SG10201403135TA - Storage system and storage method - Google Patents

Storage system and storage method

Info

Publication number
SG10201403135TA
SG10201403135TA SG10201403135TA SG10201403135TA SG10201403135TA SG 10201403135T A SG10201403135T A SG 10201403135TA SG 10201403135T A SG10201403135T A SG 10201403135TA SG 10201403135T A SG10201403135T A SG 10201403135TA SG 10201403135T A SG10201403135T A SG 10201403135TA
Authority
SG
Singapore
Prior art keywords
storage
environment
carry
managing
storage sections
Prior art date
Application number
SG10201403135TA
Other languages
English (en)
Inventor
Takahara Masahiro
Ueda Toshihito
Original Assignee
Daifuku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Kk filed Critical Daifuku Kk
Publication of SG10201403135TA publication Critical patent/SG10201403135TA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/16—Special arrangements of articles in storage spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
SG10201403135TA 2013-06-26 2014-06-11 Storage system and storage method SG10201403135TA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013134270A JP6044467B2 (ja) 2013-06-26 2013-06-26 保管システム

Publications (1)

Publication Number Publication Date
SG10201403135TA true SG10201403135TA (en) 2015-01-29

Family

ID=52115753

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201403135TA SG10201403135TA (en) 2013-06-26 2014-06-11 Storage system and storage method

Country Status (6)

Country Link
US (1) US9199793B2 (ja)
JP (1) JP6044467B2 (ja)
KR (1) KR102205503B1 (ja)
CN (1) CN104249897B (ja)
SG (1) SG10201403135TA (ja)
TW (1) TWI606964B (ja)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6102759B2 (ja) * 2014-01-16 2017-03-29 株式会社ダイフク 物品搬送台車
JP6217855B2 (ja) * 2014-06-16 2017-10-25 村田機械株式会社 パージ装置、パージシステム、パージ方法及びパージシステムにおける制御方法
WO2016129170A1 (ja) * 2015-02-12 2016-08-18 村田機械株式会社 パージ装置、パージストッカ、及びパージ異常検出方法
WO2017026168A1 (ja) * 2015-08-10 2017-02-16 村田機械株式会社 パージ装置、パージストッカ、及びクリーニング方法
WO2017033546A1 (ja) * 2015-08-25 2017-03-02 村田機械株式会社 パージ装置、パージストッカ、及びパージ方法
EP3343597B1 (en) * 2015-08-28 2022-04-20 Murata Machinery, Ltd. Storage device and storage method
JP6414525B2 (ja) * 2015-09-02 2018-10-31 株式会社ダイフク 保管設備
JP6794898B2 (ja) * 2017-03-29 2020-12-02 株式会社ダイフク 収納棚
JP6863263B2 (ja) * 2017-12-18 2021-04-21 株式会社ダイフク 物品収納設備
JP6856015B2 (ja) * 2017-12-20 2021-04-14 株式会社ダイフク 保管設備
CN111587614B (zh) * 2018-01-19 2021-09-10 株式会社富士 保管装置及带盘保管方法
US11437258B2 (en) 2018-08-30 2022-09-06 Taiwan Semiconductor Manufacturing Co., Ltd. Workpiece storage system, method of storing workpiece, and method of transferring workpiece using the same
KR102530860B1 (ko) * 2018-12-26 2023-05-10 무라다기카이가부시끼가이샤 보관 시스템

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DE69228014T2 (de) * 1991-01-29 1999-05-27 Shinko Electric Co Ltd Einheit zum luftdichten Aufbewahren von Halbleiterscheiben
EP0552756A1 (en) * 1992-01-21 1993-07-28 Shinko Electric Co. Ltd. Article storage house in a clean room
KR100221983B1 (ko) * 1993-04-13 1999-09-15 히가시 데쓰로 처리장치
JPH1159829A (ja) * 1997-08-08 1999-03-02 Mitsubishi Electric Corp 半導体ウェハカセット搬送装置、半導体ウェハカセット搬送装置で用いられるストッカ、ならびに半導体ウェハカセット搬送装置で用いられるストッカ入庫作業制御方法、ストッカ出庫作業制御方法、自動搬送車制御方法、およびストッカ在庫照合方法
JPH11168135A (ja) * 1997-12-03 1999-06-22 Toshiba Corp 基板保管装置および基板保管方法
JPH11334810A (ja) * 1998-03-25 1999-12-07 Hitachi Ltd 搬送装置及び製造方法
JPH11292219A (ja) * 1998-04-13 1999-10-26 Daifuku Co Ltd 物品収納設備
US6240335B1 (en) * 1998-12-14 2001-05-29 Palo Alto Technologies, Inc. Distributed control system architecture and method for a material transport system
JP3939101B2 (ja) * 2000-12-04 2007-07-04 株式会社荏原製作所 基板搬送方法および基板搬送容器
JP2005019911A (ja) 2003-06-30 2005-01-20 Trecenti Technologies Inc 工程進捗管理システムおよび半導体装置の製造方法
JP2005166952A (ja) * 2003-12-02 2005-06-23 Asyst Shinko Inc 保管庫
JP4186123B2 (ja) * 2006-05-02 2008-11-26 村田機械株式会社 測定ユニットを備えた搬送システム
JP4953013B2 (ja) 2007-08-23 2012-06-13 トヨタ自動車株式会社 異常監視装置及び該装置を備えた二次電池収容棚
JP4412391B2 (ja) * 2007-11-16 2010-02-10 村田機械株式会社 搬送車システム
JP5495057B2 (ja) 2010-07-26 2014-05-21 株式会社ダイフク バッテリ処理設備
JP5440871B2 (ja) * 2010-08-20 2014-03-12 株式会社ダイフク 容器保管設備
JP6001234B2 (ja) * 2010-09-13 2016-10-05 株式会社日立国際電気 基板処理システム、基板処理装置、データ処理方法およびプログラム
JP2012094822A (ja) * 2010-09-30 2012-05-17 Shibaura Mechatronics Corp 密閉型容器及び半導体製造装置
JP2012248887A (ja) * 2010-09-30 2012-12-13 Shibaura Mechatronics Corp 密閉型容器及び半導体製造装置
JP2012129414A (ja) * 2010-12-16 2012-07-05 Hitachi Kokusai Electric Inc 基板処理システム

Also Published As

Publication number Publication date
TW201502045A (zh) 2015-01-16
TWI606964B (zh) 2017-12-01
JP2015009914A (ja) 2015-01-19
KR102205503B1 (ko) 2021-01-19
US20150003941A1 (en) 2015-01-01
US9199793B2 (en) 2015-12-01
JP6044467B2 (ja) 2016-12-14
CN104249897A (zh) 2014-12-31
KR20150001615A (ko) 2015-01-06
CN104249897B (zh) 2018-01-09

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