JP2003261221A - Transferring device for conveying glass substrate, and cassette for storing glass substrate used for it - Google Patents
Transferring device for conveying glass substrate, and cassette for storing glass substrate used for itInfo
- Publication number
- JP2003261221A JP2003261221A JP2002062920A JP2002062920A JP2003261221A JP 2003261221 A JP2003261221 A JP 2003261221A JP 2002062920 A JP2002062920 A JP 2002062920A JP 2002062920 A JP2002062920 A JP 2002062920A JP 2003261221 A JP2003261221 A JP 2003261221A
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- hand
- cassette body
- supporting
- cassette
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、ガラス基板搬送用
移載装置及びそれに用いるガラス基板収納用カセットに
関し、特に、大型のガラス基板をその自重による撓み量
が小さくなるように収容し、曲げ応力に起因するガラス
基板の破損を防止することができるガラス基板搬送用移
載装置及びそれに用いるガラス基板収納用カセットに関
するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer device for transferring glass substrates and a glass substrate storage cassette used therefor, and more particularly to a large glass substrate which is accommodated so that the amount of bending due to its own weight is reduced and bending stress is applied. The present invention relates to a glass substrate transfer device capable of preventing breakage of a glass substrate due to the above, and a glass substrate storage cassette used therein.
【0002】[0002]
【従来の技術】液晶等のガラス基板は、互いに接触しな
いように分離して収容するために、専用のガラス基板収
納用カセットに収納される。このガラス基板収納用カセ
ットは、例えば、大型液晶ガラス基板の製造ラインに於
いて、製造装置間で液晶ガラス基板を搬送したり、一時
貯留する場合に使用される。2. Description of the Related Art Glass substrates such as liquid crystal are housed in a dedicated glass substrate housing cassette so as to be housed separately so as not to come into contact with each other. This glass substrate storage cassette is used, for example, in a production line for a large-sized liquid crystal glass substrate, when the liquid crystal glass substrate is transported or temporarily stored between manufacturing devices.
【0003】ガラス基板収納用カセットは、図2に示す
ように、箱形のカセット本体1の両側壁2a、2bから
対向方向にそれぞれ並列する複数の支持部材3a’、3
b’を延設するとともに、カセット本体1に挿入した移
載機のハンド4’を該支持部材3a’、3b’の間で昇
降させることによりガラス基板5の出し入れを行うよう
にしている。カセット本体1は、二股フォーク状のハン
ド4’の昇降を許容するために、カセット本体1の幅方
向中央部に広い空間を必要とし、これにより、支持部材
3a’、3b’は左右の側壁2a、2bから比較的短く
突出するように形成されている。As shown in FIG. 2, the cassette for storing glass substrates includes a plurality of supporting members 3a 'and 3a arranged in parallel in opposite directions from both side walls 2a and 2b of a box-shaped cassette body 1.
The glass substrate 5 is taken in and out by extending b'and raising and lowering the hand 4'of the transfer machine inserted in the cassette body 1 between the support members 3a ', 3b'. The cassette body 1 needs a large space in the widthwise central portion of the cassette body 1 to allow the bifurcating fork-shaped hand 4'to move up and down, whereby the support members 3a 'and 3b' are left and right side walls 2a. 2b is formed so as to project relatively shortly.
【0004】[0004]
【発明が解決しようとする課題】ところが、ガラス基板
のサイズが大きくなると、剛体であるガラス基板であっ
てもその撓みが過大になるため、上記従来の支持部材の
長さが短く制約されるようなガラス基板収納用カセット
や二股フォーク状のハンドでは、ガラス基板の自重によ
る撓みが大きくなり、この撓みによりガラス基板自身が
大きな曲げ応力を受ける結果、ガラス基板の破損が発生
しやすくなるという問題があった。However, when the size of the glass substrate becomes large, the bending of the rigid glass substrate becomes excessive, so that the length of the conventional supporting member is restricted to be short. In such a glass substrate storage cassette or a bifurcated fork-shaped hand, the bending of the glass substrate due to its own weight becomes large, and as a result of the large bending stress of the glass substrate itself due to this bending, damage to the glass substrate is likely to occur. there were.
