SG11201609998SA - Solar cell and method for producing solar cell - Google Patents

Solar cell and method for producing solar cell

Info

Publication number
SG11201609998SA
SG11201609998SA SG11201609998SA SG11201609998SA SG11201609998SA SG 11201609998S A SG11201609998S A SG 11201609998SA SG 11201609998S A SG11201609998S A SG 11201609998SA SG 11201609998S A SG11201609998S A SG 11201609998SA SG 11201609998S A SG11201609998S A SG 11201609998SA
Authority
SG
Singapore
Prior art keywords
solar cell
producing
producing solar
cell
solar
Prior art date
Application number
SG11201609998SA
Other languages
English (en)
Inventor
Yoko Endo
Takenori Watabe
Hiroyuki Otsuka
Original Assignee
Shinetsu Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Chemical Co filed Critical Shinetsu Chemical Co
Publication of SG11201609998SA publication Critical patent/SG11201609998SA/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/022441Electrode arrangements specially adapted for back-contact solar cells
    • H01L31/022458Electrode arrangements specially adapted for back-contact solar cells for emitter wrap-through [EWT] type solar cells, e.g. interdigitated emitter-base back-contacts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/022441Electrode arrangements specially adapted for back-contact solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/02002Arrangements for conducting electric current to or from the device in operations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/02002Arrangements for conducting electric current to or from the device in operations
    • H01L31/02005Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier
    • H01L31/02008Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier for solar cells or solar cell modules
    • H01L31/0201Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier for solar cells or solar cell modules comprising specially adapted module bus-bar structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0216Coatings
    • H01L31/02161Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/022433Particular geometry of the grid contacts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0236Special surface textures
    • H01L31/02366Special surface textures of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/068Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/068Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
    • H01L31/0682Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Electromagnetism (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)
SG11201609998SA 2014-06-11 2015-04-07 Solar cell and method for producing solar cell SG11201609998SA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014120283 2014-06-11
PCT/JP2015/001954 WO2015190024A1 (ja) 2014-06-11 2015-04-07 太陽電池及び太陽電池の製造方法

Publications (1)

Publication Number Publication Date
SG11201609998SA true SG11201609998SA (en) 2017-01-27

Family

ID=54833143

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201609998SA SG11201609998SA (en) 2014-06-11 2015-04-07 Solar cell and method for producing solar cell

Country Status (11)

Country Link
US (1) US10249775B2 (ja)
EP (1) EP3157062B1 (ja)
JP (1) JP6220063B2 (ja)
KR (1) KR102319471B1 (ja)
CN (1) CN106463549B (ja)
MY (1) MY181161A (ja)
PH (1) PH12016502437A1 (ja)
RU (1) RU2016150513A (ja)
SG (1) SG11201609998SA (ja)
TW (1) TWI703621B (ja)
WO (1) WO2015190024A1 (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6285612B1 (ja) * 2016-10-05 2018-02-28 信越化学工業株式会社 高光電変換効率太陽電池の製造方法
US11038070B2 (en) 2016-10-25 2021-06-15 Shin-Etsu Chemical Co., Ltd. High photoelectric conversion efficiency solar cell and method for manufacturing high photoelectric conversion efficiency solar cell
KR102556599B1 (ko) * 2016-11-07 2023-07-17 신에쓰 가가꾸 고교 가부시끼가이샤 고효율 태양전지의 제조 방법
WO2018092172A1 (ja) 2016-11-15 2018-05-24 信越化学工業株式会社 高効率太陽電池及び高効率太陽電池の製造方法
EP3355361B1 (en) * 2016-12-01 2023-05-31 Shin-Etsu Chemical Co., Ltd. Solar cell having high photoelectric conversion efficiency and method for producing solar cell having high photoelectric conversion efficiency
JP6986726B2 (ja) * 2017-02-28 2021-12-22 アートビーム有限会社 太陽電池および太陽電池の製造方法
JP6875252B2 (ja) 2017-10-26 2021-05-19 信越化学工業株式会社 ポリイミドペーストの乾燥方法及び高光電変換効率太陽電池の製造方法
JP7009172B2 (ja) * 2017-11-14 2022-01-25 シャープ株式会社 光電変換装置、およびそれを備える太陽電池ストリング
JP6564081B2 (ja) * 2018-02-13 2019-08-21 信越化学工業株式会社 高光電変換効率太陽電池及び高光電変換効率太陽電池の製造方法
CN108447922A (zh) * 2018-04-27 2018-08-24 苏州浩顺光伏材料有限公司 一种转换率高的太阳能电池片
RU2710390C1 (ru) * 2019-05-31 2019-12-26 Российская Федерация, от имени которой выступает Государственная корпорация по космической деятельности "РОСКОСМОС" Фотопреобразователь с увеличенной фотоактивной площадью
CN111211227A (zh) * 2020-01-13 2020-05-29 北京交通大学 太阳能电池的制备方法

