SG11202105171RA - Systems and methods for purifying solvents - Google Patents
Systems and methods for purifying solventsInfo
- Publication number
- SG11202105171RA SG11202105171RA SG11202105171RA SG11202105171RA SG11202105171RA SG 11202105171R A SG11202105171R A SG 11202105171RA SG 11202105171R A SG11202105171R A SG 11202105171RA SG 11202105171R A SG11202105171R A SG 11202105171RA SG 11202105171R A SG11202105171R A SG 11202105171RA
- Authority
- SG
- Singapore
- Prior art keywords
- systems
- methods
- purifying solvents
- purifying
- solvents
- Prior art date
Links
- 239000002904 solvent Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
- B01D61/025—Reverse osmosis; Hyperfiltration
- B01D61/026—Reverse osmosis; Hyperfiltration comprising multiple reverse osmosis steps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
- B01D15/08—Selective adsorption, e.g. chromatography
- B01D15/26—Selective adsorption, e.g. chromatography characterised by the separation mechanism
- B01D15/36—Selective adsorption, e.g. chromatography characterised by the separation mechanism involving ionic interaction
- B01D15/361—Ion-exchange
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
- B01D61/08—Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/06—Organic material
- B01D71/26—Polyalkenes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/06—Organic material
- B01D71/26—Polyalkenes
- B01D71/261—Polyethylene
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/06—Organic material
- B01D71/30—Polyalkenyl halides
- B01D71/32—Polyalkenyl halides containing fluorine atoms
- B01D71/36—Polytetrafluoroethene
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/06—Organic material
- B01D71/56—Polyamides, e.g. polyester-amides
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C45/00—Preparation of compounds having >C = O groups bound only to carbon or hydrogen atoms; Preparation of chelates of such compounds
- C07C45/78—Separation; Purification; Stabilisation; Use of additives
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C45/00—Preparation of compounds having >C = O groups bound only to carbon or hydrogen atoms; Preparation of chelates of such compounds
- C07C45/78—Separation; Purification; Stabilisation; Use of additives
- C07C45/786—Separation; Purification; Stabilisation; Use of additives by membrane separation process, e.g. pervaporation, perstraction, reverse osmosis
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C45/00—Preparation of compounds having >C = O groups bound only to carbon or hydrogen atoms; Preparation of chelates of such compounds
- C07C45/78—Separation; Purification; Stabilisation; Use of additives
- C07C45/79—Separation; Purification; Stabilisation; Use of additives by solid-liquid treatment; by chemisorption
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C49/00—Ketones; Ketenes; Dimeric ketenes; Ketonic chelates
- C07C49/385—Saturated compounds containing a keto group being part of a ring
- C07C49/403—Saturated compounds containing a keto group being part of a ring of a six-membered ring
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C67/00—Preparation of carboxylic acid esters
- C07C67/48—Separation; Purification; Stabilisation; Use of additives
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C67/00—Preparation of carboxylic acid esters
- C07C67/48—Separation; Purification; Stabilisation; Use of additives
- C07C67/56—Separation; Purification; Stabilisation; Use of additives by solid-liquid treatment; by chemisorption
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C69/00—Esters of carboxylic acids; Esters of carbonic or haloformic acids
- C07C69/02—Esters of acyclic saturated monocarboxylic acids having the carboxyl group bound to an acyclic carbon atom or to hydrogen
- C07C69/12—Acetic acid esters
- C07C69/14—Acetic acid esters of monohydroxylic compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2311/00—Details relating to membrane separation process operations and control
- B01D2311/25—Recirculation, recycling or bypass, e.g. recirculation of concentrate into the feed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2311/00—Details relating to membrane separation process operations and control
- B01D2311/25—Recirculation, recycling or bypass, e.g. recirculation of concentrate into the feed
- B01D2311/251—Recirculation of permeate
- B01D2311/2512—Recirculation of permeate to feed side
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2311/00—Details relating to membrane separation process operations and control
- B01D2311/26—Further operations combined with membrane separation processes
- B01D2311/2623—Ion-Exchange
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2313/00—Details relating to membrane modules or apparatus
- B01D2313/20—Specific housing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2313/00—Details relating to membrane modules or apparatus
- B01D2313/20—Specific housing
