SG11201913037PA - Liquid temperature-control apparatus and method - Google Patents

Liquid temperature-control apparatus and method

Info

Publication number
SG11201913037PA
SG11201913037PA SG11201913037PA SG11201913037PA SG11201913037PA SG 11201913037P A SG11201913037P A SG 11201913037PA SG 11201913037P A SG11201913037P A SG 11201913037PA SG 11201913037P A SG11201913037P A SG 11201913037PA SG 11201913037P A SG11201913037P A SG 11201913037PA
Authority
SG
Singapore
Prior art keywords
control apparatus
liquid temperature
liquid
temperature
control
Prior art date
Application number
SG11201913037PA
Inventor
Ming Wang
Baotong Hao
Liuyang Du
Original Assignee
Shanghai Micro Electronics Equipment Group Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Micro Electronics Equipment Group Co Ltd filed Critical Shanghai Micro Electronics Equipment Group Co Ltd
Publication of SG11201913037PA publication Critical patent/SG11201913037PA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B25/00—Machines, plants or systems, using a combination of modes of operation covered by two or more of the groups F25B1/00 - F25B23/00
    • F25B25/005—Machines, plants or systems, using a combination of modes of operation covered by two or more of the groups F25B1/00 - F25B23/00 using primary and secondary systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B41/00—Fluid-circulation arrangements
    • F25B41/30—Expansion means; Dispositions thereof
    • F25B41/31—Expansion valves
    • F25B41/34—Expansion valves with the valve member being actuated by electric means, e.g. by piezoelectric actuators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B49/00—Arrangement or mounting of control or safety devices
    • F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B49/00—Arrangement or mounting of control or safety devices
    • F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
    • F25B49/027—Condenser control arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
    • F25D17/02—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating liquids, e.g. brine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2339/00—Details of evaporators; Details of condensers
    • F25B2339/04—Details of condensers
    • F25B2339/047—Water-cooled condensers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00—Control issues
    • F25B2600/25—Control of valves
    • F25B2600/2513—Expansion valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00—Sensing or detecting of parameters; Sensors therefor
    • F25B2700/21—Temperatures
    • F25B2700/2117—Temperatures of an evaporator
    • F25B2700/21171—Temperatures of an evaporator of the fluid cooled by the evaporator
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)
SG11201913037PA 2017-06-29 2018-06-26 Liquid temperature-control apparatus and method SG11201913037PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201710517728.5A CN109210836A (en) 2017-06-29 2017-06-29 Liquid temperature controlling device and method
PCT/CN2018/092819 WO2019001413A1 (en) 2017-06-29 2018-06-26 Liquid temperature-control apparatus and method

Publications (1)

Publication Number Publication Date
SG11201913037PA true SG11201913037PA (en) 2020-01-30

Family

ID=64741128

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201913037PA SG11201913037PA (en) 2017-06-29 2018-06-26 Liquid temperature-control apparatus and method

Country Status (7)

Country Link
US (1) US20200149792A1 (en)
JP (1) JP6931093B2 (en)
KR (1) KR102245550B1 (en)
CN (1) CN109210836A (en)
SG (1) SG11201913037PA (en)
TW (1) TWI675263B (en)
WO (1) WO2019001413A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112058332B (en) * 2019-06-10 2022-02-11 上海微电子装备（集团）股份有限公司 Constant-temperature liquid tank
US11231198B2 (en) 2019-09-05 2022-01-25 Trane International Inc. Systems and methods for refrigerant leak detection in a climate control system

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100511883C (en) * 2006-09-29 2009-07-08 武汉楚天激光（集团）股份有限公司 High-precision water cooling system and control method thereof
JP2008292026A (en) * 2007-05-23 2008-12-04 Ats Japan Corp Constant temperature maintaining device
JP5111221B2 (en) * 2008-04-24 2013-01-09 三菱電機株式会社 Water heater
KR20090115627A (en) * 2008-05-02 2009-11-05 왕화식 Multy condensation Heating system
CN101270909B (en) * 2008-05-16 2011-06-15 广州恒雅空调工程有限公司 Application method of condensation heat
CN201212760Y (en) * 2008-06-03 2009-03-25 杭州电子科技大学 Liquid cooling temperature control device
KR101577125B1 (en) * 2010-10-27 2015-12-11 오르가노 가부시키가이샤 Water treatment system and water treatment method
EP2515170B1 (en) * 2011-04-20 2020-02-19 ASML Netherlands BV Thermal conditioning system for thermal conditioning a part of a lithographic apparatus and a thermal conditioning method
KR101357469B1 (en) * 2011-11-28 2014-02-03 엘지전자 주식회사 Hot water supply device associated with heat pump
CN202371848U (en) * 2011-12-22 2012-08-08 宁波惠康实业有限公司 Constant-temperature cooling water tank system
JP2013162008A (en) * 2012-02-07 2013-08-19 Nuflare Technology Inc Temperature adjustment system and charged particle beam drawing device
CN103294086B (en) * 2012-02-27 2015-06-17 上海微电子装备有限公司 Constant-temperature liquid circulating device and temperature-controlling method
CN103363745B (en) * 2012-04-06 2016-04-20 上海微电子装备有限公司 Refrigerating plant and Temp. control method thereof
CN103398457B (en) * 2013-08-21 2016-03-23 广州同方瑞风空调有限公司 A kind of electrodeless heat reclamation device of refrigeration system condensation heat and refrigeration system
CN104121736A (en) * 2014-07-18 2014-10-29 合肥天鹅制冷科技有限公司 Liquid cooling source unit with function of precisely controlling temperature and control method
CN104571223B (en) * 2015-02-10 2016-08-31 广东吉荣空调有限公司 It is applied to high-end equipment cooling ultraprecise water temperature control device
CN104729036A (en) * 2015-03-19 2015-06-24 合肥天鹅制冷科技有限公司 Condensate heat recovery system having accurate temperature control function
CN105158003A (en) * 2015-09-17 2015-12-16 中国船舶重工集团公司第七〇三研究所无锡分部 Energy-saving steam jet refrigeration unit test device
CN205925525U (en) * 2016-08-24 2017-02-08 重庆亘祥科技有限公司 Constant temperature coating stirrer
CN206160550U (en) * 2016-10-18 2017-05-10 杭州卡塞尔机械有限公司 Cold and hot all -in -one

Also Published As

Publication number Publication date
WO2019001413A1 (en) 2019-01-03
CN109210836A (en) 2019-01-15
TWI675263B (en) 2019-10-21
US20200149792A1 (en) 2020-05-14
KR102245550B1 (en) 2021-04-27
KR20200022487A (en) 2020-03-03
TW201905597A (en) 2019-02-01
JP2020525746A (en) 2020-08-27
JP6931093B2 (en) 2021-09-01

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