【0005】本発明は、上記従来のガラス基板搬送用移
載装置が有する問題点に鑑み、大型のガラス基板をその
自重による撓み量が小さくなるように収容し、曲げ応力
に起因するガラス基板の破損を防止するとともに、同様
にガラス撓み量を小さくすることができるガラス基板搬
送用移載装置及びそれに用いるガラス基板収納用カセッ
トを提供することを目的とする。In view of the problems of the above-mentioned conventional glass substrate transfer device, the present invention accommodates a large glass substrate so that the amount of bending due to its own weight is small, and the glass substrate caused by bending stress An object of the present invention is to provide a glass substrate transfer device that can prevent breakage and also reduce the amount of glass bending, and a glass substrate storage cassette used for the same.
【0006】[0006]
【課題を解決するための手段】上記目的を達成するた
め、本発明のガラス基板搬送用移載装置は、箱形のカセ
ット本体の壁に並列する複数の支持部材を形成する一
方、カセット本体に挿入した移載機のハンドを該支持部
材の間で昇降させることによりガラス基板の出し入れを
行うガラス基板搬送用移載装置において、前記支持部材
をカセット本体の後部壁から開口部付近まで延設すると
ともに、前記ハンドを、ハンドの昇降位置で、前記並列
する支持部材の間に位置する奥行き方向の複数の縦ハン
ド支持部と、前記支持部材の先端側に位置し、前記縦ハ
ンド支持部を連結する幅方向の横ハンド支持部とにより
構成したことを特徴とする。In order to achieve the above object, the glass substrate transfer device of the present invention forms a plurality of supporting members in parallel with the wall of a box-shaped cassette body, while the glass substrate transfer apparatus is provided on the cassette body. In a transfer device for glass substrate transfer, in which a glass substrate is transferred in and out by raising and lowering a hand of an inserted transfer device between the support members, the support member is extended from a rear wall of a cassette body to a vicinity of an opening. Along with the vertical position of the hand, the vertical hand support portion is located at the tip end side of the support member and a plurality of vertical hand support portions in the depth direction located between the parallel support members, and the vertical hand support portion is connected. And a lateral hand support portion in the width direction.
【0007】また、本発明のガラス基板搬送用移載装置
に用いるガラス基板収納用カセットは、箱形のカセット
本体の壁に並列する複数の支持部材を形成する一方、カ
セット本体に挿入した移載機のハンドを該支持部材の間
で昇降させることによりガラス基板の出し入れを行うガ
ラス基板搬送用移載装置において、前記支持部材をカセ
ット本体の後部壁から開口部付近まで延設するととも
に、隣接する支持部材間に、ハンドの昇降位置で支持部
材の間に位置する縦ハンド支持部が通過可能な隙間を設
けたことを特徴とする。Further, the glass substrate storing cassette used in the glass substrate transfer device of the present invention forms a plurality of supporting members arranged in parallel on the wall of the box-shaped cassette body, while the glass substrate is transferred into the cassette body. In a glass substrate transfer device for loading and unloading glass substrates by raising and lowering a hand of the machine between the supporting members, the supporting members are extended from the rear wall of the cassette body to the vicinity of the opening and are adjacent to each other. It is characterized in that a gap is provided between the support members so that a vertical hand support portion located between the support members at the elevating position of the hand can pass therethrough.
