SG11201704516QA - Structure for radiofrequency applications - Google Patents
Structure for radiofrequency applicationsInfo
- Publication number
- SG11201704516QA SG11201704516QA SG11201704516QA SG11201704516QA SG11201704516QA SG 11201704516Q A SG11201704516Q A SG 11201704516QA SG 11201704516Q A SG11201704516Q A SG 11201704516QA SG 11201704516Q A SG11201704516Q A SG 11201704516QA SG 11201704516Q A SG11201704516Q A SG 11201704516QA
- Authority
- SG
- Singapore
- Prior art keywords
- radiofrequency applications
- radiofrequency
- applications
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/02—Transmitters
- H04B1/03—Constructional details, e.g. casings, housings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/64—Carriers or collectors
- H01M4/66—Selection of materials
- H01M4/663—Selection of materials containing carbon or carbonaceous materials as conductive part, e.g. graphite, carbon fibres
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/24—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using chemical vapour deposition [CVD]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/29—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
- H10P14/2901—Materials
- H10P14/2902—Materials being Group IVA materials
- H10P14/2904—Silicon carbide
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/29—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
- H10P14/2901—Materials
- H10P14/2902—Materials being Group IVA materials
- H10P14/2905—Silicon, silicon germanium or germanium
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/34—Deposited materials, e.g. layers
- H10P14/3402—Deposited materials, e.g. layers characterised by the chemical composition
- H10P14/3404—Deposited materials, e.g. layers characterised by the chemical composition being Group IVA materials
- H10P14/3408—Silicon carbide
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/34—Deposited materials, e.g. layers
- H10P14/3402—Deposited materials, e.g. layers characterised by the chemical composition
- H10P14/3404—Deposited materials, e.g. layers characterised by the chemical composition being Group IVA materials
- H10P14/3411—Silicon, silicon germanium or germanium
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P36/00—Gettering within semiconductor bodies
- H10P36/03—Gettering within semiconductor bodies within silicon bodies
- H10P36/07—Gettering within semiconductor bodies within silicon bodies of silicon-on-insulator structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
- H10P90/19—Preparing inhomogeneous wafers
- H10P90/1904—Preparing vertically inhomogeneous wafers
- H10P90/1906—Preparing SOI wafers
- H10P90/1914—Preparing SOI wafers using bonding
- H10P90/1916—Preparing SOI wafers using bonding with separation or delamination along an ion implanted layer, e.g. Smart-cut
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
- H10P90/19—Preparing inhomogeneous wafers
- H10P90/1904—Preparing vertically inhomogeneous wafers
- H10P90/1906—Preparing SOI wafers
- H10P90/1914—Preparing SOI wafers using bonding
- H10P90/1918—Preparing SOI wafers using bonding including charge trapping layers, e.g. polycrystalline materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/10—Isolation regions comprising dielectric materials
- H10W10/181—Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/01—Manufacture or treatment
- H10D64/031—Manufacture or treatment of data-storage electrodes
- H10D64/037—Manufacture or treatment of data-storage electrodes comprising charge-trapping insulators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/69—Inorganic materials
- H10P14/6903—Inorganic materials containing silicon
- H10P14/6905—Inorganic materials containing silicon being a silicon carbide or silicon carbonitride and not containing oxygen, e.g. SiC or SiC:H
