SG116499A1 - Dual-gate structure and method of fabricating integrated circuits having dual-gate structures. - Google Patents
Dual-gate structure and method of fabricating integrated circuits having dual-gate structures.Info
- Publication number
- SG116499A1 SG116499A1 SG200303967A SG200303967A SG116499A1 SG 116499 A1 SG116499 A1 SG 116499A1 SG 200303967 A SG200303967 A SG 200303967A SG 200303967 A SG200303967 A SG 200303967A SG 116499 A1 SG116499 A1 SG 116499A1
- Authority
- SG
- Singapore
- Prior art keywords
- dual
- integrated circuits
- gate
- fabricating integrated
- gate structure
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823462—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate insulating layers, e.g. different gate insulating layer thicknesses, particular gate insulator materials or particular gate insulator implants
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
- H01L29/513—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures the variation being perpendicular to the channel plane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/517—Insulating materials associated therewith the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Weting (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/226,617 US7030024B2 (en) | 2002-08-23 | 2002-08-23 | Dual-gate structure and method of fabricating integrated circuits having dual-gate structures |
Publications (1)
Publication Number | Publication Date |
---|---|
SG116499A1 true SG116499A1 (en) | 2005-11-28 |
Family
ID=31887285
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200303967A SG116499A1 (en) | 2002-08-23 | 2003-07-03 | Dual-gate structure and method of fabricating integrated circuits having dual-gate structures. |
Country Status (4)
Country | Link |
---|---|
US (2) | US7030024B2 (ko) |
JP (1) | JP4002868B2 (ko) |
KR (1) | KR100623584B1 (ko) |
SG (1) | SG116499A1 (ko) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5651855A (en) * | 1992-07-28 | 1997-07-29 | Micron Technology, Inc. | Method of making self aligned contacts to silicon substrates during the manufacture of integrated circuits |
KR100621542B1 (ko) * | 2004-09-13 | 2006-09-19 | 삼성전자주식회사 | 미세 전자 소자의 다층 유전체막 및 그 제조 방법 |
US7588989B2 (en) | 2001-02-02 | 2009-09-15 | Samsung Electronic Co., Ltd. | Dielectric multilayer structures of microelectronic devices and methods for fabricating the same |
US7371633B2 (en) * | 2001-02-02 | 2008-05-13 | Samsung Electronics Co., Ltd. | Dielectric layer for semiconductor device and method of manufacturing the same |
US7087480B1 (en) * | 2002-04-18 | 2006-08-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Process to make high-k transistor dielectrics |
US6706581B1 (en) * | 2002-10-29 | 2004-03-16 | Taiwan Semiconductor Manufacturing Company | Dual gate dielectric scheme: SiON for high performance devices and high k for low power devices |
US7019351B2 (en) * | 2003-03-12 | 2006-03-28 | Micron Technology, Inc. | Transistor devices, and methods of forming transistor devices and circuit devices |
JP4229762B2 (ja) * | 2003-06-06 | 2009-02-25 | Necエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP4101130B2 (ja) * | 2003-07-24 | 2008-06-18 | Necエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP2005085822A (ja) * | 2003-09-04 | 2005-03-31 | Toshiba Corp | 半導体装置 |
US7071122B2 (en) * | 2003-12-10 | 2006-07-04 | International Business Machines Corporation | Field effect transistor with etched-back gate dielectric |
