SG11201403111XA - Electronic/photonic integrated circuit architecture and method of manufacture thereof - Google Patents

Electronic/photonic integrated circuit architecture and method of manufacture thereof

Info

Publication number
SG11201403111XA
SG11201403111XA SG11201403111XA SG11201403111XA SG11201403111XA SG 11201403111X A SG11201403111X A SG 11201403111XA SG 11201403111X A SG11201403111X A SG 11201403111XA SG 11201403111X A SG11201403111X A SG 11201403111XA SG 11201403111X A SG11201403111X A SG 11201403111XA
Authority
SG
Singapore
Prior art keywords
manufacture
electronic
integrated circuit
photonic integrated
circuit architecture
Prior art date
Application number
SG11201403111XA
Other languages
English (en)
Inventor
Long Chen
Pietro Bernasconi
Po Dong
Liming Zhang
Young-Kai Chen
Original Assignee
Alcatel Lucent
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent filed Critical Alcatel Lucent
Publication of SG11201403111XA publication Critical patent/SG11201403111XA/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0261—Non-optical elements, e.g. laser driver components, heaters

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Semiconductor Lasers (AREA)
SG11201403111XA 2011-12-15 2012-12-07 Electronic/photonic integrated circuit architecture and method of manufacture thereof SG11201403111XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/326,583 US9423560B2 (en) 2011-12-15 2011-12-15 Electronic/photonic integrated circuit architecture and method of manufacture thereof
PCT/US2012/068437 WO2013090140A1 (en) 2011-12-15 2012-12-07 Electronic/photonic integrated circuit architecture and method of manufacture thereof

Publications (1)

Publication Number Publication Date
SG11201403111XA true SG11201403111XA (en) 2014-08-28

Family

ID=47501442

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201403111XA SG11201403111XA (en) 2011-12-15 2012-12-07 Electronic/photonic integrated circuit architecture and method of manufacture thereof

Country Status (7)

Country Link
US (1) US9423560B2 (de)
EP (1) EP2791720B1 (de)
JP (1) JP5984958B2 (de)
CN (1) CN103998960B (de)
SG (1) SG11201403111XA (de)
TW (1) TWI480607B (de)
WO (1) WO2013090140A1 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014041536A1 (en) * 2012-09-13 2014-03-20 Ben-Gurion University Of The Negev Research And Development Authority Integrated circuit with photonic elements
WO2014047443A1 (en) * 2012-09-21 2014-03-27 The Regents Of The University Of California Integrated dielectric waveguide and semiconductor layer and method therefor
KR20140095678A (ko) * 2013-01-25 2014-08-04 삼성전자주식회사 광소자 및 전자소자를 포함하는 반도체 장치 및 그 제조 방법
JP6130284B2 (ja) * 2013-10-30 2017-05-17 日本電信電話株式会社 光導波路の作製方法
SG10201805702QA (en) * 2014-01-14 2018-08-30 Massachusetts Inst Technology Method of forming an integrated circuit and related integrated circuit
TWI549259B (zh) * 2014-05-15 2016-09-11 國立清華大學 全集成主被動積體光學於矽基積體電路及其製作方法
DE102014219792A1 (de) * 2014-09-30 2016-03-31 Technische Universität Berlin Optoelektronisches Bauelement
US9459177B1 (en) * 2015-05-15 2016-10-04 Alcatel Lucent Wafer-level testing of optical circuit devices
US20180035090A1 (en) * 2016-03-15 2018-02-01 Sutherland Cook Ellwood, JR. Photonic signal converter
US10976491B2 (en) * 2016-11-23 2021-04-13 The Research Foundation For The State University Of New York Photonics interposer optoelectronics
US10162244B1 (en) * 2017-06-27 2018-12-25 Taiwan Semiconductor Manufacturing Company, Ltd. Configurable heating device
US10371893B2 (en) 2017-11-30 2019-08-06 Taiwan Semiconductor Manufacturing Company, Ltd. Hybrid interconnect device and method
US10962710B2 (en) 2018-06-04 2021-03-30 The Boeing Company Multidimensional optical waveguide in planar dielectric structures
US11409139B2 (en) * 2019-12-13 2022-08-09 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor device including waveguide heater, and method and system for generating layout diagram of same
WO2024049944A1 (en) * 2022-09-02 2024-03-07 Quantinuum Llc Low loss silicon nitride and waveguides comprising low loss silicon nitride

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JPH03168705A (ja) 1989-11-29 1991-07-22 Omron Corp 三次元光回路
JPH0682642A (ja) 1992-03-06 1994-03-25 Fujitsu Ltd 光回路デバイス、その製造方法およびそれを用いた多層光回路
JP4224897B2 (ja) 1999-07-13 2009-02-18 ソニー株式会社 光導波路の製造方法および光送受信装置の製造方法
DE10104563A1 (de) 2001-02-01 2002-08-22 Infineon Technologies Ag Halbleiterelement mit optoelektronischer Signalübertragung und Verfahren zum Erzeugen eines solchen Halbleiterelements
US20030026575A1 (en) 2001-08-02 2003-02-06 Motorola, Inc. Structure and method for fabricating semiconductor optical waveguide structures utilizing the formation of a compliant substrate
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Also Published As

Publication number Publication date
CN103998960A (zh) 2014-08-20
JP2015505067A (ja) 2015-02-16
US9423560B2 (en) 2016-08-23
EP2791720A1 (de) 2014-10-22
US20130156364A1 (en) 2013-06-20
JP5984958B2 (ja) 2016-09-06
EP2791720B1 (de) 2018-05-16
WO2013090140A1 (en) 2013-06-20
TW201333561A (zh) 2013-08-16
CN103998960B (zh) 2017-07-18
TWI480607B (zh) 2015-04-11

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