SG103893A1 - Lithographic apparatus and device manufacturing method - Google Patents

Lithographic apparatus and device manufacturing method

Info

Publication number
SG103893A1
SG103893A1 SG200207176A SG200207176A SG103893A1 SG 103893 A1 SG103893 A1 SG 103893A1 SG 200207176 A SG200207176 A SG 200207176A SG 200207176 A SG200207176 A SG 200207176A SG 103893 A1 SG103893 A1 SG 103893A1
Authority
SG
Singapore
Prior art keywords
device manufacturing
lithographic apparatus
lithographic
manufacturing
Prior art date
Application number
SG200207176A
Other languages
English (en)
Inventor
Hernes Jacobs
Piet Vosters
Sven Antoin Johan Hol
Der Schoot Harmen Klaas Van
Diesen Robert Johannes Pet Van
David William Callen
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Publication of SG103893A1 publication Critical patent/SG103893A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70991—Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
SG200207176A 2001-11-30 2002-11-27 Lithographic apparatus and device manufacturing method SG103893A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP01204626 2001-11-30

Publications (1)

Publication Number Publication Date
SG103893A1 true SG103893A1 (en) 2004-05-26

Family

ID=8181337

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200207176A SG103893A1 (en) 2001-11-30 2002-11-27 Lithographic apparatus and device manufacturing method

Country Status (7)

Country Link
US (1) US6879377B2 (zh)
JP (1) JP3971701B2 (zh)
KR (1) KR100547943B1 (zh)
CN (1) CN1295565C (zh)
DE (1) DE60217283T2 (zh)
SG (1) SG103893A1 (zh)
TW (1) TWI293475B (zh)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4458322B2 (ja) * 2003-01-14 2010-04-28 キヤノン株式会社 露光装置およびデバイス製造方法
JP2005046941A (ja) * 2003-07-31 2005-02-24 Canon Inc ケーブル微動ユニット付きステージ装置
US6947118B2 (en) * 2003-12-22 2005-09-20 Asml Netherlands B.V. Lithographic apparatus and method of manufacturing a device
JP4655039B2 (ja) * 2004-06-07 2011-03-23 株式会社ニコン ステージ装置、露光装置及び露光方法
JP4677267B2 (ja) * 2005-04-04 2011-04-27 キヤノン株式会社 平面ステージ装置及び露光装置
JP5020662B2 (ja) 2006-05-26 2012-09-05 キヤノン株式会社 ステージ装置、露光装置、及びデバイス製造方法
US7675201B2 (en) * 2006-07-25 2010-03-09 Asml Netherlands B.V. Lithographic apparatus with planar motor driven support
US7538273B2 (en) * 2006-08-08 2009-05-26 Asml Netherlands B.V. Cable connection to decrease the passing on of vibrations from a first object to a second object
JP4845668B2 (ja) * 2006-10-17 2011-12-28 東京エレクトロン株式会社 複合配管及び複合配管を備える塗布・現像処理装置
EP2998983B1 (en) * 2006-12-27 2018-03-21 Nikon Corporation Stage apparatus, exposure apparatus and device fabricating method
US8279399B2 (en) * 2007-10-22 2012-10-02 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
JP4986185B2 (ja) * 2007-11-07 2012-07-25 株式会社ニコン 露光装置及び露光方法、並びにデバイス製造方法
JP5141421B2 (ja) * 2008-07-24 2013-02-13 株式会社安川電機 配管構造及びステージ装置
NL2004281A (en) * 2009-03-19 2010-09-20 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
US20130255414A1 (en) * 2010-09-09 2013-10-03 Nikon Corporation Parallel Linkage and Actuator Motor Coil Designs for Tube Carrier
KR101829397B1 (ko) * 2011-09-16 2018-02-19 퍼시몬 테크놀로지스 코포레이션 낮은 가변성을 가진 로봇
EP2738416A1 (en) 2012-11-28 2014-06-04 University Of Twente Flexure joint for high precision relative movement of devices or parts of devices
CN103969959B (zh) * 2013-01-25 2016-09-28 上海微电子装备有限公司 用于光刻装置的立式线缆支撑装置
US9400431B2 (en) * 2013-12-23 2016-07-26 United Microelectronics Corp. Supporting assembly with a rolling ball disposed directly below supporting rods and method for using the same
DE102019200388A1 (de) * 2019-01-15 2019-03-07 Carl Zeiss Smt Gmbh Schutzvorrichtung für Leitungen in einer Projektionsbelichtungsanlage für die Halbleiterlithographie
US11520243B2 (en) 2020-08-31 2022-12-06 Taiwan Semiconductor Manufacturing Company, Ltd. Lithography system and method thereof

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4993696A (en) 1986-12-01 1991-02-19 Canon Kabushiki Kaisha Movable stage mechanism
JPH05198490A (ja) 1992-01-22 1993-08-06 Fujitsu Ltd 荷電粒子ビーム露光装置
JPH06275486A (ja) 1993-03-17 1994-09-30 Topcon Corp 露光装置
EP0797039B1 (de) * 1996-03-20 2002-10-16 Witzenmann GmbH Leitungselement mit einem Balg aus Metall
CN2276564Y (zh) * 1996-07-04 1998-03-18 徐水旺 柔性消声管
CN2344636Y (zh) * 1998-08-18 1999-10-20 南京晨光东螺波纹管有限公司 水电站压力钢管用万能型波纹膨胀节
NL1015738C2 (nl) * 1999-07-28 2002-10-15 Kyocera Corp Schuifapparaat en bijbehorend platformmechanisme voor gebruik in vacu³m.
JP2001210576A (ja) * 2000-01-25 2001-08-03 Nikon Corp 荷重キャンセル機構、真空チャンバ結合体、露光装置及び半導体デバイスの製造方法
EP1148389B1 (en) 2000-04-17 2008-02-27 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
US6893053B2 (en) * 2001-09-10 2005-05-17 Tru-Flex Metal Hose Corp. Exhaust bellows for dynamic torsion control in an exhaust system

Also Published As

Publication number Publication date
CN1295565C (zh) 2007-01-17
US6879377B2 (en) 2005-04-12
CN1450410A (zh) 2003-10-22
JP2003203862A (ja) 2003-07-18
DE60217283T2 (de) 2007-10-18
TW200409194A (en) 2004-06-01
KR100547943B1 (ko) 2006-02-01
TWI293475B (en) 2008-02-11
US20030137643A1 (en) 2003-07-24
KR20030044815A (ko) 2003-06-09
JP3971701B2 (ja) 2007-09-05
DE60217283D1 (de) 2007-02-15

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