SG10202005594UA - Liquid supplying device and method for draining liquid thereof - Google Patents

Liquid supplying device and method for draining liquid thereof

Info

Publication number
SG10202005594UA
SG10202005594UA SG10202005594UA SG10202005594UA SG10202005594UA SG 10202005594U A SG10202005594U A SG 10202005594UA SG 10202005594U A SG10202005594U A SG 10202005594UA SG 10202005594U A SG10202005594U A SG 10202005594UA SG 10202005594U A SG10202005594U A SG 10202005594UA
Authority
SG
Singapore
Prior art keywords
liquid
supplying device
draining
liquid supplying
draining liquid
Prior art date
Application number
SG10202005594UA
Other languages
English (en)
Inventor
Fujihiko Toyomasu
Junji Kunisawa
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of SG10202005594UA publication Critical patent/SG10202005594UA/en

Links

SG10202005594UA 2019-06-20 2020-06-12 Liquid supplying device and method for draining liquid thereof SG10202005594UA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019114437A JP7138602B2 (ja) 2019-06-20 2019-06-20 液体供給装置の液抜き方法、液体供給装置

Publications (1)

Publication Number Publication Date
SG10202005594UA true SG10202005594UA (en) 2021-01-28

Family

ID=73995461

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10202005594UA SG10202005594UA (en) 2019-06-20 2020-06-12 Liquid supplying device and method for draining liquid thereof

Country Status (3)

Country Link
US (1) US20200398318A1 (ja)
JP (1) JP7138602B2 (ja)
SG (1) SG10202005594UA (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113510620A (zh) * 2021-07-26 2021-10-19 长鑫存储技术有限公司 加液装置及研磨设备

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3335511B2 (ja) * 1995-10-31 2002-10-21 株式会社山武 静電容量型圧力センサ
TW512131B (en) * 2000-06-08 2002-12-01 Mosel Vitelic Inc Apparatus and method for controlling boiling conditions of hot phosphoric acid solution with pressure adjustment
JP4738033B2 (ja) 2005-03-23 2011-08-03 大日本スクリーン製造株式会社 基板処理装置
JP4763339B2 (ja) 2005-05-11 2011-08-31 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード 配管のクリーニング方法
JP5008836B2 (ja) 2005-06-03 2012-08-22 野村マイクロ・サイエンス株式会社 超純水製造システムの運転方法
JP2008128145A (ja) 2006-11-22 2008-06-05 Dainippon Screen Mfg Co Ltd 基板処理装置
JP6618857B2 (ja) 2016-06-22 2019-12-11 サーパス工業株式会社 圧力検出装置

Also Published As

Publication number Publication date
JP7138602B2 (ja) 2022-09-16
JP2021002551A (ja) 2021-01-07
US20200398318A1 (en) 2020-12-24

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