SG102066A1 - Method and apparatus for transferring and loading a reticle with a robotic reticle end-effector - Google Patents

Method and apparatus for transferring and loading a reticle with a robotic reticle end-effector

Info

Publication number
SG102066A1
SG102066A1 SG200300053A SG200300053A SG102066A1 SG 102066 A1 SG102066 A1 SG 102066A1 SG 200300053 A SG200300053 A SG 200300053A SG 200300053 A SG200300053 A SG 200300053A SG 102066 A1 SG102066 A1 SG 102066A1
Authority
SG
Singapore
Prior art keywords
reticle
effector
transferring
loading
robotic
Prior art date
Application number
SG200300053A
Other languages
English (en)
Inventor
M Friedman Glenn
Kochersperger Peter
Laganza Joseph
Original Assignee
Asml Us Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Us Inc filed Critical Asml Us Inc
Publication of SG102066A1 publication Critical patent/SG102066A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7007—Alignment other than original with workpiece
    • G03F9/7011—Pre-exposure scan; original with original holder alignment; Prealignment, i.e. workpiece with workpiece holder
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Library & Information Science (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Manipulator (AREA)
SG200300053A 2002-01-09 2003-01-09 Method and apparatus for transferring and loading a reticle with a robotic reticle end-effector SG102066A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/040,375 US7004715B2 (en) 2002-01-09 2002-01-09 Apparatus for transferring and loading a reticle with a robotic reticle end-effector

Publications (1)

Publication Number Publication Date
SG102066A1 true SG102066A1 (en) 2004-02-27

Family

ID=21910641

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200300053A SG102066A1 (en) 2002-01-09 2003-01-09 Method and apparatus for transferring and loading a reticle with a robotic reticle end-effector

Country Status (7)

Country Link
US (2) US7004715B2 (enExample)
EP (1) EP1327913A3 (enExample)
JP (1) JP2003243301A (enExample)
KR (1) KR100891181B1 (enExample)
CN (1) CN1295121C (enExample)
SG (1) SG102066A1 (enExample)
TW (1) TWI283799B (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7004715B2 (en) * 2002-01-09 2006-02-28 Asml Holding N.V. Apparatus for transferring and loading a reticle with a robotic reticle end-effector
US6862817B1 (en) * 2003-11-12 2005-03-08 Asml Holding N.V. Method and apparatus for kinematic registration of a reticle
KR101474572B1 (ko) * 2006-06-19 2014-12-18 엔테그리스, 아이엔씨. 레티클 스토리지 정화시스템
NL1036673A1 (nl) * 2008-04-09 2009-10-12 Asml Holding Nv Robot Position Calibration Tool (RPCT).
NL1036785A1 (nl) 2008-04-18 2009-10-20 Asml Netherlands Bv Rapid exchange device for lithography reticles.
US8145349B2 (en) * 2008-05-14 2012-03-27 Formfactor, Inc. Pre-aligner search
US8336188B2 (en) * 2008-07-17 2012-12-25 Formfactor, Inc. Thin wafer chuck
US9025135B2 (en) * 2009-04-06 2015-05-05 Asml Holding N.V. Shared compliance in a rapid exchange device for reticles, and reticle stage
CN102320472B (zh) * 2011-06-03 2013-07-10 深圳市华星光电技术有限公司 基板传送系统及传送方法
KR102270563B1 (ko) * 2015-03-16 2021-06-30 주식회사 탑 엔지니어링 기판 이송 시스템
US11845184B2 (en) * 2022-04-18 2023-12-19 Dextrous Robotics, Inc. System and/or method for grasping objects
US12176228B2 (en) 2022-04-20 2024-12-24 Taiwan Semiconductor Manufacturing Co., Ltd. High density semiconductor storage system
CN116088283B (zh) * 2023-04-12 2023-06-30 深圳市龙图光罩股份有限公司 掩模版预校准方法、系统、电子设备以及可读存储介质

