SG10386G - Apparatus for measuring the thickness of thin layers - Google Patents
Apparatus for measuring the thickness of thin layersInfo
- Publication number
- SG10386G SG10386G SG103/86A SG10386A SG10386G SG 10386 G SG10386 G SG 10386G SG 103/86 A SG103/86 A SG 103/86A SG 10386 A SG10386 A SG 10386A SG 10386 G SG10386 G SG 10386G
- Authority
- SG
- Singapore
- Prior art keywords
- measuring
- thickness
- thin layers
- layers
- thin
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19823239379 DE3239379A1 (de) | 1982-10-23 | 1982-10-23 | Vorrichtung zum messen der dicke duenner schichten |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10386G true SG10386G (en) | 1987-09-18 |
Family
ID=6176500
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG103/86A SG10386G (en) | 1982-10-23 | 1986-02-06 | Apparatus for measuring the thickness of thin layers |
Country Status (6)
Country | Link |
---|---|
US (2) | US4597093A (ja) |
JP (2) | JPS5975109A (ja) |
DE (1) | DE3239379A1 (ja) |
GB (1) | GB2129127B (ja) |
HK (1) | HK25787A (ja) |
SG (1) | SG10386G (ja) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3239379A1 (de) * | 1982-10-23 | 1984-04-26 | Helmut Fischer GmbH & Co Institut für Elektronik und Meßtechnik, 7032 Sindelfingen | Vorrichtung zum messen der dicke duenner schichten |
DE3522779A1 (de) * | 1984-07-03 | 1986-01-09 | Twin City International, Inc., Amherst, N.Y. | Dickenmessinstrument mit stationaerem probenbeobachtungsspiegel |
US4648107A (en) * | 1984-12-05 | 1987-03-03 | Latter Terence D | Device for measuring the thickness of thin films |
JPH0539449Y2 (ja) * | 1985-09-30 | 1993-10-06 | ||
US4860329A (en) * | 1986-02-24 | 1989-08-22 | Upa Technology, Inc. | X-ray fluorescence thickness measuring device |
DE3710437A1 (de) * | 1987-04-01 | 1988-10-20 | Helmut Fischer Elektronik & Me | Vorrichtung zum messen der dicke duenner schichten |
DE3731973A1 (de) * | 1987-09-23 | 1989-04-13 | Helmut Fischer Gmbh & Co | Vorrichtung zur stabilisierung fuer roentgenfluoreszenzschichtdicken-messgeraete und verfahren hierzu |
US4962518A (en) * | 1987-12-07 | 1990-10-09 | Twin City International, Inc. | Apparatus for measuring the thickness of a coating |
US4979203A (en) * | 1989-06-19 | 1990-12-18 | Princeton X-Ray Laser | X-ray laser microscope apparatus |
DE4021388A1 (de) * | 1990-07-05 | 1992-01-16 | Twin City Int Inc | Vorrichtung zum messen der staerke eines ueberzuges |
DE4203887C2 (de) * | 1992-02-11 | 1998-07-23 | Helmut Fischer Gmbh & Co | Positioniervorrichtung für ein Meßgerät |
US5309495A (en) * | 1992-03-18 | 1994-05-03 | Helmut Fischer | Positioning device for an x-ray thickness measuring system |
DE19710420C2 (de) * | 1997-03-13 | 2001-07-12 | Helmut Fischer Gmbh & Co | Verfahren und Vorrichtung zum Messen der Dicken dünner Schichten mittels Röntgenfluoreszenz |
DE19739321C2 (de) * | 1997-09-09 | 2001-09-27 | Helmut Fischer Gmbh & Co | Verfahren und Einrichtung zum Bestimmen der Meßunsicherheit bei Röntgenfluoreszenz-Schichtdickenmessungen |
GB9906011D0 (en) * | 1999-03-16 | 1999-05-12 | Whiley Foils Ltd | Fluorescent materials |
US6345086B1 (en) * | 1999-09-14 | 2002-02-05 | Veeco Instruments Inc. | X-ray fluorescence system and method |
JP3811089B2 (ja) * | 2002-04-15 | 2006-08-16 | 株式会社東芝 | 摩耗量測定方法 |
DE10259696B4 (de) * | 2002-12-18 | 2018-07-05 | Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg | Vorrichtung zum Messen der Dicke dünner Schichten |
US7023954B2 (en) * | 2003-09-29 | 2006-04-04 | Jordan Valley Applied Radiation Ltd. | Optical alignment of X-ray microanalyzers |
DE102004020370B4 (de) * | 2004-04-23 | 2006-11-16 | Sirona Dental Systems Gmbh | Röntgenstrahler und Verfahren zur Erzeugung und Darstellung von Röntgenbildern |
US20080302461A1 (en) * | 2007-06-08 | 2008-12-11 | E. I. Du Pont De Nemours And Company | Transparent Colored High Modulus Interlayers and Laminates Therefrom |
US20080318063A1 (en) * | 2007-06-22 | 2008-12-25 | Anderson Jerrel C | Glass laminates with improved weatherability |
US20090155576A1 (en) * | 2007-12-18 | 2009-06-18 | E. I. Du Pont De Nemours And Company | Glass-less glazing laminates |
WO2013170052A1 (en) | 2012-05-09 | 2013-11-14 | Sio2 Medical Products, Inc. | Saccharide protective coating for pharmaceutical package |
PL2251453T3 (pl) | 2009-05-13 | 2014-05-30 | Sio2 Medical Products Inc | Uchwyt na pojemnik |
US7985188B2 (en) * | 2009-05-13 | 2011-07-26 | Cv Holdings Llc | Vessel, coating, inspection and processing apparatus |