JP4546201B2 (ja) * | 2004-03-17 | 2010-09-15 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
US8399934B2 (en) * | 2004-12-20 | 2013-03-19 | Infineon Technologies Ag | Transistor device |
DE102004040943B4 (de) * | 2004-08-24 | 2008-07-31 | Qimonda Ag | Verfahren zur selektiven Abscheidung einer Schicht mittels eines ALD-Verfahrens |
US7384880B2 (en) * | 2004-10-12 | 2008-06-10 | Intel Corporation | Method for making a semiconductor device having a high-k gate dielectric |
US7564108B2 (en) * | 2004-12-20 | 2009-07-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Nitrogen treatment to improve high-k gate dielectrics |
JP2006179635A (ja) * | 2004-12-22 | 2006-07-06 | Nec Electronics Corp | Cmos半導体装置 |
US8404594B2 (en) * | 2005-05-27 | 2013-03-26 | Freescale Semiconductor, Inc. | Reverse ALD |
US20070066021A1 (en) * | 2005-09-16 | 2007-03-22 | Texas Instruments Inc. | Formation of gate dielectrics with uniform nitrogen distribution |
JP2007088301A (ja) * | 2005-09-22 | 2007-04-05 | Toshiba Corp | 半導体装置および半導体装置の製造方法 |
JP5234301B2 (ja) | 2005-10-03 | 2013-07-10 | Nltテクノロジー株式会社 | 薄膜トランジスタ、薄膜トランジスタアレイ基板、液晶表示装置およびそれらの製造方法 |
KR100827435B1 (ko) * | 2006-01-31 | 2008-05-06 | 삼성전자주식회사 | 반도체 소자에서 무산소 애싱 공정을 적용한 게이트 형성방법 |
US20080237694A1 (en) * | 2007-03-27 | 2008-10-02 | Michael Specht | Integrated circuit, cell, cell arrangement, method for manufacturing an integrated circuit, method for manufacturing a cell, memory module |
US7998820B2 (en) * | 2007-08-07 | 2011-08-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | High-k gate dielectric and method of manufacture |
US7709331B2 (en) * | 2007-09-07 | 2010-05-04 | Freescale Semiconductor, Inc. | Dual gate oxide device integration |
US20090137119A1 (en) * | 2007-11-28 | 2009-05-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Novel seal isolation liner for use in contact hole formation |
JP2009141168A (ja) * | 2007-12-07 | 2009-06-25 | Panasonic Corp | 半導体装置及びその製造方法 |
JP2010147104A (ja) * | 2008-12-16 | 2010-07-01 | Toshiba Corp | 半導体装置の製造方法 |
US8105892B2 (en) * | 2009-08-18 | 2012-01-31 | International Business Machines Corporation | Thermal dual gate oxide device integration |
JP2010118677A (ja) * | 2010-01-15 | 2010-05-27 | Renesas Technology Corp | 半導体装置 |
JP5521726B2 (ja) * | 2010-04-16 | 2014-06-18 | 富士通セミコンダクター株式会社 | 半導体装置及びその製造方法 |
US9373501B2 (en) * | 2013-04-16 | 2016-06-21 | International Business Machines Corporation | Hydroxyl group termination for nucleation of a dielectric metallic oxide |
KR102365687B1 (ko) | 2015-04-21 | 2022-02-21 | 삼성전자주식회사 | 집적회로 소자 및 그 제조 방법 |
CN105845623B (zh) * | 2016-04-19 | 2019-02-22 | 昆山龙腾光电有限公司 | Tft阵列基板上多次开接触孔的制作方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6030862A (en) * | 1998-10-13 | 2000-02-29 | Advanced Micro Devices, Inc. | Dual gate oxide formation with minimal channel dopant diffusion |
US6063670A (en) * | 1997-04-30 | 2000-05-16 | Texas Instruments Incorporated | Gate fabrication processes for split-gate transistors |
KR20010038795A (ko) * | 1999-10-27 | 2001-05-15 | 윤종용 | 반도체 소자의 두께가 서로 다른 이중 게이트 산화막 형성 방법 |
US6261978B1 (en) * | 1999-02-22 | 2001-07-17 | Motorola, Inc. | Process for forming semiconductor device with thick and thin films |
US6268251B1 (en) * | 2000-07-12 | 2001-07-31 | Chartered Semiconductor Manufacturing Inc. | Method of forming MOS/CMOS devices with dual or triple gate oxide |