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4984953A (en) * 1987-02-20 1991-01-15 Canon Kabushiki Kaisha Plate-like article conveying system
EP0452041A1 (en) * 1990-04-06 1991-10-16 Canon Kabushiki Kaisha Substrate conveying device and method of controlling the same
US5130747A (en) * 1990-09-28 1992-07-14 Kabushiki Kaisha Toshiba Carrier apparatus
JPH1174182A (ja) * 1997-08-28 1999-03-16 Nikon Corp マスク搬送装置及びマスクステージ
US5980187A (en) * 1997-04-16 1999-11-09 Kla-Tencor Corporation Mechanism for transporting semiconductor-process masks
US20020020751A1 (en) * 2000-08-04 2002-02-21 Ken Matsumoto Substrate transfer apparatus, semiconductor manufacturing apparatus, and semiconductor device manufacturing method
WO2003013993A1 (en) * 2001-08-10 2003-02-20 Asml Us, Inc. Reticle protection and transport

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69402918T2 (de) * 1993-07-15 1997-08-14 Applied Materials Inc Substratfangvorrichtung und Keramikblatt für Halbleiterbearbeitungseinrichtung
US6183026B1 (en) * 1999-04-07 2001-02-06 Gasonics International Corporation End effector
EP1052547A3 (en) * 1999-04-21 2002-07-31 Asm Lithography B.V. Mask-handling apparatus for lithographic projection apparatus
EP1052546B1 (en) * 1999-04-21 2004-09-15 ASML Netherlands B.V. Substrate handler for use in lithographic projection apparatus
US6499777B1 (en) * 1999-05-11 2002-12-31 Matrix Integrated Systems, Inc. End-effector with integrated cooling mechanism
JP3513437B2 (ja) * 1999-09-01 2004-03-31 キヤノン株式会社 基板管理方法及び半導体露光装置
JP4689064B2 (ja) 2000-03-30 2011-05-25 キヤノン株式会社 露光装置およびデバイス製造方法
JP4560182B2 (ja) 2000-07-06 2010-10-13 キヤノン株式会社 減圧処理装置、半導体製造装置およびデバイス製造方法
US7004715B2 (en) 2002-01-09 2006-02-28 Asml Holding N.V. Apparatus for transferring and loading a reticle with a robotic reticle end-effector

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4984953A (en) * 1987-02-20 1991-01-15 Canon Kabushiki Kaisha Plate-like article conveying system
EP0452041A1 (en) * 1990-04-06 1991-10-16 Canon Kabushiki Kaisha Substrate conveying device and method of controlling the same
US5130747A (en) * 1990-09-28 1992-07-14 Kabushiki Kaisha Toshiba Carrier apparatus
US5980187A (en) * 1997-04-16 1999-11-09 Kla-Tencor Corporation Mechanism for transporting semiconductor-process masks
JPH1174182A (ja) * 1997-08-28 1999-03-16 Nikon Corp マスク搬送装置及びマスクステージ
US20020020751A1 (en) * 2000-08-04 2002-02-21 Ken Matsumoto Substrate transfer apparatus, semiconductor manufacturing apparatus, and semiconductor device manufacturing method
WO2003013993A1 (en) * 2001-08-10 2003-02-20 Asml Us, Inc. Reticle protection and transport

Also Published As

Publication number Publication date
KR100891181B1 (ko) 2009-04-01
US20030129051A1 (en) 2003-07-10
EP1327913A3 (en) 2007-03-21
JP2003243301A (ja) 2003-08-29
EP1327913A2 (en) 2003-07-16
TW200302955A (en) 2003-08-16
KR20030080180A (ko) 2003-10-11
US7004715B2 (en) 2006-02-28
CN1295121C (zh) 2007-01-17
TWI283799B (en) 2007-07-11
CN1433940A (zh) 2003-08-06
US7278817B2 (en) 2007-10-09
US20060182605A1 (en) 2006-08-17

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