SG11201901725WA - Vacuum coating apparatus - Google Patents

Vacuum coating apparatus

Info

Publication number
SG11201901725WA
SG11201901725WA SG11201901725WA SG11201901725WA SG11201901725WA SG 11201901725W A SG11201901725W A SG 11201901725WA SG 11201901725W A SG11201901725W A SG 11201901725WA SG 11201901725W A SG11201901725W A SG 11201901725WA SG 11201901725W A SG11201901725W A SG 11201901725WA
Authority
SG
Singapore
Prior art keywords
international
gradient
substrate holder
pct
mask
Prior art date
Application number
SG11201901725WA
Other languages
English (en)
Inventor
Franco Moreni
Antonio Corea
Giuseppe Viscomi
Original Assignee
Satisloh Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Satisloh Ag filed Critical Satisloh Ag
Publication of SG11201901725WA publication Critical patent/SG11201901725WA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00317—Production of lenses with markings or patterns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00865—Applying coatings; tinting; colouring

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
SG11201901725WA 2016-09-16 2017-09-06 Vacuum coating apparatus SG11201901725WA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP16002019.4A EP3296423B1 (en) 2016-09-16 2016-09-16 Vacuum coating apparatus
PCT/EP2017/001051 WO2018050270A1 (en) 2016-09-16 2017-09-06 Vacuum coating apparatus

Publications (1)

Publication Number Publication Date
SG11201901725WA true SG11201901725WA (en) 2019-04-29

Family

ID=56985423

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201901725WA SG11201901725WA (en) 2016-09-16 2017-09-06 Vacuum coating apparatus

Country Status (7)

Country Link
US (1) US10913996B2 (zh)
EP (1) EP3296423B1 (zh)
KR (1) KR102203002B1 (zh)
CN (2) CN207727134U (zh)
SG (1) SG11201901725WA (zh)
TW (1) TWI660191B (zh)
WO (1) WO2018050270A1 (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3296423B1 (en) * 2016-09-16 2019-01-30 Satisloh AG Vacuum coating apparatus
FR3058424B1 (fr) * 2016-11-10 2022-06-10 Bnl Eurolens Installation de depot par evaporation d'un revetement sur des articles
IT201900008784A1 (it) * 2019-06-12 2020-12-12 Thelios S P A Metodo per realizzare una lente di occhiali rivestita mediante deposizione fisica di vapore pvd, lente di occhiali ed occhiale dotato di lenti realizzate con detto metodo
DE102020118367A1 (de) * 2020-07-13 2022-01-13 Carl Zeiss Vision International Gmbh Vorrichtung zum Aufnehmen eines Gegenstands in einer Vakuumbeschichtungsanlage
CN113416934B (zh) * 2021-06-26 2023-07-25 丹阳市鼎新机械设备有限公司 一种镜片双舱真空镀膜工艺
CN115407432B (zh) * 2022-08-29 2023-12-22 歌尔光学科技有限公司 一种真空镀膜系统

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH650028A5 (de) * 1980-09-26 1985-06-28 Balzers Hochvakuum Anordnung zum gleichfoermigen beschichten von rotationsflaechen durch bedampfen im hochvakuum.
CH652754A5 (de) * 1981-03-13 1985-11-29 Balzers Hochvakuum Anordnung zum beschichten von substraten in einer vakuumbeschichtungsanlage.
JP2913745B2 (ja) * 1990-04-10 1999-06-28 松下電器産業株式会社 真空蒸着装置
FR2775298B1 (fr) * 1998-02-24 2000-05-05 Essilor Int Cache de repartition pour le controle du depot par evaporation d'un quelconque revetement sur un quelconque substrat, enceinte de traitement mettant en oeuvre un tel cache de repartition, et procede correspondant
DE10324928A1 (de) 2003-06-03 2005-07-14 Leybold Optics Gmbh Vakuumbeschichtungsanlage
JP3966869B2 (ja) * 2004-05-11 2007-08-29 株式会社昭和真空 基板ドーム
KR200435257Y1 (ko) * 2006-09-29 2007-01-12 (주)인텍 진공 증착기
US8293017B2 (en) * 2008-04-10 2012-10-23 Raytheon Canada Limited Method and apparatus for coating surfaces
US8246748B2 (en) * 2008-07-09 2012-08-21 Raytheon Canada Limited Method and apparatus for coating surfaces
US20100102025A1 (en) * 2008-10-28 2010-04-29 Essilor International (Compagnie Generale D'optique) Method and apparatus for marking coated ophthalmic substrates or lens blanks having one or more electrically conductive layers
CN103668075B (zh) * 2012-09-05 2015-11-11 财团法人工业技术研究院 具有弧形载盘的旋转定位装置、自动取放系统及其操作方法
CN105143500B (zh) * 2012-10-04 2017-10-10 康宁股份有限公司 光学涂覆方法、设备和产品
CN107250422B (zh) * 2015-03-11 2019-09-06 依视路国际公司 热蒸发器
EP3296423B1 (en) * 2016-09-16 2019-01-30 Satisloh AG Vacuum coating apparatus

Also Published As

Publication number Publication date
CN107829069A (zh) 2018-03-23
KR102203002B1 (ko) 2021-01-14
CN207727134U (zh) 2018-08-14
EP3296423A1 (en) 2018-03-21
EP3296423B1 (en) 2019-01-30
US10913996B2 (en) 2021-02-09
TWI660191B (zh) 2019-05-21
US20190376176A1 (en) 2019-12-12
CN107829069B (zh) 2020-05-22
TW201814329A (zh) 2018-04-16
KR20190056364A (ko) 2019-05-24
WO2018050270A1 (en) 2018-03-22

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