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/01—Manufacture or treatment
- H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
- H10W10/019—Manufacture or treatment of isolation regions comprising dielectric materials using epitaxial passivated integrated circuit [EPIC] processes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/10—Isolation regions comprising dielectric materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Computer Networks & Wireless Communication (AREA)
- Signal Processing (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Semiconductor Integrated Circuits (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Recrystallisation Techniques (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1402801A FR3029682B1 (fr) | 2014-12-04 | 2014-12-04 | Substrat semi-conducteur haute resistivite et son procede de fabrication |
| PCT/FR2015/052494 WO2016087728A1 (fr) | 2014-12-04 | 2015-09-17 | Structure pour applications radiofréquences |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201704516QA true SG11201704516QA (en) | 2017-07-28 |
Family
ID=53039463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201704516QA SG11201704516QA (en) | 2014-12-04 | 2015-09-17 | Structure for radiofrequency applications |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US10250282B2 (https=) |
| EP (2) | EP3872839A1 (https=) |
| JP (1) | JP6612872B2 (https=) |
| KR (1) | KR102395398B1 (https=) |
| CN (1) | CN107004572B (https=) |
| FR (1) | FR3029682B1 (https=) |
| SG (1) | SG11201704516QA (https=) |
| WO (1) | WO2016087728A1 (https=) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3037438B1 (fr) | 2015-06-09 | 2017-06-16 | Soitec Silicon On Insulator | Procede de fabrication d'un element semi-conducteur comprenant une couche de piegeage de charges |
| US10541667B2 (en) * | 2015-08-25 | 2020-01-21 | Avago Technologies International Sales Pte. Limited | Surface acoustic wave (SAW) resonator having trap-rich region |
| US10530327B2 (en) * | 2015-08-25 | 2020-01-07 | Avago Technologies International Sales Pte. Limited | Surface acoustic wave (SAW) resonator |
| US10523178B2 (en) | 2015-08-25 | 2019-12-31 | Avago Technologies International Sales Pte. Limited | Surface acoustic wave (SAW) resonator |
| US10181428B2 (en) * | 2015-08-28 | 2019-01-15 | Skyworks Solutions, Inc. | Silicon on porous silicon |
| EP3144958B1 (en) | 2015-09-17 | 2021-03-17 | Soitec | Structure for radiofrequency applications and process for manufacturing such a structure |
| CN108605422B (zh) * | 2016-02-25 | 2019-12-17 | 日本瑞翁株式会社 | 导热片及其制造方法、以及散热装置 |
| FR3053532B1 (fr) | 2016-06-30 | 2018-11-16 | Soitec | Structure hybride pour dispositif a ondes acoustiques de surface |
| FR3058561B1 (fr) | 2016-11-04 | 2018-11-02 | Soitec | Procede de fabrication d'un element semi-conducteur comprenant un substrat hautement resistif |
| FR3062238A1 (fr) * | 2017-01-26 | 2018-07-27 | Soitec | Support pour une structure semi-conductrice |
| FR3062517B1 (fr) * | 2017-02-02 | 2019-03-15 | Soitec | Structure pour application radiofrequence |
| US10784348B2 (en) | 2017-03-23 | 2020-09-22 | Qualcomm Incorporated | Porous semiconductor handle substrate |
| US11063117B2 (en) * | 2017-04-20 | 2021-07-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device structure having carrier-trapping layers with different grain sizes |
| FR3067517B1 (fr) * | 2017-06-13 | 2019-07-12 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Substrat soi compatible avec les technologies rfsoi et fdsoi |
| FR3079662B1 (fr) * | 2018-03-30 | 2020-02-28 | Soitec | Substrat pour applications radiofrequences et procede de fabrication associe |
| JP6827442B2 (ja) * | 2018-06-14 | 2021-02-10 | 信越半導体株式会社 | 貼り合わせsoiウェーハの製造方法及び貼り合わせsoiウェーハ |