US6368923B1 (en) * | 2000-04-20 | 2002-04-09 | United Microelectronics Corp. | Method of fabricating a dual metal gate having two different gate dielectric layers |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3407204B2 (ja) * | 1992-07-23 | 2003-05-19 | オリンパス光学工業株式会社 | 強誘電体集積回路及びその製造方法 |
US6320238B1 (en) * | 1996-12-23 | 2001-11-20 | Agere Systems Guardian Corp. | Gate structure for integrated circuit fabrication |
US6262456B1 (en) * | 1998-11-06 | 2001-07-17 | Advanced Micro Devices, Inc. | Integrated circuit having transistors with different threshold voltages |
US6210999B1 (en) * | 1998-12-04 | 2001-04-03 | Advanced Micro Devices, Inc. | Method and test structure for low-temperature integration of high dielectric constant gate dielectrics into self-aligned semiconductor devices |
US6383871B1 (en) * | 1999-08-31 | 2002-05-07 | Micron Technology, Inc. | Method of forming multiple oxide thicknesses for merged memory and logic applications |
US6297103B1 (en) * | 2000-02-28 | 2001-10-02 | Micron Technology, Inc. | Structure and method for dual gate oxide thicknesses |
US6475911B1 (en) * | 2000-08-16 | 2002-11-05 | Micron Technology, Inc. | Method of forming noble metal pattern |
US6518106B2 (en) * | 2001-05-26 | 2003-02-11 | Motorola, Inc. | Semiconductor device and a method therefor |
US6524908B2 (en) * | 2001-06-01 | 2003-02-25 | International Business Machines Corporation | Method for forming refractory metal-silicon-nitrogen capacitors and structures formed |
US6656852B2 (en) * | 2001-12-06 | 2003-12-02 | Texas Instruments Incorporated | Method for the selective removal of high-k dielectrics |
US6660578B1 (en) * | 2002-04-08 | 2003-12-09 | Advanced Micro Devices, Inc. | High-K dielectric having barrier layer for P-doped devices and method of fabrication |
US6764898B1 (en) * | 2002-05-16 | 2004-07-20 | Advanced Micro Devices, Inc. | Implantation into high-K dielectric material after gate etch to facilitate removal |
-
2002
- 2002-08-23 US US10/226,617 patent/US7030024B2/en not_active Expired - Fee Related
-
2003
- 2003-07-03 SG SG200303967A patent/SG116499A1/en unknown
- 2003-08-22 JP JP2003208505A patent/JP4002868B2/ja not_active Expired - Lifetime
- 2003-08-22 KR KR1020030058437A patent/KR100623584B1/ko active IP Right Grant
-
2005
- 2005-12-16 US US11/303,530 patent/US7271450B2/en not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6063670A (en) * | 1997-04-30 | 2000-05-16 | Texas Instruments Incorporated | Gate fabrication processes for split-gate transistors |
US6030862A (en) * | 1998-10-13 | 2000-02-29 | Advanced Micro Devices, Inc. | Dual gate oxide formation with minimal channel dopant diffusion |
US6261978B1 (en) * | 1999-02-22 | 2001-07-17 | Motorola, Inc. | Process for forming semiconductor device with thick and thin films |
KR20010038795A (ko) * | 1999-10-27 | 2001-05-15 | 윤종용 | 반도체 소자의 두께가 서로 다른 이중 게이트 산화막 형성 방법 |
US6368923B1 (en) * | 2000-04-20 | 2002-04-09 | United Microelectronics Corp. | Method of fabricating a dual metal gate having two different gate dielectric layers |
US6268251B1 (en) * | 2000-07-12 | 2001-07-31 | Chartered Semiconductor Manufacturing Inc. | Method of forming MOS/CMOS devices with dual or triple gate oxide |
Also Published As
Publication number | Publication date |
---|---|
US20040038538A1 (en) | 2004-02-26 |
KR100623584B1 (ko) | 2006-09-18 |
US20060091469A1 (en) | 2006-05-04 |
JP2004253767A (ja) | 2004-09-09 |
KR20040018225A (ko) | 2004-03-02 |
US7030024B2 (en) | 2006-04-18 |
US7271450B2 (en) | 2007-09-18 |
JP4002868B2 (ja) | 2007-11-07 |
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