SG10202005594UA - Liquid supplying device and method for draining liquid thereof - Google Patents

Liquid supplying device and method for draining liquid thereof

Info

Publication number
SG10202005594UA
SG10202005594UA SG10202005594UA SG10202005594UA SG10202005594UA SG 10202005594U A SG10202005594U A SG 10202005594UA SG 10202005594U A SG10202005594U A SG 10202005594UA SG 10202005594U A SG10202005594U A SG 10202005594UA SG 10202005594U A SG10202005594U A SG 10202005594UA
Authority
SG
Singapore
Prior art keywords
liquid
supplying device
draining
liquid supplying
draining liquid
Prior art date
Application number
SG10202005594UA
Inventor
Fujihiko Toyomasu
Junji Kunisawa
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of SG10202005594UA publication Critical patent/SG10202005594UA/en

Links

SG10202005594UA 2019-06-20 2020-06-12 Liquid supplying device and method for draining liquid thereof SG10202005594UA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019114437A JP7138602B2 (en) 2019-06-20 2019-06-20 Liquid draining method for liquid supply device, liquid supply device

Publications (1)

Publication Number Publication Date
SG10202005594UA true SG10202005594UA (en) 2021-01-28

Family

ID=73995461

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10202005594UA SG10202005594UA (en) 2019-06-20 2020-06-12 Liquid supplying device and method for draining liquid thereof

Country Status (3)

Country Link
US (1) US20200398318A1 (en)
JP (1) JP7138602B2 (en)
SG (1) SG10202005594UA (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113510620A (en) * 2021-07-26 2021-10-19 长鑫存储技术有限公司 Liquid feeding device and grinding equipment

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3335511B2 (en) * 1995-10-31 2002-10-21 株式会社山武 Capacitive pressure sensor
TW512131B (en) * 2000-06-08 2002-12-01 Mosel Vitelic Inc Apparatus and method for controlling boiling conditions of hot phosphoric acid solution with pressure adjustment
JP4738033B2 (en) * 2005-03-23 2011-08-03 大日本スクリーン製造株式会社 Substrate processing equipment
JP4763339B2 (en) * 2005-05-11 2011-08-31 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード How to clean piping
JP5008836B2 (en) * 2005-06-03 2012-08-22 野村マイクロ・サイエンス株式会社 Operation method of ultrapure water production system
JP2008128145A (en) * 2006-11-22 2008-06-05 Dainippon Screen Mfg Co Ltd Substrate treatment apparatus
JP6618857B2 (en) * 2016-06-22 2019-12-11 サーパス工業株式会社 Pressure detection device

Also Published As

Publication number Publication date
JP2021002551A (en) 2021-01-07
US20200398318A1 (en) 2020-12-24
JP7138602B2 (en) 2022-09-16

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