【0008】このガラス基板搬送用移載装置及びそれに
用いるガラス基板収納用カセットは、ガラス基板を支持
する複数の支持部材を、カセット本体の後部壁から開口
部付近まで延設するとともに、ガラス基板の出し入れを
行うハンドを、ハンドの昇降位置で、前記並列する支持
部材の間に位置する奥行き方向の複数の縦ハンド支持部
と、前記支持部材の先端側に位置し、前記縦ハンド支持
部を連結する幅方向の横ハンド支持部とにより構成した
ことから、前記支持部材をガラス基板のほぼ全幅まで延
長することができ、これにより、大型のガラス基板をそ
の自重による撓み量が小さくなるように収容し、収納時
の曲げ応力に起因するガラス基板の破損を防止すること
ができる。そして、移載機のハンドを、ハンドの昇降位
置で、支持部材の間に位置する奥行き方向の複数の縦ハ
ンド支持部と、支持部材の先端側に位置し、前記縦ハン
ド支持部を連結する幅方向の横ハンド支持部とによって
構成したことにより、ハンドの寸法をガラス基板の幅方
向端部付近まで大きくすることができ、これにより、大
型のガラス基板をその自重による撓み量が小さくなるよ
うに移載し、搬送時の曲げ応力に起因するガラス基板の
破損を防止することができる。In this glass substrate transfer device and the glass substrate storage cassette used therein, a plurality of support members for supporting the glass substrate are provided from the rear wall of the cassette body to the vicinity of the opening, and A hand for taking in and out a plurality of vertical hand supporting portions in the depth direction, which are located between the supporting members arranged in parallel with each other at the raising and lowering position of the hand, and located at the tip side of the supporting member, and connect the vertical hand supporting portions. Since it is composed of the lateral hand supporting portion in the width direction, the supporting member can be extended to almost the entire width of the glass substrate, thereby accommodating a large glass substrate so that the amount of bending due to its own weight is small. However, it is possible to prevent breakage of the glass substrate due to bending stress during storage. Then, the hand of the transfer machine is located at the vertical position of the hand and is positioned on the front end side of the support member with a plurality of vertical hand support parts in the depth direction located between the support members, and connects the vertical hand support parts. By configuring with the lateral hand support portion in the width direction, it is possible to increase the size of the hand up to the vicinity of the end portion in the width direction of the glass substrate, thereby reducing the amount of bending of the large glass substrate due to its own weight. It is possible to prevent the glass substrate from being damaged due to bending stress during transportation.
【0009】この場合において、前記支持部材を同形状
に形成して、カセット本体の内部に上下に複数、段状に
配設することができる。In this case, the supporting members can be formed in the same shape, and a plurality of upper and lower steps can be arranged inside the cassette body.
【0010】これにより、多数のガラス基板をカセット
に収納することができる。As a result, a large number of glass substrates can be stored in the cassette.
【0011】[0011]
【発明の実施の形態】以下、本発明のガラス基板搬送用
移載装置及びそれに用いるガラス基板収納用カセットの
実施の形態を図面に基づいて説明する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a glass substrate transfer device of the present invention and a glass substrate storage cassette used therein will be described below with reference to the drawings.
【0012】図1に、本発明のガラス基板搬送用移載装
置及びそれに用いるガラス基板収納用カセットの一実施
例を示す。このガラス基板搬送用移載装置は、別の移載
装置と組み合わせて使用されるもので、箱形のカセット
本体1の後部壁2から開口部1a側に、並列する複数の
支持部材3を延設するとともに、カセット本体1に挿入
した移載機43のハンド4を該支持部材3の間で昇降さ
せることによりガラス基板5の出し入れを行うように構
成されている。そして、このガラス基板搬送用移載装置
は、前記支持部材3を、カセット本体1の後部壁2から
開口部1a付近まで延設するとともに、前記ハンド4
を、ハンド4の昇降位置で、前記並列する支持部材3の
間に位置する奥行き方向の複数の縦ハンド支持部41
と、前記支持部材3の先端側に位置し、前記縦ハンド支
持部41を連結する幅方向の横ハンド支持部42とによ
り構成している。さらに、このガラス基板搬送用移載装
置では、図では省略しているが、前記支持部材3を同形
状に形成して、カセット本体1の内部に上下に複数、段
状に配設している。FIG. 1 shows an embodiment of the glass substrate transfer device of the present invention and a glass substrate storage cassette used therein. This glass substrate transfer device is used in combination with another transfer device, and extends a plurality of supporting members 3 in parallel from the rear wall 2 of the box-shaped cassette body 1 to the opening 1a side. The glass substrate 5 is set in and taken out by raising and lowering the hand 4 of the transfer machine 43 inserted in the cassette body 1 between the supporting members 3. In this glass substrate transfer device, the supporting member 3 is extended from the rear wall 2 of the cassette body 1 to the vicinity of the opening 1a, and the hand 4 is provided.
