AU2002305749A1 - Ring-type sputtering target - Google Patents

Ring-type sputtering target

Info

Publication number
AU2002305749A1
AU2002305749A1 AU2002305749A AU2002305749A AU2002305749A1 AU 2002305749 A1 AU2002305749 A1 AU 2002305749A1 AU 2002305749 A AU2002305749 A AU 2002305749A AU 2002305749 A AU2002305749 A AU 2002305749A AU 2002305749 A1 AU2002305749 A1 AU 2002305749A1
Authority
AU
Australia
Prior art keywords
ring
sputtering target
type sputtering
type
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002305749A
Inventor
Charles R. Fisher
Daniel R. Marx
Rajan Mathew
Alfred Snowman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Praxair ST Technology Inc
Original Assignee
Praxair ST Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Praxair ST Technology Inc filed Critical Praxair ST Technology Inc
Publication of AU2002305749A1 publication Critical patent/AU2002305749A1/en
Abandoned legal-status Critical Current

Links

AU2002305749A 2001-06-05 2002-05-31 Ring-type sputtering target Abandoned AU2002305749A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/873,184 2001-06-05

Publications (1)

Publication Number Publication Date
AU2002305749A1 true AU2002305749A1 (en) 2002-12-16

Family

ID=

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