SG10201902983VA - Archimedes brush for semiconductor cleaning - Google Patents
Archimedes brush for semiconductor cleaningInfo
- Publication number
- SG10201902983VA SG10201902983VA SG10201902983VA SG10201902983VA SG10201902983VA SG 10201902983V A SG10201902983V A SG 10201902983VA SG 10201902983V A SG10201902983V A SG 10201902983VA SG 10201902983V A SG10201902983V A SG 10201902983VA SG 10201902983V A SG10201902983V A SG 10201902983VA
- Authority
- SG
- Singapore
- Prior art keywords
- brush
- archimedes
- semiconductor cleaning
- cleaning
- mandrel
- Prior art date
Links
- 238000004140 cleaning Methods 0.000 title abstract 4
- 239000004065 semiconductor Substances 0.000 title 1
- 230000002745 absorbent Effects 0.000 abstract 1
- 239000002250 absorbent Substances 0.000 abstract 1
- 239000006260 foam Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- A—HUMAN NECESSITIES
- A46—BRUSHWARE
- A46B—BRUSHES
- A46B9/00—Arrangements of the bristles in the brush body
- A46B9/08—Supports or guides for bristles
-
- A—HUMAN NECESSITIES
- A46—BRUSHWARE
- A46B—BRUSHES
- A46B13/00—Brushes with driven brush bodies or carriers
- A46B13/001—Cylindrical or annular brush bodies
-
- A—HUMAN NECESSITIES
- A46—BRUSHWARE
- A46B—BRUSHES
- A46B13/00—Brushes with driven brush bodies or carriers
- A46B13/001—Cylindrical or annular brush bodies
- A46B13/006—Cylindrical or annular brush bodies formed by winding a strip tuft in a helix about the body
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/12—Brushes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
-
- A—HUMAN NECESSITIES
- A46—BRUSHWARE
- A46D—MANUFACTURE OF BRUSHES
- A46D1/00—Bristles; Selection of materials for bristles
- A46D1/02—Bristles details
- A46D1/0207—Bristles characterised by the choice of material, e.g. metal
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
- Brushes (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/537,707 US10271636B2 (en) | 2014-11-10 | 2014-11-10 | Archimedes brush for semiconductor cleaning |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG10201902983VA true SG10201902983VA (en) | 2019-05-30 |
Family
ID=54477247
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG10201902983VA SG10201902983VA (en) | 2014-11-10 | 2015-10-16 | Archimedes brush for semiconductor cleaning |
| SG11201703696RA SG11201703696RA (en) | 2014-11-10 | 2015-10-16 | Archimedes brush for semiconductor cleaning |
| SG10202003948SA SG10202003948SA (en) | 2014-11-10 | 2015-10-16 | Archimedes brush for semiconductor cleaning |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201703696RA SG11201703696RA (en) | 2014-11-10 | 2015-10-16 | Archimedes brush for semiconductor cleaning |
| SG10202003948SA SG10202003948SA (en) | 2014-11-10 | 2015-10-16 | Archimedes brush for semiconductor cleaning |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US10271636B2 (ko) |
| EP (2) | EP3217837B1 (ko) |
| JP (2) | JP6673916B2 (ko) |
| KR (2) | KR102544905B1 (ko) |
| CN (2) | CN113100558B (ko) |
| SG (3) | SG10201902983VA (ko) |
| TW (1) | TWI666715B (ko) |
| WO (1) | WO2016077030A1 (ko) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20190090624A1 (en) * | 2017-09-22 | 2019-03-28 | Illinois Tool Works Inc. | Hybrid material post-cmp brushes and methods for forming the same |
| USD955115S1 (en) * | 2018-08-10 | 2022-06-21 | Sharkninja Operating Llc | Brush roll |