US9458536B2 (en) | 2009-07-02 | 2016-10-04 | Sio2 Medical Products, Inc. | PECVD coating methods for capped syringes, cartridges and other articles |
US11624115B2 (en) | 2010-05-12 | 2023-04-11 | Sio2 Medical Products, Inc. | Syringe with PECVD lubrication |
US9878101B2 (en) | 2010-11-12 | 2018-01-30 | Sio2 Medical Products, Inc. | Cyclic olefin polymer vessels and vessel coating methods |
US9272095B2 (en) | 2011-04-01 | 2016-03-01 | Sio2 Medical Products, Inc. | Vessels, contact surfaces, and coating and inspection apparatus and methods |
EP2776603B1 (en) | 2011-11-11 | 2019-03-06 | SiO2 Medical Products, Inc. | PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS |
US9554968B2 (en) | 2013-03-11 | 2017-01-31 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging |
US11116695B2 (en) | 2011-11-11 | 2021-09-14 | Sio2 Medical Products, Inc. | Blood sample collection tube |
CN104854257B (zh) | 2012-11-01 | 2018-04-13 | Sio2医药产品公司 | 涂层检查方法 |
US9903782B2 (en) | 2012-11-16 | 2018-02-27 | Sio2 Medical Products, Inc. | Method and apparatus for detecting rapid barrier coating integrity characteristics |
BR112015012470B1 (pt) | 2012-11-30 | 2022-08-02 | Sio2 Medical Products, Inc | Método de produção de um tambor médico para um cartucho ou seringa médica |
US9764093B2 (en) | 2012-11-30 | 2017-09-19 | Sio2 Medical Products, Inc. | Controlling the uniformity of PECVD deposition |
US9662450B2 (en) | 2013-03-01 | 2017-05-30 | Sio2 Medical Products, Inc. | Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus |
DE102013102270A1 (de) * | 2013-03-07 | 2014-09-11 | Helmut Fischer GmbH Institut für Elektronik und Messtechnik | Optischer Spiegel, Röntgenfluoreszenzanalysegerät und Verfahren zur Röntgenfluoreszenzanalyse |
US9937099B2 (en) | 2013-03-11 | 2018-04-10 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging with low oxygen transmission rate |
US9863042B2 (en) | 2013-03-15 | 2018-01-09 | Sio2 Medical Products, Inc. | PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases |
EP3693493A1 (en) | 2014-03-28 | 2020-08-12 | SiO2 Medical Products, Inc. | Antistatic coatings for plastic vessels |
KR20180048694A (ko) | 2015-08-18 | 2018-05-10 | 에스아이오2 메디컬 프로덕츠, 인크. | 산소 전달률이 낮은, 의약품 및 다른 제품의 포장용기 |
CN109323653B (zh) * | 2018-11-14 | 2024-03-08 | 江苏一六仪器有限公司 | 一种x光光斑定位仪及其定位方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1976179A (en) * | 1930-04-28 | 1934-10-09 | Mannl Rudolf | Adjusting device for x-ray tubes |
US3717768A (en) * | 1970-02-09 | 1973-02-20 | Medinova Ab | X-ray filter device in combination with a positioning light converging means |
JPS51121388A (en) * | 1975-04-16 | 1976-10-23 | Nec Corp | Apparatus for adjusting a specimen for x-ray diffration camera |
AT354160B (de) * | 1977-12-21 | 1979-12-27 | Oesterr Studien Atomenergie | Einrichtung zur bestimmung des spezifischen gewichtes von ausgewaehlten bereichen von mikroskopisch kleinen, planprallelen probe- teilen |
JPS5489596A (en) * | 1977-12-27 | 1979-07-16 | Nec Corp | Swing and iris set for x-rays |
JPS5758300U (ja) * | 1980-09-22 | 1982-04-06 | ||
JPS57129156U (ja) * | 1981-02-04 | 1982-08-12 | ||
JPS57197454A (en) * | 1981-05-29 | 1982-12-03 | Rigaku Denki Kogyo Kk | X-ray analysing apparatus |
JPS58133239A (ja) * | 1982-02-02 | 1983-08-08 | 株式会社堀場製作所 | 照射x線領域モニタ−装置 |
DE3239379A1 (de) * | 1982-10-23 | 1984-04-26 | Helmut Fischer GmbH & Co Institut für Elektronik und Meßtechnik, 7032 Sindelfingen | Vorrichtung zum messen der dicke duenner schichten |
-
1982
- 1982-10-23 DE DE19823239379 patent/DE3239379A1/de active Granted
-
1983
- 1983-04-21 JP JP58070825A patent/JPS5975109A/ja active Granted
- 1983-04-21 GB GB08310802A patent/GB2129127B/en not_active Expired
- 1983-04-21 US US06/487,130 patent/US4597093A/en not_active Expired - Lifetime
-
1986
- 1986-02-06 SG SG103/86A patent/SG10386G/en unknown
- 1986-05-02 US US06/858,689 patent/US4799246A/en not_active Expired - Lifetime
-
1987
- 1987-03-26 HK HK257/87A patent/HK25787A/xx not_active IP Right Cessation
-
1990
- 1990-02-08 JP JP2027320A patent/JPH02236106A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
US4597093A (en) | 1986-06-24 |
GB2129127B (en) | 1985-11-13 |
DE3239379A1 (de) | 1984-04-26 |
JPH02236106A (ja) | 1990-09-19 |
GB2129127A (en) | 1984-05-10 |
US4799246A (en) | 1989-01-17 |
HK25787A (en) | 1987-04-03 |
JPH0526122B2 (ja) | 1993-04-15 |
JPS5975109A (ja) | 1984-04-27 |
DE3239379C2 (ja) | 1989-04-20 |
JPH0244363B2 (ja) | 1990-10-03 |
GB8310802D0 (en) | 1983-05-25 |
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