support member for the parallel and the transverse hand supporting part of the plurality of the width direction can pass through the position and the length of one pair of juxtaposed be a clearance in a width direction respectively connected to the transverse hand supporting portion between said opposed support members A single-wafer substrate transfer apparatus, comprising: a vertical hand support portion in a direction; and a protruding buffer member that directly supports the single-wafer substrate is provided on the upper surface of the support portion.   While supporting portions are respectively extended in opposite directions from both sides of the storage device, the transfer of the single-wafer substrates is performed by moving the hand of the transfer machine inserted into the storage device up and down between the support portions. In the mounting device, an auxiliary support portion is arranged in parallel at an intermediate position of the support portion, and the hand is moved in a lifted position of the hand, and a plurality of widthwise horizontal hand support portions positioned between the support portions arranged in parallel, And a pair of vertical hand support portions arranged in parallel with a gap in the width direction connecting the horizontal hand support portions, and a protruding buffer member for directly supporting the single-wafer substrate on the upper surface of the support portion. A single-wafer substrate transfer device provided. While supporting portions are respectively extended in opposite directions from both sides of the storage device, the transfer of the single-wafer substrates is performed by moving the hand of the transfer machine inserted into the storage device up and down between the support portions. In the mounting apparatus, an auxiliary support part is provided in parallel at an intermediate position of the support part, and the hand is provided with a gap in the width direction, and each pair has a width of 20% or more of the width dimension of the single substrate. A single-wafer substrate transfer device comprising a wide vertical hand support portion having a width direction dimension, and provided with a protruding buffer member for directly supporting a single-wafer substrate on the upper surface of the support portion. It said pair longitudinal hand supporting portion auxiliary longitudinal hand supporting portion transfer device of the sheet substrate according to claim 1, 2 or 3 wherein the juxtaposed to during the.   In a single-wafer substrate transfer hand used for transferring a single-wafer substrate, the hand includes a plurality of lateral hand support portions arranged in parallel so as to form a common plane with a gap, and the lateral hand A plurality of longitudinal hand support portions in the longitudinal direction for connecting the support portions, the lateral hand support portions extending in opposite directions to the longitudinal hand support portions, respectively, on the upper surface of the support portion, A single-wafer substrate transfer hand, comprising a protruding buffer member that directly supports a substrate.

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