SG10201902983VA - Archimedes brush for semiconductor cleaning - Google Patents

Archimedes brush for semiconductor cleaning

Info

Publication number
SG10201902983VA
SG10201902983VA SG10201902983VA SG10201902983VA SG10201902983VA SG 10201902983V A SG10201902983V A SG 10201902983VA SG 10201902983V A SG10201902983V A SG 10201902983VA SG 10201902983V A SG10201902983V A SG 10201902983VA SG 10201902983V A SG10201902983V A SG 10201902983VA
Authority
SG
Singapore
Prior art keywords
brush
archimedes
semiconductor cleaning
cleaning
mandrel
Prior art date
Application number
SG10201902983VA
Inventor
Bradley Scott Withers
Erik Scott Nelson
Robert Allen Willis
Original Assignee
Illinois Tool Works
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Illinois Tool Works filed Critical Illinois Tool Works
Publication of SG10201902983VA publication Critical patent/SG10201902983VA/en

Links

Classifications

    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B9/00—Arrangements of the bristles in the brush body
    • A46B9/08—Supports or guides for bristles
    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B13/00—Brushes with driven brush bodies or carriers
    • A46B13/001—Cylindrical or annular brush bodies
    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B13/00—Brushes with driven brush bodies or carriers
    • A46B13/001—Cylindrical or annular brush bodies
    • A46B13/006—Cylindrical or annular brush bodies formed by winding a strip tuft in a helix about the body
    • B08B1/12—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46D—MANUFACTURE OF BRUSHES
    • A46D1/00—Bristles; Selection of materials for bristles
    • A46D1/02—Bristles details
    • A46D1/0207—Bristles characterised by the choice of material, e.g. metal

Abstract

A cleaning device for cleaning a substrate is provided. In one aspect, the cleaning device includes a brush engaged with a mandrel, and the brush forms an Archimedean screw thread form. The brush is formed of an absorbent material, preferably foam. In one aspect, the brush is seated within a groove in the mandrel. Figure 3
SG10201902983VA 2014-11-10 2015-10-16 Archimedes brush for semiconductor cleaning SG10201902983VA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14/537,707 US10271636B2 (en) 2014-11-10 2014-11-10 Archimedes brush for semiconductor cleaning

Publications (1)

Publication Number Publication Date
SG10201902983VA true SG10201902983VA (en) 2019-05-30

Family

ID=54477247

Family Applications (3)

Application Number Title Priority Date Filing Date
SG10202003948SA SG10202003948SA (en) 2014-11-10 2015-10-16 Archimedes brush for semiconductor cleaning
SG10201902983VA SG10201902983VA (en) 2014-11-10 2015-10-16 Archimedes brush for semiconductor cleaning
SG11201703696RA SG11201703696RA (en) 2014-11-10 2015-10-16 Archimedes brush for semiconductor cleaning

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG10202003948SA SG10202003948SA (en) 2014-11-10 2015-10-16 Archimedes brush for semiconductor cleaning

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG11201703696RA SG11201703696RA (en) 2014-11-10 2015-10-16 Archimedes brush for semiconductor cleaning

Country Status (8)

Country Link
US (1) US10271636B2 (en)
EP (2) EP3714733B1 (en)
JP (2) JP6673916B2 (en)
KR (2) KR102542156B1 (en)
CN (2) CN107257639B (en)
SG (3) SG10202003948SA (en)
TW (1) TWI666715B (en)
WO (1) WO2016077030A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190090624A1 (en) * 2017-09-22 2019-03-28 Illinois Tool Works Inc. Hybrid material post-cmp brushes and methods for forming the same
USD955115S1 (en) * 2018-08-10 2022-06-21 Sharkninja Operating Llc Brush roll
US10758946B2 (en) * 2019-01-23 2020-09-01 Tung An Development Ltd. Device of cleaning brush
US11694910B2 (en) 2019-09-10 2023-07-04 Illinois Tool Works Inc. Brush with non-constant nodule density
KR20210035601A (en) 2019-09-24 2021-04-01 (주)아모레퍼시픽 Production method for cultured root of leguminous plants comprising high-content of coumestrol using methyl jasmonate treatment
US20220039912A1 (en) * 2020-08-10 2022-02-10 Covidien Lp Endoscope cleaning device