- B01D2313/206—Specific housing characterised by the material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/30—Chemical resistance
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C2601/00—Systems containing only non-condensed rings
- C07C2601/12—Systems containing only non-condensed rings with a six-membered ring
- C07C2601/14—The ring being saturated
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Water Supply & Treatment (AREA)
- Nanotechnology (AREA)
- Analytical Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Filtering Materials (AREA)
- Filtration Of Liquid (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862769612P | 2018-11-20 | 2018-11-20 | |
PCT/US2019/061664 WO2020106567A1 (en) | 2018-11-20 | 2019-11-15 | Systems and methods for purifying solvents |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202105171RA true SG11202105171RA (en) | 2021-06-29 |
Family
ID=70727333
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202105171RA SG11202105171RA (en) | 2018-11-20 | 2019-11-15 | Systems and methods for purifying solvents |
Country Status (9)
Country | Link |
---|---|
US (1) | US10773210B2 (de) |
EP (1) | EP3883676A4 (de) |
JP (1) | JP2022507876A (de) |
KR (1) | KR20210089777A (de) |
CN (2) | CN113286647B (de) |
IL (1) | IL283235A (de) |
SG (1) | SG11202105171RA (de) |
TW (1) | TW202033487A (de) |
WO (1) | WO2020106567A1 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020035731A1 (en) * | 2018-08-14 | 2020-02-20 | 1441413 Alberta Inc. DBA EPT | Highly porous lubricant conditioning and remediation media |
US20200129884A1 (en) * | 2018-10-24 | 2020-04-30 | Fujifilm Electronic Materials U.S.A., Inc. | Chemical liquid manufacturing apparatus and method of manufacturing chemical liquid |
KR20210090194A (ko) * | 2018-11-21 | 2021-07-19 | 후지필름 일렉트로닉 머티리얼스 유.에스.에이., 아이엔씨. | 화학 액체 제조 장치 및 화학 액체의 제조 방법 |
EP4025319A4 (de) | 2019-09-03 | 2022-08-03 | FUJIFILM Electronic Materials U.S.A, Inc. | Systeme und verfahren zur reinigung von lösungsmitteln |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001224929A (ja) * | 1999-08-04 | 2001-08-21 | Fuji Photo Film Co Ltd | 精密ろ過フィルターカートリッジ |
SG152910A1 (en) | 2001-12-07 | 2009-06-29 | Tokyo Electron Ltd | Nitriding method for insulation film, semiconductor device and production method for semiconductor device, substrate treating device and substrate treating method |
JP6075124B2 (ja) * | 2012-03-15 | 2017-02-08 | Jsr株式会社 | 現像液の精製方法 |
JP2014183245A (ja) * | 2013-03-21 | 2014-09-29 | Toyoda Gosei Co Ltd | Iii族窒化物半導体製造装置の洗浄方法および洗浄装置 |
JP5728517B2 (ja) * | 2013-04-02 | 2015-06-03 | 富士フイルム株式会社 | 化学増幅型レジスト膜のパターニング用有機系処理液の製造方法、パターン形成方法、及び、電子デバイスの製造方法 |
JP5886804B2 (ja) * | 2013-09-02 | 2016-03-16 | 信越化学工業株式会社 | レジスト組成物の製造方法 |
JP6157408B2 (ja) | 2014-05-22 | 2017-07-05 | 三菱電機株式会社 | 溶融金属吐出装置および溶融金属吐出方法 |
JP6427590B2 (ja) | 2014-09-30 | 2018-11-21 | 富士フイルム株式会社 | レジスト膜のパターニング用有機系処理液の製造方法、及び、レジスト膜のパターニング用有機系処理液が収容された収容容器、並びに、これらを使用したレジスト膜のパターニング用有機系処理液の保管方法、パターン形成方法、及び、電子デバイスの製造方法 |
JP2016073922A (ja) | 2014-10-07 | 2016-05-12 | 信越化学工業株式会社 | 有機溶剤の精製装置 |
JP2016075920A (ja) * | 2015-11-16 | 2016-05-12 | 富士フイルム株式会社 | 化学増幅型レジスト膜のパターニング用有機系処理液の製造方法、パターン形成方法及び電子デバイスの製造方法 |
US10159949B2 (en) * | 2016-03-11 | 2018-12-25 | Fujifilm Planar Solutions, LLC | Advanced fluid processing methods and systems |
CN109075035B (zh) | 2016-04-28 | 2023-06-13 | 富士胶片株式会社 | 处理液及处理液收容体 |
TWI822658B (zh) * | 2016-09-02 | 2023-11-21 | 日商富士軟片股份有限公司 | 有機溶劑的精製方法及有機溶劑的精製裝置 |
JP6847123B2 (ja) | 2016-11-07 | 2021-03-24 | 富士フイルム株式会社 | 処理液及びパターン形成方法 |
WO2018180735A1 (ja) * | 2017-03-31 | 2018-10-04 | 富士フイルム株式会社 | 薬液の精製方法、薬液の製造方法、及び、薬液 |
KR102500938B1 (ko) * | 2018-01-12 | 2023-02-17 | 후지필름 가부시키가이샤 | 약액, 약액의 제조 방법 |
KR20210014097A (ko) * | 2018-03-30 | 2021-02-08 | 후지필름 일렉트로닉 머티리얼스 유.에스.에이., 아이엔씨. | 화학 액체 제조 장치 |
-
2019
- 2019-11-15 KR KR1020217019011A patent/KR20210089777A/ko active Search and Examination
- 2019-11-15 EP EP19887485.1A patent/EP3883676A4/de active Pending
- 2019-11-15 SG SG11202105171RA patent/SG11202105171RA/en unknown
- 2019-11-15 WO PCT/US2019/061664 patent/WO2020106567A1/en unknown
- 2019-11-15 CN CN201980088674.2A patent/CN113286647B/zh active Active
- 2019-11-15 US US16/684,769 patent/US10773210B2/en active Active
- 2019-11-15 JP JP2021528468A patent/JP2022507876A/ja active Pending
- 2019-11-15 CN CN202410311251.5A patent/CN118179262A/zh active Pending
- 2019-11-19 TW TW108142013A patent/TW202033487A/zh unknown
-
2021
- 2021-05-18 IL IL283235A patent/IL283235A/en unknown
Also Published As
Publication number | Publication date |
---|---|
CN113286647A (zh) | 2021-08-20 |
JP2022507876A (ja) | 2022-01-18 |
US20200156005A1 (en) | 2020-05-21 |
IL283235A (en) | 2021-07-29 |
WO2020106567A1 (en) | 2020-05-28 |
CN118179262A (zh) | 2024-06-14 |
TW202033487A (zh) | 2020-09-16 |
CN113286647B (zh) | 2024-04-05 |
KR20210089777A (ko) | 2021-07-16 |
US10773210B2 (en) | 2020-09-15 |
EP3883676A4 (de) | 2022-10-05 |
EP3883676A1 (de) | 2021-09-29 |
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