The vertical hand supporting portions 41 in the depth direction, which are located between the supporting members 3 arranged in parallel at the elevating position of the hand 4.
And a lateral hand support portion 42 in the width direction, which is located on the tip end side of the support member 3 and connects the vertical hand support portion 41. Further, in this glass substrate transfer device, although not shown in the figure, the support members 3 are formed in the same shape and are vertically arranged in a plurality of steps inside the cassette body 1. .
【0013】支持部材3は、1枚のガラス基板5を水平
に支持するために、同一平面上に設置されており、ガラ
ス基板5を均等に支持できるように、4本の支持部材3
が後部壁2に等間隔で平行に配設されている。この場
合、隣接する支持部材3間には、ハンド4の昇降位置で
支持部材3の間に位置する縦ハンド支持部41が通過可
能な隙間6が設けられている。かくして、このカセット
本体1の開口部1a付近まで延設された支持部材3は、
ガラス基板5の自重による撓み量を小さくすることがで
き、これにより、収納時の曲げ応力に起因するガラス基
板5の破損を防止することができる。The support members 3 are installed on the same plane to horizontally support one glass substrate 5, and four support members 3 are provided so that the glass substrates 5 can be supported uniformly.
Are arranged in parallel on the rear wall 2 at equal intervals. In this case, a gap 6 is provided between the adjacent support members 3 through which the vertical hand support portion 41 located between the support members 3 at the raising / lowering position of the hand 4 can pass. Thus, the support member 3 extending to the vicinity of the opening 1a of the cassette body 1 is
It is possible to reduce the amount of bending of the glass substrate 5 due to its own weight, and thus to prevent the glass substrate 5 from being damaged due to bending stress during storage.
【0014】また、ハンド4の縦ハンド支持部41は、
ガラス基板5を水平に移載するために、同一平面上に形
成されており、また、縦ハンド支持部41と横ハンド支
持部42は、ハンド4の昇降位置で支持部材3と干渉し
ない位置に形成されている。縦ハンド支持部41は、カ
セット本体1の後部壁2付近まで延設された長尺の板状
のものからなり、横ハンド支持部42は、縦ハンド支持
部41を連結する板状のものからなる。ハンド4は、こ
のような縦ハンド支持部41と横ハンド支持部42を備
えることにより、大型のガラス基板5をその自重による
撓み量が小さくなるように移載し、搬送時の曲げ応力に
起因するガラス基板5の破損を防止することができる。The vertical hand support portion 41 of the hand 4 is
In order to transfer the glass substrate 5 horizontally, the glass substrate 5 is formed on the same plane, and the vertical hand support portion 41 and the horizontal hand support portion 42 are positioned so as not to interfere with the support member 3 when the hand 4 is moved up and down. Has been formed. The vertical hand support portion 41 is made of a long plate-like member extended to the vicinity of the rear wall 2 of the cassette body 1, and the horizontal hand support portion 42 is made of a plate-like member that connects the vertical hand support portion 41. Become. The hand 4 is provided with such a vertical hand support portion 41 and a horizontal hand support portion 42, so that the large glass substrate 5 is transferred so that the amount of bending due to its own weight is reduced, and this is caused by bending stress during transportation. It is possible to prevent the glass substrate 5 from being damaged.
