SG108871A1 - Ito sputtering target - Google Patents
Ito sputtering targetInfo
- Publication number
- SG108871A1 SG108871A1 SG200205611A SG200205611A SG108871A1 SG 108871 A1 SG108871 A1 SG 108871A1 SG 200205611 A SG200205611 A SG 200205611A SG 200205611 A SG200205611 A SG 200205611A SG 108871 A1 SG108871 A1 SG 108871A1
- Authority
- SG
- Singapore
- Prior art keywords
- sputtering target
- ito sputtering
- ito
- target
- sputtering
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/453—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates
- C04B35/457—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates based on tin oxides or stannates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Structural Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Compositions Of Oxide Ceramics (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001283657A JP2003089868A (ja) | 2001-09-18 | 2001-09-18 | Itoスパッタリングターゲット |
Publications (1)
Publication Number | Publication Date |
---|---|
SG108871A1 true SG108871A1 (en) | 2005-02-28 |
Family
ID=19107111
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200205611A SG108871A1 (en) | 2001-09-18 | 2002-09-17 | Ito sputtering target |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2003089868A (ko) |
KR (1) | KR100495886B1 (ko) |
CN (1) | CN1207432C (ko) |
SG (1) | SG108871A1 (ko) |
TW (1) | TWI242050B (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4846872B2 (ja) | 2009-03-03 | 2011-12-28 | Jx日鉱日石金属株式会社 | スパッタリングターゲット及びその製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1006558A1 (de) * | 1998-12-03 | 2000-06-07 | Leybold Systems GmbH | Zerstäubungskathode für die Beschichtung von Substraten |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09324263A (ja) * | 1996-06-06 | 1997-12-16 | Sumitomo Bakelite Co Ltd | スパッタリング用ターゲット |
-
2001
- 2001-09-18 JP JP2001283657A patent/JP2003089868A/ja active Pending
-
2002
- 2002-09-03 TW TW091120105A patent/TWI242050B/zh not_active IP Right Cessation
- 2002-09-13 KR KR10-2002-0055703A patent/KR100495886B1/ko not_active IP Right Cessation
- 2002-09-17 SG SG200205611A patent/SG108871A1/en unknown
- 2002-09-18 CN CNB021427984A patent/CN1207432C/zh not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1006558A1 (de) * | 1998-12-03 | 2000-06-07 | Leybold Systems GmbH | Zerstäubungskathode für die Beschichtung von Substraten |
Also Published As
Publication number | Publication date |
---|---|
CN1207432C (zh) | 2005-06-22 |
KR20030024589A (ko) | 2003-03-26 |
CN1408895A (zh) | 2003-04-09 |
KR100495886B1 (ko) | 2005-06-16 |
JP2003089868A (ja) | 2003-03-28 |
TWI242050B (en) | 2005-10-21 |
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