SG115676A1 - Method for fabricating a gate structure of a field effect transistor - Google Patents
Method for fabricating a gate structure of a field effect transistorInfo
- Publication number
- SG115676A1 SG115676A1 SG200402070A SG200402070A SG115676A1 SG 115676 A1 SG115676 A1 SG 115676A1 SG 200402070 A SG200402070 A SG 200402070A SG 200402070 A SG200402070 A SG 200402070A SG 115676 A1 SG115676 A1 SG 115676A1
- Authority
- SG
- Singapore
- Prior art keywords
- fabricating
- field effect
- effect transistor
- gate structure
- gate
- Prior art date
Links
- 230000005669 field effect Effects 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
- H01L21/02071—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a delineation, e.g. RIE, of conductive layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
- B23Q7/04—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers
- B23Q7/048—Multiple gripper units
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B25/00—Screws that cut thread in the body into which they are screwed, e.g. wood screws
- F16B25/0036—Screws that cut thread in the body into which they are screwed, e.g. wood screws characterised by geometric details of the screw
- F16B25/0042—Screws that cut thread in the body into which they are screwed, e.g. wood screws characterised by geometric details of the screw characterised by the geometry of the thread, the thread being a ridge wrapped around the shaft of the screw
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B39/00—Locking of screws, bolts or nuts
- F16B39/22—Locking of screws, bolts or nuts in which the locking takes place during screwing down or tightening
- F16B39/28—Locking of screws, bolts or nuts in which the locking takes place during screwing down or tightening by special members on, or shape of, the nut or bolt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
- H01L21/31122—Etching inorganic layers by chemical means by dry-etching of layers not containing Si, e.g. PZT, Al2O3
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
- H01L21/32137—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas of silicon-containing layers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Geometry (AREA)
- Drying Of Semiconductors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/418,995 US20040209468A1 (en) | 2003-04-17 | 2003-04-17 | Method for fabricating a gate structure of a field effect transistor |
Publications (1)
Publication Number | Publication Date |
---|---|
SG115676A1 true SG115676A1 (en) | 2005-10-28 |
Family
ID=32908366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200402070A SG115676A1 (en) | 2003-04-17 | 2004-04-16 | Method for fabricating a gate structure of a field effect transistor |
Country Status (7)
Country | Link |
---|---|
US (1) | US20040209468A1 (fr) |
EP (1) | EP1469510A3 (fr) |
JP (1) | JP2004336029A (fr) |
KR (1) | KR20040090931A (fr) |
CN (1) | CN1538504A (fr) |
SG (1) | SG115676A1 (fr) |
TW (1) | TW200428658A (fr) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7723242B2 (en) * | 2004-03-15 | 2010-05-25 | Sharp Laboratories Of America, Inc. | Enhanced thin-film oxidation process |
KR101037308B1 (ko) | 2003-05-30 | 2011-05-27 | 도쿄엘렉트론가부시키가이샤 | 고-k 유전성 재료 에칭 방법 및 시스템 |
US20050153563A1 (en) * | 2004-01-14 | 2005-07-14 | Lam Research Corporation | Selective etch of films with high dielectric constant |
US8119210B2 (en) | 2004-05-21 | 2012-02-21 | Applied Materials, Inc. | Formation of a silicon oxynitride layer on a high-k dielectric material |
US7431795B2 (en) * | 2004-07-29 | 2008-10-07 | Applied Materials, Inc. | Cluster tool and method for process integration in manufacture of a gate structure of a field effect transistor |
US20060032833A1 (en) * | 2004-08-10 | 2006-02-16 | Applied Materials, Inc. | Encapsulation of post-etch halogenic residue |
US7402472B2 (en) * | 2005-02-25 | 2008-07-22 | Freescale Semiconductor, Inc. | Method of making a nitrided gate dielectric |
JP4671729B2 (ja) * | 2005-03-28 | 2011-04-20 | 富士通セミコンダクター株式会社 | 半導体装置及びその製造方法 |
US20070190795A1 (en) * | 2006-02-13 | 2007-08-16 | Haoren Zhuang | Method for fabricating a semiconductor device with a high-K dielectric |
US7645710B2 (en) | 2006-03-09 | 2010-01-12 | Applied Materials, Inc. | Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system |
US7678710B2 (en) | 2006-03-09 | 2010-03-16 | Applied Materials, Inc. | Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system |
US7837838B2 (en) | 2006-03-09 | 2010-11-23 | Applied Materials, Inc. | Method of fabricating a high dielectric constant transistor gate using a low energy plasma apparatus |
US8183161B2 (en) * | 2006-09-12 | 2012-05-22 | Tokyo Electron Limited | Method and system for dry etching a hafnium containing material |
