SG88724A1 - Management for generating a purified, low-turbulence air flow for supplying local clean rooms - Google Patents

Management for generating a purified, low-turbulence air flow for supplying local clean rooms

Info

Publication number
SG88724A1
SG88724A1 SG9609946A SG1996009946A SG88724A1 SG 88724 A1 SG88724 A1 SG 88724A1 SG 9609946 A SG9609946 A SG 9609946A SG 1996009946 A SG1996009946 A SG 1996009946A SG 88724 A1 SG88724 A1 SG 88724A1
Authority
SG
Singapore
Prior art keywords
purified
management
generating
low
air flow
Prior art date
Application number
SG9609946A
Other languages
English (en)
Inventor
Schneider Heinz
Schultz Klaus
Original Assignee
Jenoptik Jena Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Jena Gmbh filed Critical Jenoptik Jena Gmbh
Publication of SG88724A1 publication Critical patent/SG88724A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/007—Ventilation with forced flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/20—Casings or covers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/28—Arrangement or mounting of filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
SG9609946A 1995-10-13 1996-06-01 Management for generating a purified, low-turbulence air flow for supplying local clean rooms SG88724A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19538040A DE19538040C2 (de) 1995-10-13 1995-10-13 Einrichtung zur Erzeugung eines gereinigten, turbulenzarmen Luftstromes zur Versorgung lokaler Reinräume

Publications (1)

Publication Number Publication Date
SG88724A1 true SG88724A1 (en) 2002-05-21

Family

ID=7774679

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9609946A SG88724A1 (en) 1995-10-13 1996-06-01 Management for generating a purified, low-turbulence air flow for supplying local clean rooms

Country Status (6)

Country Link
US (1) US5814116A (ja)
EP (1) EP0768498A3 (ja)
JP (1) JP3091412B2 (ja)
KR (1) KR0173766B1 (ja)
DE (1) DE19538040C2 (ja)
SG (1) SG88724A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1348392A (zh) 1999-04-28 2002-05-08 斯特拉托泰克公司 可调的净化空气气流场
US20020071954A1 (en) * 2000-12-08 2002-06-13 Nelson Christopher R. Cellulose gypsum based substrate with increased water resistance and strength by surface application of polymeric diphenylmethane diisocyanate
DE10351848A1 (de) 2003-11-06 2005-06-09 Leica Microsystems Semiconductor Gmbh System zur Detektion von Makrodefekten
DE102004062592B3 (de) 2004-12-24 2006-06-08 Leica Microsystems Jena Gmbh System zur Untersuchung eines scheibenförmigen Substrats
JP5427833B2 (ja) * 2011-05-18 2014-02-26 パナソニック株式会社 クリーンルームの逆流防止装置
CN107883508A (zh) * 2016-09-29 2018-04-06 殷晓冬 装配式和组装式弱湍流集中送风装置
CN111271870A (zh) * 2020-02-24 2020-06-12 东莞市利人净化科技有限公司 一种带有静压箱的风机过滤器机组

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3828530A (en) * 1971-09-01 1974-08-13 M Peters Filter system
US4412849A (en) * 1981-04-09 1983-11-01 Klenzaids Engineers Private Limited Method and apparatus for control of gas-borne particulates
US4790863A (en) * 1983-12-16 1988-12-13 Nitta Co., Ltd. Air cleaner