| US20210183691A1 (en) * | 2018-07-05 | 2021-06-17 | Soitec | Substrate for an integrated radiofrequency device, and process for manufacturing same |
| FR3098642B1 (fr) | 2019-07-12 | 2021-06-11 | Soitec Silicon On Insulator | procédé de fabrication d'une structure comprenant une couche mince reportée sur un support muni d’une couche de piégeage de charges |
| CN114207782B (zh) * | 2019-07-19 | 2026-03-27 | Iqe公开有限公司 | 具有可调介电常数和可调热导率的半导体材料 |
| CN113629182A (zh) * | 2020-05-08 | 2021-11-09 | 济南晶正电子科技有限公司 | 一种tc-saw复合衬底及其制备方法 |
| CN111884616B (zh) * | 2020-07-23 | 2021-04-13 | 中国科学院上海微系统与信息技术研究所 | 一种衬底基板/压电材料薄膜结构及其制备方法和应用 |
| US20220116014A1 (en) * | 2020-10-13 | 2022-04-14 | RF360 Europe GmbH | Surface acoustic wave (saw) device with high permittivity dielectric for intermodulation distortion improvement |
| CN112260660B (zh) * | 2020-10-21 | 2023-03-03 | 济南晶正电子科技有限公司 | 一种复合基底、复合薄膜及其制备方法 |
| FR3117668B1 (fr) * | 2020-12-16 | 2022-12-23 | Commissariat Energie Atomique | Structure amelioree de substrat rf et procede de realisation |
| CN112750686B (zh) * | 2020-12-30 | 2021-12-07 | 济南晶正电子科技有限公司 | 一种多层衬底、电子元器件及多层衬底制备方法 |
| JP2023054965A (ja) * | 2021-10-05 | 2023-04-17 | 信越半導体株式会社 | シリコンウエーハ及びsoiウエーハ並びにそれらの製造方法 |
| FR3136325B1 (fr) * | 2022-06-02 | 2025-10-03 | Soitec Silicon On Insulator | Dispositif a ondes elastiques de surface |
| EP4533661A1 (fr) * | 2022-06-02 | 2025-04-09 | Soitec | Procédé de fabrication d'un dispositif à ondes élastiques de surface |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5637883A (en) * | 1995-02-27 | 1997-06-10 | The United States Of America As Represented By The Secretary Of The Navy | Optically addressed spatial light modulator using an intrinsic semiconductor active material and high resistivity cladding layers |
| US20070032040A1 (en) * | 2003-09-26 | 2007-02-08 | Dimitri Lederer | Method of manufacturing a multilayer semiconductor structure with reduced ohmic losses |
| JP4983010B2 (ja) * | 2005-11-30 | 2012-07-25 | 富士通株式会社 | 圧電素子及びその製造方法 |
| JP2009231376A (ja) * | 2008-03-19 | 2009-10-08 | Shin Etsu Handotai Co Ltd | Soiウェーハ及び半導体デバイスならびにsoiウェーハの製造方法 |
| US8536021B2 (en) * | 2010-12-24 | 2013-09-17 | Io Semiconductor, Inc. | Trap rich layer formation techniques for semiconductor devices |
| EP3734645B1 (en) * | 2010-12-24 | 2025-09-10 | Qualcomm Incorporated | Trap rich layer for semiconductor devices |
| FR2973158B1 (fr) * | 2011-03-22 | 2014-02-28 | Soitec Silicon On Insulator | Procédé de fabrication d'un substrat de type semi-conducteur sur isolant pour applications radiofréquences |
| KR101876579B1 (ko) * | 2012-09-13 | 2018-07-10 | 매그나칩 반도체 유한회사 | 전력용 반도체 소자 및 그 소자의 제조 방법 |
-
2014
- 2014-12-04 FR FR1402801A patent/FR3029682B1/fr active Active
-
2015
- 2015-09-17 CN CN201580065277.5A patent/CN107004572B/zh active Active
- 2015-09-17 WO PCT/FR2015/052494 patent/WO2016087728A1/fr not_active Ceased
- 2015-09-17 JP JP2017529767A patent/JP6612872B2/ja active Active
- 2015-09-17 KR KR1020177015538A patent/KR102395398B1/ko active Active
- 2015-09-17 EP EP21170134.7A patent/EP3872839A1/fr active Pending
- 2015-09-17 US US15/531,976 patent/US10250282B2/en active Active
- 2015-09-17 SG SG11201704516QA patent/SG11201704516QA/en unknown
- 2015-09-17 EP EP15788467.7A patent/EP3227905B1/fr active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP3872839A1 (fr) | 2021-09-01 |
| WO2016087728A1 (fr) | 2016-06-09 |
| US20170331501A1 (en) | 2017-11-16 |
| FR3029682A1 (fr) | 2016-06-10 |
| EP3227905A1 (fr) | 2017-10-11 |
| JP2018501651A (ja) | 2018-01-18 |
| US10250282B2 (en) | 2019-04-02 |
| KR20170091627A (ko) | 2017-08-09 |
| FR3029682B1 (fr) | 2017-12-29 |
| JP6612872B2 (ja) | 2019-11-27 |
| CN107004572B (zh) | 2020-05-22 |
| KR102395398B1 (ko) | 2022-05-10 |
| EP3227905B1 (fr) | 2021-08-18 |
| CN107004572A (zh) | 2017-08-01 |
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