【0015】一方、図2に、従来使用されているガラス
基板搬送用移載装置の構造を示す。カセット本体1の中
に収納されたガラス基板5は、カセット本体1の左右の
側壁2a、2bからそれぞれ延設された支持部材3
a’、3b’に支持され、収納されたガラス基板5の自
重による撓みを小さくするように配慮されている。カセ
ット本体1へのガラス基板5の出し入れには、移載機の
ハンド4’が使用され、ガラス基板5がハンド4’によ
り持ち上げられた状態でガラス基板2の撓みが大きくな
らないように、ハンド4’の幅方向寸法Lが決められて
いる。On the other hand, FIG. 2 shows the structure of a transfer device for transporting a glass substrate which has been conventionally used. The glass substrate 5 housed in the cassette body 1 includes support members 3 extending from the left and right side walls 2a and 2b of the cassette body 1, respectively.
It is considered that the glass substrates 5 supported by a'and 3b 'are less likely to bend due to their own weight. A hand 4 ′ of the transfer machine is used for taking the glass substrate 5 in and out of the cassette body 1, and the hand 4 ′ is used so that the glass substrate 5 is not greatly bent when the glass substrate 5 is lifted by the hand 4 ′. The widthwise dimension L of 'is determined.
【0016】図3は、ガラス基板5のサイズが図2の場
合よりさらに大きくなった場合を示す。この場合、カセ
ットのカセット本体1に収納されたガラス基板5は、自
重により大きな曲げを受けるが、この曲げを解消するた
めに、支持部材3a’、3b’をガラス基板5の幅方向
中央部まで延ばそうとすると、ハンド4’の幅方向寸法
Lを小さくしなけらばならない。しかし、ハンド4’の
幅方向寸法Lを小さくすると、ハンド4’に載せられて
いるガラス基板5の撓みは、図3(c)に点線にて示す
状態となり、ガラス基板5が大きな曲げを受け、破損が
発生しやすくなる。FIG. 3 shows a case where the size of the glass substrate 5 is larger than that in FIG. In this case, the glass substrate 5 housed in the cassette body 1 of the cassette undergoes a large bending due to its own weight. In order to eliminate this bending, the supporting members 3a ′, 3b ′ are extended to the central portion in the width direction of the glass substrate 5. In order to extend it, the widthwise dimension L of the hand 4'must be reduced. However, when the dimension L in the width direction of the hand 4'is reduced, the bending of the glass substrate 5 placed on the hand 4'becomes the state shown by the dotted line in FIG. , Breakage easily occurs.
【0017】これに対し、本実施例のガラス基板搬送用
移載装置では、図1に示すように、ガラス基板5を支持
する複数の支持部材3を、カセット本体1の後部壁2か
ら開口部1a付近まで延設するとともに、ガラス基板5
の出し入れを行うハンド4を、ハンド4の昇降位置で、
前記並列する支持部材3の間に位置する奥行き方向の複
数の縦ハンド支持部41と、前記支持部材3の先端側に
位置し、前記縦ハンド支持部41を連結する幅方向の横
ハンド支持部42とにより構成したことから、前記支持
部材3をガラス基板5のほぼ全幅まで延長することがで
き、これにより、大型のガラス基板5をその自重による
撓み量が小さくなるように収容し、収納時の曲げ応力に
起因するガラス基板5の破損を防止することができる。
さらに、移載機43のハンド4を、ハンド4の昇降位置
で、支持部材3の間に位置する奥行き方向の複数の縦ハ
ンド支持部41と、支持部材3の先端側に位置し、前記
縦ハンド支持部41を連結する幅方向の横ハンド支持部
42とによって構成したことにより、ハンド4の寸法を
ガラス基板5の幅方向端部付近まで大きくすることがで
き、これにより、大型のガラス基板5をその自重による
撓み量が小さくなるように移載し、搬送時の曲げ応力に
起因するガラス基板5の破損を防止することができる。
ちなみに、本実施例のガラス基板搬送用移載装置では、
サイズが1200×1000ミリ程度の液晶ガラス基板
5を有効に収納し且つ移載することができる。On the other hand, in the glass substrate transfer device of this embodiment, as shown in FIG. 1, a plurality of supporting members 3 for supporting the glass substrate 5 are provided from the rear wall 2 of the cassette body 1 to the opening. The glass substrate 5 is extended to the vicinity of 1a.
