SG10202005594UA - Liquid supplying device and method for draining liquid thereof - Google Patents
Liquid supplying device and method for draining liquid thereofInfo
- Publication number
- SG10202005594UA SG10202005594UA SG10202005594UA SG10202005594UA SG10202005594UA SG 10202005594U A SG10202005594U A SG 10202005594UA SG 10202005594U A SG10202005594U A SG 10202005594UA SG 10202005594U A SG10202005594U A SG 10202005594UA SG 10202005594U A SG10202005594U A SG 10202005594UA
- Authority
- SG
- Singapore
- Prior art keywords
- liquid
- supplying device
- draining
- liquid supplying
- draining liquid
- Prior art date
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019114437A JP7138602B2 (en) | 2019-06-20 | 2019-06-20 | Liquid draining method for liquid supply device, liquid supply device |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10202005594UA true SG10202005594UA (en) | 2021-01-28 |
Family
ID=73995461
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10202005594UA SG10202005594UA (en) | 2019-06-20 | 2020-06-12 | Liquid supplying device and method for draining liquid thereof |
Country Status (3)
Country | Link |
---|---|
US (1) | US20200398318A1 (en) |
JP (1) | JP7138602B2 (en) |
SG (1) | SG10202005594UA (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113510620A (en) * | 2021-07-26 | 2021-10-19 | 长鑫存储技术有限公司 | Liquid feeding device and grinding equipment |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3335511B2 (en) * | 1995-10-31 | 2002-10-21 | 株式会社山武 | Capacitive pressure sensor |
TW512131B (en) * | 2000-06-08 | 2002-12-01 | Mosel Vitelic Inc | Apparatus and method for controlling boiling conditions of hot phosphoric acid solution with pressure adjustment |
JP4738033B2 (en) * | 2005-03-23 | 2011-08-03 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
JP4763339B2 (en) * | 2005-05-11 | 2011-08-31 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | How to clean piping |
JP5008836B2 (en) * | 2005-06-03 | 2012-08-22 | 野村マイクロ・サイエンス株式会社 | Operation method of ultrapure water production system |
JP2008128145A (en) * | 2006-11-22 | 2008-06-05 | Dainippon Screen Mfg Co Ltd | Substrate treatment apparatus |
JP6618857B2 (en) * | 2016-06-22 | 2019-12-11 | サーパス工業株式会社 | Pressure detection device |
-
2019
- 2019-06-20 JP JP2019114437A patent/JP7138602B2/en active Active
-
2020
- 2020-06-12 SG SG10202005594UA patent/SG10202005594UA/en unknown
- 2020-06-18 US US16/905,852 patent/US20200398318A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2021002551A (en) | 2021-01-07 |
US20200398318A1 (en) | 2020-12-24 |
JP7138602B2 (en) | 2022-09-16 |
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