SG11201403111XA - Electronic/photonic integrated circuit architecture and method of manufacture thereof - Google Patents

Electronic/photonic integrated circuit architecture and method of manufacture thereof

Info

Publication number
SG11201403111XA
SG11201403111XA SG11201403111XA SG11201403111XA SG11201403111XA SG 11201403111X A SG11201403111X A SG 11201403111XA SG 11201403111X A SG11201403111X A SG 11201403111XA SG 11201403111X A SG11201403111X A SG 11201403111XA SG 11201403111X A SG11201403111X A SG 11201403111XA
Authority
SG
Singapore
Prior art keywords
manufacture
electronic
integrated circuit
photonic integrated
circuit architecture
Prior art date
Application number
SG11201403111XA
Inventor
Long Chen
Pietro Bernasconi
Po Dong
Liming Zhang
Young-Kai Chen
Original Assignee
Alcatel Lucent
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent filed Critical Alcatel Lucent
Publication of SG11201403111XA publication Critical patent/SG11201403111XA/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0261—Non-optical elements, e.g. laser driver components, heaters
SG11201403111XA 2011-12-15 2012-12-07 Electronic/photonic integrated circuit architecture and method of manufacture thereof SG11201403111XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/326,583 US9423560B2 (en) 2011-12-15 2011-12-15 Electronic/photonic integrated circuit architecture and method of manufacture thereof
PCT/US2012/068437 WO2013090140A1 (en) 2011-12-15 2012-12-07 Electronic/photonic integrated circuit architecture and method of manufacture thereof

Publications (1)

Publication Number Publication Date
SG11201403111XA true SG11201403111XA (en) 2014-08-28

Family

ID=47501442

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201403111XA SG11201403111XA (en) 2011-12-15 2012-12-07 Electronic/photonic integrated circuit architecture and method of manufacture thereof

Country Status (7)

Country Link
US (1) US9423560B2 (en)
EP (1) EP2791720B1 (en)
JP (1) JP5984958B2 (en)
CN (1) CN103998960B (en)
SG (1) SG11201403111XA (en)
TW (1) TWI480607B (en)
WO (1) WO2013090140A1 (en)

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WO2014047443A1 (en) * 2012-09-21 2014-03-27 The Regents Of The University Of California Integrated dielectric waveguide and semiconductor layer and method therefor
KR20140095678A (en) * 2013-01-25 2014-08-04 삼성전자주식회사 Semiconductor apparatus including an optical device and an electronic device, and method of manufacturing the same
JP6130284B2 (en) * 2013-10-30 2017-05-17 日本電信電話株式会社 Optical waveguide fabrication method
WO2015108488A1 (en) * 2014-01-14 2015-07-23 Massachusetts Institute Of Technology (Mit) Method of forming an integrated circuit and related integrated circuit
TWI549259B (en) * 2014-05-15 2016-09-11 國立清華大學 Method of Integrating All Active and Passive Integrated Optical Devices on Silicon-based Integrated Circuit
DE102014219792A1 (en) 2014-09-30 2016-03-31 Technische Universität Berlin Optoelectronic component
US9459177B1 (en) * 2015-05-15 2016-10-04 Alcatel Lucent Wafer-level testing of optical circuit devices
US20180035090A1 (en) * 2016-03-15 2018-02-01 Sutherland Cook Ellwood, JR. Photonic signal converter
US10976491B2 (en) * 2016-11-23 2021-04-13 The Research Foundation For The State University Of New York Photonics interposer optoelectronics
US10162244B1 (en) * 2017-06-27 2018-12-25 Taiwan Semiconductor Manufacturing Company, Ltd. Configurable heating device
US10371893B2 (en) * 2017-11-30 2019-08-06 Taiwan Semiconductor Manufacturing Company, Ltd. Hybrid interconnect device and method
US10962710B2 (en) * 2018-06-04 2021-03-30 The Boeing Company Multidimensional optical waveguide in planar dielectric structures
US11409139B2 (en) * 2019-12-13 2022-08-09 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor device including waveguide heater, and method and system for generating layout diagram of same
WO2024049944A1 (en) * 2022-09-02 2024-03-07 Quantinuum Llc Low loss silicon nitride and waveguides comprising low loss silicon nitride

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JP4224897B2 (en) 1999-07-13 2009-02-18 ソニー株式会社 Optical waveguide manufacturing method and optical transmitter / receiver manufacturing method
DE10104563A1 (en) 2001-02-01 2002-08-22 Infineon Technologies Ag Semiconductor element with optoelectronic signal transmission and method for producing such a semiconductor element
US20030026575A1 (en) 2001-08-02 2003-02-06 Motorola, Inc. Structure and method for fabricating semiconductor optical waveguide structures utilizing the formation of a compliant substrate
US7253091B2 (en) * 2001-09-28 2007-08-07 Hrl Laboratories, Llc Process for assembling three-dimensional systems on a chip and structure thus obtained
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Also Published As

Publication number Publication date
CN103998960A (en) 2014-08-20
WO2013090140A1 (en) 2013-06-20
JP2015505067A (en) 2015-02-16
US20130156364A1 (en) 2013-06-20
EP2791720B1 (en) 2018-05-16
TW201333561A (en) 2013-08-16
US9423560B2 (en) 2016-08-23
EP2791720A1 (en) 2014-10-22
CN103998960B (en) 2017-07-18
JP5984958B2 (en) 2016-09-06
TWI480607B (en) 2015-04-11

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