Put the hand 4 in and out of the
A plurality of vertical hand support parts 41 in the depth direction, which are located between the support members 3 arranged in parallel, and a lateral hand support part, which is located on the tip side of the support member 3 and connects the vertical hand support parts 41 in the width direction. 42, the supporting member 3 can be extended to almost the entire width of the glass substrate 5, so that the large glass substrate 5 can be accommodated so that the amount of bending due to its own weight is small. It is possible to prevent the glass substrate 5 from being damaged due to the bending stress.
Further, the hand 4 of the transfer machine 43 is located at the vertical position of the hand 4 and is located on the front end side of the vertical hand support portions 41 in the depth direction between the support members 3 and the vertical direction. Since the hand supporting portion 41 is connected to the widthwise horizontal hand supporting portion 42, the size of the hand 4 can be increased to the vicinity of the end portion in the width direction of the glass substrate 5, whereby a large glass substrate. It is possible to prevent the glass substrate 5 from being damaged due to bending stress during transportation by transferring the glass substrate 5 so that the amount of bending due to its own weight becomes small.
By the way, in the glass substrate transfer device of this embodiment,
It is possible to effectively store and transfer the liquid crystal glass substrate 5 having a size of about 1200 × 1000 mm.
【0018】以上、本発明のガラス基板搬送用移載装置
及びそれに用いるガラス基板収納用カセットについて、
実施例に基づいて説明したが、本発明は上記実施例に記
載した構成に限定されるものではなく、その趣旨を逸脱
しない範囲において適宜その構成を変更することができ
る。As described above, the glass substrate transfer device of the present invention and the glass substrate storage cassette used therein are as follows:
Although described based on the embodiments, the present invention is not limited to the structures described in the above embodiments, and the structures can be appropriately changed without departing from the gist thereof.
【0019】[0019]
【発明の効果】本発明のガラス基板搬送用移載装置及び
それに用いるガラス基板収納用カセットによれば、ガラ
ス基板を支持する複数の支持部材を、カセット本体の後
部壁から開口部付近まで延設するとともに、ガラス基板
の出し入れを行うハンドを、ハンドの昇降位置で、前記
並列する支持部材の間に位置する奥行き方向の複数の縦
ハンド支持部と、前記支持部材の先端側に位置し、前記
縦ハンド支持部を連結する幅方向の横ハンド支持部とに
より構成したことから、前記支持部材をガラス基板のほ
ぼ全幅まで延長することができ、これにより、大型のガ
ラス基板をその自重による撓み量が小さくなるように収
容し、収納時の曲げ応力に起因するガラス基板の破損を
防止することができる。そして、移載機のハンドを、ハ
ンドの昇降位置で、支持部材の間に位置する奥行き方向
の複数の縦ハンド支持部と、支持部材の先端側に位置
し、前記縦ハンド支持部を連結する幅方向の横ハンド支
持部とによって構成したことにより、ハンドの寸法をガ
ラス基板の幅方向端部付近まで大きくすることができ、
これにより、大型のガラス基板をその自重による撓み量
が小さくなるように移載し、搬送時の曲げ応力に起因す
るガラス基板の破損を防止することができる。According to the glass substrate transfer device of the present invention and the glass substrate storage cassette used therein, a plurality of support members for supporting the glass substrates are extended from the rear wall of the cassette body to the vicinity of the opening. Along with, a hand for taking out and putting in a glass substrate is located at a vertical position of the hand, and a plurality of vertical hand supporting portions in the depth direction located between the supporting members arranged in parallel, and is located on the tip side of the supporting member, The support member can be extended to almost the entire width of the glass substrate because it is configured by the horizontal hand support portion in the width direction that connects the vertical hand support portion, and thus the large glass substrate is bent by its own weight. It is possible to prevent the glass substrate from being damaged due to bending stress during storage. Then, the hand of the transfer machine is positioned at the vertical position of the hand and is positioned on the tip side of the support member with a plurality of vertical hand support parts in the depth direction located between the support members, and connects the vertical hand support parts. By configuring with the lateral hand support portion in the width direction, the size of the hand can be increased to the vicinity of the width direction end of the glass substrate,
As a result, a large glass substrate can be transferred so as to reduce the amount of bending due to its own weight, and damage to the glass substrate due to bending stress during transportation can be prevented.