WO2008039845A2 (fr) | 2006-09-26 | 2008-04-03 | Applied Materials, Inc. | Traitement au plasma de fluor d'un empilement de grille à constante diélectrique (k) élevée pour la passivation de défauts |
US7776696B2 (en) * | 2007-04-30 | 2010-08-17 | Spansion Llc | Method to obtain multiple gate thicknesses using in-situ gate etch mask approach |
JP2009021584A (ja) * | 2007-06-27 | 2009-01-29 | Applied Materials Inc | 高k材料ゲート構造の高温エッチング方法 |
US20090096001A1 (en) * | 2007-10-15 | 2009-04-16 | Qimonda Ag | Integrated Circuit and Method of Manufacturing the Same |
JP5072531B2 (ja) * | 2007-10-24 | 2012-11-14 | 東京エレクトロン株式会社 | プラズマエッチング方法及び記憶媒体 |
TWI421919B (zh) * | 2008-07-24 | 2014-01-01 | Lam Res Corp | 藉由順序施加化學品以進行半導體基板之表面處理的方法與設備 |
JP5250476B2 (ja) * | 2009-05-11 | 2013-07-31 | 株式会社日立ハイテクノロジーズ | ドライエッチング方法 |
US8368125B2 (en) | 2009-07-20 | 2013-02-05 | International Business Machines Corporation | Multiple orientation nanowires with gate stack stressors |
US20110012177A1 (en) * | 2009-07-20 | 2011-01-20 | International Business Machines Corporation | Nanostructure For Changing Electric Mobility |
US8871107B2 (en) * | 2013-03-15 | 2014-10-28 | International Business Machines Corporation | Subtractive plasma etching of a blanket layer of metal or metal alloy |
DE102013223490B4 (de) * | 2013-11-18 | 2023-07-06 | Robert Bosch Gmbh | Verfahren zur Herstellung einer strukturierten Oberfläche |
US9570319B2 (en) * | 2014-05-30 | 2017-02-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of manufacturing a semiconductor device |
US9793273B2 (en) | 2014-07-18 | 2017-10-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fin-based semiconductor device including a metal gate diffusion break structure with a conformal dielectric layer |
KR102333699B1 (ko) * | 2014-12-19 | 2021-12-02 | 에스케이하이닉스 주식회사 | 고유전 금속 게이트스택의 에칭 방법 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5895245A (en) * | 1997-06-17 | 1999-04-20 | Vlsi Technology, Inc. | Plasma ash for silicon surface preparation |
US6303482B1 (en) * | 2000-06-19 | 2001-10-16 | United Microelectronics Corp. | Method for cleaning the surface of a semiconductor wafer |
TW525223B (en) * | 1999-12-14 | 2003-03-21 | United Microelectronics Corp | Method for removing photoresist and residual polymer from polysilicon gate |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3524763B2 (ja) * | 1998-05-12 | 2004-05-10 | 株式会社日立製作所 | エッチング方法 |
JP2000150678A (ja) * | 1998-11-10 | 2000-05-30 | Mitsubishi Electric Corp | 不揮発性半導体記憶装置およびその製造方法 |
US6242350B1 (en) * | 1999-03-18 | 2001-06-05 | Taiwan Semiconductor Manufacturing Company | Post gate etch cleaning process for self-aligned gate mosfets |
WO2001054184A1 (fr) * | 2000-01-19 | 2001-07-26 | Philips Semiconductors, Inc. | Methode d'elimination de residus par gravure a l'oxyde reduite |
JP4056195B2 (ja) * | 2000-03-30 | 2008-03-05 | 株式会社ルネサステクノロジ | 半導体集積回路装置の製造方法 |
TW449929B (en) * | 2000-08-02 | 2001-08-11 | Ind Tech Res Inst | Structure and manufacturing method of amorphous-silicon thin film transistor array |
US6455330B1 (en) * | 2002-01-28 | 2002-09-24 | Taiwan Semiconductor Manufacturing Company | Methods to create high-k dielectric gate electrodes with backside cleaning |
US6451647B1 (en) * | 2002-03-18 | 2002-09-17 | Advanced Micro Devices, Inc. | Integrated plasma etch of gate and gate dielectric and low power plasma post gate etch removal of high-K residual |
-
2003
- 2003-04-17 US US10/418,995 patent/US20040209468A1/en not_active Abandoned
-
2004
- 2004-04-16 SG SG200402070A patent/SG115676A1/en unknown
- 2004-04-16 JP JP2004122245A patent/JP2004336029A/ja not_active Withdrawn
- 2004-04-16 TW TW093110641A patent/TW200428658A/zh unknown
- 2004-04-16 EP EP04009164A patent/EP1469510A3/fr not_active Withdrawn
- 2004-04-17 KR KR1020040026447A patent/KR20040090931A/ko not_active Application Discontinuation
- 2004-04-19 CN CNA200410033896XA patent/CN1538504A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5895245A (en) * | 1997-06-17 | 1999-04-20 | Vlsi Technology, Inc. | Plasma ash for silicon surface preparation |
TW525223B (en) * | 1999-12-14 | 2003-03-21 | United Microelectronics Corp | Method for removing photoresist and residual polymer from polysilicon gate |
US6303482B1 (en) * | 2000-06-19 | 2001-10-16 | United Microelectronics Corp. | Method for cleaning the surface of a semiconductor wafer |
Also Published As
Publication number | Publication date |
---|---|
JP2004336029A (ja) | 2004-11-25 |
EP1469510A2 (fr) | 2004-10-20 |
KR20040090931A (ko) | 2004-10-27 |
US20040209468A1 (en) | 2004-10-21 |
EP1469510A3 (fr) | 2005-04-13 |
CN1538504A (zh) | 2004-10-20 |
TW200428658A (en) | 2004-12-16 |
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