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US3139641A (en) 1961-06-22 1964-07-07 Power Brushes Inc Cylindrical brush construction
JPS60186085U (en) 1984-05-22 1985-12-10 カネボウ株式会社 Cleaning roll
KR100230694B1 (en) 1992-05-18 1999-11-15 다카시마 히로시 Cleaning apparatus for semiconductor substrate
JPH08150377A (en) 1994-11-29 1996-06-11 M Setetsuku Kk Cylindrical brush for scrubbing
US5778481A (en) 1996-02-15 1998-07-14 International Business Machines Corporation Silicon wafer cleaning and polishing pads
IL123707A (en) 1997-05-26 2001-01-28 Heidelberger Druckmasch Ag Method and device for eliminating peeled-off surface portions of an ink-repellent layer of an offset printing plate
JP2000015190A (en) * 1998-07-03 2000-01-18 Matsushita Electric Ind Co Ltd Method and device for substrate washing
US6464010B1 (en) * 1998-08-13 2002-10-15 Global Completion Services, Inc. Apparatus and method for cleaning a tubular member with a brush
US20050081316A1 (en) * 2002-12-13 2005-04-21 Andrea Dondi Roller for rotating cylindrical brushes applicable in any industrial, road-related or other sector
KR20040081973A (en) * 2003-03-17 2004-09-23 삼성전자주식회사 Cleaning brush of semiconductor wafer
JP2007007501A (en) 2005-06-28 2007-01-18 Shimada Phys & Chem Ind Co Ltd Substrate washing brush
US8407846B2 (en) * 2006-03-07 2013-04-02 Applied Materials, Inc. Scrubber brush with sleeve and brush mandrel for use with the scrubber brush
JP2007330536A (en) * 2006-06-15 2007-12-27 Kowa Co Ltd Bristle material for brush
US8234739B2 (en) 2006-10-03 2012-08-07 Xyratex Technology Limited Spiral brush for cleaning and conveying a substrate
KR100818559B1 (en) 2007-03-22 2008-04-02 엠.씨.케이 (주) Cleaning roller for glass substrate
WO2009141098A1 (en) * 2008-05-20 2009-11-26 Alcan Packaging Beauty Services Variable pitch mascara brush
KR101119951B1 (en) * 2009-09-29 2012-03-16 방선정 brush roll
JP5977175B2 (en) * 2010-02-22 2016-08-24 インテグリス・インコーポレーテッド Cleaning brush after CMP
GB201005140D0 (en) * 2010-03-26 2010-05-12 Spaans Babcock Ltd An archimedean screw apparatus
US8898845B2 (en) * 2011-06-08 2014-12-02 Llinois Tool Works, Inc. Brush mandrel for PVA sponge brush
US9202723B2 (en) * 2011-11-29 2015-12-01 Illinois Tool Works, Inc. Brush with cantilevered nodules
US20130255721A1 (en) * 2012-04-03 2013-10-03 Illinois Tool Works Inc. Concave nodule sponge brush
US8778087B2 (en) * 2012-04-03 2014-07-15 Illinois Tool Works Inc. Conical sponge brush for cleaning semiconductor wafers
CN202873538U (en) 2012-05-28 2013-04-17 谢丽方 Cylindrical hairbrush for egg washing machine
JP6058383B2 (en) * 2012-12-25 2017-01-11 槌屋ティスコ株式会社 Rotating brush for brush and vacuum cleaner
CN203018351U (en) 2012-12-31 2013-06-26 中芯国际集成电路制造(北京)有限公司 Wafer cleaning brush and wafer cleaning device

Also Published As

Publication number Publication date
KR20200064170A (en) 2020-06-05
EP3217837A1 (en) 2017-09-20
EP3714733B1 (en) 2023-05-31
TWI666715B (en) 2019-07-21
CN107257639B (en) 2021-04-09
SG11201703696RA (en) 2017-06-29
CN113100558A (en) 2021-07-13
JP6673916B2 (en) 2020-03-25
WO2016077030A1 (en) 2016-05-19
EP3714733A1 (en) 2020-09-30
CN107257639A (en) 2017-10-17
EP3217837B1 (en) 2020-09-23
US20160128460A1 (en) 2016-05-12
JP2020096196A (en) 2020-06-18
TW201618218A (en) 2016-05-16
SG10202003948SA (en) 2020-06-29
KR20170082586A (en) 2017-07-14
KR102542156B1 (en) 2023-06-12
US10271636B2 (en) 2019-04-30
KR102544905B1 (en) 2023-06-16
CN113100558B (en) 2023-06-16
JP7177110B2 (en) 2022-11-22
JP2017535081A (en) 2017-11-24

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