| US10758946B2 (en) * | 2019-01-23 | 2020-09-01 | Tung An Development Ltd. | Device of cleaning brush |
| US11694910B2 (en) | 2019-09-10 | 2023-07-04 | Illinois Tool Works Inc. | Brush with non-constant nodule density |
| KR20210035601A (ko) | 2019-09-24 | 2021-04-01 | (주)아모레퍼시픽 | 메틸자스모네이트 처리를 통한 쿠메스트롤 함량이 증가된 콩과 식물 배양근의 생산 방법 |
| US20220039912A1 (en) * | 2020-08-10 | 2022-02-10 | Covidien Lp | Endoscope cleaning device |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3139641A (en) | 1961-06-22 | 1964-07-07 | Power Brushes Inc | Cylindrical brush construction |
| JPS60186085U (ja) | 1984-05-22 | 1985-12-10 | カネボウ株式会社 | 洗浄用ロ−ル |
| KR100230694B1 (ko) | 1992-05-18 | 1999-11-15 | 다카시마 히로시 | 기판세정처리장치 |
| JPH08150377A (ja) | 1994-11-29 | 1996-06-11 | M Setetsuku Kk | スクラビング用円筒ブラシ |
| US5778481A (en) | 1996-02-15 | 1998-07-14 | International Business Machines Corporation | Silicon wafer cleaning and polishing pads |
| IL123707A (en) | 1997-05-26 | 2001-01-28 | Heidelberger Druckmasch Ag | Method and device for eliminating peeled-off surface portions of an ink-repellent layer of an offset printing plate |
| JP2000015190A (ja) * | 1998-07-03 | 2000-01-18 | Matsushita Electric Ind Co Ltd | 基板洗浄方法及び装置 |
| US6464010B1 (en) * | 1998-08-13 | 2002-10-15 | Global Completion Services, Inc. | Apparatus and method for cleaning a tubular member with a brush |
| US20050081316A1 (en) * | 2002-12-13 | 2005-04-21 | Andrea Dondi | Roller for rotating cylindrical brushes applicable in any industrial, road-related or other sector |
| KR20040081973A (ko) * | 2003-03-17 | 2004-09-23 | 삼성전자주식회사 | 반도체 웨이퍼의 세정 브러쉬 |
| JP2007007501A (ja) | 2005-06-28 | 2007-01-18 | Shimada Phys & Chem Ind Co Ltd | 基板洗浄ブラシ |
| US8407846B2 (en) * | 2006-03-07 | 2013-04-02 | Applied Materials, Inc. | Scrubber brush with sleeve and brush mandrel for use with the scrubber brush |
| JP2007330536A (ja) * | 2006-06-15 | 2007-12-27 | Kowa Co Ltd | ブラシ用毛材 |
| US8234739B2 (en) | 2006-10-03 | 2012-08-07 | Xyratex Technology Limited | Spiral brush for cleaning and conveying a substrate |
| KR100818559B1 (ko) | 2007-03-22 | 2008-04-02 | 엠.씨.케이 (주) | 유리기판용 세정롤러 |
| US9232851B2 (en) * | 2008-05-20 | 2016-01-12 | Albea Services | Variable pitch mascara brush |
| KR101119951B1 (ko) * | 2009-09-29 | 2012-03-16 | 방선정 | 반도체 웨이퍼용 브러쉬 롤 |
| SG183419A1 (en) * | 2010-02-22 | 2012-09-27 | Entegris Inc | Post-cmp cleaning brush |
| GB201005140D0 (en) * | 2010-03-26 | 2010-05-12 | Spaans Babcock Ltd | An archimedean screw apparatus |
| TWD161994S (zh) * | 2011-06-08 | 2014-08-01 | 伊利諾工具工程公司 | 海綿刷的刷心之部分（一） |
| US9202723B2 (en) * | 2011-11-29 | 2015-12-01 | Illinois Tool Works, Inc. | Brush with cantilevered nodules |
| US20130255721A1 (en) * | 2012-04-03 | 2013-10-03 | Illinois Tool Works Inc. | Concave nodule sponge brush |
| US8778087B2 (en) * | 2012-04-03 | 2014-07-15 | Illinois Tool Works Inc. | Conical sponge brush for cleaning semiconductor wafers |
| CN202873538U (zh) | 2012-05-28 | 2013-04-17 | 谢丽方 | 一种蛋品清洗机用圆柱毛刷 |
| JP6058383B2 (ja) * | 2012-12-25 | 2017-01-11 | 槌屋ティスコ株式会社 | ブラシ及び電気掃除機用の回転ブラシ |
| CN203018351U (zh) | 2012-12-31 | 2013-06-26 | 中芯国际集成电路制造(北京)有限公司 | 晶圆清洗刷和晶圆清洗装置 |
-
2014
- 2014-11-10 US US14/537,707 patent/US10271636B2/en active Active
-
2015
- 2015-10-15 TW TW104133894A patent/TWI666715B/zh active
- 2015-10-16 CN CN202110216088.0A patent/CN113100558B/zh active Active