【0020】また、支持部材を同形状に形成して、カセ
ット本体の内部に上下に複数、段状に配設することによ
り、多数のガラス基板をカセットに収納することができ
る。Further, by forming the supporting member in the same shape and arranging a plurality of upper and lower stages inside the cassette body, a large number of glass substrates can be stored in the cassette.
【図1】本発明のガラス基板搬送用移載装置の一実施例
を示す天板を省略した斜視透視図である。FIG. 1 is a perspective perspective view showing an embodiment of a glass substrate transfer device of the present invention with a top plate omitted.
【図2】従来のガラス基板搬送用移載装置を示し、
(a)は天板を省略した平面図、(b)は正面図、
(c)はハンドの幅方向寸法とガラス基板の撓みとの関
係を示す説明図である。FIG. 2 shows a conventional glass substrate transfer device,
(A) is a plan view in which the top plate is omitted, (b) is a front view,
(C) is an explanatory view showing the relationship between the widthwise dimension of the hand and the bending of the glass substrate.
【図3】従来の大型ガラス基板搬送用移載装置を示し、
(a)は天板を省略した平面図、(b)は正面図、
(c)はハンドの幅方向寸法とガラス基板の撓みとの関
係を示す説明図である。FIG. 3 shows a conventional transfer device for transferring a large glass substrate,
(A) is a plan view in which the top plate is omitted, (b) is a front view,
(C) is an explanatory view showing the relationship between the widthwise dimension of the hand and the bending of the glass substrate.
1 カセット本体 1a 開口部 2 後部壁 3 支持部材 4 ハンド 41 縦ハンド支持部 42 横ハンド支持部 43 移載機 5 ガラス基板 6 隙間 1 cassette body 1a opening 2 rear wall 3 Support members 4 hands 41 Vertical hand support 42 Horizontal hand support 43 Transfer machine 5 glass substrates 6 gap
Claims (3)
の支持部材を形成する一方、カセット本体に挿入した移
載機のハンドを該支持部材の間で昇降させることにより
ガラス基板の出し入れを行うガラス基板搬送用移載装置
において、前記支持部材をカセット本体の後部壁から開
口部付近まで延設するとともに、前記ハンドを、ハンド
の昇降位置で、前記並列する支持部材の間に位置する奥
行き方向の複数の縦ハンド支持部と、前記支持部材の先
端側に位置し、前記縦ハンド支持部を連結する幅方向の
横ハンド支持部とにより構成したことを特徴とするガラ
ス基板搬送用移載装置。1. A glass substrate is placed in and taken out by forming a plurality of supporting members arranged in parallel on the wall of a box-shaped cassette body, and raising and lowering a hand of a transfer machine inserted in the cassette body between the supporting members. In the glass substrate transfer device for carrying out, the support member is extended from the rear wall of the cassette body to the vicinity of the opening, and the hand is positioned at the vertical position of the hand between the parallel support members. Transfer of a glass substrate for transporting a glass substrate, characterized by comprising a plurality of vertical hand supporting portions in a horizontal direction and a lateral hand supporting portion in the width direction that is located on the tip end side of the supporting member and connects the vertical hand supporting portions. apparatus.