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5214755B2 (ja) 1972-10-20 1977-04-23
JPH05317209A (ja) 1992-05-27 1993-12-03 Tokyo Electric Co Ltd 電気掃除機の吸込口体
US20050115602A1 (en) * 2003-11-28 2005-06-02 Kyocera Corporation Photo-electric conversion cell and array, and photo-electric generation system
US20060130891A1 (en) 2004-10-29 2006-06-22 Carlson David E Back-contact photovoltaic cells
EP2009701A1 (en) * 2006-03-01 2008-12-31 Sanyo Electric Co., Ltd. Solar battery cell and solar battery module using such solar battery cell
JP4697194B2 (ja) 2006-10-13 2011-06-08 日立化成工業株式会社 太陽電池セルの接続方法及び太陽電池モジュール
US7804022B2 (en) 2007-03-16 2010-09-28 Sunpower Corporation Solar cell contact fingers and solder pad arrangement for enhanced efficiency
US20110120530A1 (en) 2007-08-23 2011-05-26 Takayuki Isaka Back surface contact type solar cell, back surface contact type solar cell with wiring board, solar cell string, and solar cell module
JP5067815B2 (ja) 2007-11-22 2012-11-07 シャープ株式会社 素子間配線部材、光電変換素子接続体および光電変換モジュール
DE102007059486A1 (de) * 2007-12-11 2009-06-18 Institut Für Solarenergieforschung Gmbh Rückkontaktsolarzelle mit länglichen, ineinander verschachtelten Emitter- und Basisbereichen an der Rückseite und Herstellungsverfahren hierfür
JP2009206366A (ja) 2008-02-28 2009-09-10 Sanyo Electric Co Ltd 太陽電池モジュール
CN102742013B (zh) * 2008-08-04 2014-12-17 松下电器产业株式会社 柔性半导体装置的制造方法
JP2011003724A (ja) * 2009-06-18 2011-01-06 Sanyo Electric Co Ltd 太陽電池モジュール
JP5289291B2 (ja) 2009-12-01 2013-09-11 デクセリアルズ株式会社 電子部品の製造方法、電子部品および導電性フィルム
JP5495777B2 (ja) 2009-12-25 2014-05-21 京セラ株式会社 太陽電池モジュール
JP5214755B2 (ja) 2011-03-03 2013-06-19 シャープ株式会社 裏面電極型太陽電池セル、裏面電極型太陽電池サブセルおよび太陽電池モジュール
KR101231314B1 (ko) * 2011-05-25 2013-02-07 현대중공업 주식회사 태양전지 모듈
KR101218416B1 (ko) * 2011-05-25 2013-01-21 현대중공업 주식회사 태양전지 모듈
KR101103501B1 (ko) 2011-05-30 2012-01-09 한화케미칼 주식회사 태양전지 및 이의 제조방법
US20140352753A1 (en) * 2011-09-29 2014-12-04 Dow Global Technologies Llc Photovoltaic cell interconnect
US10383207B2 (en) 2011-10-31 2019-08-13 Cellink Corporation Interdigitated foil interconnect for rear-contact solar cells
US20130160825A1 (en) * 2011-12-22 2013-06-27 E I Du Pont De Nemours And Company Back contact photovoltaic module with glass back-sheet
WO2014002249A1 (ja) 2012-06-29 2014-01-03 三洋電機株式会社 太陽電池、太陽電池モジュール、及び太陽電池の製造方法
JP2014075532A (ja) * 2012-10-05 2014-04-24 Panasonic Corp 太陽電池モジュール
KR102124520B1 (ko) * 2013-10-29 2020-06-18 엘지전자 주식회사 태양 전지 모듈 및 그 제조 방법
KR102175893B1 (ko) * 2014-02-24 2020-11-06 엘지전자 주식회사 태양 전지 모듈의 제조 방법

Also Published As

Publication number Publication date
TWI703621B (zh) 2020-09-01
MY181161A (en) 2020-12-20
PH12016502437B1 (en) 2017-03-06
TW201611103A (zh) 2016-03-16
US20170186894A1 (en) 2017-06-29
JP6220063B2 (ja) 2017-10-25
EP3157062B1 (en) 2023-12-20
EP3157062A4 (en) 2018-01-17
WO2015190024A1 (ja) 2015-12-17
JPWO2015190024A1 (ja) 2017-04-20
KR102319471B1 (ko) 2021-10-28
RU2016150513A (ru) 2018-07-11
KR20170017895A (ko) 2017-02-15
CN106463549A (zh) 2017-02-22
PH12016502437A1 (en) 2017-03-06
EP3157062A1 (en) 2017-04-19
CN106463549B (zh) 2019-08-13
US10249775B2 (en) 2019-04-02

Similar Documents

Publication Publication Date Title
SG11201701356WA (en) Solar cell and method for producing thereof
ZA201608890B (en) Method and system for power production with improved efficiency
SG11201709321RA (en) Preparation method for solar cell piece unit and solar cell module
GB2535546B (en) Battery modules and methods for their manufacture
SG11201609998SA (en) Solar cell and method for producing solar cell
EP3103141A4 (en) System and method for manipulating solar energy
EP3128098A4 (en) Solar cell apparatus
SG11201609916RA (en) Culture method and cell mass
HUE046424T2 (hu) Elválasztó elemekhez és eljárás annak elõállítására
EP3188256A4 (en) Solar module and solar module production method
SG11201610351VA (en) A method for forming a photovoltaic cell and a photovoltaic cell formed according to the method
HUP1400380A2 (hu) Napelem cella elrendezés
EP3101696A4 (en) Solar cell and solar cell manufacturing method
HUE047530T2 (hu) Napelem
EP3496162A4 (en) SOLAR CELL AND METHOD FOR MANUFACTURING SAME
IL246831B (en) A method for the production of 1-indanols and 1-indanamines
EP3156080A4 (en) Cell structure and method for producing cell structure
SG11201701418RA (en) Solar cell and manufacturing method of solar cell
EP3214658A4 (en) Method for manufacturing solar cell module and apparatus for manufacturing solar cell module
GB2531588B (en) Battery and method for the production thereof
EP3192295A4 (en) Method and arrangement for cell combination
EP3188255A4 (en) Solar cell module and solar cell module production method
EP3211676A4 (en) Method for producing solar cell module
GB201420078D0 (en) Energy system and method
EP3320925A4 (en) Cell structure and method for producing cell structure