- 2015-10-16 CN CN201580066701.8A patent/CN107257639B/zh active Active
- 2015-10-16 JP JP2017525089A patent/JP6673916B2/ja active Active
- 2015-10-16 KR KR1020177015462A patent/KR102544905B1/ko active IP Right Grant
- 2015-10-16 EP EP15791084.5A patent/EP3217837B1/en active Active
- 2015-10-16 SG SG10201902983VA patent/SG10201902983VA/en unknown
- 2015-10-16 KR KR1020207015413A patent/KR102542156B1/ko active IP Right Grant
- 2015-10-16 EP EP20173816.8A patent/EP3714733B1/en active Active
- 2015-10-16 SG SG11201703696RA patent/SG11201703696RA/en unknown
- 2015-10-16 SG SG10202003948SA patent/SG10202003948SA/en unknown
- 2015-10-16 WO PCT/US2015/055998 patent/WO2016077030A1/en active Application Filing
-
2020
- 2020-03-05 JP JP2020037766A patent/JP7177110B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR102542156B1 (ko) | 2023-06-12 |
| TWI666715B (zh) | 2019-07-21 |
| CN113100558B (zh) | 2023-06-16 |
| US20160128460A1 (en) | 2016-05-12 |
| WO2016077030A1 (en) | 2016-05-19 |
| JP6673916B2 (ja) | 2020-03-25 |
| KR102544905B1 (ko) | 2023-06-16 |
| JP2020096196A (ja) | 2020-06-18 |
| TW201618218A (zh) | 2016-05-16 |
| EP3714733B1 (en) | 2023-05-31 |
| KR20200064170A (ko) | 2020-06-05 |
| EP3714733A1 (en) | 2020-09-30 |
| EP3217837B1 (en) | 2020-09-23 |
| CN107257639A (zh) | 2017-10-17 |
| JP7177110B2 (ja) | 2022-11-22 |
| US10271636B2 (en) | 2019-04-30 |
| KR20170082586A (ko) | 2017-07-14 |
| EP3217837A1 (en) | 2017-09-20 |
| CN107257639B (zh) | 2021-04-09 |
| SG11201703696RA (en) | 2017-06-29 |
| CN113100558A (zh) | 2021-07-13 |
| SG10202003948SA (en) | 2020-06-29 |
| JP2017535081A (ja) | 2017-11-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| SG10201902983VA (en) | Archimedes brush for semiconductor cleaning | |
| KR101882055B1 (ko) | 소스/드레인 구조체 위에 콘택을 구비한 반도체 구조체 및 이의 형성 방법 | |
| AU356867S (en) | Cleaning nozzle | |
| AU201710972S (en) | Floor cleaning device | |
| AU359681S (en) | Floor cleaning apparatus | |
| HK1221070A1 (zh) | 半導體器件和用於製造其的方法 | |
| EP3116964A4 (en) | Stretch releasable adhesive article, usage and manufacturing the same | |
| EP3105053A4 (en) | Thin nanocomposite film for use in an absorbent article | |
| AU359793S (en) | Utensil handle | |
| EP3238238A4 (en) | Sinterable bonding material and semiconductor device using the same | |
| EP3238239A4 (en) | Sinterable bonding material and semiconductor device using the same | |
| AU359680S (en) | Floor cleaning apparatus | |
| EP3518384A4 (en) | POWER SUPPLY DEVICE AND POWER STORAGE DEVICE | |
| IL252112A0 (en) | Interdental brush and cleaning device for it | |
| AU360015S (en) | Holder for brushes sponges and the like | |
| EP3154325A4 (en) | Component supply device and surface mounter | |
| SG11201706200UA (en) | A fall-proof apparatus for cleaning semiconductor devices and a chamber with the apparatus | |
| PL3545188T3 (pl) | Urządzenie śruby Archimedesa dla elektrowni wodnej i sposób jego wytwarzania | |
| AU359792S (en) | Utensil handle | |
| HK1232277A1 (zh) | 用於對主液體中的液體添加劑的劑量分配器的運行進行監測的裝置以及設有所述裝置的劑量分配器 | |
| PL3509552T3 (pl) | Wyrób chłonny z możliwym do regulowania zamknięciem | |
| GB201716639D0 (en) | Apparatus for use in the supply and application of liquids and cleaning | |
| PL408890A1 (pl) | Aplikator medyczny | |
| AU201613130S (en) | arm chair | |
| GB201418542D0 (en) | A new type of plastic bottle with a screw-thread fixed onto the base |