の支持部材を形成する一方、カセット本体に挿入した移
載機のハンドを該支持部材の間で昇降させることにより
ガラス基板の出し入れを行うガラス基板搬送用移載装置
において、前記支持部材をカセット本体の後部壁から開
口部付近まで延設するとともに、隣接する支持部材間
に、ハンドの昇降位置で支持部材の間に位置する縦ハン
ド支持部が通過可能な隙間を設けたことを特徴とするガ
ラス基板収納用カセット。2. A plurality of supporting members arranged in parallel with each other on a wall of a box-shaped cassette body, and a glass substrate is taken in and out by raising and lowering a hand of a transfer machine inserted in the cassette body between the supporting members. In the transfer device for glass substrate transfer, a vertical hand extending between the supporting member extending from the rear wall of the cassette body to the vicinity of the opening and being positioned between the supporting members at an elevating position of the hand. A cassette for housing a glass substrate, characterized by having a gap through which a supporting portion can pass.
ット本体の内部に上下に複数、段状に形成したことを特
徴とする請求項2記載の基板収納用カセット。3. The substrate storage cassette according to claim 2, wherein the support members are formed in the same shape, and are formed in a plurality of upper and lower stages inside the cassette body.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002062920A JP2003261221A (en) | 2002-03-08 | 2002-03-08 | Transferring device for conveying glass substrate, and cassette for storing glass substrate used for it |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002062920A JP2003261221A (en) | 2002-03-08 | 2002-03-08 | Transferring device for conveying glass substrate, and cassette for storing glass substrate used for it |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2003261221A true JP2003261221A (en) | 2003-09-16 |
Family
ID=28670702
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002062920A Pending JP2003261221A (en) | 2002-03-08 | 2002-03-08 | Transferring device for conveying glass substrate, and cassette for storing glass substrate used for it |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2003261221A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012142620A (en) * | 2005-07-08 | 2012-07-26 | Crossing Automation Inc | Substrate container for storing substrate |
WO2013159388A1 (en) * | 2012-04-27 | 2013-10-31 | 深圳市华星光电技术有限公司 | Substrate transferring device |
CN112010040A (en) * | 2020-08-10 | 2020-12-01 | Tcl华星光电技术有限公司 | Substrate conveying device |
CN112542411A (en) * | 2019-09-20 | 2021-03-23 | 株式会社斯库林集团 | Substrate processing apparatus |
-
2002
- 2002-03-08 JP JP2002062920A patent/JP2003261221A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012142620A (en) * | 2005-07-08 | 2012-07-26 | Crossing Automation Inc | Substrate container for storing substrate |
WO2013159388A1 (en) * | 2012-04-27 | 2013-10-31 | 深圳市华星光电技术有限公司 | Substrate transferring device |
CN112542411A (en) * | 2019-09-20 | 2021-03-23 | 株式会社斯库林集团 | Substrate processing apparatus |
KR20210034516A (en) * | 2019-09-20 | 2021-03-30 | 가부시키가이샤 스크린 홀딩스 | Substrate processing apparatus |
US11521881B2 (en) | 2019-09-20 | 2022-12-06 | SCREEN Holdings Co., Ltd. | Substrate treating apparatus |
KR102533973B1 (en) * | 2019-09-20 | 2023-05-18 | 가부시키가이샤 스크린 홀딩스 | Substrate processing apparatus |
US11948823B2 (en) | 2019-09-20 | 2024-04-02 | SCREEN Holdings Co., Ltd. | Substrate treating apparatus |
CN112010040A (en) * | 2020-08-10 | 2020-12-01 | Tcl华星光电技术有限公司 | Substrate conveying device |
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