SE9502258D0 - Method for the manufacture of a membrane-containing microstructure - Google Patents

Method for the manufacture of a membrane-containing microstructure

Info

Publication number
SE9502258D0
SE9502258D0 SE9502258A SE9502258A SE9502258D0 SE 9502258 D0 SE9502258 D0 SE 9502258D0 SE 9502258 A SE9502258 A SE 9502258A SE 9502258 A SE9502258 A SE 9502258A SE 9502258 D0 SE9502258 D0 SE 9502258D0
Authority
SE
Sweden
Prior art keywords
cavity
hole
pct
membrane
substrate body
Prior art date
Application number
SE9502258A
Other languages
English (en)
Swedish (sv)
Inventor
Ove Oehman
Christian Vieider
Original Assignee
Pharmacia Biotech Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pharmacia Biotech Ab filed Critical Pharmacia Biotech Ab
Priority to SE9502258A priority Critical patent/SE9502258D0/xx
Publication of SE9502258D0 publication Critical patent/SE9502258D0/xx
Priority to PCT/SE1996/000789 priority patent/WO1997001055A1/en
Priority to JP9503781A priority patent/JPH11508347A/ja
Priority to DE69621335T priority patent/DE69621335D1/de
Priority to EP96921188A priority patent/EP0838005B1/en
Priority to US08/945,855 priority patent/US5962081A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
SE9502258A 1995-06-21 1995-06-21 Method for the manufacture of a membrane-containing microstructure SE9502258D0 (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE9502258A SE9502258D0 (sv) 1995-06-21 1995-06-21 Method for the manufacture of a membrane-containing microstructure
PCT/SE1996/000789 WO1997001055A1 (en) 1995-06-21 1996-06-17 Method for the manufacture of a membrane-containing microstructure
JP9503781A JPH11508347A (ja) 1995-06-21 1996-06-17 膜を含むマイクロストラクチャを製造する方法
DE69621335T DE69621335D1 (de) 1995-06-21 1996-06-17 Verfahren zur herstellung einer membranhaltenden mikrostruktur
EP96921188A EP0838005B1 (en) 1995-06-21 1996-06-17 Method for the manufacture of a membrane-containing microstructure
US08/945,855 US5962081A (en) 1995-06-21 1996-06-17 Method for the manufacture of a membrane-containing microstructure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9502258A SE9502258D0 (sv) 1995-06-21 1995-06-21 Method for the manufacture of a membrane-containing microstructure

Publications (1)

Publication Number Publication Date
SE9502258D0 true SE9502258D0 (sv) 1995-06-21

Family

ID=20398698

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9502258A SE9502258D0 (sv) 1995-06-21 1995-06-21 Method for the manufacture of a membrane-containing microstructure

Country Status (6)

Country Link
US (1) US5962081A (ja)
EP (1) EP0838005B1 (ja)
JP (1) JPH11508347A (ja)
DE (1) DE69621335D1 (ja)
SE (1) SE9502258D0 (ja)
WO (1) WO1997001055A1 (ja)

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Also Published As

Publication number Publication date
DE69621335D1 (de) 2002-06-27
WO1997001055A1 (en) 1997-01-09
EP0838005A1 (en) 1998-04-29
EP0838005B1 (en) 2002-05-22
US5962081A (en) 1999-10-05
JPH11508347A (ja) 1999-07-21

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