SU621367A1 - Способ травлени полупроводниковых материалов - Google Patents
Способ травлени полупроводниковых материаловInfo
- Publication number
- SU621367A1 SU621367A1 SU741989753A SU1989753A SU621367A1 SU 621367 A1 SU621367 A1 SU 621367A1 SU 741989753 A SU741989753 A SU 741989753A SU 1989753 A SU1989753 A SU 1989753A SU 621367 A1 SU621367 A1 SU 621367A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- etching
- reactor
- materials
- torr
- gaseous
- Prior art date
Links
- 238000005530 etching Methods 0.000 title claims 13
- 238000000034 method Methods 0.000 title claims 12
- 239000000463 material Substances 0.000 title claims 5
- 239000004065 semiconductor Substances 0.000 title claims 5
- 239000000203 mixture Substances 0.000 claims 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 2
- 239000011521 glass Substances 0.000 claims 2
- 239000001257 hydrogen Substances 0.000 claims 2
- 229910052739 hydrogen Inorganic materials 0.000 claims 2
- 238000005554 pickling Methods 0.000 claims 2
- 239000002210 silicon-based material Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052786 argon Inorganic materials 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 230000009972 noncorrosive effect Effects 0.000 claims 1
- 235000021110 pickles Nutrition 0.000 claims 1
- 231100000614 poison Toxicity 0.000 claims 1
- 230000007096 poisonous effect Effects 0.000 claims 1
- 238000007670 refining Methods 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD17050973A DD105008A1 (enrdf_load_html_response) | 1973-04-28 | 1973-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU621367A1 true SU621367A1 (ru) | 1978-08-30 |
Family
ID=5491043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU741989753A SU621367A1 (ru) | 1973-04-28 | 1974-01-14 | Способ травлени полупроводниковых материалов |
Country Status (3)
| Country | Link |
|---|---|
| CS (1) | CS182368B1 (enrdf_load_html_response) |
| DD (1) | DD105008A1 (enrdf_load_html_response) |
| SU (1) | SU621367A1 (enrdf_load_html_response) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1417085A (en) * | 1973-05-17 | 1975-12-10 | Standard Telephones Cables Ltd | Plasma etching |
-
1973
- 1973-04-28 DD DD17050973A patent/DD105008A1/xx unknown
-
1974
- 1974-01-14 SU SU741989753A patent/SU621367A1/ru active
- 1974-04-25 CS CS296874A patent/CS182368B1/cs unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CS182368B1 (en) | 1978-04-28 |
| DD105008A1 (enrdf_load_html_response) | 1974-04-05 |
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