SG168493A1 - Adsorbing apparatus - Google Patents

Adsorbing apparatus

Info

Publication number
SG168493A1
SG168493A1 SG201005261-1A SG2010052611A SG168493A1 SG 168493 A1 SG168493 A1 SG 168493A1 SG 2010052611 A SG2010052611 A SG 2010052611A SG 168493 A1 SG168493 A1 SG 168493A1
Authority
SG
Singapore
Prior art keywords
elastic
adsorbing
adsorption
holder
adsorbing member
Prior art date
Application number
SG201005261-1A
Other languages
English (en)
Inventor
Akira Nakatsu
Original Assignee
Canon Machinery Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Machinery Inc filed Critical Canon Machinery Inc
Publication of SG168493A1 publication Critical patent/SG168493A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75—Apparatus for connecting with bump connectors or layer connectors

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Die Bonding (AREA)
  • Dicing (AREA)
  • Manipulator (AREA)
SG201005261-1A 2009-08-04 2010-07-20 Adsorbing apparatus SG168493A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009181603A JP4397967B1 (ja) 2009-08-04 2009-08-04 吸着装置

Publications (1)

Publication Number Publication Date
SG168493A1 true SG168493A1 (en) 2011-02-28

Family

ID=41591579

Family Applications (1)

Application Number Title Priority Date Filing Date
SG201005261-1A SG168493A1 (en) 2009-08-04 2010-07-20 Adsorbing apparatus

Country Status (4)

Country Link
JP (1) JP4397967B1 (ja)
KR (1) KR101597644B1 (ja)
SG (1) SG168493A1 (ja)
TW (1) TWI474419B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103213840A (zh) * 2013-04-01 2013-07-24 上海功源电子科技有限公司 自动分料机
KR101731932B1 (ko) 2017-01-18 2017-05-02 주식회사 대한테크 반도체 칩 픽업용 콜렛

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69333322T2 (de) * 1992-09-24 2004-09-30 Ebara Corp. Poliergerät
JPH07335720A (ja) * 1994-06-10 1995-12-22 Toshiba Corp 半導体チップ取上装置およびその取上方法
JP2002066972A (ja) 2000-09-01 2002-03-05 Koganei Corp 吸着装置
JP3848606B2 (ja) 2002-08-26 2006-11-22 日東電工株式会社 コレットおよびそれを用いてチップ部品をピックアップする方法
JP4298640B2 (ja) 2004-12-06 2009-07-22 キヤノンマシナリー株式会社 ダイボンダー用コレット

Also Published As

Publication number Publication date
JP2011035261A (ja) 2011-02-17
KR20110014066A (ko) 2011-02-10
JP4397967B1 (ja) 2010-01-13
KR101597644B1 (ko) 2016-02-25
TW201105559A (en) 2011-02-16
TWI474419B (zh) 2015-02-21

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