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Publication number Priority date Publication date Assignee Title
US3251177A (en) * 1963-05-15 1966-05-17 Arthur K Baker Dust-free bench
US3301167A (en) * 1964-05-04 1967-01-31 Ray Products Company Inc Anticontaminant work bench
US3290866A (en) * 1964-08-26 1966-12-13 Schonrock Verlie Evaporative cooler
US3284148A (en) * 1965-02-24 1966-11-08 Ramniceanu Tiberiu Justinian Blower-contained vibration-free work bench
DE2138985A1 (de) * 1971-08-04 1973-02-15 Buettner Schilde Haas Ag Belueftungseinrichtung
US3935803A (en) * 1972-10-12 1976-02-03 Flanders Filters, Inc. Air filtration apparatus
CA988357A (en) * 1973-01-26 1976-05-04 Her Majesty The Queen, In Right Of Canada, As Represented By The Minister Of National Defence Back table clean station
US3838556A (en) * 1973-04-06 1974-10-01 Med Assists Inc Air filtration device with oriented output
JPS5520886B2 (ja) * 1974-04-26 1980-06-05
JPS51136570A (en) * 1975-05-22 1976-11-26 Mitsubishi Heavy Ind Ltd Coarse packed bed
JPS52142851A (en) * 1976-05-22 1977-11-29 Hosokawa Kankiyou Enjiniaringu Distribution controlled air feeder assembled in interior building structure
US4560395A (en) * 1984-04-17 1985-12-24 Environmental Air Control, Inc. Compact blower and filter assemblies for use in clean air environments
JPS6171829A (ja) * 1984-09-14 1986-04-12 Fuji Electric Co Ltd 移動磁界式処理装置
JPS61175834A (ja) * 1985-01-31 1986-08-07 Toshiba Corp マイクロプログラムデバツグ機能付きデ−タ処理装置
JPS61175834U (ja) * 1985-04-22 1986-11-01
JPS62183832A (ja) * 1985-10-23 1987-08-12 Hitachi Ltd 半導体製造装置
DE8805774U1 (de) * 1988-04-30 1988-06-23 Babcock-BSH AG vormals Büttner-Schilde-Haas AG, 4150 Krefeld Tunnelmodul zum Aufbau eines Reinraumes in Laminar-Flow-Technik
US5053065A (en) * 1988-05-16 1991-10-01 Garay Charles J Low-profile blower and filter apparatus for supplying clean air
JPH02183832A (ja) * 1989-01-11 1990-07-18 Nec Corp 推論処理装置
DE9116423U1 (de) * 1991-07-08 1992-09-17 Babcock-BSH AG vormals Büttner-Schilde-Haas AG, 4150 Krefeld Modul zum Aufbau einer Reinraumdecke
DE4303805A1 (en) * 1992-02-12 1993-09-09 Helios Klima Kaelte Supporting frame for air conditioning plant - comprises inner frame attached to outer frame by continuous rubber bead or by six rocker bolts
JP3309416B2 (ja) * 1992-02-13 2002-07-29 松下電器産業株式会社 連結式クリーン空間装置
KR970006728B1 (ko) * 1992-08-31 1997-04-29 마쯔시다 덴기 산교 가부시끼가이샤 환경제어장치
DE4236031C2 (de) * 1992-10-24 1996-07-11 Jenoptik Jena Gmbh Vorrichtung zur Erzeugung eines Reinluftstromes
DE4238895C1 (de) * 1992-11-19 1993-12-16 Howatherm Klimatech Gmbh Ventilatoraggregat zum Einbau in einen Luftkanal eines raumlufttechnischen Gerätes
US5413524A (en) * 1993-02-09 1995-05-09 Kabushiki Kaisha Nikko Method of taking out viscera of fish and apparatus thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3828530A (en) * 1971-09-01 1974-08-13 M Peters Filter system
US4412849A (en) * 1981-04-09 1983-11-01 Klenzaids Engineers Private Limited Method and apparatus for control of gas-borne particulates
US4790863A (en) * 1983-12-16 1988-12-13 Nitta Co., Ltd. Air cleaner

Also Published As

Publication number Publication date
KR970022014A (ko) 1997-05-28
DE19538040C2 (de) 1998-08-13
JPH09126511A (ja) 1997-05-16
DE19538040A1 (de) 1997-04-17
KR0173766B1 (ko) 1999-03-20
JP3091412B2 (ja) 2000-09-25
EP0768498A2 (de) 1997-04-16
US5814116A (en) 1998-09-29
EP0768498A3 (de) 1999-11-24

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